GB1317052A - Apparatus for vacuum deposition - Google Patents

Apparatus for vacuum deposition

Info

Publication number
GB1317052A
GB1317052A GB2834570A GB2834570A GB1317052A GB 1317052 A GB1317052 A GB 1317052A GB 2834570 A GB2834570 A GB 2834570A GB 2834570 A GB2834570 A GB 2834570A GB 1317052 A GB1317052 A GB 1317052A
Authority
GB
United Kingdom
Prior art keywords
substrates
source
spindle
frame
spindles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2834570A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGA AB
Original Assignee
AGA AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AGA AB filed Critical AGA AB
Publication of GB1317052A publication Critical patent/GB1317052A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Abstract

1317052 Vacuum vapour coating apparatus AGA AB 11 June 1970 28345/70 Heading C7F Vacuum vapour deposition apparatus for simultaneously coating a series of substrates in which the substrates are mounted on holders 4 which rotate about spindle 5 which is non coincident with line 13 through the substrates and source 3 and in which the spindle bearing 6 rotates about an axis through the source 3 which does not coincide with line 13. The bearings 6 are mounted on frame 8 which is rotated in a horizontal plane by electric motor 11 and drive wheel 12. The periphery of wheels 7 on spindles 5 are coupled to stationary frame 9 so that rotation of frame 8 effects rotation of holders 4 on spindles 5. The substrates are attached to the holder surfaces parallel to the axis of spindle 5 and the source may be located in a perforated rotating tube 19.
GB2834570A 1969-06-13 1970-06-11 Apparatus for vacuum deposition Expired GB1317052A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE840469A SE335294B (en) 1969-06-13 1969-06-13

Publications (1)

Publication Number Publication Date
GB1317052A true GB1317052A (en) 1973-05-16

Family

ID=20273982

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2834570A Expired GB1317052A (en) 1969-06-13 1970-06-11 Apparatus for vacuum deposition

Country Status (6)

Country Link
JP (1) JPS4842352B1 (en)
CH (1) CH537986A (en)
DE (1) DE2029020B2 (en)
FR (1) FR2052571A5 (en)
GB (1) GB1317052A (en)
SE (1) SE335294B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10767261B2 (en) 2010-07-23 2020-09-08 Leybold Optics Gmbh Device and method for vacuum coating

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10767261B2 (en) 2010-07-23 2020-09-08 Leybold Optics Gmbh Device and method for vacuum coating

Also Published As

Publication number Publication date
JPS4842352B1 (en) 1973-12-12
DE2029020B2 (en) 1973-03-29
FR2052571A5 (en) 1971-04-09
DE2029020A1 (en) 1971-01-07
CH537986A (en) 1973-06-15
SE335294B (en) 1971-05-17

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Legal Events

Date Code Title Description
PS Patent sealed
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee