CA919035A - Chemical vapor deposition coatings on titanium - Google Patents

Chemical vapor deposition coatings on titanium

Info

Publication number
CA919035A
CA919035A CA079294A CA79294A CA919035A CA 919035 A CA919035 A CA 919035A CA 079294 A CA079294 A CA 079294A CA 79294 A CA79294 A CA 79294A CA 919035 A CA919035 A CA 919035A
Authority
CA
Canada
Prior art keywords
titanium
vapor deposition
chemical vapor
deposition coatings
coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA079294A
Inventor
Carl D. Reedy, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of CA919035A publication Critical patent/CA919035A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
CA079294A 1969-05-02 1970-04-06 Chemical vapor deposition coatings on titanium Expired CA919035A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82150669A 1969-05-02 1969-05-02

Publications (1)

Publication Number Publication Date
CA919035A true CA919035A (en) 1973-01-16

Family

ID=25233572

Family Applications (1)

Application Number Title Priority Date Filing Date
CA079294A Expired CA919035A (en) 1969-05-02 1970-04-06 Chemical vapor deposition coatings on titanium

Country Status (8)

Country Link
US (1) US3656995A (en)
JP (1) JPS526695B1 (en)
BE (1) BE749529A (en)
CA (1) CA919035A (en)
DE (1) DE2020697C3 (en)
FR (1) FR2047187A5 (en)
GB (1) GB1307018A (en)
NL (1) NL7006182A (en)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2120031B1 (en) * 1970-12-28 1974-08-30 Sakata Watch Co Ltd
US3771976A (en) * 1971-01-08 1973-11-13 Texas Instruments Inc Metal carbonitride-coated article and method of producing same
US4162338A (en) * 1972-02-04 1979-07-24 Schwarzkopf Development Corporation Coated cemented carbide elements and their manufacture
DE2263210B2 (en) * 1972-02-04 1977-03-17 Metallwerk Plansee AG & Co. KG, Reutte, Tirol (Österreich) WEAR PART MADE OF CARBIDE, ESPECIALLY FOR TOOLS
US4101703A (en) * 1972-02-04 1978-07-18 Schwarzkopf Development Corporation Coated cemented carbide elements
BE795014A (en) * 1972-02-11 1973-05-29 Gen Electric COATED AGGLOMERATED CARBIDE TYPE PRODUCTS
US3874900A (en) * 1973-08-13 1975-04-01 Materials Technology Corp Article coated with titanium carbide and titanium nitride
US3964937A (en) * 1973-08-13 1976-06-22 Materials Technology Corporation Method of making a composite coating
US4196233A (en) * 1974-02-07 1980-04-01 Ciba-Geigy Corporation Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides
CH590339A5 (en) * 1974-02-07 1977-08-15 Ciba Geigy Ag
US4018631A (en) * 1975-06-12 1977-04-19 General Electric Company Coated cemented carbide product
JPS537513A (en) * 1976-07-10 1978-01-24 Mitsubishi Metal Corp Covered hard alloy product
CH632944A5 (en) * 1978-06-22 1982-11-15 Stellram Sa HARD METAL WEAR.
US4239819A (en) * 1978-12-11 1980-12-16 Chemetal Corporation Deposition method and products
US4268582A (en) * 1979-03-02 1981-05-19 General Electric Company Boride coated cemented carbide
US4399168A (en) * 1980-01-21 1983-08-16 Santrade Ltd. Method of preparing coated cemented carbide product
US4409003A (en) * 1982-05-20 1983-10-11 Gte Laboratories Incorporated Carbonitride coated silicon nitride cutting tools
US4409004A (en) * 1982-05-20 1983-10-11 Gte Laboratories Incorporated Carbonitride coated composite silicon nitride cutting tools
US4440547A (en) * 1982-05-20 1984-04-03 Gte Laboratories Incorporated Alumina coated silicon nitride cutting tools
EP0102489B1 (en) * 1982-07-31 1987-02-04 BROWN, BOVERI & CIE Aktiengesellschaft Multifilament superconductor and method of making the same
US4655893A (en) * 1983-02-07 1987-04-07 Battelle Development Corporation Cubic boron nitride preparation utilizing a boron and nitrogen bearing gas
US4803127A (en) * 1983-02-25 1989-02-07 Liburdi Engineering Limited Vapor deposition of metal compound coating utilizing metal sub-halides and coated metal article
US4699082A (en) * 1983-02-25 1987-10-13 Liburdi Engineering Limited Apparatus for chemical vapor deposition
