JP7452927B2 - 高分子マイクロ流体バルブ - Google Patents
高分子マイクロ流体バルブ Download PDFInfo
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0025—Valves using microporous membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
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- B01L2200/12—Specific details about manufacturing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
- B01L2400/0487—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/06—Valves, specific forms thereof
- B01L2400/0633—Valves, specific forms thereof with moving parts
- B01L2400/0655—Valves, specific forms thereof with moving parts pinch valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
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Description
Claims (10)
- 高分子マイクロ流体バルブにおいて、
プラスチック基板と、
前記基板にわたって延在する弾性変形可能なエラストマ膜であって、前記基板および膜が、マイクロ流体デバイス内の少なくとも2つのマイクロ流体チャネルを分離するバルブ区域を画定する、エラストマ膜と、
前記膜および前記基板のうちの一方の上の前記バルブ区域内にあり、前記高分子マイクロ流体バルブが閉じられたとき、前記膜および前記基板が接触する付着制御表面を有する、弁座と、
前記膜によって前記マイクロ流体チャネルから分離された封止された制御流体チャンバであって、前記制御流体チャンバ内の圧力の変化が、前記基板から前記膜を分離し、それによって前記バルブを開放するために、前記弁座の前記付着制御表面における前記基板と前記膜との間の付着に打ち勝つのに十分な力を前記膜上に与える、制御流体チャンバと、
を備え、
前記付着制御表面は、複数の分離された頂部合わせ表面と凹部表面とを与えるマイクロ構造の軽減パターンを備え、前記頂部合わせ表面は、前記付着制御表面が及ぶ面積(スパン領域)よりも小さい累積表面積を集合的に有し、前記高分子マイクロ流体バルブが閉鎖しているときに前記頂部合わせ表面間に流体充填空所を有し、前記軽減パターンは、前記流体充填空所が、前記マイクロ流体チャネル内の前記弁座の両端の間で、前記弁座にわたって相互接続されるような開放パターンを備え、
前記軽減パターンが前記膜または前記基板のいずれかに提供され、
前記流体充填空所は、(1)スパン領域にマイクロ構造が存在しない場合の付着と比較して、(2)膜と基板とが、頂部合わせ表面および凹部表面を含む全ての利用可能な表面にわたって、共形接触している場合の付着と比較して、スパン領域における膜と基板との間の付着を低減する、高分子マイクロ流体バルブ。 - 前記バルブが閉鎖したときの前記付着制御表面上の前記頂部合わせ表面間の累積表面積は、前記付着制御表面が及ぶ表面積の0.55%~76%であり、あるいは、
前記付着制御表面上の前記頂部合わせ表面の前記累積表面積は、前記付着制御表面の全表面積の0.54%~30%であり、前記全表面積は、前記頂部合わせ表面の前記累積表面積と、前記凹部表面の累積表面積と、前記頂部合わせ表面および凹部表面を接続する前記マイクロ構造の側壁の累積表面積とを含む、請求項1に記載のバルブ。 - 前記マイクロ構造の前記頂部合わせ表面および凹部表面は、少なくとも75nmの深さdによって分離され、50~1256本のマイクロピラーを有する、請求項1~2のいずれか一項に記載のバルブ。
- 前記複数の別個の頂部合わせ表面は、少なくとも25の別個の頂部合わせ表面を含み、これらの頂部合わせ表面は、前記マイクロ構造が規則的に配列された複数のマイクロピラーであるように、前記頂部合わせ表面に制限された、いかなる経路によっても接続されていない、請求項1~3のいずれか一項に記載のバルブ。
- 前記流体充填空所は、集合的な空所容量を有し、前記マイクロ構造および/またはナノ構造は、集合的な構造容量を有し、前記制御流体チャンバおよび前記マイクロ流体チャネルの間に圧力差がない状態で前記高分子マイクロ流体バルブが閉鎖されるとき、前記集合的な空所容量は、前記集合的な空所容量および前記集合的な構造容量の合計の50~99.5%である、請求項1~4のいずれか一項に記載のバルブ。
- 前記付着制御表面は、前記マイクロ流体チャネルを分離するバルブ本体上にあり、前記バルブ本体を超えて延在し、前記チャネルの中間の基板の頂部合わせ表面を覆う、請求項1に記載のバルブ。
- 前記流体充填空所は、空気または水で充填される、請求項1~6のいずれか一項に記載のバルブ。
- 高分子マイクロ流体バルブを使用してマイクロ流体チャネル内の流体の流れを制御する方法において、
マイクロ流体デバイスにおいて、常閉型の、請求項1~7のいずれか一項に記載の高分子マイクロ流体バルブを準備するステップと、
前記制御流体チャンバ内の圧力を変化させ、前記弁座の前記付着制御表面における前記基板との付着に打ち勝つのに十分な力を前記膜に与え、前記膜を前記基板から分離し、それによって、前記高分子マイクロ流体バルブを開放し、流体が前記2以上のマイクロチャネル間を流れる事を可能にするステップと、
を含む、方法。 - 前記高分子マイクロ流体バルブが開放されているときに前記制御流体チャンバ内の圧力を十分に変化させて、前記基板および前記膜を前記付着制御表面で一緒に押圧し、それによって、前記膜を前記基板に対して密封係合させ、前記高分子マイクロ流体バルブを閉鎖して、流体が前記マイクロ流体チャネルを通って流れるのを防止するステップを更に含む、請求項8に記載の方法。
- 高分子マイクロ流体バルブの弁座を表面処理する方法において、
弾性変形可能なエラストマ膜上またはバルブの為のプラスチック基板上に弁座を製作するステップであって、前記弁座が、前記バルブが閉鎖されるときに前記膜が前記プラスチック基板に対して接触して密封することになる付着制御表面を有する、前記ステップと、
前記膜または基板を表面処理液に接触させるステップであって、表面処理液は、マイクロ構造が存在しない前記膜または基板の部分ではなく、前記弁座の前記付着制御表面を優先的に濡らし、それによって、前記膜または基板の前記部分を表面処理することなく、前記弁座を表面処理するステップと、
前記膜と、2つのマイクロ流体チャネルと交差するように配置された前記弁座を備えた基板とを組み立てるステップであって、前記付着制御表面は、複数の分離された頂部合わせ表面と凹部表面とを与えるマイクロ構造の軽減パターンを備え、前記頂部合わせ表面は、前記付着制御表面が及ぶ面積(スパン領域)よりも小さい累積表面積を集合的に有し、前記頂部合わせ表面の間に流体充填空所を有する、前記ステップと、
を含み、、
前記軽減パターンは、前記流体充填空所が、前記マイクロ流体チャネル内の前記弁座の両端の間で、前記弁座にわたって相互接続されるような開放パターンを備える、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862637673P | 2018-03-02 | 2018-03-02 | |
US62/637,673 | 2018-03-02 | ||
PCT/IB2019/051731 WO2019167031A1 (en) | 2018-03-02 | 2019-03-04 | Polymeric microfluidic valve |
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JP2023545412A (ja) * | 2020-10-07 | 2023-10-30 | マサチューセッツ インスティテュート オブ テクノロジー | マイクロ流体細胞培養デバイス |
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