JPS56119367A - Surface polishing method - Google Patents

Surface polishing method

Info

Publication number
JPS56119367A
JPS56119367A JP2253980A JP2253980A JPS56119367A JP S56119367 A JPS56119367 A JP S56119367A JP 2253980 A JP2253980 A JP 2253980A JP 2253980 A JP2253980 A JP 2253980A JP S56119367 A JPS56119367 A JP S56119367A
Authority
JP
Japan
Prior art keywords
worked
plate
air
plane plate
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2253980A
Other languages
Japanese (ja)
Other versions
JPS6039510B2 (en
Inventor
Taketoshi Yonezawa
Kazuo Yokoyama
Yoshitaka Katayama
Noboru Ito
Shigeru Kondo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55022539A priority Critical patent/JPS6039510B2/en
Publication of JPS56119367A publication Critical patent/JPS56119367A/en
Publication of JPS6039510B2 publication Critical patent/JPS6039510B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE: To mirror-finish a surface of a semiconductor wafer with a comparatively small polishing plate by a method wherein a pressure piston of the polishing plate is allowed to make a two-diminsional motion in parallel to a worked face.
CONSTITUTION: A work-piece 1 is fixed in a working fluid. A plane plate 5 is rotation-driven by an air moror 7. The air motor 7 is driven direction to the worked face by the pressure of an air in a cylinder upper chamber 13. The working fluid containing abrasive particles flows between the plane plate 5 and the worked surface to process the surface of the work-piece and also, acts as a fluid bearing to keep a constant distance between the plane plate 5 and the worked surface. This polishing device differs from a working plate of a usual lapping machine and can be made a small size on the whole due to the two-dimensional motion of the piston means 18 in parallel to the worked surface along a guide.
COPYRIGHT: (C)1981,JPO&Japio
JP55022539A 1980-02-25 1980-02-25 Surface polishing method Expired JPS6039510B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55022539A JPS6039510B2 (en) 1980-02-25 1980-02-25 Surface polishing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55022539A JPS6039510B2 (en) 1980-02-25 1980-02-25 Surface polishing method

Publications (2)

Publication Number Publication Date
JPS56119367A true JPS56119367A (en) 1981-09-18
JPS6039510B2 JPS6039510B2 (en) 1985-09-06

Family

ID=12085601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55022539A Expired JPS6039510B2 (en) 1980-02-25 1980-02-25 Surface polishing method

Country Status (1)

Country Link
JP (1) JPS6039510B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238262A (en) * 1984-05-11 1985-11-27 Shinkosha:Kk Method of manufacturing ultra-microtome knife
JPS6186172A (en) * 1984-07-30 1986-05-01 Esutetsuku Giken Kk Polishing method for glass plate and its device
JPS6288565A (en) * 1985-10-14 1987-04-23 Shinkosha:Kk Polishing device
US6951507B2 (en) 1993-11-16 2005-10-04 Applied Materials, Inc. Substrate polishing apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60238262A (en) * 1984-05-11 1985-11-27 Shinkosha:Kk Method of manufacturing ultra-microtome knife
JPS6320668B2 (en) * 1984-05-11 1988-04-28 Shinkosha Kk
JPS6186172A (en) * 1984-07-30 1986-05-01 Esutetsuku Giken Kk Polishing method for glass plate and its device
JPS6288565A (en) * 1985-10-14 1987-04-23 Shinkosha:Kk Polishing device
US6951507B2 (en) 1993-11-16 2005-10-04 Applied Materials, Inc. Substrate polishing apparatus

Also Published As

Publication number Publication date
JPS6039510B2 (en) 1985-09-06

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