RU2548551C2 - Способ и устройство для упрочнения стальных деталей, а также упрочненные в соответствии с этим способом стальные детали - Google Patents

Способ и устройство для упрочнения стальных деталей, а также упрочненные в соответствии с этим способом стальные детали Download PDF

Info

Publication number
RU2548551C2
RU2548551C2 RU2012113813/02A RU2012113813A RU2548551C2 RU 2548551 C2 RU2548551 C2 RU 2548551C2 RU 2012113813/02 A RU2012113813/02 A RU 2012113813/02A RU 2012113813 A RU2012113813 A RU 2012113813A RU 2548551 C2 RU2548551 C2 RU 2548551C2
Authority
RU
Russia
Prior art keywords
parts
chamber
cooling chamber
carbon
carburizing
Prior art date
Application number
RU2012113813/02A
Other languages
English (en)
Russian (ru)
Other versions
RU2012113813A (ru
Inventor
Фолькер ХОЙЕР
Клаус ЛЕЗЕР
Гунтер ШМИТТ
Герхард ВЕЛЬЦИГ
Original Assignee
Альд Вакуум Текнолоджиз Гмбх
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Альд Вакуум Текнолоджиз Гмбх filed Critical Альд Вакуум Текнолоджиз Гмбх
Publication of RU2012113813A publication Critical patent/RU2012113813A/ru
Application granted granted Critical
Publication of RU2548551C2 publication Critical patent/RU2548551C2/ru

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20Carburising
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20Carburising
    • C23C8/22Carburising of ferrous surfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24Nitriding
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24Nitriding
    • C23C8/26Nitriding of ferrous surfaces
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Tunnel Furnaces (AREA)
  • Heat Treatment Of Articles (AREA)
RU2012113813/02A 2009-09-10 2010-09-06 Способ и устройство для упрочнения стальных деталей, а также упрочненные в соответствии с этим способом стальные детали RU2548551C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009041041.4 2009-09-10
DE102009041041A DE102009041041B4 (de) 2009-09-10 2009-09-10 Verfahren und Vorrichtung zum Härten von Werkstücken, sowie nach dem Verfahren gehärtete Werkstücke
PCT/EP2010/005456 WO2011029565A1 (de) 2009-09-10 2010-09-06 Verfahren und vorrichtung zum härten von werkstücken, sowie nach dem verfahren gehärtete werkstücke

Publications (2)

Publication Number Publication Date
RU2012113813A RU2012113813A (ru) 2013-10-20
RU2548551C2 true RU2548551C2 (ru) 2015-04-20

Family

ID=42938505

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2012113813/02A RU2548551C2 (ru) 2009-09-10 2010-09-06 Способ и устройство для упрочнения стальных деталей, а также упрочненные в соответствии с этим способом стальные детали

Country Status (17)

Country Link
US (1) US9518318B2 (es)
EP (1) EP2475797B8 (es)
JP (1) JP5976540B2 (es)
KR (1) KR101774741B1 (es)
CN (1) CN102625859B (es)
BR (1) BR112012005330B1 (es)
CA (1) CA2773860C (es)
DE (1) DE102009041041B4 (es)
DK (1) DK2475797T3 (es)
ES (1) ES2639613T3 (es)
LT (1) LT2475797T (es)
MX (1) MX348240B (es)
PL (1) PL2475797T3 (es)
PT (1) PT2475797T (es)
RU (1) RU2548551C2 (es)
SI (1) SI2475797T1 (es)
WO (1) WO2011029565A1 (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2614292C1 (ru) * 2015-12-24 2017-03-24 Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский автомобильно-дорожный государственный технический университет (МАДИ)" Способ циклического газового азотирования деталей из конструкционных легированных сталей

