SE8800380L - Forfarande for slipning med anvendning av ett magnetiskt fluidum och en anordning derfor - Google Patents

Forfarande for slipning med anvendning av ett magnetiskt fluidum och en anordning derfor

Info

Publication number
SE8800380L
SE8800380L SE8800380A SE8800380A SE8800380L SE 8800380 L SE8800380 L SE 8800380L SE 8800380 A SE8800380 A SE 8800380A SE 8800380 A SE8800380 A SE 8800380A SE 8800380 L SE8800380 L SE 8800380L
Authority
SE
Sweden
Prior art keywords
abrasive grains
grinding
work
magnetic fluid
floating pad
Prior art date
Application number
SE8800380A
Other languages
Unknown language ( )
English (en)
Other versions
SE464565B (sv
SE8800380D0 (sv
Inventor
K Kato
N Umehara
S Adachi
S Sato
Original Assignee
Koji Kato
Jgc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62026443A external-priority patent/JPS63196368A/ja
Priority claimed from JP62287439A external-priority patent/JPH01135466A/ja
Application filed by Koji Kato, Jgc Corp filed Critical Koji Kato
Publication of SE8800380D0 publication Critical patent/SE8800380D0/sv
Publication of SE8800380L publication Critical patent/SE8800380L/sv
Publication of SE464565B publication Critical patent/SE464565B/sv

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/112—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
SE8800380A 1987-02-09 1988-02-05 Foerfarande foer slipning med anvaendning av ett magnetiskt fluidum och anordning daerfoer SE464565B (sv)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62026443A JPS63196368A (ja) 1987-02-09 1987-02-09 磁性流体を用いる研磨方法
JP62287439A JPH01135466A (ja) 1987-11-16 1987-11-16 磁性流体を用いる研磨装置

Publications (3)

Publication Number Publication Date
SE8800380D0 SE8800380D0 (sv) 1988-02-05
SE8800380L true SE8800380L (sv) 1988-08-10
SE464565B SE464565B (sv) 1991-05-13

Family

ID=26364229

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8800380A SE464565B (sv) 1987-02-09 1988-02-05 Foerfarande foer slipning med anvaendning av ett magnetiskt fluidum och anordning daerfoer

Country Status (3)

Country Link
US (1) US4821466A (sv)
DE (1) DE3803773A1 (sv)
SE (1) SE464565B (sv)

