SE1450911A1 - Refractory coatings for cutting tools - Google Patents

Refractory coatings for cutting tools Download PDF

Info

Publication number
SE1450911A1
SE1450911A1 SE1450911A SE1450911A SE1450911A1 SE 1450911 A1 SE1450911 A1 SE 1450911A1 SE 1450911 A SE1450911 A SE 1450911A SE 1450911 A SE1450911 A SE 1450911A SE 1450911 A1 SE1450911 A1 SE 1450911A1
Authority
SE
Sweden
Prior art keywords
sublayer
composite
alumina
cutting tool
coated cutting
Prior art date
Application number
SE1450911A
Other languages
English (en)
Inventor
Volkmar Sottke
Karl Heinz Wendt
Hartmut Westpahl
Peter Leicht
Yixiong Liu
Original Assignee
Kennametal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kennametal Inc filed Critical Kennametal Inc
Publication of SE1450911A1 publication Critical patent/SE1450911A1/sv

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148Composition of the cutting inserts
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/308Oxynitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/405Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582Rigid and flat substrates, e.g. plates or discs
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2222/00Materials of tools or workpieces composed of metals, alloys or metal matrices
    • B23B2222/16Cermet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2222/00Materials of tools or workpieces composed of metals, alloys or metal matrices
    • B23B2222/28Details of hard metal, i.e. cemented carbide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2222/00Materials of tools or workpieces composed of metals, alloys or metal matrices
    • B23B2222/88Titanium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2224/00Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/32Titanium carbide nitride (TiCN)
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2224/00Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/36Titanium nitride
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2226/00Materials of tools or workpieces not comprising a metal
    • B23B2226/18Ceramic
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drilling Tools (AREA)

