SE348950B - - Google Patents
Info
- Publication number
- SE348950B SE348950B SE11350/69A SE1135069A SE348950B SE 348950 B SE348950 B SE 348950B SE 11350/69 A SE11350/69 A SE 11350/69A SE 1135069 A SE1135069 A SE 1135069A SE 348950 B SE348950 B SE 348950B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/34—Deposited materials, e.g. layers
- H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
- H10P14/3404—Deposited materials, e.g. layers characterised by the chemical composition being Group IVA materials
- H10P14/3411—Silicon, silicon germanium or germanium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
- H10P14/2901—Materials
- H10P14/2902—Materials being Group IVA materials
- H10P14/2905—Silicon, silicon germanium or germanium
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/36—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by treatments done before the formation of the materials
- H10P14/3602—In-situ cleaning
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19681769968 DE1769968C3 (de) | 1968-08-14 | Verfahren zum epitaktischen Abscheiden von anorganischem Material auf der gereinigten Oberfläche eines SiIiciumkristalls |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE348950B true SE348950B (enExample) | 1972-09-18 |
Family
ID=5700349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE11350/69A SE348950B (enExample) | 1968-08-14 | 1969-08-14 |
Country Status (7)
| Country | Link |
|---|---|
| AT (1) | AT286935B (enExample) |
| CA (1) | CA918549A (enExample) |
| CH (1) | CH516649A (enExample) |
| FR (1) | FR2016937A1 (enExample) |
| GB (1) | GB1243890A (enExample) |
| NL (1) | NL6911771A (enExample) |
| SE (1) | SE348950B (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3976512A (en) * | 1975-09-22 | 1976-08-24 | Signetics Corporation | Method for reducing the defect density of an integrated circuit utilizing ion implantation |
| GB2179930A (en) * | 1985-09-06 | 1987-03-18 | Philips Electronic Associated | A method of depositing an epitaxial silicon layer |
-
1969
- 1969-08-01 NL NL6911771A patent/NL6911771A/xx unknown
- 1969-08-05 FR FR6926838A patent/FR2016937A1/fr not_active Withdrawn
- 1969-08-12 AT AT777969A patent/AT286935B/de not_active IP Right Cessation
- 1969-08-12 CH CH1222069A patent/CH516649A/de not_active IP Right Cessation
- 1969-08-13 GB GB40381/69A patent/GB1243890A/en not_active Expired
- 1969-08-14 SE SE11350/69A patent/SE348950B/xx unknown
- 1969-08-14 CA CA059501A patent/CA918549A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL6911771A (enExample) | 1970-02-17 |
| DE1769968A1 (de) | 1971-11-04 |
| CH516649A (de) | 1971-12-15 |
| CA918549A (en) | 1973-01-09 |
| AT286935B (de) | 1970-12-28 |
| FR2016937A1 (enExample) | 1970-05-15 |
| GB1243890A (en) | 1971-08-25 |
| DE1769968B2 (de) | 1976-06-10 |