AT310252B - Verfahren zum Herstellen eines Magnesium-Aluminium-Spinellsubstrates zum epitaktischen Abscheiden von Halbleitermaterialschichten - Google Patents
Verfahren zum Herstellen eines Magnesium-Aluminium-Spinellsubstrates zum epitaktischen Abscheiden von HalbleitermaterialschichtenInfo
- Publication number
- AT310252B AT310252B AT578069A AT578069A AT310252B AT 310252 B AT310252 B AT 310252B AT 578069 A AT578069 A AT 578069A AT 578069 A AT578069 A AT 578069A AT 310252 B AT310252 B AT 310252B
- Authority
- AT
- Austria
- Prior art keywords
- magnesium
- production
- semiconductor material
- material layers
- epitaxial deposition
- Prior art date
Links
- SNAAJJQQZSMGQD-UHFFFAOYSA-N aluminum magnesium Chemical compound [Mg].[Al] SNAAJJQQZSMGQD-UHFFFAOYSA-N 0.000 title 1
- 230000008021 deposition Effects 0.000 title 1
- 239000000463 material Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 229910052596 spinel Inorganic materials 0.000 title 1
- 239000011029 spinel Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/36—Single-crystal growth by pulling from a melt, e.g. Czochralski method characterised by the seed, e.g. its crystallographic orientation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
- C30B29/26—Complex oxides with formula BMe2O4, wherein B is Mg, Ni, Co, Al, Zn, or Cd and Me is Fe, Ga, Sc, Cr, Co, or Al
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/967—Semiconductor on specified insulator
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19681769635 DE1769635A1 (de) | 1968-06-20 | 1968-06-20 | Duenne Halbleiter-Aufwachsschicht auf tonerdearmen,tiegelgezogenem Magnesium-Aluminium-Spinell-Einkristall,sowie Verfahren zur Herstellung der Schicht und zur Herstellung der Einkristalle |
Publications (1)
Publication Number | Publication Date |
---|---|
AT310252B true AT310252B (de) | 1973-09-25 |
Family
ID=5700215
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT578069A AT310252B (de) | 1968-06-20 | 1969-06-18 | Verfahren zum Herstellen eines Magnesium-Aluminium-Spinellsubstrates zum epitaktischen Abscheiden von Halbleitermaterialschichten |
Country Status (9)
Country | Link |
---|---|
US (1) | US3625868A (de) |
JP (1) | JPS499907B1 (de) |
AT (1) | AT310252B (de) |
CH (1) | CH525026A (de) |
DE (1) | DE1769635A1 (de) |
FR (1) | FR1599437A (de) |
GB (1) | GB1229508A (de) |
NL (1) | NL6909488A (de) |
SE (1) | SE361418B (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3883313A (en) * | 1972-12-14 | 1975-05-13 | Rca Corp | Modified czochralski-grown magnesium aluminate spinel and method of making same |
US3917462A (en) * | 1974-07-26 | 1975-11-04 | Union Carbide Corp | Method of producing sodium beta-alumina single crystals |
DE3840609A1 (de) * | 1988-12-02 | 1990-06-07 | Maier Kg Andreas | Laserskalpell |
US6839362B2 (en) * | 2001-05-22 | 2005-01-04 | Saint-Gobain Ceramics & Plastics, Inc. | Cobalt-doped saturable absorber Q-switches and laser systems |
US6844084B2 (en) * | 2002-04-03 | 2005-01-18 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel substrate and heteroepitaxial growth of III-V materials thereon |
US7045223B2 (en) * | 2003-09-23 | 2006-05-16 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel articles and methods for forming same |
US20050061230A1 (en) * | 2003-09-23 | 2005-03-24 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel articles and methods for forming same |
US7326477B2 (en) * | 2003-09-23 | 2008-02-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel boules, wafers, and methods for fabricating same |
US7919815B1 (en) | 2005-02-24 | 2011-04-05 | Saint-Gobain Ceramics & Plastics, Inc. | Spinel wafers and methods of preparation |
CN109668862B (zh) * | 2017-10-17 | 2021-02-05 | 中国科学院沈阳自动化研究所 | 一种基于激光诱导击穿光谱的铝电解质分子比检测方法 |
-
1968
- 1968-06-20 DE DE19681769635 patent/DE1769635A1/de active Pending
- 1968-12-24 FR FR1599437D patent/FR1599437A/fr not_active Expired
-
1969
- 1969-06-16 US US833342A patent/US3625868A/en not_active Expired - Lifetime
- 1969-06-18 CH CH927969A patent/CH525026A/de not_active IP Right Cessation
- 1969-06-18 AT AT578069A patent/AT310252B/de not_active IP Right Cessation
- 1969-06-19 SE SE08824/69A patent/SE361418B/xx unknown
- 1969-06-19 GB GB1229508D patent/GB1229508A/en not_active Expired
- 1969-06-20 JP JP44048384A patent/JPS499907B1/ja active Pending
- 1969-06-20 NL NL6909488A patent/NL6909488A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
CH525026A (de) | 1972-07-15 |
SE361418B (de) | 1973-11-05 |
FR1599437A (de) | 1970-07-15 |
DE1769635A1 (de) | 1972-03-30 |
US3625868A (en) | 1971-12-07 |
NL6909488A (de) | 1969-12-23 |
GB1229508A (de) | 1971-04-21 |
JPS499907B1 (de) | 1974-03-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |