SE410743B - Forfarande for beleggning av oorganiska substrat med skikt av karbider, nitrider och/eller karbonitrider - Google Patents

Forfarande for beleggning av oorganiska substrat med skikt av karbider, nitrider och/eller karbonitrider

Info

Publication number
SE410743B
SE410743B SE7501315A SE7501315A SE410743B SE 410743 B SE410743 B SE 410743B SE 7501315 A SE7501315 A SE 7501315A SE 7501315 A SE7501315 A SE 7501315A SE 410743 B SE410743 B SE 410743B
Authority
SE
Sweden
Prior art keywords
carbonitrides
carbides
nitrides
layers
procedure
Prior art date
Application number
SE7501315A
Other languages
English (en)
Swedish (sv)
Other versions
SE7501315L (no
Inventor
D Bitzer
D Lohmann
Original Assignee
Ciba Geigy Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH170374A external-priority patent/CH589723A5/de
Priority claimed from CH170474A external-priority patent/CH593345A5/de
Application filed by Ciba Geigy Ag filed Critical Ciba Geigy Ag
Publication of SE7501315L publication Critical patent/SE7501315L/
Publication of SE410743B publication Critical patent/SE410743B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Carbon And Carbon Compounds (AREA)
SE7501315A 1974-02-07 1975-02-06 Forfarande for beleggning av oorganiska substrat med skikt av karbider, nitrider och/eller karbonitrider SE410743B (sv)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH170374A CH589723A5 (en) 1974-02-07 1974-02-07 Depositing carbide, nitride and carbonitride coatings - on inorg. substrates by using cyano cpds. as sources of carbon and nitrogen
CH170474A CH593345A5 (en) 1974-02-07 1974-02-07 Depositing carbide, nitride and carbonitride coatings - on inorg. substrates by using cyano cpds. as sources of carbon and nitrogen

Publications (2)

Publication Number Publication Date
SE7501315L SE7501315L (no) 1975-08-08
SE410743B true SE410743B (sv) 1979-10-29

Family

ID=25688425

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7501315A SE410743B (sv) 1974-02-07 1975-02-06 Forfarande for beleggning av oorganiska substrat med skikt av karbider, nitrider och/eller karbonitrider

Country Status (6)

Country Link
JP (1) JPS5753308B2 (no)
AT (1) AT332697B (no)
CA (1) CA1047899A (no)
FR (1) FR2273080B1 (no)
GB (1) GB1489102A (no)
SE (1) SE410743B (no)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50124904A (no) * 1974-03-20 1975-10-01
GB2227755B (en) * 1988-12-08 1993-03-10 Univ Hull A process for improving the wear and corrosion resistance of metallic components
TWI343953B (en) * 2004-05-17 2011-06-21 Ring traveler and method for producing it
DE102005049393B4 (de) * 2005-10-15 2019-08-08 Kennametal Widia Produktions Gmbh & Co. Kg Verfahren zur Herstellung eines beschichteten Substratkörpers, Substratkörper mit einer Beschichtung und Verwendung des beschichteten Substratkörpers
JP2011166160A (ja) * 2011-03-22 2011-08-25 Tokyo Electron Ltd 積層膜の形成方法
CN113166933A (zh) 2018-09-28 2021-07-23 康宁股份有限公司 用于在金属基材上沉积无机颗粒的低温方法及由其生产的制品
CN109243654B (zh) * 2018-10-10 2022-10-18 镇江华核装备有限公司 一种核泄漏应急用屏蔽服的制备工艺

Also Published As

Publication number Publication date
JPS50117809A (no) 1975-09-16
AT332697B (de) 1976-10-11
DE2505009B2 (de) 1977-06-30
FR2273080B1 (no) 1977-09-16
GB1489102A (en) 1977-10-19
FR2273080A1 (no) 1975-12-26
CA1047899A (en) 1979-02-06
SE7501315L (no) 1975-08-08
DE2505009A1 (de) 1975-08-14
JPS5753308B2 (no) 1982-11-12
ATA92375A (de) 1976-01-15

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