AT270749B - Verfahren zum Abscheiden von hochreinem kristallinem Material - Google Patents

Verfahren zum Abscheiden von hochreinem kristallinem Material

Info

Publication number
AT270749B
AT270749B AT507967A AT507967A AT270749B AT 270749 B AT270749 B AT 270749B AT 507967 A AT507967 A AT 507967A AT 507967 A AT507967 A AT 507967A AT 270749 B AT270749 B AT 270749B
Authority
AT
Austria
Prior art keywords
deposition
crystalline material
highly pure
pure crystalline
highly
Prior art date
Application number
AT507967A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of AT270749B publication Critical patent/AT270749B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B41/00—Obtaining germanium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
AT507967A 1966-06-02 1967-05-31 Verfahren zum Abscheiden von hochreinem kristallinem Material AT270749B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0104115 1966-06-02

Publications (1)

Publication Number Publication Date
AT270749B true AT270749B (de) 1969-05-12

Family

ID=7525634

Family Applications (1)

Application Number Title Priority Date Filing Date
AT507967A AT270749B (de) 1966-06-02 1967-05-31 Verfahren zum Abscheiden von hochreinem kristallinem Material

Country Status (7)

Country Link
US (1) US3489621A (de)
AT (1) AT270749B (de)
CH (1) CH487262A (de)
DE (1) DE1519892A1 (de)
GB (1) GB1128556A (de)
NL (1) NL6707560A (de)
SE (1) SE326431B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3554162A (en) * 1969-01-22 1971-01-12 Motorola Inc Diffusion tube
US3765960A (en) * 1970-11-02 1973-10-16 Ibm Method for minimizing autodoping in epitaxial deposition
SE393967B (sv) * 1974-11-29 1977-05-31 Sateko Oy Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket
US4957780A (en) * 1987-01-20 1990-09-18 Gte Laboratories Incorporated Internal reactor method for chemical vapor deposition
GB2213836B (en) * 1987-12-18 1992-08-26 Gen Electric Co Plc Vacuum deposition process
WO1998000215A1 (fr) * 1996-07-02 1998-01-08 Jury Viktorovich Klevkov Procede permettant d'eliminer les impuretes de substances simples ou complexes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3145125A (en) * 1961-07-10 1964-08-18 Ibm Method of synthesizing iii-v compound semiconductor epitaxial layers having a specified conductivity type without impurity additions

Also Published As

Publication number Publication date
US3489621A (en) 1970-01-13
GB1128556A (en) 1968-09-25
CH487262A (de) 1970-03-15
NL6707560A (de) 1967-12-04
DE1519892A1 (de) 1969-02-20
SE326431B (de) 1970-07-27

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