SE8703754D0 - Forfarande for framstellning av ett fotoresistmaterial - Google Patents

Forfarande for framstellning av ett fotoresistmaterial

Info

Publication number
SE8703754D0
SE8703754D0 SE8703754A SE8703754A SE8703754D0 SE 8703754 D0 SE8703754 D0 SE 8703754D0 SE 8703754 A SE8703754 A SE 8703754A SE 8703754 A SE8703754 A SE 8703754A SE 8703754 D0 SE8703754 D0 SE 8703754D0
Authority
SE
Sweden
Prior art keywords
polymer
photo resist
procedure
preparation
resist material
Prior art date
Application number
SE8703754A
Other languages
English (en)
Other versions
SE8703754L (sv
Inventor
J-H Tsao
P R Hein
Original Assignee
Grace W R & Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grace W R & Co filed Critical Grace W R & Co
Publication of SE8703754L publication Critical patent/SE8703754L/sv
Publication of SE8703754D0 publication Critical patent/SE8703754D0/sv

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/08—Processes
    • C08G18/0804—Manufacture of polymers containing ionic or ionogenic groups
    • C08G18/0819—Manufacture of polymers containing ionic or ionogenic groups containing anionic or anionogenic groups
    • C08G18/0823—Manufacture of polymers containing ionic or ionogenic groups containing anionic or anionogenic groups containing carboxylate salt groups or groups forming them
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
    • C08G18/81—Unsaturated isocyanates or isothiocyanates
    • C08G18/8141—Unsaturated isocyanates or isothiocyanates masked
    • C08G18/815—Polyisocyanates or polyisothiocyanates masked with unsaturated compounds having active hydrogen
    • C08G18/8158—Polyisocyanates or polyisothiocyanates masked with unsaturated compounds having active hydrogen with unsaturated compounds having only one group containing active hydrogen
    • C08G18/8175—Polyisocyanates or polyisothiocyanates masked with unsaturated compounds having active hydrogen with unsaturated compounds having only one group containing active hydrogen with esters of acrylic or alkylacrylic acid having only one group containing active hydrogen
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00—Polymeric products of isocyanates or isothiocyanates
    • C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/83—Chemically modified polymers
    • C08G18/831—Chemically modified polymers by oxygen-containing compounds inclusive of carbonic acid halogenides, carboxylic acid halogenides and epoxy halides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S525/00—Synthetic resins or natural rubbers -- part of the class 520 series
    • Y10S525/92—Polyurethane having terminal ethylenic unsaturation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Polymerisation Methods In General (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Polyethers (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Epoxy Resins (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
SE8703754A 1981-01-16 1987-09-29 Forfarande for framstellning av ett fotoresistmaterial SE8703754D0 (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/225,809 US4422914A (en) 1981-01-16 1981-01-16 Polymer composition having terminal alkene and terminal carboxyl groups

Publications (2)

Publication Number Publication Date
SE8703754L SE8703754L (sv) 1987-09-29
SE8703754D0 true SE8703754D0 (sv) 1987-09-29

Family

ID=22846336

Family Applications (2)

Application Number Title Priority Date Filing Date
SE8200130A SE453994B (sv) 1981-01-16 1982-01-12 Polymer med terminala alken- och terminala karboxylgrupper, forfarande for dess framstellning samt anvendning derav som fotoresist eller varmsmelta
SE8703754A SE8703754D0 (sv) 1981-01-16 1987-09-29 Forfarande for framstellning av ett fotoresistmaterial

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SE8200130A SE453994B (sv) 1981-01-16 1982-01-12 Polymer med terminala alken- och terminala karboxylgrupper, forfarande for dess framstellning samt anvendning derav som fotoresist eller varmsmelta

Country Status (10)