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0777704B2 (ja) * 1989-12-04 1995-08-23 松下電器産業株式会社 微小研磨方法
JP2682260B2 (ja) * 1991-05-09 1997-11-26 松下電器産業株式会社 微小研磨方法及び微小研磨工具
US6503414B1 (en) 1992-04-14 2003-01-07 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
US5449313A (en) * 1992-04-14 1995-09-12 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
WO1994004313A1 (en) * 1992-08-14 1994-03-03 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
KR100335219B1 (ko) * 1993-06-04 2002-11-07 바이엘로코프 사이언티픽, 인코퍼레이티드 자기유동학적유체및이를이용한시편표면완성방법,장치및광택방법
JP3098661B2 (ja) * 1993-07-28 2000-10-16 キヤノン株式会社 研磨剤組成物及びそれを用いる研磨方法
US5795212A (en) * 1995-10-16 1998-08-18 Byelocorp Scientific, Inc. Deterministic magnetorheological finishing
US5575706A (en) * 1996-01-11 1996-11-19 Taiwan Semiconductor Manufacturing Company Ltd. Chemical/mechanical planarization (CMP) apparatus and polish method
JP3552427B2 (ja) * 1996-11-18 2004-08-11 株式会社日立製作所 半導体装置の研磨方法
JPH10180611A (ja) * 1996-12-24 1998-07-07 Takahiro Imahashi 複数の交番磁界生成による磁気研摩方法及び装置
US5807165A (en) * 1997-03-26 1998-09-15 International Business Machines Corporation Method of electrochemical mechanical planarization
US5775976A (en) * 1997-03-27 1998-07-07 Scientific Manufacturing Technologies, Inc. Method and device for magnetic-abrasive machining of parts
US5813901A (en) * 1997-03-27 1998-09-29 Scientific Manufacturing Technologies Inc Method and device for magnetic-abrasive machining of parts
US6228231B1 (en) 1997-05-29 2001-05-08 International Business Machines Corporation Electroplating workpiece fixture having liquid gap spacer
US6152805A (en) * 1997-07-17 2000-11-28 Canon Kabushiki Kaisha Polishing machine
US6036580A (en) * 1997-09-03 2000-03-14 Scientific Manufacturing Technologies, Inc. Method and device for magnetic-abrasive machining of parts
US5931718A (en) * 1997-09-30 1999-08-03 The Board Of Regents Of Oklahoma State University Magnetic float polishing processes and materials therefor
US5957753A (en) * 1997-12-30 1999-09-28 The Board Of Regents For Oklahoma State University Magnetic float polishing of magnetic materials
US6267646B1 (en) * 1998-04-10 2001-07-31 Kabushiki Kaisha Toshiba Polishing machine
JPH11291165A (ja) * 1998-04-10 1999-10-26 Toshiba Corp 研磨装置及び研磨方法
US6071388A (en) * 1998-05-29 2000-06-06 International Business Machines Corporation Electroplating workpiece fixture having liquid gap spacer
US6056869A (en) * 1998-06-04 2000-05-02 International Business Machines Corporation Wafer edge deplater for chemical mechanical polishing of substrates
US6273787B1 (en) * 1998-08-26 2001-08-14 Extrude Hone Corp Abrasive polishing method, apparatus and composition
US6227942B1 (en) * 1999-04-21 2001-05-08 H-Semitran Llc Ferrofluidic finishing
US6146245A (en) * 1999-05-06 2000-11-14 Scientific Manufacturing Technologies, Inc. Method of and device for machining flat parts
US6402978B1 (en) 1999-05-06 2002-06-11 Mpm Ltd. Magnetic polishing fluids for polishing metal substrates
US6644929B2 (en) * 2000-08-18 2003-11-11 Flexcon Industries Pressure regulating valve
US20030216109A1 (en) * 2001-11-21 2003-11-20 Alfredo Riviere Electromagnetic cleaning process and device
US6776693B2 (en) * 2001-12-19 2004-08-17 Applied Materials Inc. Method and apparatus for face-up substrate polishing
JP3976581B2 (ja) * 2002-02-14 2007-09-19 Ｎｓｋワーナー株式会社 ロックアップクラッチ摩擦面の形成方法
DE102004014895A1 (de) * 2004-03-23 2005-10-13 Sergej Dr. Prichodko Bearbeitungsvorrichtung
US7094132B2 (en) * 2004-06-24 2006-08-22 Magnetic Abrasive Technologies, Inc. Method of and apparatus for magnetic-abrasive machining of wafers
US7252576B1 (en) * 2006-02-21 2007-08-07 The Board Of Regents For Oklahoma State University Method and apparatus for magnetic float polishing
CN100500378C (zh) * 2006-12-22 2009-06-17 浙江工业大学 浮力磨粒球抛光方法
CN100486765C (zh) * 2006-12-31 2009-05-13 广东工业大学 基于磁流变效应的研磨抛光方法及其抛光装置
US8915769B2 (en) * 2009-02-17 2014-12-23 Clino Corporation Method of manufacturing tubular structure, and stent
CN101850530A (zh) * 2010-04-06 2010-10-06 重庆大学 微动磨损的齿轮镜面抛光系统
US9102030B2 (en) * 2010-07-09 2015-08-11 Corning Incorporated Edge finishing apparatus
CN102601722A (zh) * 2011-01-20 2012-07-25 中芯国际集成电路制造(上海)有限公司 一种研磨方法和研磨装置
CN102284890A (zh) * 2011-09-26 2011-12-21 厦门大学 面形自适应回转轴对称光学元件抛光装置
CN102632434B (zh) * 2012-05-10 2014-07-02 河南科技大学 柱体工件磁流变抛光系统
CN103042438B (zh) * 2012-12-31 2014-11-05 天津大学 一种恒压式超声波辅助磁流变抛光方法及装置
CN103111917B (zh) * 2013-01-28 2015-11-18 嘉兴纳美精密机械有限公司 一种磁路通断可控的高效磁流变研抛装置
CN103522129B (zh) * 2013-09-28 2016-04-06 浙江科惠医疗器械股份有限公司 医用钛合金微小件超声波磁流变复合抛光机
CN103639903B (zh) * 2013-11-25 2016-09-28 北京理工大学 三向关联调整磁射流体加工装置
US9713865B2 (en) * 2015-06-02 2017-07-25 Apple Inc. Electromechanical surface texturing
CN105397611B (zh) * 2015-11-20 2017-12-08 沈阳黎明航空发动机(集团)有限责任公司 一种精铣曲面自动抛光方法及装置
CN105729250B (zh) * 2015-12-29 2018-01-30 广东工业大学 一种自修整磁流变柔性抛光砂轮及其磨抛方法
CN106217272B (zh) * 2016-07-20 2018-01-02 太原理工大学 液体磁性磨具滑移模型及其应用
CN110039380B (zh) * 2019-04-11 2020-12-01 上海理工大学 一种用于周期性微沟槽结构抛光的磁性复合流体抛光装置
CN110480423B (zh) * 2019-08-13 2021-04-02 武汉光韵达科技有限公司 一种磁力抛光组件
CN113305650B (zh) * 2021-06-17 2022-07-01 广东工业大学 一种超光滑平坦化抛光方法及装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2735232A (en) * 1956-02-21 simjian
US2827740A (en) * 1956-02-29 1958-03-25 Luther E Lee Polishing treatment for article surfaces
US2883809A (en) * 1957-11-21 1959-04-28 Reflectone Corp Polishing apparatus
DE1577331A1 (de) * 1966-11-24 1970-02-05 Eigemeier Kg Leichtmetallgiess Verfahren zur Oberflaechenbearbeitung von Werkstuecken
DE2821783C2 (de) * 1978-05-18 1982-04-15 Fiziko-techničeskij institut Akademii Nauk Belorusskoj SSR, Minsk Verfahren und Einrichtung zum Ändern des Konzentrationsgefälles von ferromagnetischem Schleif- oder Polierpulver
US4306386A (en) * 1978-05-31 1981-12-22 Sakulevich Faddei J Method of finishing ferromagnetic articles by ferromagnetic abrasive powders in magnetic field