Description

15 20 25 30 comprising a plurality of sublayer groups, a sublayer group comprising an aluminum oxynitride sublayer or composite aluminum oxynitride sublayer and an alumina sublayer or composite alumina sublayer. In some embodiments, one or more inner coating layers are deposited over the substrate prior to deposition of the refractory layer. Further, one or more outer layers can be deposited over the refractory layer.
These and other embodiments are described filrther in the detailed description which follows.
BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 illustrates a cutting tool substrate according to one embodiment described herein.
Figure 2 illustrates a schematic of a coated cutting tool according to one embodiment described herein.
Figure 3 illustrates a schematic of a coated cutting tool according to one embodiment described herein.
Figure 4 illustrates a schematic of a coated cutting tool according to one embodiment described herein.
Figure 5 is a cross-sectional scanning electron microscopy (SEM) image of a coated cutting insert according to one embodiment described herein.
Figure 6 is a SEM image of a refractory layer surface of a coating according to one embodiment described herein.
Figure 7(a) is a photograph of a cutting insert having a coating architecture described herein, the cutting insert having been subjected to milling testing as set forth in Example 3.
Figures 7(b)-(c) are photographs of comparative cutting inserts having been subjected to milling testing as set forth in Example 3.
DETAILED DESCRIPTION Embodiments described herein can be understood more readily by reference to the following detailed description and examples and their previous and following descriptions. 2 10 15 20 25 Elements, apparatus and methods described herein, however, are not limited to the specific embodiments presented in the detailed description and examples. It should be recognized that these embodiments are merely illustrative of the principles of the present invention.
Numerous modifications and adaptations will be readily apparent to those of skill in the art without departing from the spirit and scope of the invention.
I. Coated Cutting Tools In one aspect, cutting tools are described having coatings adhered thereto Which, in some embodiments, demonstrate desirable wear resistance and increased cutting lifetimes.
A coated cutting tool described herein comprises a substrate and a coating adhered to the substrate, the coating including a refractory layer comprising plurality of sublayer groups, a sublayer group comprising an aluminum oxynitride (AlON) sublayer or a composite AlON sublayer and an a1umina(A12O3) sublayer or composite alumina sublayer. The coating adhered to the cutting tool substrate, in some embodiments, further comprises one or more inner layers between the refractory layer and the substrate and/ or one or more outer layers deposited over the refractory layer.
Tuming now to specific components, coated cutting tools described herein comprise a substrate. A coated cutting tool can comprise any substrate not inconsistent with the objectives of the present invention. A substrate, in some embodiments, is an end mill, drill or indexable cutting insert. Indexable cutting inserts can have any desired ANSI standard geometry for milling or turning applications. Substrates of coated cutting tools described herein can be formed of cemented carbide, carbide, ceramic, cerrnet or steel. A cemented carbide substrate, in some embodiments, comprises tungsten carbide (WC). WC can be present in a cutting tool substrate in an amount of at least about 80 weight percent or in an amount of at least about 85 weight percent. Additionally, metallic binder of cemented carbide can comprise cobalt or cobalt alloy. Cobalt, for example, can be present in a cemented carbide substrate in an amount ranging from 3 weight percent to 15 weight percent. In some embodiments, cobalt is present in a cemented carbide substrate in an amount ranging from 5-12 weight percent or from 6-10 weight percent. Further, a 10 15 20 25 cemented carbide substrate may exhibit a zone of binder enrichment beginning at and extending inwardly from the surface of the substrate.
Cemented carbide cutting tool substrates can also comprise one or more additives such as, for example, one or more of the following elements and/or their compounds: titanium, niobium, Vanadium, tantalum, chromium, zirconium and/ or hafnium. ln some embodiments, titanium, niobium, Vanadium, tantalum, chromium, zirconium and/ or hafnium form solid solution carbides With WC of the substrate. In such embodiments, the substrate can comprise one or more solid solution carbides in an amount ranging from 0.1-5 Weight percent. Additionally, a cemented carbide substrate can comprise nitro gen.
A cutting tool substrate can comprise one or more cutting edges formed at the juncture of a rake face and flank face(s) of the substrate. Figure 1 illustrates a cutting tool substrate according to one embodiment described herein. As illustrated in Figure 1, the substrate (10) has cutting edges (12) formed at junctions of the substrate rake face (14) and flank faces (16). The substrate (10) also comprises an aperture (18) for securing the substrate (10) to a tool holder.
As described herein, a coating adhered to the substrate comprises a refractory layer including a plurality of sublayer groups, a sublayer group comprising an AlON sublayer or composite AlON sublayer and an alumina sublayer or composite alumina sublayer.
Sublayer groups of the refractory layer can be adj acent to another or spaced apart from one another by intervening layer(s) in the refractory layer. Further, any desired number of sublayer groups can form the refractory layer. In some embodiments, for example, the refractory layer comprises at least four sublayer groups.
Individual sublayer groups can demonstrate various constructions. In some embodiments, at least one sublayer group of the refractory layer can have a construction selected from Table I.
Table I ~ Sublayer Group Constructions of Refractory Layer Composite AlON sublayer/Composite Al2O3 sublayer Composite AlON sublayer/AlzOg sublayer AlON sublayer/ Composite AlzOg sublayer AlON sublayer/ A120; sublayer 10 15 20 25 30 Further, sublayer groups forrning a refractory layer described herein can have the same or different constructions. In some embodiments, for example, sublayer groups forrning the refractory layer have a single construction selected from Table I, such as composite AlON sublayer/composite A12O3 sublayer. Altematively, sublayer groups forming the refractory layer can have differing constructions selected from Table I. Any combination of sublayer group constructions derived from Table I are contemplated. For example, a first sublayer group of the refractory layer can comprise a composite AlON sublayer and a composite alumina sublayer and a second sublayer group comprising a composite AlON sublayer and an alumina sublayer.
Tuming now to specific sublayers, an AlON sublayer can be polycrystalline demonstrating hexagonal crystalline structure, cubic crystalline structure of a mixture of hexagonal and cubic crystalline structures. Altematively, the AlON sublayer is amorphous.
Further, the AlON sublayer can display a mixture of crystalline and amorphous Structures, Wherein the crystalline structures are hexagonal, cubic or a combination thereof. The AlON sublayer can also demonstrate a fine grain structure With grains having sizes in the range of 10 nm to 2 um.
Aluminum, nitrogen and oxygen contents of an AlON sublayer can be varied according to the CVD parameters selected. Aluminum of an AlON sublayer, for example, can range from 20 to 50 atomic%. In some embodiments, aluminum of the AlON is in the range of 25 to 40 atomic% or 32 to 38 atomic%. Nitrogen of an AlON sublayer can range from 40 to 70 atomic%. In some embodiments, nitrogen of the AlON is in the range of 55 to 70 atomic% or 63 to 67 atomic percent. Further, oxygen of an AlON sublayer can range from 1 to 20 atomic%. In some embodiments, oxygen of the AlON is in the range of 2 to 15 atomic% or 4 to 6 atomic%.
Moreover, a composite AlON sublayer comprises an AlON phase and a metal oxide phase including one or more oxides of metallic elements of Group IVB of the Periodic Table. The AlON phase can be present in the composite sublayer in any amount not inconsistent With the objectives of the present invention. The AlON phase, for example, can be the major phase of the composite sublayer serving as a matrix for the metal oxide 5 10 15 20 25 and metal oxynitride phases discussed filrther herein. In some embodíments, the AlON phase is present in the composite sublayer in an amount selected from Table II.
Table II- AlON Phase of Composite AlON Sublayer (Volume Percent) AlON Phase (Vol.%) 250 260 270 280 85-99 90 -99 Aluminum, nitrogen and oxygen contents of an AlON phase can be Varied according to the CVD parameters selected. Aluminum of the AlON phase, for example, can range from 20 to 50 atomic%. In some embodíments, aluminum of the AlON phase is in the range of 25 to 40 atomic% or 32 to 38 atomic%. Nitrogen of the AlON phase can range fiom 40 to 70 atomic%. In some embodíments, nitrogen of the AlON phase is in the range of 55 to 70 atomic% or 63 to 67 atomic percent. Further, oxygen of the AlON phase can range from 1 to 20 atomic%. In some embodíments, oxygen of the AlON phase is in the range of 2 to 15 atomic% or 4 to 6 atomic%.
The AlON phase, in some embodíments, is polycrystalline. For example, the AlON phase can display a hexagonal crystalline structure, cubic crystalline structure or mixture of hexagonal and cubic crystalline structures. Alternatively, the AlON phase is amorphous.
Further, the AlON phase can display a mixture of crystalline and amorphous structures, Wherein the crystalline structures are hexagonal, cubic or a combination thereof. The AlON phase can also exhibit a fine grain structure With grains having sizes in the range of 10 nm to 2 um.
As described herein, a composite AlON sublayer also comprises a metal oxide phase including at least one oxide of a metallic element selected from Group IVB of the Periodic Table. The metal oxide phase, for example, can comprise ZrOg or HfOg. The metal oxide phase, in some embodiments, comprises a plurality of oxides of metallic elements selected from Group IVB of the Periodic Table. The metal oxide phase, for 6 10 15 20 25 example, can comprise a mixture of ZrOg and HfOg. The metal oxide phase can be a minor phase of the composite AlON sublayer, being contained or dispersed in the AlON matrix phase. In some embodiments, the metal oxide phase is present in the AlON composite sublayer in an amount selected firom Table III.
Table III ~ Metal Oxide Phase of Composite AlON Sublayer (Volume Percent) Metal Oxide Phase (V ol.%) 1-15 2-12 3-10 The metal oxide phase of a composite AlON sublayer, in some embodiments, is polycrystalline. For example, the metal oxide phase can display a cubic crystalline structure, monoclinic crystalline structure or tetragonal crystalline structure or mixtures thereof. The metal oxide phase can also demonstrate a fine grain structure With grains having sizes in the range of 10 nm to 2 um. Grains of the metal oxide phase can have a spherical or elliptical geometry.
A composite AlON sublayer can further comprise a metal oxynitride phase in addition to the AlON and metal oxides phases, the metal oxynitride phase comprising at least one oxynitride of a metallic element selected from Group IVB of the Periodic Table.
The metal oxynitride phase, for example, can comprise titanium oxynitride (TiON). In some embodiments, the metal oxynitride phase comprises a plurality of oxynitrides of metallic elements selected from Group IVB. A metal oxynitride phase, in some embodiments, is of the formula MOXNH , Wherein M is selected from metallic elements of Group IVB of the Periodic Table and x = 0.1-0.9.
The metal oxynitride phase can be polycrystalline. In such embodiments, the metal oxynitride phase can demonstrate a cubic crystalline structure. Further, the metal oxynitride phase can exhibit an ultrafme grain structure With grains having sizes in the range of 1 nm to 20 nm. The metal oxynitride phase can be a minor phase of the composite AlON sublayer being contained or dispersed in the AlON matrix phase. In some embodiments, 10 15 20 25 for example, the metal oxynitride phase is present in the composite layer in an amount selected from Table IV.
Table IV - Metal Oxynitride Phase of the Composite AlON Sublayer (Volume Percent) Metal Oxynitride Phase (Vol.%) 0-10 0.5-10 1-9 2-8 The volume percentages of the AlON phase, metal oxide phase and metal oxynitride phase of an AlON composite sublayer described herein can be determined using glow discharge optical emission spectroscopy (GDOES) and energy dispersive X-ray spectroscopy (BDX/EDS). In one embodiment, for example, the composition of a composite AlON sublayer can be analyzed by GDOES using GDA750 Glow Discharge Spectrometer (Spectrum Analytic Ltd. of Hof, Germany) With spot diameter of 1.0 mm.