Country Link
US (1) US4422914A (sv)
JP (2) JPS57139112A (sv)
AU (1) AU552010B2 (sv)
CA (1) CA1212798A (sv)
DE (1) DE3200703C2 (sv)
FR (1) FR2499998B1 (sv)
GB (1) GB2091278B (sv)
IT (1) IT1154253B (sv)
NL (1) NL8105805A (sv)
SE (2) SE453994B (sv)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4752553A (en) * 1982-04-01 1988-06-21 M&T Chemicals Inc. High resolution solder mask photopolymers for screen coating over circuit traces
JPS60163911A (ja) * 1984-02-02 1985-08-26 Suriibondo:Kk 光硬化性ゴム弾性組成物
AU3118784A (en) * 1984-02-23 1985-08-29 W.R. Grace & Co. Acrylate-capped polyurethane use as solder mask
US4746685A (en) * 1984-08-31 1988-05-24 Nippon Oil And Fats Co., Ltd. Light curable dental composition
SE444950B (sv) * 1984-09-28 1986-05-20 Ytkemiska Inst Ytbelagd artikel, forfarande och medel for framstellning derav samt anvendning derav
DE3447357A1 (de) * 1984-12-24 1986-07-03 Basf Ag, 6700 Ludwigshafen Trockenfilmresist und verfahren zur herstellung von resistmustern
US4837126A (en) * 1985-06-07 1989-06-06 W. R. Grace & Co. Polymer composition for photoresist application
US4828961A (en) * 1986-07-02 1989-05-09 W. R. Grace & Co.-Conn. Imaging process for forming ceramic electronic circuits
US5200438A (en) * 1988-03-09 1993-04-06 Hayakawa Rubber Co., Ltd. Ultraviolet ray-curable ink
US5340653A (en) * 1988-08-12 1994-08-23 Stamicarbon B.V. Free-radical curable compositions comprising vinyl ether and urethane malenate compounds
US5006436A (en) * 1988-09-20 1991-04-09 Atochem North America, Inc. UV curable compositions for making tentable solder mask coating
DK0508981T4 (da) * 1988-10-17 2003-06-30 Guertin Bros Coatings And Seal NCO-frie harpikser med anvendelse som en erstatning for polyurethaner
DE3841025A1 (de) * 1988-12-06 1990-06-07 Hoechst Ag Durch strahlung polymerisierbares gemisch und daraus hergestelltes aufzeichnungsmaterial
US5019636A (en) * 1989-05-10 1991-05-28 Allied-Signal Inc. Polyester chain-extended vinyl ether urethane oligomers
DE3927632A1 (de) * 1989-08-22 1991-02-28 Basf Ag Umsetzungsprodukt, verfahren zu dessen herstellung und damit erhaltenes strahlungsempfindliches material
US5567761A (en) * 1993-05-10 1996-10-22 Guertin Bros. Coatings And Sealants Ltd. Aqueous two-part isocyanate-free curable, polyurethane resin systems
DE19621545C1 (de) * 1996-05-29 1998-02-05 Cicorel S A Verfahren zum Herstellen einer Leiterplatte
US6803406B2 (en) 2002-03-29 2004-10-12 National Starch And Chemical Investmnet Holding Corporation Electron donors, electron acceptors and adhesion promoters containing disulfide
US7742672B2 (en) * 2005-08-24 2010-06-22 General Electric Company Composition, optical device article, and associated method
JP4915500B2 (ja) * 2006-01-11 2012-04-11 Ｊｓｒ株式会社 熱硬化性樹脂組成物、カラーフィルタの保護膜の形成方法、およびカラーフィルタの保護膜
KR20140148400A (ko) * 2012-03-28 2014-12-31 도레이 카부시키가이샤 감광성 도전 페이스트 및 도전 패턴의 제조 방법
MX2019002823A (es) * 2016-09-12 2019-09-18 Poly6 Tech Inc Metodo de reciclaje de alto desempeño, de un solo recipiente para residuo de polímero usando síntesis de polímero renovable.

