ES2602055T3 - Disposición de análisis para espectrómetro de partículas - Google Patents

Disposición de análisis para espectrómetro de partículas Download PDF

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Publication number
ES2602055T3
ES2602055T3 ES14185601.3T ES14185601T ES2602055T3 ES 2602055 T3 ES2602055 T3 ES 2602055T3 ES 14185601 T ES14185601 T ES 14185601T ES 2602055 T3 ES2602055 T3 ES 2602055T3
Authority
ES
Spain
Prior art keywords
particle beam
particles
charged particles
positions
deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES14185601.3T
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English (en)
Spanish (es)
Inventor
Björn WANNBERG
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Scienta Omicron AB
Original Assignee
Scienta Omicron AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=49117105&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2602055(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Scienta Omicron AB filed Critical Scienta Omicron AB
Application granted granted Critical
Publication of ES2602055T3 publication Critical patent/ES2602055T3/es
Active legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/061—Ion deflecting means, e.g. ion gates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/085—Investigating materials by wave or particle radiation secondary emission photo-electron spectrum [ESCA, XPS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H01J2237/0535—Mirror analyser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
ES14185601.3T 2012-03-06 2012-03-06 Disposición de análisis para espectrómetro de partículas Active ES2602055T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/SE2012/050251 WO2013133739A1 (en) 2012-03-06 2012-03-06 Analyser arrangement for particle spectrometer
EP14185601.3A EP2851933B1 (en) 2012-03-06 2012-03-06 Analyser arrangement for particle spectrometer

Publications (1)

Publication Number Publication Date
ES2602055T3 true ES2602055T3 (es) 2017-02-17

Family

ID=49117105

Family Applications (2)

Application Number Title Priority Date Filing Date
ES12870629.8T Active ES2687794T3 (es) 2012-03-06 2012-03-06 Disposición analizadora para espectrómetro de partículas
ES14185601.3T Active ES2602055T3 (es) 2012-03-06 2012-03-06 Disposición de análisis para espectrómetro de partículas

Family Applications Before (1)

Application Number Title Priority Date Filing Date
ES12870629.8T Active ES2687794T3 (es) 2012-03-06 2012-03-06 Disposición analizadora para espectrómetro de partículas

Country Status (11)

Country Link
US (3) US9437408B2 (enExample)
EP (3) EP2823504B1 (enExample)
JP (1) JP6301269B2 (enExample)
KR (1) KR101953944B1 (enExample)
CN (1) CN104040681B (enExample)
DE (2) DE14185601T1 (enExample)
DK (1) DK2823504T3 (enExample)
ES (2) ES2687794T3 (enExample)
PL (2) PL2851933T3 (enExample)
SE (3) SE547590C2 (enExample)
WO (1) WO2013133739A1 (enExample)

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CN114303229A (zh) * 2019-08-30 2022-04-08 盛达欧米科有限公司 用于控制电子束的静电透镜
SE544658C2 (en) * 2021-02-18 2022-10-11 Scienta Omicron Ab An illumination control device for a charged particle analyser
SE545450C2 (en) * 2021-03-24 2023-09-12 Scienta Omicron Ab Charged particle spectrometer and method for calibration
SE545152C2 (en) * 2021-09-21 2023-04-18 Scienta Omicron Ab Charged particle spectrometer operable in an angular mode
TW202405424A (zh) * 2022-04-19 2024-02-01 美商英福康公司 使用光電離進行過程污染物檢測的分壓力計元件及相關方法

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Also Published As

Publication number Publication date
SE1451107A1 (sv) 2014-09-19
EP2851933A1 (en) 2015-03-25
ES2687794T3 (es) 2018-10-29
SE1450816A1 (sv) 2014-07-01
US20140361161A1 (en) 2014-12-11
PL2851933T3 (pl) 2017-04-28
CN104040681B (zh) 2017-04-26
JP2015511055A (ja) 2015-04-13
US9978579B2 (en) 2018-05-22
EP2851933B1 (en) 2016-10-19
US20160336166A1 (en) 2016-11-17
KR101953944B1 (ko) 2019-03-04
EP3428953A1 (en) 2019-01-16
CN104040681A (zh) 2014-09-10
KR20140137342A (ko) 2014-12-02
SE1451107A3 (en) 2015-01-20
EP2823504A4 (en) 2015-10-07
EP2823504B1 (en) 2018-08-01
DE14185601T1 (de) 2015-05-21
EP2823504A1 (en) 2015-01-14
WO2013133739A9 (en) 2013-10-31
DE12870629T1 (de) 2015-03-19
SE542643C2 (en) 2020-06-23
SE538941C2 (en) 2017-02-28
DK2823504T3 (en) 2018-11-05
SE2050142A1 (en) 2020-02-10
SE547590C2 (en) 2025-10-21
WO2013133739A1 (en) 2013-09-12
US20180269054A1 (en) 2018-09-20
PL2823504T3 (pl) 2019-03-29
JP6301269B2 (ja) 2018-03-28
EP3428953C0 (en) 2025-09-17
US9437408B2 (en) 2016-09-06
SE1450816A3 (en) 2015-01-20
EP3428953B1 (en) 2025-09-17

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