The sputtered material removal for analysis can be administered With 0.5 um steps from the top of the sublayer to the substrate side. Further, additional analysis of coating sublayers can be conducted by EDS using scanning electron microscopy equipment LEO 430i (LEO Ltd. of Oberkochen, Germany) With analysis system of LINK ISIS (Oxford Ltd.) As described herein, a sublayer group also comprises an alumina sublayer or composite alumina sublayer. An alumina sublayer can be polycrystalline exhibiting any alumina polymorph not inconsistent With the objectives of the present invention. In some embodiments, for example, an alumina sublayer is formed of ot-alumina, K-alumina or mixtures (ot/K) thereof. Moreover, a composite alumina sublayer can adopt several constructions. In some embodiments, a composite alumina sublayer comprises an alumina phase and a metal oxide phase comprising one or more oxides of metallic elements of Group IVB of the Periodic Table. In some embodiments, for example, metal oxide phase of a composite alumina layer is formed of Zirconia, hafiiia or mixtures thereof. Ratio of alumina phase to metal oxide phase can range from 1:10 to 10: l. Further, the metal oxide phase can comprise titanium oxide (TiOX) in addition to zirconia and/ or hafiflia. When 10 15 20 25 30 present, titanium oxide can be a minor constituent of the metal oxide phase and is finely dispersed throughout the composite alumina sublayer. In being finely dispersed, titanium oxide can have a grain size less than grain sizes of the alumina phase and zirconía and/or hafnia.
The alumina phase of the composite alumina sublayer can be polycrystalline exhibiting any alumina polymorph not inconsistent With the objectives of the present invention. In some embodiments, for example, an alumina phase is formed of ot-alumina, K-alumina or mixtures (ot/K) thereof. In some embodiments, a composite alumina layer has a construction described in United States Patent 6,660,371 Which is incorporated herein by reference in its entirety.
Altematively, in another aspect, a composite alumina sublayer is formed of alumina doped With one or more metallic elements of Group IVB of the Periodic Table. In some embodiments, the alumina is doped With titanium, zirconium or mixtures thereof. In some embodiments, the alumina is doped With titanium, zirconium or mixtures thereof in an amount of 0.01-5 Wt.% of the composite alumina sublayer.
AlON, composite AlON, alumina and composite alumina sublayers can have any thicknesses not inconsistent With the objectives of the present invention. These sublayers, for example, can each have an individual thickness less than 1 um or less than 0.5 um. In some embodiments, a sublayer has a thickness of 0. 1 -0.8 um or 0.2-0.5 um. Additionally, an alumina sublayer or composite alumina sublayer can have hardness less than the adjacent AlON sublayer or composite AlON sublayer of the sublayer group. For example, an alumina sublayer or composite alumina sublayer can have hardness (HV0.05) ranging from about 1500 to 1800, Wherein HV0.05 refers to Vickers Hardness using a 0.05 kilogram-force load. The AlON or composite AlON sublayer can have hardness (HV0.05) of about 1700 to 2200. Vickers hardness values recited herein are deterrnined according to ASTM E 384, “Standard Method for Knoop and Vickers Hardness of Materials,” ASTM Intemational.
As described further herein, sublayer groups forrning the refractory layer can be adjacent to one another. Altematively, sublayer groups of the refractory layer can be spaced apart from one another by one or more intervening layers. Further, the refractory 9 10 15 20 25 layer can comprise any number of sublayer groups not inconsistent With the objectives of the present invention. In some embodiments, the refractory layer comprises at least four sublayer groups, each sublayer group having a construction selected from Table Iherein.
In comprising a plurality of sublayer groups, the refractory layer can have a thickness greater than 5 um. In some embodiments, the refractory layer has a thickness of 5 um to 25 um or 6 um to 20 um.
A refractory layer comprising a plurality of sublayer groups, in some embodiments, is deposited directly on the cutting tool substrate surface. Figure 2 is a schematic of a coated cutting tool according to one embodiment Wherein the refractory layer is deposited directly on the cutting tool substrate surface. The coated cutting tool (20) of Figure 2 comprises a cutting tool substrate (21) and a coating (22) adhered to the substrate (21). The coating (22) is formed of a refractory layer (23) having a plurality of sublayer groups (24).
In the embodiment of Figure 2, the refractory layer (23) is formed of four sublayer groups (24), each sublayer group comprising an AlON sublayer or a composite AlON sublayer (26) and an alumina sublayer or composite alumina sublayer (25).
Altematively, a coating described herein can further comprise one or more inner layers between the refractory layer and the substrate. Inner layer(s), in some embodiments, comprise one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table and one or more non-metallic elements selected from the group consisting of non-metallic elements of Groups IIIA, IVA, VA and VIA of the Periodic Table. In some embodiments, one or more inner layers between the substrate and refractory layer comprise a carbide, nitride, carbonitride, oxycarbonitride, oxide or boride of one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table. For example, one or more inner layers are selected from the group consisting of titanium nitride, titanium carbonitride, titanium oxycarbonitride, titanium carbide, titanium oxide, zirconium oxide, zirconium nitride, zirconium carbonitride, hafnium nitride, hafnium carbonitride and alumina and mixtures thereof. An alumina inner layer can comprise ot-alumina, K-alumina or ot/K-alumina. 10 10 15 20 25 30 Inner layers of coatings described herein can have any thickness not inconsistent With the objectives of the present invention. Coating inner layer(s) can have a thickness ranging from 0.5 um to 15 um. In some embodiments, thickness of an inner layer is selected according to the position of the inner layer in the coating. An inner layer deposited directly on a surface of the substrate as an initial layer of the coating, for example, can have thickness ranging from 0.5 to 2.5 um. An inner layer deposited over the initial layer, such as a TiCN or TiN layer, can have thickness ranging from 2 um to 12 um. Further, an inner layer on Which a refractory layer described herein is deposited, such as a layer comprising alumina, can have a thickness ranging from 0.1 to 6 um.
In some embodiments, a refractory layer described herein is the outermost layer of the coating. Altematively, a coating described herein can comprise one or more outer layers over the refractory layer. Outer layer(s) can comprise one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table and one or more non-metallic elements selected from the group consisting of non-metallic elements of Groups IIIA, IVA, VA and VIA of the Periodic Table. Outer layer(s) over the refractory layer can comprise a carbide, nitride, carbonitride, oxycarbonitride, oxide or boride of one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table. For example, one or more outer layers are selected from the group consisting of titanium nitride, titanium carbonitride, titanium oxycarbonitride, titanium carbide, zirconium nitride, zirconium carbonitride, hafiiium nitride, hafnium carbonitride and alumina and mixtures thereof.
Outer layers of coatings described herein can have any thickness not inconsistent with the objectives of the present invention. A coating outer layer, in some embodiments, can have a thickness ranging from 0.5 um to 5 um.
Additionally, in some embodiments, a coating described herein can comprise one or more bonding layers. A bonding layer can demonstrate various positions in a coating described herein. In some embodiments, a bonding layer is disposed between two inner layers of the coating, such as between a titanium nitride or titanium carbonitride inner layer and an inner layer comprising alumina. A bonding layer can also be disposed between an 1 1 10 15 20 25 30 inner layer and the refractory layer described herein. Further, a bonding layer can be disposed between the refractory layer and an outer layer of the coating. In some embodiments, bonding layers are used to increase adhesion between layers of the coating and/or nucleate the desired morphology of a coating layer deposited on the bonding layer.
A bonding layer, in some embodiments, is of the forrnula M(OXCyNZ), wherein M is a metal selected from the group consisting of metallic elements of Groups IVB, VB and VIB of the Periodic Table and X20, y20 and 220 wherein x + y + z = l. For example, in one embodiment, a bonding layer of TiC is employed between an inner layer of TiCN and an inner layer comprising alumina.
A bonding layer of the forrnula M(OXCyNZ) can have any thickness not inconsistent with the objectives of the present invention. In some embodiments, an M(OXCyNZ) layer has a thickness of about 0.5 um. Moreover, an M(OXCyNZ) layer can have a thickness ranging from 0.5 um to 5 um.
Figure 3 illustrates a schematic of a coated cutting tool according to one embodiment Wherein the refractory layer is deposited on an inner layer of the coating. The coated cutting tool (30) of Figure 3 comprises a cutting tool substrate (31) and a coating (32) adhered to the substrate (31). The coating (32) comprises a refractory layer (33) having a plurality of sublayer groups (34). As in Figure 2, the refractory layer (33) is formed of four sublayer groups (34), each sublayer group comprising an AlON sublayer or a composite AlON sublayer (3 6) and an alumina sublayer or composite alumina sublayer (35). An inner layer (37) of the coating is posited between the refractory layer (33) and the cutting tool substrate (31). As described herein, the inner layer (37) can be a single layer or multiple layers.
A coating adhered to a cutting tool substrate can have any architecture of refractory layer, inner layer(s) and/or outer layer(s) described herein. In some embodiments, a coating has an architecture selected from Table V. With reference to Table V, inner layers are listed beginning with the layer deposited directly on the substrate surface and proceed outward to the refractory layer. Further, each parenthetical structure listed for the refractory layer [e. g. (Composite AlgOg/Composite AlON)] refers to a sublayer group with the first sublayer group listed being in contact with the last inner layer listed. For example, 1 2 10 15 20 in the first coating architecture of Table V, the refractory layer is formed of four sublayer groups of (Composite AlgOg/Composite AlON) adjacent to one another. The Composite A120; sublayer of the first sublayer group is in contact With the terminal inner layer of AlgOg.
Table V - Coating Architectures Inner Layer(s) Refractory Layer Outer Layer (Composite Al2O3/Composite AlON) (Composite AlzOg/Composite AlON) (Composite AlzOg/Composite AlON) (Composite AlzOg/Composite AlON) TiN-TiCN(MT)* -TiOCN-ZrCN-Al2O3 TiOCN* * or ZrCN** TiN-TiCN(MT)-TiOCN-Al2O3 (Composite AlzOg/Composite AlON) (Composite AlzOg/Composite AlON) (Composite AlzOg/Composite AlON) (Composite AlzOg/Composite AlON) TiOCN** or ZrCN** *MT = Medium Temperature CVD **Optional Sublayer constructions listed in Table V can have any compositional parameters and/or properties described for the same in this Section I. For example, a composite AlgOg sublayer can comprise an alumina phase and a metal oxide phase. Alternatively, the composite AlgOg sublayer is formed of alumina doped With one or more metallic elements of Group IVB of the Periodic Table.
II. Methods of Making Coated Cutting Tools In another aspect, methods of making coated cutting tools are described herein. A method of making a coated cutting tool comprises providing a substrate a depositing over the substrate by chemical vapor deposition a coating including a refractory layer comprising a plurality of sublayer groups, a sublayer group comprising an AlON sublayer or composite AlON sublayer and an alumina sublayer or composite alumina sublayer. The substrate and sublayers of AlON, composite AlON, alumina and composite alumina can have any construction and/or properties recited for the same in Section I herein. 13 10 15 20 An AlON sublayer can be deposited from a gaseous mixture comprising an aluminum source, oxygen source and nitrogen source. In some embodiments, for example, an AlON sublayer is deposited from a gaseous mixture comprising AlClg, H2, Ng, NH3, HCl and C02. General CVD processing parameters for depositing an AlON sublayer are provided in Table VI.
Table VI ~ AlON Sublayer CVD Processing Parameters Ranges of Processing Parameters for AlON Sublayer Temperature 750-l020°C Pressure 50-100 mbar Time 30-120 min.
H2 Balance N; 30-65 vol.% AlCl3 0.5-2 vol.% NH; 1-2 vol.% C02 0.1-1.5 vol.% HCl 2-6 vol.% CO 0-2 vol.% Ar 0-25 vol.% Compositional percentages of aluminum, oxygen and nitrogen of an AlON sublayer described in Section I herein can be achieved by Varying amounts of individual reactant gases in the mixture.
