SE547590C2 - Method and analyser arrangement for analysing charged particles emitted from a particle emitting sample - Google Patents

Method and analyser arrangement for analysing charged particles emitted from a particle emitting sample

Info

Publication number
SE547590C2
SE547590C2 SE2050142A SE2050142A SE547590C2 SE 547590 C2 SE547590 C2 SE 547590C2 SE 2050142 A SE2050142 A SE 2050142A SE 2050142 A SE2050142 A SE 2050142A SE 547590 C2 SE547590 C2 SE 547590C2
Authority
SE
Sweden
Prior art keywords
charged particles
measurement region
sample
entrance
particles emitted
Prior art date
Application number
SE2050142A
Other languages
English (en)
Other versions
SE2050142A1 (en
Inventor
Björn Wannberg
Original Assignee
Scienta Omicron Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=49117105&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SE547590(C2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Scienta Omicron Ab filed Critical Scienta Omicron Ab
Publication of SE2050142A1 publication Critical patent/SE2050142A1/en
Publication of SE547590C2 publication Critical patent/SE547590C2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/061—Ion deflecting means, e.g. ion gates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/085—Investigating materials by wave or particle radiation secondary emission photo-electron spectrum [ESCA, XPS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H01J2237/0535—Mirror analyser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
SE2050142A 2012-03-06 2012-03-06 Method and analyser arrangement for analysing charged particles emitted from a particle emitting sample SE547590C2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SE2012/050251 WO2013133739A1 (en) 2012-03-06 2012-03-06 Analyser arrangement for particle spectrometer

Publications (2)

Publication Number Publication Date
SE2050142A1 SE2050142A1 (en) 2020-02-10
SE547590C2 true SE547590C2 (en) 2025-10-21

Family

ID=49117105

Family Applications (3)

Application Number Title Priority Date Filing Date
SE2050142A SE547590C2 (en) 2012-03-06 2012-03-06 Method and analyser arrangement for analysing charged particles emitted from a particle emitting sample
SE1451107A SE538941C2 (en) 2012-03-06 2012-03-06 Analyze arrangement for particle spectrometer
SE1450816A SE542643C2 (en) 2012-03-06 2012-03-06 Analyze arrangement for particle spectrometer

Family Applications After (2)

Application Number Title Priority Date Filing Date
SE1451107A SE538941C2 (en) 2012-03-06 2012-03-06 Analyze arrangement for particle spectrometer
SE1450816A SE542643C2 (en) 2012-03-06 2012-03-06 Analyze arrangement for particle spectrometer

Country Status (11)

Country Link
US (3) US9437408B2 (enExample)
EP (3) EP2823504B1 (enExample)
JP (1) JP6301269B2 (enExample)
KR (1) KR101953944B1 (enExample)
CN (1) CN104040681B (enExample)
DE (2) DE14185601T1 (enExample)
DK (1) DK2823504T3 (enExample)
ES (2) ES2687794T3 (enExample)
PL (2) PL2851933T3 (enExample)
SE (3) SE547590C2 (enExample)
WO (1) WO2013133739A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE14185601T1 (de) 2012-03-06 2015-05-21 Vg Scienta Ab Analysatoranordnung für Teilchenspektrometer
EP3032563A1 (en) 2014-12-10 2016-06-15 VG Scienta AB Analyser instrument
GB2534892B (en) * 2015-02-03 2020-09-09 Auckland Uniservices Ltd An ion mirror, an ion mirror assembly and an ion trap
JP6405271B2 (ja) * 2015-03-12 2018-10-17 日本電子株式会社 電子分光装置および測定方法
SE540581C2 (en) * 2015-05-08 2018-10-02 Hard X-Ray Photoelectron Spectroscopy Apparatus
JP6173552B1 (ja) * 2016-05-27 2017-08-02 エム・ベー・サイエンティフィック・アクチボラゲットＭｂ Ｓｃｉｅｎｔｉｆｉｃ Ａｂ 電子分光器
US9997346B1 (en) 2017-06-30 2018-06-12 Mb Scientific Ab Electron spectrometer
DE102017130072B4 (de) 2017-12-15 2021-05-20 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Impulsauflösendes Photoelektronenspektrometer und Verfahren zur impulsauflösenden Photoelektronenspektroskopie
US10361064B1 (en) 2018-02-28 2019-07-23 National Electrostatics Corp. Beam combiner
DE102019107327A1 (de) 2019-03-21 2020-09-24 Specs Surface Nano Analysis Gmbh Vorrichtung und Verfahren zum Elektronentransfer von einer Probe zu einem Energieanalysator und Elektronen-Spektrometervorrichtung
WO2020250307A1 (ja) * 2019-06-11 2020-12-17 三菱電機株式会社 試料ホルダー及びｘ線光電子分光装置
GB201910880D0 (en) * 2019-07-30 2019-09-11 Vg Systems Ltd A spectroscopy and imaging system
CN114303229A (zh) * 2019-08-30 2022-04-08 盛达欧米科有限公司 用于控制电子束的静电透镜
SE544658C2 (en) * 2021-02-18 2022-10-11 Scienta Omicron Ab An illumination control device for a charged particle analyser
SE545450C2 (en) * 2021-03-24 2023-09-12 Scienta Omicron Ab Charged particle spectrometer and method for calibration
SE545152C2 (en) * 2021-09-21 2023-04-18 Scienta Omicron Ab Charged particle spectrometer operable in an angular mode
TW202405424A (zh) * 2022-04-19 2024-02-01 美商英福康公司 使用光電離進行過程污染物檢測的分壓力計元件及相關方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4358680A (en) * 1979-11-30 1982-11-09 Kratos Limited Charged particle spectrometers
US5285066A (en) * 1991-07-02 1994-02-08 Jeol Ltd. Imaging XPS system
US6104029A (en) * 1997-08-26 2000-08-15 Vg Systems Ltd. Spectrometer and method of spectroscopy
JP2000258369A (ja) * 1999-03-03 2000-09-22 Ricoh Co Ltd 走査ｘ線電子顕微鏡
JP2000299080A (ja) * 1999-04-14 2000-10-24 Jeol Ltd 電子分光装置
WO2011019457A1 (en) * 2009-08-11 2011-02-17 Regents Of The University Of California Time-of-flight electron energy analyzer

