SE335294B - - Google Patents

Info

Publication number
SE335294B
SE335294B SE840469A SE840469A SE335294B SE 335294 B SE335294 B SE 335294B SE 840469 A SE840469 A SE 840469A SE 840469 A SE840469 A SE 840469A SE 335294 B SE335294 B SE 335294B
Authority
SE
Sweden
Prior art keywords
substrates
source
spindle
frame
spindles
Prior art date
Application number
SE840469A
Other languages
English (en)
Inventor
R Jacobsson
J Martensson
Original Assignee
Aga Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aga Ab filed Critical Aga Ab
Priority to SE840469A priority Critical patent/SE335294B/xx
Priority to GB2834570A priority patent/GB1317052A/en
Priority to DE19702029020 priority patent/DE2029020B2/de
Priority to JP5145770A priority patent/JPS4842352B1/ja
Priority to FR7021878A priority patent/FR2052571A5/fr
Priority to CH901070A priority patent/CH537986A/de
Publication of SE335294B publication Critical patent/SE335294B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
SE840469A 1969-06-13 1969-06-13 SE335294B (enrdf_load_stackoverflow)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE840469A SE335294B (enrdf_load_stackoverflow) 1969-06-13 1969-06-13
GB2834570A GB1317052A (en) 1969-06-13 1970-06-11 Apparatus for vacuum deposition
DE19702029020 DE2029020B2 (de) 1969-06-13 1970-06-12 Vakuum-bedampfungsvorrichtung
JP5145770A JPS4842352B1 (enrdf_load_stackoverflow) 1969-06-13 1970-06-13
FR7021878A FR2052571A5 (enrdf_load_stackoverflow) 1969-06-13 1970-06-15
CH901070A CH537986A (de) 1969-06-13 1970-06-15 Vorrichtung zum Vakuumaufdampfen und Verwendung derselben

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE840469A SE335294B (enrdf_load_stackoverflow) 1969-06-13 1969-06-13

Publications (1)

Publication Number Publication Date
SE335294B true SE335294B (enrdf_load_stackoverflow) 1971-05-17

Family

ID=20273982

Family Applications (1)

Application Number Title Priority Date Filing Date
SE840469A SE335294B (enrdf_load_stackoverflow) 1969-06-13 1969-06-13

Country Status (6)

Country Link
JP (1) JPS4842352B1 (enrdf_load_stackoverflow)
CH (1) CH537986A (enrdf_load_stackoverflow)
DE (1) DE2029020B2 (enrdf_load_stackoverflow)
FR (1) FR2052571A5 (enrdf_load_stackoverflow)
GB (1) GB1317052A (enrdf_load_stackoverflow)
SE (1) SE335294B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
DE102010032591A1 (de) 2010-07-23 2012-01-26 Leybold Optics Gmbh Vorrichtung und Verfahren zur Vakuumbeschichtung

Also Published As

Publication number Publication date
CH537986A (de) 1973-06-15
JPS4842352B1 (enrdf_load_stackoverflow) 1973-12-12
FR2052571A5 (enrdf_load_stackoverflow) 1971-04-09
DE2029020A1 (de) 1971-01-07
GB1317052A (en) 1973-05-16
DE2029020B2 (de) 1973-03-29

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