Moreover, a composite AlON sublayer can be deposited from a gaseous mixture comprising an aluminum source, oxygen source, nitro gen source and source for metallic e1ement(s) of Group IVB. In some embodiments, for example, the aluminum source is AlClg, and the metallic element source is a Group IVB metal chloride, such as ZrCl4, HfCl4 or mixtures thereof. Further, as described herein, a composite AlON layer can also comprise a metal oxynitride phase in addition to the AlON and metal oxide phases, Wherein the metal of the oxynitride phase is selected from metallic elements of Group IVB of the Periodic Table. In some embodiments, the metal oxynitride phase comprises titanium oxynitride (TiON). Titanium chloride (TiCl4), for example, can be added to the gaseous mixture for the deposition of a TiON phase in the AlON sublayer. 14 Compositional percentages of phases in the composite AlON sublayer as set forth in Tables II-IV herein can be achieved by varying amounts of individual reactant gases in the deposition mixture. Additionally, compositional percentages of aluminum, nitrogen and oxygen of the Al0N phase as set forth in Section I above can be achieved by varying 5 amounts of individual reactant gases in the mixture. General CVD processing parameters for depositing a composite Al0N sublayer are provided in Table VII.
Table VII ~ Coinposite Al0N Sublayer CVD Processing Parameters Ranges of Processing Parameters for Composite Al0N Sublayer Temp erature 900- 1 000°C Pressure 50- 1 00 mbar Time 30-120 min.
H2 Balance AlClg 1-4 vol.% MC14* 05-3 vol.% NH3 l -4 vol.% C02 1-5 vol.% HCl 2-6 vol.% Ar 0-25v0l% CO 0-2 vol% TiC14** 0.1-2 vol.% *M = Group IVB Meta1(s) 10 ** Optional An alumina sublayer can be deposited from a gaseous mixture of AlClg, H2, C02, HCl and optionally H2S. General CVD processing parameters for depositing an alumina sublayer are provided in Table VIII. 1 5 Table VIII ~ Alumina Sublayer CVD Processing Parameters Ranges of Processing Paraineters for Aluinina Sublayer Temp erature 900- l 000°C Pressure 50-100 mbar Time 30-120 min.
H2 Balance AlClg 1-5 vol.% C02 1-5 vol.% HCl 2-6 vol.% H2S* 0.1-0.6 vol.% *Optional 15 As described herein, a composite alumina sublayer can adopt several constructions. In some embodiments, a composite alumina sublayer comprises an alumina phase and a metal oxide phase comprising one or more oxides of metallic elements of Group IVB of the 5 Periodic Table. The metal oxide phase, for example, can be formed zirconia, hafiïia or mixtures thereof. In some embodiments, the metal oxide phase can further comprise titanium oxide. General CVD processing parameters for depositing a composite alumina sublayer including an alumina phase and metal oxide phase are provided in Table IX. 10 Table IX - Composite Aluinina Sublayer CVD Processing Parameters Ranges of Processing Parameters for Composite Alumina Sublayer Temp erature 900-l 000°C Pressure 50-100 mbar Time 30-120 min.
H2 Balance AlCl2 1-5 vol.% MCI4* 02-3 vol.% CH4 3-6 vol.% C02 1-5 vol.% HCl 2-6 vol.% TiCl4** 0.l-l.5 vol.% *M = Group IVB Metal(s) **Optional A composite alumina layer can also be formed of alumina doped With one or more 15 metallic elements of Group IVB of the Periodic Table. In some embodiments, alumina is doped With titanium, zirconium or mixtures thereof in an amount of 0.01 -5 Wt.% of the composite alumina sublayer. General CVD deposition parameters for a polycrystalline titanium and/ or zirconium doped alumina sublayer are provided in Table X. 20 Table X - CVD Paraineters for Ti,Zr Doped Al2O2 Sublayer deposition Gas Mixture Temperature (°C) Pressure (mbar) Duration (minutes) H2, AlClg, ZrCl4, TiCl4, C02, H2S*, HCl* 800-1500 40-150 10-600 *Optional ZrCl4 and TiCl4 can be added or removed from the gaseous mixture depending on desired alumina doping scheme. 16 10 15 20 25 A refractory layer comprising a plurality of sublayer groups can be deposited directly on a surface of the cutting tool substrate. Altematively, the refractory layer is deposited on an inner layer of the coating. A coating inner layer can have any construction, compositional parameters and/or properties recited in Section I above for an inner layer.
An inner layer can comprise one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB, and VIB of the Periodic Table and one or more non-metallic elements selected from the group consisting of non- metallic elements of Groups IIIA, IVA, VA and VIA of the Periodic Table. In some embodiments, an inner layer is a carbide, nitride, carbonitride, oxycarbonitride, oxide or boride of one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table. An inner layer over Which a composite layer is deposited, for example, can be selected from the group consisting of titanium nitride, titanium carbide, titanium carbonitride, titanium oxycarbonitride, titanium oxide, zirconium oxide, zirconium nitride, zirconium carbonitride, hafnium nitride, hafnium carbonitride and alumina and mixtures thereof.
As described herein, a plurality of coating inner layers can reside between the cutting tool substrate and refractory layer. General CVD deposition parameters for various inner layers are provided in Table XI.
Table XI ~ CVD Parameters for Inner layer deposition Base Layer Gas Mixture Temperature (°C) Pressure Duration Composítion (torr) (minutes) TiN H2, N2, TiCl4 800-900 60-300 20-60 TiCN(MT) H2, N2, TíCl4, CH3CN 750-900 30-120 60-300 TiCN(HT) H2, N2, TiCl4, CH4 900-1050 30-300 30-100 TíOCN H2, N2, TiCl4, CH4, CO 900-1050 60-500 30-100 Al2O3 H2, AlClg, C02, H2S*, 900-1000 40-150 60-300 HCl *Optional In some embodiments of methods described herein, one or more outer layers are deposited over the refractory layer. An outer layer of the coating can have any construction, compositional parameters and/or properties recited in Section I hereinabove for an outer layer. An outer layer, for example, can comprise one or more metallic 17 10 15 20 25 30 elements selected from the group consisting of aluminum and one or more metallic elements of Groups IVB, VB, and VIB of the Periodic Table and one or more non-metallic elements selected from the group consisting of non-metallic elements of Groups IIIA, IVA, VA and VIA of the Periodic Table. In some embodiments, an outer layer is a carbide, nitride, carbonitride, oxycarbonitride, oxide or boride of one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table. An outer layer can be selected from the group consisting of titanium nitride, titanium carbide, titanium carbonitride, titanium oxycarbonitride, titanium oxide, zirconium oxide, zirconium nitride, zirconium carbonitride, hafnium nitride, hafnium carbonitride and alumina and mixtures thereof.
These and other embodiments are further illustrated in the following non-limiting examples.
EXAMPLE 1 - Coated Curling Tool A coated cutting tool described herein was produced by placing a cemented tungsten carbide (WC-Co) cutting insert substrate [ANSI standard geometry HNPJ0905ANSNGD] into a Bernex 200 CVD reactor. The cutting insert comprised 6 Wt.% cobalt binder With the balance WC grains of size 1-5 um. A coating comprising a refractory layer having a plurality of sublayer groups Was deposited on the WC-Co cutting insert according to Tables XII-XIII. Specifically, the refractory layer Was comprised of four adjacent sublayer groups, each sublayer group formed of a composite AlON sublayer and composite alumina sublayer. The composite AlON sublayer Was of the construction AlON-ZrOg-TiON, and the composite alumina sublayer Was of the construction K-AlgOg- ZrOg-TiOx. Depositions of the composite alumina sublayers and composite AlON sublayers Were administered in altemating fashion to form the refractory layer.
Further, the refractory layer Was deposited over an inner layer structure of TiN-TiCN(MT)- TiOCN-ZrCN-AlgOg. Figure 4 is a schematic of the coating architecture of the present example. 18 Table XII - CVD Deposition Steps of Coating *Composite Alumina Sublayer With mixture of Al2O3, ZrOz and TiOx phases ** Composite AlON Sublayer with mixture of AION, ZrOz and TiON phases 5 Table XIII- CVD Deposition Steps of Coating Process Step Temp. Pressure Time °C min.
TiN 930-960 600-900 20-40 MT-TiCN 900-940 70-100 70-110 TiOCN 950-1000 200-500 30-70 ZrCN 950-1000 70-100 20-60 K-AIZO; 950-1000 70-100 60-150 K-Al2O3/ZrO2/TiOx 950-1000 70-100 15-60 (per sublayer) AION/ZrOZ/TiON 950-1000 70-100 15-60 (per sublayer) The resulting multilayer coating demonstrated the properties provided in Table XIV. 10 Table XIV - Properties of CVD Coating Coating Layer Thickness (pm) Hardness (0.05HV) TiN 1.2 - MT-TiCN 3.6 - TiOCN 0.6 - ZrCN 1.0 - K-AIZO; 0.6 - K-Al2O3/ZrO2/TiOxT (4x) 0.7 = (2.8) 1700-1900 AlON/ZrOJTiONT (4x) 0.8 = (3.2) 1900-2200 Tlndividual Sublayer Thickness 19 Process Step H2 NZ TiCl4 CHgCN CH4 AlClg, C02 CO ZrCl4 NH3 HCl vol.% vol.% vol.% vol.% vol.% vol.% vol.% vol.% vol.% vol.% vol.% TiN Bal. 40-48 05-2 - - - - - - - MT-TiCN Bal. 25-40 O.5-2 0.1-1.5 - - - - - - - TiOCN Bal. 15-42 0.5-2 2-4 - - 0.3-2 - - - ZrCN Bal. 25-35 - 0.1-1.5 - - - - 05-3 - - ic-ABO; Bal. 7-20 - - 1.5-4 2-4 0-1.5 - - 1-4 K- Bal. - 0.1-1.5 3-6 1.5-4 2-5 - 0.1-1.5 - 3-6 AlzOg/ZrOz /TiOx* AlON/ZrOz/ Bal. - 0.1-1.5 - 1.5-4 2-5 O-1.5 0.1-1_5 1-4 3-6 TiON** 10 15 20 25 30 Figure 5 is a cross-sectional SEM image of the resulting coated cutting insert at a magnification of 5000x. Further, Figure 6 is a top-down SEM image of the refiactory layer surface at a magnification of 5000x.
EXAMPLE 2 - Coated Cutting Tool A coated cutting tool described herein Was produced by placing a cemented tungsten carbide (WC-Co) cutting insert substrate [ANSI standard geometry SPHXl205PCERGPB] into a Bemex 200 CVD reactor. The cutting insert comprised 6 Wt.% cobalt binder With the balance WC grains of size 1-5 um. A coating Was deposited on the cutting insert according to the parameters of Example 1. The resulting multilayer coating demonstrated properties consistent With those provided in Table XIV.
EXAMPLE 3 - Millíng Testing A coated cutting insert of Example 1 and Comparative cutting inserts (1 and 2) Were subjected to milling testing according to the parameters below. Comparative coated cutting inserts (1 and 2) comprised the same cemented WC substrate as Example 1 and exhibited the following CVD coating architectures: Comparative 1: TiN-(MT)-TiCN-TiCN-Al2O3-(TiCN/TiN)* (*removed after post coat) Comparative 2: TiN-(MT)TiCN-(AlgOg/ZrOg/TiOX)-(AlON/ZrO2/TiON) For the milling testing, two cutting edges Were tested for each coated insert of Example 1, Comparative 1 and Comparative 2.
Milling Parameters Workpiece - 4140 Steel Lead Angle - 45° Cutting Speed - 820 sfm RPM - l 171 Feed Rate - 12.881 ipm Axial Depth of Cut - 0.098 inch Radial Depth of Cut - 1.969 inch Coolant - None 20 The average milling lengths (mm) until end of life (EOL) of the coated inserts are provided in Table XV. EOL was registered by failure modes of flank wear (VB) > 0.3 mm and/or microchipping on the cutting edge determined by visual inspection. 5 Table XV ~ Milling Test Results (Length ~ imn) 10 15 20 25 Coated Cutting Insert Cutting Edge 1 Cutting Edge 2 Average Example 1 160 103 131.5 Comparative 1 54 43 63.5 Comparative 2 63 91 77 As provided in Table XV, the coated cutting insert of Example 1 having an architecture described herein outperformed Comparative inserts 1 and 2, demonstrating at least a 100 percent increase in lifetime. Moreover, the coated cutting insert of Example 1 exhibited superior resistance to cracking and chipping in response to thermal cycling. Figure 7 provides photographs of the cutting insert of Example 1 (a) and Comparative inserts 1 and 2 (b and c respectively) after 67 passes in the milling testing. As illustrated in Figure 7, the cutting insert of Example 1 displayed significantly less cracking and chipping relative to Comparative cutting inserts 1 and 2.
EXAMPLE 4 - Milling Testing A coated cutting insert of Example 2 and Comparative cutting inserts (3 and 4) were subjected to milling testing according to the parameters below. Comparative coated cutting inserts (3 and 4) comprised the same cemented WC substrate as Example 1 and exhibited the following CVD coating architectures: Comparative 1: TiN-(MT)-TiCN-TiCN-A12O3-(TiCN/TiN)* (*removed after post coat) Comparative 2: TiN-(MT)TiCN-ZrCN-(AlgOg/ZrO2/TiOx)-(AlON/ZrOg/TiON) For the milling testing, two cutting edges were tested for each coated insert of Example 2, Comparative 3 and Comparative 4.
Milling Parameters Workpiece - Gray Cast Iron (Class 40) Lead Angle - 0°/90° 21 10 15 20 Cutting Speed - 1312 sfm RPM - 2021 Feed Rate - 16.168 ipm Axial Depth of Cut - 0.098 inch Radial Depth of Cut- 1.969 inch Coolant - None The average milling lengths (mm) until end of life (EOL) of the coated inserts are provided in Table XVI. EOL Was registered by failure modes of flank Wear (VB) > 0.3 mm and/or microchipping on the cutting edge determined by visual inspection.
Table XVI ~ Milling Test Results (Length - imn) Coated Cutting Insert Cutting Edge 1 Cutting Edge 2 Average Example 2 77 65 71 Comparative 3 69 49 59 Comparative 4 76 63 69.5 As provided in Table XVI, the coated cutting insert of Example 2 having an architecture described herein outperforrned Comparative inserts 3 and 4, exhibiting at least a 20 percent increase in lifetime.
Various embodiments of the invention have been described in fulfillment of the various objects of the invention. It should be recognized that these embodiments are merely illustrative of the principles of the present invention. Numerous modifications and adaptations thereofWill be readily apparent to those skilled in the art Without departing from the spirit and scope of the invention. That Which is claimed is: 22

