Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02518—Deposited layers
  • H01L21/02521—Materials
  • H01L21/02524—Group 14 semiconducting materials
  • H01L21/02532—Silicon, silicon germanium, germanium
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02367—Substrates
  • H01L21/0237—Materials
  • H01L21/02373—Group 14 semiconducting materials
  • H01L21/02381—Silicon, silicon germanium, germanium
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02656—Special treatments
  • H01L21/02658—Pretreatments
  • H01L21/02661—In-situ cleaning

Landscapes

• Engineering & Computer Science (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Physics & Mathematics (AREA)
• Power Engineering (AREA)
• Chemical & Material Sciences (AREA)
• Materials Engineering (AREA)
• Chemical Vapour Deposition (AREA)
• Cleaning Or Drying Semiconductors (AREA)
• Formation Of Insulating Films (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=5700349

Family Applications (1)

Country Status (7)

Families Citing this family (2)

• 1969
  • 1969-08-01 NL NL6911771A patent/NL6911771A/xx unknown
  • 1969-08-05 FR FR6926838A patent/FR2016937A1/fr not_active Withdrawn
  • 1969-08-12 AT AT777969A patent/AT286935B/de not_active IP Right Cessation
  • 1969-08-12 CH CH1222069A patent/CH516649A/de not_active IP Right Cessation
  • 1969-08-13 GB GB4038169A patent/GB1243890A/en not_active Expired
  • 1969-08-14 SE SE1135069A patent/SE348950B/xx unknown
  • 1969-08-14 CA CA059501A patent/CA918549A/en not_active Expired

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