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US619809A (en) 1899-02-21 John unser
US1773980A (en) 1927-01-07 1930-08-26 Television Lab Inc Television system
GB1303136A (enExample) 1970-02-27 1973-01-17
DE2043749C3 (de) * 1970-08-31 1975-08-21 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Raster-Korpuskularstrahlmikroskop
US3749926A (en) 1971-08-03 1973-07-31 Du Pont Charged particle energy analysis
JPS532755B2 (enExample) * 1973-08-22 1978-01-31
GB2064213B (en) 1979-11-30 1983-10-05 Kratos Ltd Electron spectrometers
JPS56107463A (en) 1979-11-30 1981-08-26 Kratos Ltd Electron spectrometer
US4427885A (en) 1981-11-27 1984-01-24 Shimadzu Seisakusho Ltd. Double focussing mass spectrometer
JPS58200144A (ja) 1982-05-17 1983-11-21 Shimadzu Corp Ｘ線光電子分光装置
DE3478261D1 (en) 1984-02-18 1989-06-22 Leybold Ag Device for the examination of crystal surfaces according to the leed-technique
JP2580114B2 (ja) 1985-12-17 1997-02-12 株式会社日立製作所 偏向回路
JPH0723878B2 (ja) 1985-12-26 1995-03-15 株式会社島津製作所 Ｘ線光電子分光装置
GB8612099D0 (en) * 1986-05-19 1986-06-25 Vg Instr Group Spectrometer
JPH0797092B2 (ja) 1988-04-26 1995-10-18 株式会社島津製作所 Ｘ線光電子分析装置
GB2244369A (en) * 1990-05-22 1991-11-27 Kratos Analytical Ltd Charged particle energy analysers
US5097126A (en) * 1990-09-25 1992-03-17 Gatan, Inc. High resolution electron energy loss spectrometer
GB9122161D0 (en) * 1991-10-18 1991-11-27 Kratos Analytical Ltd Charged particle energy analysers
US5506414A (en) * 1993-03-26 1996-04-09 Fisons Plc Charged-particle analyzer
JP2629594B2 (ja) 1994-03-30 1997-07-09 日本電気株式会社 Ｘ線光電子分光装置
US5650628A (en) * 1994-12-15 1997-07-22 International Business Machines Corporation Simultaneous deflections in charged-particle beams
DE19701192C2 (de) 1997-01-15 2000-10-05 Staib Instr Gmbh Vorrichtung und Verfahren zum Betrieb eines Spektrometers mit Energie- und Winkelauflösung
US6064071A (en) 1997-04-23 2000-05-16 Nikon Corporation Charged-particle-beam optical systems
US6198005B1 (en) * 1998-04-23 2001-03-06 Lehigh University Treating methanol containing waste gas streams
DE19820427A1 (de) * 1998-05-07 1999-11-11 Siemens Ag Röntgenstrahlersystem
JP2000164166A (ja) * 1998-11-24 2000-06-16 Jeol Ltd 電子分光装置
JP3360115B2 (ja) 2000-03-17 2002-12-24 東京大学長 回折面アパチャー透過エネルギー制御方式の角度分解型電子分光器及びこの分光器を用いた分析方法
JP2002299207A (ja) 2001-03-29 2002-10-11 Toshiba Corp 荷電粒子ビーム描画装置
JP2003207470A (ja) * 2002-01-16 2003-07-25 Jeol Ltd 電子分光装置
DE10235456B4 (de) 2002-08-02 2008-07-10 Leo Elektronenmikroskopie Gmbh Elektronenmikroskopiesystem
GB0225791D0 (en) * 2002-11-05 2002-12-11 Kratos Analytical Ltd Charged particle spectrometer and detector therefor
US7411188B2 (en) * 2005-07-11 2008-08-12 Revera Incorporated Method and system for non-destructive distribution profiling of an element in a film
GB0620963D0 (en) 2006-10-20 2006-11-29 Thermo Finnigan Llc Multi-channel detection
EP2051278B1 (en) 2007-10-17 2011-09-07 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Energy filter for cold field emission electron beam apparatus
JP5948083B2 (ja) * 2012-02-28 2016-07-06 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
DE14185601T1 (de) 2012-03-06 2015-05-21 Vg Scienta Ab Analysatoranordnung für Teilchenspektrometer
JP6013261B2 (ja) * 2013-04-11 2016-10-25 Nok株式会社 プレート一体ガスケットの製造方法
JP5815826B2 (ja) 2014-10-07 2015-11-17 ヴィゲー・シエンタ・アーベー 粒子分光計のための分析装置
JP6268111B2 (ja) * 2015-02-06 2018-01-24 信越化学工業株式会社 フッ素含有ケイ素化合物、その製造方法、及びフッ素含有ケイ素樹脂の製造方法
JP2016197124A (ja) 2016-07-25 2016-11-24 シエンタ・オミクロン・アーベー 粒子分光計のための分析装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4358680A (en) * 1979-11-30 1982-11-09 Kratos Limited Charged particle spectrometers
US5285066A (en) * 1991-07-02 1994-02-08 Jeol Ltd. Imaging XPS system
US6104029A (en) * 1997-08-26 2000-08-15 Vg Systems Ltd. Spectrometer and method of spectroscopy
JP2000258369A (ja) * 1999-03-03 2000-09-22 Ricoh Co Ltd 走査ｘ線電子顕微鏡
JP2000299080A (ja) * 1999-04-14 2000-10-24 Jeol Ltd 電子分光装置
WO2011019457A1 (en) * 2009-08-11 2011-02-17 Regents Of The University Of California Time-of-flight electron energy analyzer

