SE9401586L - Ytbehandling av rostfri stålkomponent till anordning för tillverkning av halvledare - Google Patents

Ytbehandling av rostfri stålkomponent till anordning för tillverkning av halvledare

Info

Publication number
SE9401586L
SE9401586L SE9401586A SE9401586A SE9401586L SE 9401586 L SE9401586 L SE 9401586L SE 9401586 A SE9401586 A SE 9401586A SE 9401586 A SE9401586 A SE 9401586A SE 9401586 L SE9401586 L SE 9401586L
Authority
SE
Sweden
Prior art keywords
stainless steel
semiconductor manufacturing
steel component
surface treatment
gases
Prior art date
Application number
SE9401586A
Other languages
Unknown language ( )
English (en)
Swedish (sv)
Other versions
SE9401586D0 (sv
Inventor
Haruo Tomari
Ikuro Hashimoto
Koji Wada
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of SE9401586D0 publication Critical patent/SE9401586D0/xx
Publication of SE9401586L publication Critical patent/SE9401586L/

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C23C8/12—Oxidising using elemental oxygen or ozone
    • C23C8/14—Oxidising of ferrous surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Physical Vapour Deposition (AREA)
SE9401586A 1993-05-07 1994-05-06 Ytbehandling av rostfri stålkomponent till anordning för tillverkning av halvledare SE9401586L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13144193A JP3218802B2 (ja) 1993-05-07 1993-05-07 半導体製造装置用ステンレス鋼材の表面処理法

Publications (2)

Publication Number Publication Date
SE9401586D0 SE9401586D0 (sv) 1994-05-06
SE9401586L true SE9401586L (sv) 1994-11-08

Family

ID=15058038

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9401586A SE9401586L (sv) 1993-05-07 1994-05-06 Ytbehandling av rostfri stålkomponent till anordning för tillverkning av halvledare

Country Status (4)

Country Link
US (1) US5456768A (ja)
JP (1) JP3218802B2 (ja)
DE (1) DE4415927C2 (ja)
SE (1) SE9401586L (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3379070B2 (ja) * 1992-10-05 2003-02-17 忠弘 大見 クロム酸化物層を表面に有する酸化不動態膜の形成方法
KR100194212B1 (ko) * 1995-12-06 1999-06-15 윤종용 반도체 제조 설비용 가스 배관의 성능 평가 방법
JP2000208431A (ja) * 1999-01-13 2000-07-28 Tadahiro Omi 酸化クロム不働態膜が形成された金属材料及びその製造方法並びに接流体部品及び流体供給・排気システム
KR100345320B1 (ko) * 1999-12-23 2002-07-24 학교법인 포항공과대학교 스테인레스 스틸 표면상에 크롬산화막을 형성하는 방법
DE10109031A1 (de) * 2001-02-24 2002-09-05 Zeiss Carl Optisches Strahlführungssystem und Verfahren zur Kontaminationsverhinderung optischer Komponenten hiervon
JP4148671B2 (ja) * 2001-11-06 2008-09-10 ソニー株式会社 表示画像制御処理装置、動画像情報送受信システム、および表示画像制御処理方法、動画像情報送受信方法、並びにコンピュータ・プログラム
TW530717U (en) * 2001-12-13 2003-05-01 Ind Tech Res Inst An apparatus for electrolyzing polishing/grinding internal surface of long tube
JP2008047381A (ja) * 2006-08-14 2008-02-28 Toyo Seikan Kaisha Ltd 燃料電池用ステンレス部材
JP5561431B2 (ja) * 2012-04-04 2014-07-30 新日鐵住金株式会社 クロム含有オーステナイト合金
GB201309598D0 (en) * 2013-05-29 2013-07-10 Brannigan Linda Central heating system
JP6309576B2 (ja) * 2016-07-21 2018-04-11 株式会社クボタ アルミナバリア層を有するエチレン製造用反応管

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3519496A (en) * 1967-09-08 1970-07-07 Owens Illinois Inc Method for oxidizing alloys
DE3108160C2 (de) * 1981-02-06 1984-12-06 M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München Verfahren zur Herstellung von Oxidschichten auf chrom- und/oder nickellegierten Stählen
JP2517727B2 (ja) * 1987-07-25 1996-07-24 忠弘 大見 半導体製造装置用ステンレス鋼部材の製造方法
US5259935A (en) * 1991-05-03 1993-11-09 The Boc Group, Inc. Stainless steel surface passivation treatment

Also Published As

Publication number Publication date
SE9401586D0 (sv) 1994-05-06
US5456768A (en) 1995-10-10
DE4415927C2 (de) 1996-04-11
JP3218802B2 (ja) 2001-10-15
DE4415927A1 (de) 1994-11-24
JPH06322512A (ja) 1994-11-22

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