Claims (42)

10 15 20 25 CLAIMS
1. A coated cutting tool comprising: a substrate; and a coating adhered to the substrate, the coating including a refractory layer comprising a plurality of sublayer groups, a sublayer group comprising an aluminum oxynitride sublayer or a composite aluminum oxynitride sublayer and an alumina sublayer or composite alumina sublayer.
2. The coated cutting tool of claim l, Wherein the composite aluminum oxynitride sublayer comprises an aluminum oxynitride phase and a metal oxide phase comprising one or more oxides of metallic elements of Group IVB of the Periodic Table.
3. The coated cutting tool of claim 2, Wherein the metal oxide phase comprises ZrOg, HfOg or mixtures thereof.
4. The coated cutting tool of claim 2, Wherein the composite aluminum oxynitride sublayer fiarther comprises a metal oxynitride phase in addition to the aluminum oxynitride phase and metal oxide phase, the metal oxynitride phase comprising at least one oxynitride of a metallic element selected from Group IVB of the Periodic Table.
5. The coated cutting tool of claim 4, Wherein the metal oxynitride phase is TiON.
6. The coated cutting tool of claim 1, Wherein the composite alumina sublayer comprises an alumina phase and a metal oxide phase comprising one or more oxides of metallic elements of Group IVB of the Periodic Table.
7. The coated cutting tool of claim 6, Wherein the metal oxide phase is formed of zirconia, hafnia or mixtures thereof. 23 10 15 20 25
8. The coated cutting tool of claim 7, Wherein the metal oxide phase further comprises titanium oxide.
9. The coated cutting tool of claim 1, Wherein the composite alumina layer is formed of alumina doped With one or more metallic elements selected from Group IVB of the Periodic Table.
10. The coated cutting tool of claim 9, Wherein the alumina is doped With zirconium, titanium or mixtures thereof in an amount of 0.01-5 vvt.% of the composite alumina sublayer.
11. 1 1. The coated cutting tool of claim 1, Wherein the sublayer groups are adjacent to one another.
12. The coated cutting tool of claim 1, Wherein the refractory layer comprises at least four sublayer groups.
13. The coated cutting tool of claim 1, Wherein at least one sublayer group is formed of the aluminum oxynitride sublayer and composite alumina sublayer.
14. The coated cutting tool of claim 1, Wherein at least one sublayer group is formed of the aluminum oxynitride sublayer and alumina sublayer.
15. The coated cutting tool of claim 1, Wherein a first sublayer group comprises an aluminum oxynitride sublayer or a composite aluminum oxynitride sublayer and a composite alumina sublayer and a second sublayer group comprises a composite aluminum oxynitride sublayer and an alumina sublayer. 24 10 15 20 25
16. The coated cutting tool of claim 1, Wherein the aluminum oxynitride sublayer, composite aluminum oxynitride sublayer, alumina sublayer and composite alumina sublayer each have thickness less than 1 pm.
17. The coated cutting tool of claim 1, Wherein the aluminum oxynitride sublayer, composite aluminum oxynitride sublayer, alumina sublayer and composite alumina sublayer each have a thickness of 0.1 pm to 0.8 pm.
18. The coated cutting tool of claim 16, Wherein the refractory layer has a thickness of 5 pm to 25 pm.
19. The coated cutting tool of claim 16, Wherein the refractory layer has a thickness of 6 pm to 15 pm.
20. The coated cutting tool of claim 1, Wherein the composite alumina sublayer or the alumina sublayer has a hardness (HV0.05) less than the composite aluminum oxynitride layer.
21. The coated cutting tool of claim 1 further comprising one or more inner layers between the refractory layer and the substrate.
22. The coated cutting tool of claim 21, Wherein an inner layer comprises one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table and one or more non-metallic elements of Groups IIIA, IVA, VA and VIA of the Periodic Table.
23. The coated cutting tool of claim 22, Wherein the one or more inner layers are selected from the group consisting of TiN, TiCN, TiOCN, ZrCN and alumina. 25 10 15 20 25
24. The coated cutting tool of claim 1, Wherein the substrate is cemented carbide or cerrnet.
25. The coated cutting tool of claim 1, Wherein the coating further comprises one or more outer layers over the refractory layer, an outer layer comprising one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table and one or more non-metallic elements of Groups IIIA, IVA, VA and VIA of the Periodic Table.
26. A method of making a coated cutting tool comprising: providing a substrate; and depositing over the substrate by chemical vapor deposition a coating including a refractory layer comprising a plurality of sublayer groups, a sublayer group comprising an aluminum oxynitride sublayer or composite aluminum oxynitride sublayer and an alumina sublayer or composite alumina sublayer.
27. The method of claim 26, Wherein the composite aluminum oxynitride sublayer comprises an aluminum oxynitride phase and a metal oxide phase comprising one or more oxides of metallic elements of Group IVB of the Periodic Table.
28. The method of claim 27, Wherein the metal oxide phase comprises ZrOg, HfOg or mixtures thereof.
29. The method of claim 27, Wherein the composite aluminum oxynitride sublayer is deposited from a gaseous mixture comprising an aluminum source, oxygen source, nitrogen source and Group IVB metallic element source.
30. The method of claim 29, Wherein the aluminum source is AlClg, and the Group IVB metallic element source comprises one or more Group IVB metal chlorides. 26 10 15 20 25 30
31. The method of claim 27, Wherein the composite aluminum oxynitride sublayer further comprises a metal oxynitride phase in addition to the aluminum oxynitride phase and metal oxide phase, the metal oxynitride phase comprising at least one oxynitride of a metallic element selected from Group IVB of the Periodic Table.
32. The method of claim 31, Wherein the metal oxynitride phase is TiON.
33. The method of claim 26, Wherein the composite alumina sublayer comprises an alumina phase and a metal oxide phase comprising one or more oxides of metallic elements of Group IVB of the Periodic Table.
34. The method of claim 33, Wherein the metal oxide phase comprises zirconia and titanium oxide.
35. The method of claim 33, Wherein the composite alumina layer is deposited from a gaseous mixture comprising an aluminum source, oxygen source and a Group IVB metallic element source.
36. The method of claim 35, Wherein the aluminum source is AlClg, and the Group IVB metallic element source comprises one or more Group IVB metal chlorides.
37. The method of claim 26, Wherein the refractory layer comprises at least four sublayer groups.
38. The method of claim 37, Wherein the sublayer groups are adjacent to one another.
39. The method of claim 26, Wherein a first sublayer group comprises a composite aluminum oxynitride sublayer and a composite alumina sublayer and a second sublayer group comprises a composite aluminum oxynitride sublayer and an alumina sublayer. 27 10
40. The method of claim 26, Wherein one or more inner layers of the coating are deposited over the substrate prior to deposition of the refractory layer.
41. The method of claim 40, Wherein an inner layer comprises one or more metallic elements selected from the group consisting of aluminum and metallic elements of Groups IVB, VB and VIB of the Periodic Table and one or more non-metallic elements of Groups IIIA, IVA, VA and VIA of the Periodic Table.
42. The method of claim 41, Wherein the one or more inner layers are selected from the group consisting of TiN, TiCN, TiOCN, ZrCN and alumina. 28
SE1450911A 2013-08-30 2014-07-23 Refractory coatings for cutting tools SE1450911A1 (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/014,968 US9427808B2 (en) 2013-08-30 2013-08-30 Refractory coatings for cutting tools

