CA813788A - Vapor deposition process and product - Google Patents

Vapor deposition process and product

Info

Publication number
CA813788A
CA813788A CA813788A CA813788DA CA813788A CA 813788 A CA813788 A CA 813788A CA 813788 A CA813788 A CA 813788A CA 813788D A CA813788D A CA 813788DA CA 813788 A CA813788 A CA 813788A
Authority
CA
Canada
Prior art keywords
product
vapor deposition
deposition process
vapor
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA813788A
Inventor
William A. Santini, Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Publication date
Application granted granted Critical
Publication of CA813788A publication Critical patent/CA813788A/en
Expired legal-status Critical Current

Links

CA813788A Vapor deposition process and product Expired CA813788A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA813788T

Publications (1)

Publication Number Publication Date
CA813788A true CA813788A (en) 1969-05-27

Family

ID=36286294

Family Applications (1)

Application Number Title Priority Date Filing Date
CA813788A Expired CA813788A (en) Vapor deposition process and product

Country Status (1)

Country Link
CA (1) CA813788A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4900525A (en) * 1986-08-25 1990-02-13 Gte Laboratories Incorporated Chemical vapor deposition reactor for producing metal carbide or nitride whiskers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4900525A (en) * 1986-08-25 1990-02-13 Gte Laboratories Incorporated Chemical vapor deposition reactor for producing metal carbide or nitride whiskers

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