SE329427B - - Google Patents

Info

Publication number
SE329427B
SE329427B SE03132/65A SE313265A SE329427B SE 329427 B SE329427 B SE 329427B SE 03132/65 A SE03132/65 A SE 03132/65A SE 313265 A SE313265 A SE 313265A SE 329427 B SE329427 B SE 329427B
Authority
SE
Sweden
Prior art keywords
ring
tantalide
sputtering
aluminium
resistor
Prior art date
Application number
SE03132/65A
Other languages
English (en)
Inventor
R Duckworth
Original Assignee
Ultra Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Electronics Ltd filed Critical Ultra Electronics Ltd
Publication of SE329427B publication Critical patent/SE329427B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques by sputtering
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G7/00—Botany in general
    • A01G7/02—Treatment of plants with carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/50—Carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D99/00—Subject matter not provided for in other groups of this subclass
    • F23D99/002—Burners specially adapted for specific applications
    • F23D99/004—Burners specially adapted for specific applications for use in particular heating operations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques by vapour deposition
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2206/00—Burners for specific applications
    • F23D2206/0094—Gas burners adapted for use in illumination and heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Environmental Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Combustion & Propulsion (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Botany (AREA)
  • Ecology (AREA)
  • Forests & Forestry (AREA)
  • General Engineering & Computer Science (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Conductive Materials (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Surface Treatment Of Glass (AREA)
SE03132/65A 1964-03-11 1965-03-10 SE329427B (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB10180/64A GB1067831A (en) 1964-03-11 1964-03-11 Improvements in thin film circuits

Publications (1)

Publication Number Publication Date
SE329427B true SE329427B (enExample) 1970-10-12

Family

ID=9963030

Family Applications (1)

Application Number Title Priority Date Filing Date
SE03132/65A SE329427B (enExample) 1964-03-11 1965-03-10

Country Status (8)

Country Link
JP (1) JPS517825B1 (enExample)
BE (1) BE682874A (enExample)
CH (1) CH438441A (enExample)
DE (1) DE1590786B1 (enExample)
FR (1) FR1428353A (enExample)
GB (1) GB1067831A (enExample)
NL (1) NL6502933A (enExample)
SE (1) SE329427B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3627577A (en) * 1968-05-22 1971-12-14 Bell Telephone Labor Inc Thin film resistors
US3784951A (en) * 1968-05-22 1974-01-08 Bell Telephone Labor Inc Thin film resistors
US3641402A (en) * 1969-12-30 1972-02-08 Ibm Semiconductor device with beta tantalum-gold composite conductor metallurgy
US3737343A (en) * 1971-04-19 1973-06-05 Bell Telephone Labor Inc Technique for the preparation of ion implanted tantalum-aluminum alloy
BE793097A (fr) * 1971-12-30 1973-04-16 Western Electric Co Procede pour ajuster le coefficient de resistance en fonction de la temperature d'alliages tantale-aluminium
US4382977A (en) * 1982-01-11 1983-05-10 The United States Of America As Represented By The Secretary Of The Army Method of producing smooth metallic layers on a substrate
DE3480243D1 (en) * 1983-03-31 1989-11-23 Matsushita Electric Industrial Co Ltd Method of manufacturing thin-film integrated devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1119357B (de) * 1956-02-27 1961-12-14 Union Carbide Corp Verfahren zur Herstellung einer elektrisch leitenden, lichtdurchlaessigen Schicht auf einem beliebigen Traegermaterial
NL126129C (enExample) * 1959-06-30

Also Published As

Publication number Publication date
NL6502933A (enExample) 1965-09-13
GB1067831A (en) 1967-05-03
DE1590786B1 (de) 1971-01-07
FR1428353A (fr) 1966-02-11
CH438441A (fr) 1967-06-30
JPS517825B1 (enExample) 1976-03-11
BE682874A (enExample) 1966-12-01

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