Publications (1)

Publication Number Publication Date
SE1450911A1 true SE1450911A1 (sv) 2015-03-01

Family

ID=51752262

Family Applications (1)

Application Number Title Priority Date Filing Date
SE1450911A SE1450911A1 (sv) 2013-08-30 2014-07-23 Refractory coatings for cutting tools

Country Status (10)

Country Link
US (1) US9427808B2 (sv)
JP (1) JP2015047690A (sv)
KR (1) KR20150026865A (sv)
CN (1) CN104416206A (sv)
BR (1) BR102014020549A2 (sv)
CA (1) CA2860822A1 (sv)
DE (1) DE102014109652B4 (sv)
FR (1) FR3009984A1 (sv)
GB (1) GB2520798A (sv)
SE (1) SE1450911A1 (sv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016108734B4 (de) * 2016-05-11 2023-09-07 Kennametal Inc. Beschichteter Körper und Verfahren zur Herstellung des Körpers
JP6699056B2 (ja) 2016-06-14 2020-05-27 住友電工ハードメタル株式会社 表面被覆切削工具
US11839923B2 (en) * 2017-06-21 2023-12-12 Kyocera Corporation Coated tool, cutting tool, and method for manufacturing machined product
CN113549876B (zh) * 2021-07-22 2022-11-01 中国科学院力学研究所 一种铝合金压铸基体的阻隔涂层