DE3544975C1 (en) * 1985-12-19 1992-09-24 Krupp Gmbh Process for producing a coated molded body
US4732801A (en) * 1986-04-30 1988-03-22 International Business Machines Corporation Graded oxide/nitride via structure and method of fabrication therefor
US4904528A (en) * 1987-12-24 1990-02-27 United Technologies Corporation Coated gas turbine engine compressor components
US4928423A (en) * 1988-07-20 1990-05-29 Yoshikazu Furuta Fishhook and method for producing the same
US5139825A (en) * 1989-11-30 1992-08-18 President And Fellows Of Harvard College Process for chemical vapor deposition of transition metal nitrides
GB9006311D0 (en) * 1990-03-17 1990-05-16 Atomic Energy Authority Uk Surface protection of titanium
US5123972A (en) * 1990-04-30 1992-06-23 Dana Corporation Hardened insert and brake shoe for backstopping clutch
CA2065581C (en) * 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
JPH06101462B2 (en) * 1991-04-30 1994-12-12 インターナショナル・ビジネス・マシーンズ・コーポレイション Method and substrate for bonding fluorocarbon polymer film to substrate
JPH06101463B2 (en) * 1991-04-30 1994-12-12 インターナショナル・ビジネス・マシーンズ・コーポレイション Method and substrate for bonding fluorocarbon polymer film to substrate
FR2682125A1 (en) * 1991-10-07 1993-04-09 Nitruvid PROCESSING PROCESS FOR DEPOSITING A CARBON LAYER IN A STEAM PHASE ON THE SURFACE OF A METAL PART AND A PART THUS OBTAINED.
US5518820A (en) * 1992-06-16 1996-05-21 General Electric Company Case-hardened titanium aluminide bearing
DE69431032T2 (en) * 1993-05-31 2003-01-30 Sumitomo Electric Industries, Ltd. COATED CUTTING TOOL AND METHOD FOR THE PRODUCTION THEREOF
US5975912A (en) * 1994-06-03 1999-11-02 Materials Research Corporation Low temperature plasma-enhanced formation of integrated circuits
JPH09109126A (en) * 1995-10-17 1997-04-28 Ngk Insulators Ltd Recycling method for honeycomb molding mouth piece
US6432479B2 (en) * 1997-12-02 2002-08-13 Applied Materials, Inc. Method for in-situ, post deposition surface passivation of a chemical vapor deposited film
US6432022B1 (en) 1998-05-15 2002-08-13 Alpha Getriebebau Gmbh Low-play planetary gear mechanism
EP1090417A1 (en) 1999-04-20 2001-04-11 Tokyo Electron Limited Method for single chamber processing of pecvd-ti and cvd-tin films in ic manufacturing
JP4626914B2 (en) 2001-01-29 2011-02-09 日本碍子株式会社 Manufacturing method of die for forming honeycomb and die
ES2259122T3 (en) 2002-10-08 2006-09-16 Atras Auto Co., Ltd. FOLDING BICYCLE.
US8608592B2 (en) * 2007-05-16 2013-12-17 Taylor Made Golf Company, Inc. Coated golf club head/component
JP5496205B2 (en) * 2008-08-28 2014-05-21 コーニング インコーポレイテッド Abrasion resistant coating for tool dies
US10821718B2 (en) 2017-06-23 2020-11-03 General Electric Company Selective powder processing during powder bed additive manufacturing
US10821519B2 (en) 2017-06-23 2020-11-03 General Electric Company Laser shock peening within an additive manufacturing process
US11851763B2 (en) 2017-06-23 2023-12-26 General Electric Company Chemical vapor deposition during additive manufacturing
US11420259B2 (en) 2019-11-06 2022-08-23 General Electric Company Mated components and method and system therefore

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2715576A (en) * 1954-04-21 1955-08-16 Crucible Steel Co America Age hardening alloy steel of high hardenability and toughness
US2972556A (en) * 1958-12-09 1961-02-21 Union Carbide Corp Composite coated carbonaceous article and process of making the same
GB1106291A (en) * 1963-11-25 1968-03-13 Nat Res Dev Boron-containing materials
US3437511A (en) * 1966-04-07 1969-04-08 Us Air Force Metal surfaced with boron and coating of silicon,silicon carbide or titanium nitride

Also Published As

Publication number Publication date
US3656995A (en) 1972-04-18
BE749529A (en) 1970-10-01
GB1307018A (en) 1973-02-14
FR2047187A5 (en) 1971-03-12
DE2020697A1 (en) 1970-11-19
JPS526695B1 (en) 1977-02-24
NL7006182A (en) 1970-11-04
DE2020697C3 (en) 1979-12-06
DE2020697B2 (en) 1979-04-19

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