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Email Exchanges X1-X4 *
Jozwiak, C. et Al, 'A high-efficiency spin-resolved photoemission spectrometer combining time-of-flight spectroscopy with exchange-scattering polarimetry', Review of scientific instruments, AIP, May 2010, Vol. 81, no. 5, pg 53904-1 - 53904-15, ISSN: 0034-6748, doi:10.1063/1.3427223 *
User manual for Scienta Electron Spectrometer SES 200, dated 1996-04- 15. *

Also Published As

Publication number Publication date
SE1451107A1 (sv) 2014-09-19
EP2851933A1 (en) 2015-03-25
ES2687794T3 (es) 2018-10-29
SE1450816A1 (sv) 2014-07-01
US20140361161A1 (en) 2014-12-11
PL2851933T3 (pl) 2017-04-28
CN104040681B (zh) 2017-04-26
JP2015511055A (ja) 2015-04-13
US9978579B2 (en) 2018-05-22
EP2851933B1 (en) 2016-10-19
US20160336166A1 (en) 2016-11-17
KR101953944B1 (ko) 2019-03-04
EP3428953A1 (en) 2019-01-16
CN104040681A (zh) 2014-09-10
KR20140137342A (ko) 2014-12-02
SE1451107A3 (en) 2015-01-20
EP2823504A4 (en) 2015-10-07
EP2823504B1 (en) 2018-08-01
DE14185601T1 (de) 2015-05-21
EP2823504A1 (en) 2015-01-14
WO2013133739A9 (en) 2013-10-31
DE12870629T1 (de) 2015-03-19
SE542643C2 (en) 2020-06-23
SE538941C2 (en) 2017-02-28
DK2823504T3 (en) 2018-11-05
SE2050142A1 (en) 2020-02-10
WO2013133739A1 (en) 2013-09-12
US20180269054A1 (en) 2018-09-20
PL2823504T3 (pl) 2019-03-29
JP6301269B2 (ja) 2018-03-28
EP3428953C0 (en) 2025-09-17
ES2602055T3 (es) 2017-02-17
US9437408B2 (en) 2016-09-06
SE1450816A3 (en) 2015-01-20
EP3428953B1 (en) 2025-09-17

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