Family Cites Families (110)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE406090B (sv) * 1977-06-09 1979-01-22 Sandvik Ab Belagd hardmetallkropp samt sett att framstalla en dylik kropp
DE2851584B2 (de) 1978-11-29 1980-09-04 Fried. Krupp Gmbh, 4300 Essen Verbundkörper
USRE32111E (en) 1980-11-06 1986-04-15 Fansteel Inc. Coated cemented carbide bodies
US4357382A (en) * 1980-11-06 1982-11-02 Fansteel Inc. Coated cemented carbide bodies
DE3332260A1 (de) 1983-09-07 1985-03-28 Fried. Krupp Gmbh, 4300 Essen Beschichteter hartmetallkoerper
JPS60127905A (ja) 1983-12-09 1985-07-08 Ngk Spark Plug Co Ltd 高靭性セラミック工具
JPS60238481A (ja) 1984-05-14 1985-11-27 Sumitomo Electric Ind Ltd 多重層被覆超硬合金
SE442305B (sv) 1984-06-27 1985-12-16 Santrade Ltd Forfarande for kemisk gasutfellning (cvd) for framstellning av en diamantbelagd sammansatt kropp samt anvendning av kroppen
US4714660A (en) * 1985-12-23 1987-12-22 Fansteel Inc. Hard coatings with multiphase microstructures
US4749629A (en) * 1987-01-20 1988-06-07 Gte Laboratories Ultrathin laminated oxide coatings and methods
US4950558A (en) 1987-10-01 1990-08-21 Gte Laboratories Incorporated Oxidation resistant high temperature thermal cycling resistant coatings on silicon-based substrates and process for the production thereof
SE464818B (sv) 1989-06-16 1991-06-17 Sandvik Ab Belagt skaer foer skaerande bearbetning
US5075265A (en) 1990-12-10 1991-12-24 Ford Motor Company Preparation of aluminum oxynitride from organosiloxydihaloalanes
US5665431A (en) 1991-09-03 1997-09-09 Valenite Inc. Titanium carbonitride coated stratified substrate and cutting inserts made from the same
US5494743A (en) 1992-08-20 1996-02-27 Southwall Technologies Inc. Antireflection coatings
DE69320913T2 (de) 1992-11-09 1999-03-11 Central Glass Co Ltd Glasplatte mit einem ultraviolett absorbierenden mehrschichtigen Überzug
TW250618B (sv) 1993-01-27 1995-07-01 Mitsui Toatsu Chemicals
US5500279A (en) 1994-08-26 1996-03-19 Eastman Kodak Company Laminated metal structure and metod of making same
EP0704880A3 (en) 1994-09-28 1998-09-30 Matsushita Electric Industrial Co., Ltd. High-pressure discharge lamp, method for manufacturing a discharge tube body for high-pressure discharge lamps and method for manufacturing a hollow tube body
DE69521410T2 (de) 1994-10-04 2001-10-04 Sumitomo Electric Industries Beschichtete hartlegierung
DE69617767T2 (de) * 1995-02-17 2002-08-08 Seco Tools Ab Fagersta Sinterkarbidsubstrat mit Mehrschichten aus Aluminien
NO309233B1 (no) 1995-06-07 2001-01-02 Aker Eng As Fremgangsmåte ved installasjon av strekkstagplattform
US6652922B1 (en) 1995-06-15 2003-11-25 Alliedsignal Inc. Electron-beam processed films for microelectronics structures
US5722803A (en) 1995-07-14 1998-03-03 Kennametal Inc. Cutting tool and method of making the cutting tool
JPH09165670A (ja) 1995-12-14 1997-06-24 Orient Watch Co Ltd 透明保護膜を形成した構造体、およびその製造方法
GB2310218B (en) 1996-02-13 1999-12-22 Marconi Gec Ltd Coatings
JP3418066B2 (ja) 1996-07-03 2003-06-16 日立金属株式会社 アルミナ被覆工具とその製造方法
GB9703616D0 (en) 1997-02-21 1997-04-09 Univ Paisley Thin films
US6010283A (en) 1997-08-27 2000-01-04 Kennametal Inc. Cutting insert of a cermet having a Co-Ni-Fe-binder
JP3031907B2 (ja) 1998-03-16 2000-04-10 日立ツール株式会社 多層膜被覆部材
US6660371B1 (en) 1998-09-24 2003-12-09 Widia Gmbh Composite material coating and a method for the production thereof
US6161990A (en) 1998-11-12 2000-12-19 Kennametal Inc. Cutting insert with improved flank surface roughness and method of making the same
WO2000040402A1 (fr) 1998-12-28 2000-07-13 Asahi Glass Company, Limited Produit en couches
DE10017909B4 (de) 1999-04-13 2009-07-23 Mitsubishi Materials Corp. Beschichtetes Sinterkarbid-Schneidwerkzeugelement
LU90420B1 (fr) 1999-07-20 2001-01-22 Glaverbel Couche pyrolitique d'oxynitrure d'aluminium et vitrage comportant cette couche
FR2800998B1 (fr) 1999-11-17 2002-04-26 Saint Gobain Vitrage Substrat transparent comportant un revetement antireflet
US6582777B1 (en) 2000-02-17 2003-06-24 Applied Materials Inc. Electron beam modification of CVD deposited low dielectric constant materials
DE10016958A1 (de) * 2000-04-06 2001-10-18 Widia Gmbh Verfahren zur Herstellung von Multilagenschichten auf Substratkörpern und Verbundwerkstoff, bestehend aus einem beschichteten Substratkörper
US6528180B1 (en) 2000-05-23 2003-03-04 Applied Materials, Inc. Liner materials
FR2810118B1 (fr) 2000-06-07 2005-01-21 Saint Gobain Vitrage Substrat transparent comportant un revetement antireflet
US20030036483A1 (en) 2000-12-06 2003-02-20 Arendt Paul N. High temperature superconducting thick films
AU2002305393A1 (en) 2001-05-04 2002-11-18 General Atomics O2 and h2o barrier material
US6667121B2 (en) 2001-05-17 2003-12-23 Guardian Industries Corp. Heat treatable coated article with anti-migration barrier between dielectric and solar control layer portion, and methods of making same
US6733874B2 (en) 2001-08-31 2004-05-11 Mitsubishi Materials Corporation Surface-coated carbide alloy cutting tool
JP4251990B2 (ja) 2002-01-18 2009-04-08 住友電工ハードメタル株式会社 表面被覆切削工具
US7514037B2 (en) 2002-08-08 2009-04-07 Kobe Steel, Ltd. AG base alloy thin film and sputtering target for forming AG base alloy thin film
US20060127699A1 (en) 2002-09-14 2006-06-15 Christoph Moelle Protective layer and process and arrangement for producing protective layers
US7829194B2 (en) 2003-03-31 2010-11-09 Ut-Battelle, Llc Iron-based alloy and nitridation treatment for PEM fuel cell bipolar plates
US6811880B1 (en) 2003-04-04 2004-11-02 Ensci Inc. Metal oxyanion coated substrates
US6811881B1 (en) 2003-04-07 2004-11-02 Ensci Inc. Metal oxyanion coated nano substrates
US7322776B2 (en) 2003-05-14 2008-01-29 Diamond Innovations, Inc. Cutting tool inserts and methods to manufacture
US7592077B2 (en) 2003-06-17 2009-09-22 Kennametal Inc. Coated cutting tool with brazed-in superhard blank
US20050064247A1 (en) 2003-06-25 2005-03-24 Ajit Sane Composite refractory metal carbide coating on a substrate and method for making thereof
FR2856627B1 (fr) 2003-06-26 2006-08-11 Saint Gobain Substrat transparent muni d'un revetement avec proprietes de resistance mecanique
FR2856677B1 (fr) 2003-06-27 2006-12-01 Saint Gobain Substrat revetu d'une couche dielectrique et procede pour sa fabrication
JP2005029849A (ja) 2003-07-07 2005-02-03 Kobe Steel Ltd リフレクター用Ag合金反射膜、及び、このAg合金反射膜を用いたリフレクター、並びに、このAg合金反射膜の形成用のAg合金スパッタリングターゲット
EP1498397A1 (fr) 2003-07-16 2005-01-19 Glaverbel Substrat revêtu à très faible facteur solaire
US20050025973A1 (en) 2003-07-25 2005-02-03 Slutz David E. CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
JP4249184B2 (ja) 2003-08-12 2009-04-02 日本電信電話株式会社 窒化物半導体成長用基板
FR2858975B1 (fr) 2003-08-20 2006-01-27 Saint Gobain Substrat transparent revetu d'un empilement de couches minces a proprietes de reflexion dans l'infrarouge et/ou dans le domaine du rayonnement solaire
DE10342364A1 (de) 2003-09-12 2005-04-14 Kennametal Widia Gmbh & Co.Kg Hartmetall-oder Cermetkörper und Verfahren zu seiner Herstellung
DE10342398B4 (de) 2003-09-13 2008-05-29 Schott Ag Schutzschicht für einen Körper sowie Verfahren zur Herstellung und Verwendung von Schutzschichten
JP2005271190A (ja) 2003-12-05 2005-10-06 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
WO2005099945A1 (ja) 2004-04-13 2005-10-27 Sumitomo Electric Hardmetal Corp. 表面被覆切削工具
US7704611B2 (en) 2004-04-19 2010-04-27 Pivot A.S. Hard, wear-resistant aluminum nitride based coating
US7262145B2 (en) 2004-04-23 2007-08-28 Kennametal Inc. Whisker-reinforced ceramic containing aluminum oxynitride and method of making the same
US7378157B2 (en) 2004-06-28 2008-05-27 Dai Nippon Printing Co., Ltd. Gas barrier film, and display substrate and display using the same
US20060165994A1 (en) 2004-07-07 2006-07-27 General Electric Company Protective coating on a substrate and method of making thereof
US7812522B2 (en) 2004-07-22 2010-10-12 Ifire Ip Corporation Aluminum oxide and aluminum oxynitride layers for use with phosphors for electroluminescent displays
KR101035223B1 (ko) 2004-07-23 2011-05-18 스미토모 덴키 고교 가부시키가이샤 압축 응력의 강도 분포를 갖는 피막을 구비한 표면 피복절삭공구
KR101210859B1 (ko) 2004-08-18 2012-12-11 다우 코닝 코포레이션 피복 기판 및 이의 제조방법
KR101143281B1 (ko) 2004-08-20 2012-05-08 데이진 가부시키가이샤 투명 도전성 적층체 및 투명 터치 패널
US7208044B2 (en) 2004-11-24 2007-04-24 Mark A. Zurbuchen Topotactic anion exchange oxide films and method of producing the same
US7608335B2 (en) 2004-11-30 2009-10-27 Los Alamos National Security, Llc Near single-crystalline, high-carrier-mobility silicon thin film on a polycrystalline/amorphous substrate
CN101080295B (zh) 2004-12-14 2010-08-18 住友电工硬质合金株式会社 被覆切削工具
US7258927B2 (en) 2004-12-23 2007-08-21 Los Alamos National Security, Llc High rate buffer layer for IBAD MgO coated conductors
US7727934B2 (en) 2004-12-23 2010-06-01 Los Alamos National Security, Llc Architecture for coated conductors
DE102004063816B3 (de) * 2004-12-30 2006-05-18 Walter Ag Al2O3-Multilagenplatte
US7393584B2 (en) 2005-01-14 2008-07-01 Solutia Incorporated Multiple layer laminate with moisture barrier
US7362053B2 (en) 2005-01-31 2008-04-22 Osram Sylvania Inc. Ceramic discharge vessel having aluminum oxynitride seal region
JP4573673B2 (ja) 2005-02-28 2010-11-04 富士フイルム株式会社 水蒸気バリアフィルム
BE1016553A3 (fr) 2005-03-17 2007-01-09 Glaverbel Vitrage a faible emissivite.
SE528929C2 (sv) 2005-04-18 2007-03-20 Sandvik Intellectual Property Skär belagt med ett skiktsystem och metod att framställa detta
CN101237990B (zh) 2005-05-12 2013-11-20 北美Agc平板玻璃公司 具有低的太阳辐射得热系数、增强的化学和物理性能的低发射率镀层及其制备方法
WO2007005925A1 (en) 2005-06-30 2007-01-11 Varian Semiconductor Equipment Associates, Inc. Clamp for use in processing semiconductor workpieces
JPWO2007007622A1 (ja) 2005-07-07 2009-01-29 旭硝子株式会社 プラズマディスプレイパネル用電磁波遮蔽フィルムおよび保護板
US20070030569A1 (en) 2005-08-04 2007-02-08 Guardian Industries Corp. Broad band antireflection coating and method of making same
WO2007029290A1 (ja) * 2005-09-01 2007-03-15 Osg Corporation 硬質積層被膜、および硬質積層被膜被覆工具
FR2893023B1 (fr) 2005-11-08 2007-12-21 Saint Gobain Substrat muni d'un empilement a proprietes thermiques
US20070172696A1 (en) 2006-01-17 2007-07-26 Georgia Tech Research Corporation Protective thin film layers and methods of dielectric passivation of organic materials using assisted deposition processes
US8119227B2 (en) 2006-10-18 2012-02-21 Sandvik Intellectual Property Ab Coated cutting tool
US7782569B2 (en) 2007-01-18 2010-08-24 Sae Magnetics (Hk) Ltd. Magnetic recording head and media comprising aluminum oxynitride underlayer and a diamond-like carbon overcoat
IL182344A (en) 2007-04-01 2011-07-31 Iscar Ltd Cutting with a ceramic coating
US8080323B2 (en) 2007-06-28 2011-12-20 Kennametal Inc. Cutting insert with a wear-resistant coating scheme exhibiting wear indication and method of making the same
WO2009023744A1 (en) 2007-08-13 2009-02-19 University Of Virginia Patent Foundation Thin film battery synthesis by directed vapor deposition
SE532020C2 (sv) 2007-09-13 2009-09-29 Seco Tools Ab Belagt hårdmetallskär för frästillämpningar och tillverkningssätt
JP2009120912A (ja) 2007-11-15 2009-06-04 Kobe Steel Ltd 硬質皮膜を備えた耐摩耗性部材
JP5714481B2 (ja) 2008-04-29 2015-05-07 エージェンシー フォー サイエンス,テクノロジー アンド リサーチ 無機傾斜バリア膜及びそれらの製造方法
US20100255337A1 (en) 2008-11-24 2010-10-07 Langhorn Jason B Multilayer Coatings
WO2010065564A1 (en) 2008-12-02 2010-06-10 Georgia Tech Research Corporation Environmental barrier coating for organic semiconductor devices and methods thereof
KR20110008398A (ko) 2009-07-20 2011-01-27 삼성전자주식회사 막 구조물, 이를 포함하는 커패시터 및 그 제조 방법
US20110016946A1 (en) 2009-07-21 2011-01-27 Sudhir Brahmandam Coated Tooling
SE533972C2 (sv) 2009-07-27 2011-03-15 Seco Tools Ab Finkornigt belagt hårdmetallskärverktygsskär för svarvning i härdat stål och verktygsstål
CN102534488A (zh) * 2010-12-30 2012-07-04 鸿富锦精密工业(深圳)有限公司 具有硬质涂层的被覆件及其制备方法
CN102560491A (zh) 2010-12-30 2012-07-11 鸿富锦精密工业(深圳)有限公司 铝及铝合金表面防腐处理方法及其制品
US8877300B2 (en) 2011-02-16 2014-11-04 Veeco Ald Inc. Atomic layer deposition using radicals of gas mixture
US8574728B2 (en) * 2011-03-15 2013-11-05 Kennametal Inc. Aluminum oxynitride coated article and method of making the same
FR2973940A1 (fr) 2011-04-08 2012-10-12 Saint Gobain Element en couches pour l’encapsulation d’un element sensible
FR2973939A1 (fr) 2011-04-08 2012-10-12 Saint Gobain Element en couches pour l’encapsulation d’un element sensible
US9017809B2 (en) * 2013-01-25 2015-04-28 Kennametal Inc. Coatings for cutting tools

