SE542643C2 - Analyze arrangement for particle spectrometer - Google Patents

Analyze arrangement for particle spectrometer

Info

Publication number
SE542643C2
SE542643C2 SE1450816A SE1450816A SE542643C2 SE 542643 C2 SE542643 C2 SE 542643C2 SE 1450816 A SE1450816 A SE 1450816A SE 1450816 A SE1450816 A SE 1450816A SE 542643 C2 SE542643 C2 SE 542643C2
Authority
SE
Sweden
Prior art keywords
deflector
particle beam
lens system
arrangement
measurement region
Prior art date
Application number
SE1450816A
Other languages
English (en)
Swedish (sv)
Other versions
SE1450816A3 (en
SE1450816A1 (sv
Inventor
Björn Wannberg
Original Assignee
Vg Scienta Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=49117105&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SE542643(C2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Vg Scienta Ab filed Critical Vg Scienta Ab
Publication of SE1450816A1 publication Critical patent/SE1450816A1/sv
Publication of SE1450816A3 publication Critical patent/SE1450816A3/sv
Publication of SE542643C2 publication Critical patent/SE542643C2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/061—Ion deflecting means, e.g. ion gates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/085—Investigating materials by wave or particle radiation secondary emission photo-electron spectrum [ESCA, XPS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H01J2237/0535—Mirror analyser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
SE1450816A 2012-03-06 2012-03-06 Analyze arrangement for particle spectrometer SE542643C2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SE2012/050251 WO2013133739A1 (en) 2012-03-06 2012-03-06 Analyser arrangement for particle spectrometer

Publications (3)

Publication Number Publication Date
SE1450816A1 SE1450816A1 (sv) 2014-07-01
SE1450816A3 SE1450816A3 (en) 2015-01-20
SE542643C2 true SE542643C2 (en) 2020-06-23

Family

ID=49117105

Family Applications (3)

Application Number Title Priority Date Filing Date
SE1450816A SE542643C2 (en) 2012-03-06 2012-03-06 Analyze arrangement for particle spectrometer
SE1451107A SE538941C2 (en) 2012-03-06 2012-03-06 Analyze arrangement for particle spectrometer
SE2050142A SE547590C2 (en) 2012-03-06 2012-03-06 Method and analyser arrangement for analysing charged particles emitted from a particle emitting sample

Family Applications After (2)

Application Number Title Priority Date Filing Date
SE1451107A SE538941C2 (en) 2012-03-06 2012-03-06 Analyze arrangement for particle spectrometer
SE2050142A SE547590C2 (en) 2012-03-06 2012-03-06 Method and analyser arrangement for analysing charged particles emitted from a particle emitting sample

Country Status (11)

Country Link
US (3) US9437408B2 (enExample)
EP (3) EP3428953B1 (enExample)
JP (1) JP6301269B2 (enExample)
KR (1) KR101953944B1 (enExample)
CN (1) CN104040681B (enExample)
DE (2) DE12870629T1 (enExample)
DK (1) DK2823504T3 (enExample)
ES (2) ES2602055T3 (enExample)
PL (2) PL2823504T3 (enExample)
SE (3) SE542643C2 (enExample)
WO (1) WO2013133739A1 (enExample)

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US9997346B1 (en) 2017-06-30 2018-06-12 Mb Scientific Ab Electron spectrometer
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EP4022669A4 (en) * 2019-08-30 2023-10-11 Scienta Omicron AB ELECTROSTATIC LENS FOR CONTROLLING AN ELECTRON BEAM
SE544658C2 (en) * 2021-02-18 2022-10-11 Scienta Omicron Ab An illumination control device for a charged particle analyser
SE545450C2 (en) * 2021-03-24 2023-09-12 Scienta Omicron Ab Charged particle spectrometer and method for calibration
SE545152C2 (en) * 2021-09-21 2023-04-18 Scienta Omicron Ab Charged particle spectrometer operable in an angular mode
TW202405424A (zh) * 2022-04-19 2024-02-01 美商英福康公司 使用光電離進行過程污染物檢測的分壓力計元件及相關方法

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Also Published As

Publication number Publication date
SE2050142A1 (en) 2020-02-10
US20180269054A1 (en) 2018-09-20
EP3428953C0 (en) 2025-09-17
ES2602055T3 (es) 2017-02-17
SE1451107A1 (sv) 2014-09-19
SE547590C2 (en) 2025-10-21
US20140361161A1 (en) 2014-12-11
SE1450816A3 (en) 2015-01-20
US9437408B2 (en) 2016-09-06
JP2015511055A (ja) 2015-04-13
EP3428953B1 (en) 2025-09-17
ES2687794T3 (es) 2018-10-29
CN104040681A (zh) 2014-09-10
US9978579B2 (en) 2018-05-22
SE1451107A3 (en) 2015-01-20
JP6301269B2 (ja) 2018-03-28
EP2851933B1 (en) 2016-10-19
EP2823504A4 (en) 2015-10-07
PL2823504T3 (pl) 2019-03-29
EP3428953A1 (en) 2019-01-16
EP2823504A1 (en) 2015-01-14
KR101953944B1 (ko) 2019-03-04
DK2823504T3 (en) 2018-11-05
KR20140137342A (ko) 2014-12-02
CN104040681B (zh) 2017-04-26
DE14185601T1 (de) 2015-05-21
DE12870629T1 (de) 2015-03-19
PL2851933T3 (pl) 2017-04-28
WO2013133739A9 (en) 2013-10-31
EP2823504B1 (en) 2018-08-01
EP2851933A1 (en) 2015-03-25
US20160336166A1 (en) 2016-11-17
WO2013133739A1 (en) 2013-09-12
SE1450816A1 (sv) 2014-07-01
SE538941C2 (en) 2017-02-28

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Legal Events

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TRCL Swedish translation of the claims has been filed
CANC Patent cancelled, revoked after opposition