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3850770A (en) * 1969-10-24 1974-11-26 Kansai Paint Co Ltd Radiation curable compositions from acrylurethane resins
GB1289075A (sv) 1970-04-30 1972-09-13
US3890150A (en) * 1970-06-04 1975-06-17 Agency Ind Science Techn Photosensitive compositions including aromatic bis-acrylic derivatives
AU451354B2 (en) * 1971-01-06 1974-08-08 Inmont Corp. "actinic radiation curing compositions and method of coating and printing using same"
US3801329A (en) * 1971-12-17 1974-04-02 Union Carbide Corp Radiation curable coating compositions
US3715293A (en) * 1971-12-17 1973-02-06 Union Carbide Corp Acetophenone-type photosensitizers for radiation curable coatings
US3809732A (en) * 1972-12-18 1974-05-07 Bell Telephone Labor Inc Photo-locking technique for producing integrated optical circuits
US3960572A (en) * 1973-02-21 1976-06-01 Asahi Kasei Kogyo Kabushiki Kaisha Photosensitive compositions comprising a polyester-polyether block polymer
US3954584A (en) * 1973-06-20 1976-05-04 Kansai Paint Company Photopolymerizable vinylurethane liquid composition
JPS5514087B2 (sv) 1973-09-05 1980-04-14
US3953214A (en) * 1974-05-24 1976-04-27 Dynachem Corporation Photopolymerizable screen printing inks and use thereof
DE2443665A1 (de) * 1974-09-12 1976-03-25 Basf Ag Photovernetzbare formmasse fuer die herstellung von waessrig-alkalisch entwickelbaren druckformen
JPS51123140A (en) * 1975-04-19 1976-10-27 Nippon Paint Co Ltd Photosensitive compositions and processing method thereof
US4167415A (en) * 1975-07-11 1979-09-11 Kansai Paint Co., Ltd. Photocurable composition comprising copolymer of maleic acid monoester and α-olefin compound
US4057431A (en) 1975-09-29 1977-11-08 The Goodyear Tire & Rubber Company Ethylenically polyurethane unsaturated composition
DE2557408C2 (de) * 1975-12-19 1983-08-25 Bayer Ag, 5090 Leverkusen Verfahren zur Herstellung eines in organischen Lösungsmitteln löslichen, vernetzbaren Acryloyl- und/oder Methacryloylgruppen und Carboxylgruppen enthaltenden Urethanharzes und seine Verwendung
JPS5823616B2 (ja) * 1976-11-08 1983-05-16 東レ株式会社 感光性ポリマ組成物
US4216019A (en) 1977-07-21 1980-08-05 Kenneth James Reed Photographically produced stencils
JPS6049206B2 (ja) * 1977-11-15 1985-10-31 大日本インキ化学工業株式会社 付着性の優れた重合性プレポリマ−
FR2425094B1 (fr) * 1978-05-01 1985-07-19 Minnesota Mining & Mfg Compositions photopolymerisables
US4230770A (en) 1978-10-06 1980-10-28 The Goodyear Tire & Rubber Company Metal photopolymer substrates
US4228232A (en) * 1979-02-27 1980-10-14 Minnesota Mining And Manufacturing Company Photopolymerizable composition containing ethylenically unsaturated oligomers
US4218295A (en) * 1979-05-16 1980-08-19 The Dow Chemical Company Epoxy-carbonyl compositions as photopolymerization initiators
US4254230A (en) * 1979-12-10 1981-03-03 Lord Corporation Actinic radiation-curable formulations of unsaturated polyetherester urethane
JPS56120718A (en) 1980-02-28 1981-09-22 Asahi Chem Ind Co Ltd Improved polyurethane type photosensitive resin composition

Also Published As

Publication number Publication date
US4422914A (en) 1983-12-27
CA1212798A (en) 1986-10-14
FR2499998A1 (fr) 1982-08-20
SE8703754L (sv) 1987-09-29
NL8105805A (nl) 1982-08-16
JPH0439663B2 (sv) 1992-06-30
FR2499998B1 (fr) 1986-12-12
DE3200703C2 (de) 1995-01-05
SE8200130L (sv) 1982-07-17
DE3200703A1 (de) 1982-08-26
JPS6236660A (ja) 1987-02-17
IT8247504A0 (it) 1982-01-05
AU7900981A (en) 1982-07-22
GB2091278B (en) 1984-10-24
IT1154253B (it) 1987-01-21
JPS57139112A (en) 1982-08-27
GB2091278A (en) 1982-07-28
AU552010B2 (en) 1986-05-22
SE453994B (sv) 1988-03-21
JPS6156247B2 (sv) 1986-12-01

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