Also Published As

Publication number Publication date
US9427808B2 (en) 2016-08-30
GB201415234D0 (en) 2014-10-15
US20150064431A1 (en) 2015-03-05
KR20150026865A (ko) 2015-03-11
DE102014109652A1 (de) 2015-03-05
JP2015047690A (ja) 2015-03-16
DE102014109652B4 (de) 2022-05-05
CA2860822A1 (en) 2015-02-28
GB2520798A (en) 2015-06-03
FR3009984A1 (fr) 2015-03-06
BR102014020549A2 (pt) 2017-10-10
CN104416206A (zh) 2015-03-18

Similar Documents

Publication Publication Date Title
EP0653499B1 (en) Coated cutting tool and method for producing the same
US20180371610A1 (en) Cvd composite refractory coatings and applications thereof
US20120219789A1 (en) Coated bodies made of metal, hard metal, cermet, or ceramic, and method(s) for coating of such bodies
US9017809B2 (en) Coatings for cutting tools
US9994958B2 (en) Coating, cutting tool, and method of manufacturing coating
US10711345B2 (en) Hard coating film for cutting tool
SE1450911A1 (sv) Refractory coatings for cutting tools
US9181620B2 (en) Coatings for cutting tools
CN101688299B (zh) Al-Ti-Ru-N-C硬质材料涂层
KR20160080609A (ko) 절삭공구용 경질피막
US8409734B2 (en) Coated substrates and methods of making same
JP5027491B2 (ja) 表面被覆切削工具
JP2008168364A (ja) 表面被覆切削工具
US9138864B2 (en) Green colored refractory coatings for cutting tools
JP2003039207A (ja) 被覆工具
JP5109202B2 (ja) 表面被覆切削工具
JPH08318406A (ja) 被覆切削工具
US11998993B2 (en) Cutting tool
US11207736B2 (en) Cutting tool
US20220331880A1 (en) Cutting tool
US20220040767A1 (en) Cutting tool
US20220032380A1 (en) Cutting tool
JP2006175596A (ja) 被覆工具
JPH08318407A (ja) 被覆切削工具
JP5309698B2 (ja) 高速重切削加工で硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具

Legal Events

Date Code Title Description
NAV Patent application has lapsed