Also Published As

Publication number Publication date
SE464565B (sv) 1991-05-13
DE3803773A1 (de) 1988-08-18
SE8800380D0 (sv) 1988-02-05
US4821466A (en) 1989-04-18

Similar Documents

Publication Publication Date Title
SE8800380L (sv) Forfarande for slipning med anvendning av ett magnetiskt fluidum och en anordning derfor
SE9000106L (sv) Knivslipningsanordning
IT8349172A0 (it) Metodo e dispositivo per finitura di contorno per abrasione con utensile vibrante
FR2554016B1 (fr) Perfectionnements apportes aux moyens magnetiques destines a retirer des billes de gel magnetique d'un fluide de dosage
ATE215869T1 (de) Magnetorheologische poliervorrichtungen und verfahren
DE3364665D1 (en) Method for grinding the surface of a semiconductor wafer
JPS5789551A (en) Grinding process for sapphire wafer
GB2117681B (en) Centerless honing or grinding apparatus
IT8249575A0 (it) Metodo e dispositivo per il controllo funzionale di macchine rettificatrici
JPS5591830A (en) Method of visualizing defect on surface of polished silicon wafer
DE3478289D1 (en) Magnetic attraction system grinding method
EP0051040A3 (en) Apparatus and method for the grinding of material
IT1157340B (it) Dispositivo per collegare amovibilamente utensili abrasivi all'albero di levigatrici e simili
GB1540517A (en) Grinding method and apparatus
BE875607A (fr) Procede et dispositif pour le broyage de matieres solides abrasives
JPS5683843A (en) Processing method for magnetic disc substrate
JPS5361309A (en) Polishing method of magnetic material
IT989718B (it) Dispositivo per allontanare il mate riale di abrasione prodotto in ope razioni di smerigliatura di leviga tura molatura o simili
Umehara et al. Hydro-magnetic grinding properties of magnetic fluid containing grains at high speeds
SU1783714A1 (ru) Способ полирования деталей
JPS56119367A (en) Surface polishing method
ES485146A1 (es) Dispositivo de mecanizacion por abrasion
JPS5357596A (en) Grinding method of roll
JPS52128105A (en) Production method of magnetic sheet
IT1157181B (it) Metodo ed apparecchi per l'estrazione in situ della magnetite contenuta nelle sabbie ferrifere per mezzo di normali calamite o miscugli di gomma sintetica e granelli magnetici

Legal Events

Date Code Title Description
NAL Patent in force

Ref document number: 8800380-1

Format of ref document f/p: F

NUG Patent has lapsed

Ref document number: 8800380-1

Format of ref document f/p: F