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5650739B2 (ja) 2009-08-07 2015-01-07 スウエイジロク・カンパニー 低真空下での低温浸炭
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization
DE102013006589A1 (de) * 2013-04-17 2014-10-23 Ald Vacuum Technologies Gmbh Verfahren und Vorrichtung für das thermochemische Härten von Werkstücken
JP6212937B2 (ja) * 2013-05-09 2017-10-18 大同特殊鋼株式会社 真空焼入れ処理設備
JP6427949B2 (ja) * 2014-05-20 2018-11-28 大同特殊鋼株式会社 真空焼入れ処理方法
PL228603B1 (pl) 2015-02-04 2018-04-30 Seco/Warwick Spolka Akcyjna Piec wielokomorowy do nawęglania próżniowego i hartowania kół zębatych, wałków, pierścieni i tym podobnych detali
JP6477609B2 (ja) * 2016-06-20 2019-03-06 トヨタ自動車株式会社 表面処理方法および表面処理装置
JP6673778B2 (ja) * 2016-08-02 2020-03-25 光洋サーモシステム株式会社 金属部品の製造方法、および、熱処理装置
JP6932801B2 (ja) * 2016-08-02 2021-09-08 光洋サーモシステム株式会社 金属部品の製造方法、および、熱処理装置
DE102018101994A1 (de) * 2018-01-30 2019-08-01 Ald Vacuum Technologies Gmbh Vorrichtung zur Abstützung metallischer Werkstücke und Verfahren zur thermochemischen Behandlung
US11213912B2 (en) * 2018-06-25 2022-01-04 Bwxt Nuclear Operations Group, Inc. Methods and systems for monitoring a temperature of a component during a welding operation
CA3012611A1 (en) * 2018-07-27 2020-01-27 Kelvin Thermal Energy Inc. Modified inert gas atmosphere and graphite based thermal energy storage
DE102020123322A1 (de) * 2020-09-07 2022-03-10 Ald Vacuum Technologies Gmbh Fluidführung zur Abschreckung metallischer Werkstücke
CN116287654A (zh) * 2023-04-24 2023-06-23 山西富兴通重型环锻件有限公司 一种风电法兰环冷却设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1076724A1 (ru) * 1981-08-19 1984-02-29 Всесоюзный Научно-Исследовательский Проектно-Конструкторский И Технологический Институт Электротермического Оборудования Внииэто Методическа электропечь дл химико-термической обработки
EP1247875A2 (de) * 2001-04-04 2002-10-09 Aichelin Industrieofenbau Ges.m.b.H. Verfahren und Vorrichtung zur Niederdruck-Carbonitrierung von Stahlteilen
RU44980U1 (ru) * 2004-12-27 2005-04-10 Общество с ограниченной ответственностью "НПП "Нитрид" Устройство для управления газонапуском для азотирования

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3575398A (en) * 1968-11-13 1971-04-20 Midland Ross Corp Apparatus for minimizing atmosphere upset in a furnace for heat treating articles
DE3405244C1 (de) * 1984-02-15 1985-04-11 Aichelin GmbH, 7015 Korntal-Münchingen Industrieofen,insbesondere Mehrkammer-Vakuumofen zur Waermebehandlung von Chargen metallischer Werkstuecke
JP2582554B2 (ja) 1986-07-24 1997-02-19 大同特殊鋼株式会社 鋼材の浸炭処理方法
DE3934103A1 (de) 1989-10-12 1991-04-25 Ipsen Ind Int Gmbh Ofen zur partiellen waermebehandlung von werkzeugen
DE4132712C2 (de) 1991-10-01 1995-06-29 Ipsen Ind Int Gmbh Vakuumofen zur Plasmaaufkohlung metallischer Werkstücke
US5445683A (en) * 1992-05-13 1995-08-29 Daidousanso Co., Ltd. Nickel alloy products with their surfaces nitrided and hardened
DE4318400C1 (de) 1993-06-03 1994-06-23 Loi Ind Ofenanlagen Verfahren und Vorrichtung zum Wärmebehandeln von Werkstücken
US5853502A (en) * 1995-08-11 1998-12-29 Sumitomo Metal Industries, Ltd. Carburizing steel and steel products manufactured making use of the carburizing steel
DE19829825C2 (de) 1997-07-07 2002-10-10 Ntn Toyo Bearing Co Ltd Karburierungs- und Abschreckungsvorrichtung und Verfahren zum Abschrecken dünner Plattenteile
JP4317299B2 (ja) * 1999-10-22 2009-08-19 株式会社日本テクノ 熱処理用治具
DE10030046C1 (de) * 2000-06-19 2001-09-13 Ald Vacuum Techn Ag Verfahren und Vorrichtung zum Bestimmen der Abkühlwirkung einer strömenden Gasatmosphäre auf Werkstücke
DE10109565B4 (de) 2001-02-28 2005-10-20 Vacuheat Gmbh Verfahren und Vorrichtung zur partiellen thermochemischen Vakuumbehandlung von metallischen Werkstücken
JP2003183728A (ja) * 2001-12-14 2003-07-03 Jh Corp 真空熱処理装置
EP1333105B1 (de) 2002-02-04 2008-04-02 Ipsen International GmbH Verfahren zur Wärmebehandlung metallischer Werkstücke sowie wärmebehandeltes Werkstück
DE10322255B4 (de) 2003-05-16 2013-07-11 Ald Vacuum Technologies Ag Verfahren zur Hochtemperaturaufkohlung von Stahlteilen
US7045746B2 (en) * 2003-11-12 2006-05-16 Mattson Technology, Inc. Shadow-free shutter arrangement and method
DE10359554B4 (de) 2003-12-17 2008-04-17 Ald Vacuum Technologies Ag Verfahren zur Aufkohlung metallischer Werkstücke in einem Vakuumofen
FR2868083B1 (fr) * 2004-03-24 2006-07-21 Ascometal Sa Acier pour pieces mecaniques, procede de fabrication de pieces mecaniques l'utilisant et pieces mecaniques ainsi realisees
DE102006041434B4 (de) * 2005-09-07 2017-12-28 Unirock Co., Ltd. Schwingungsisolatiosvorrichtung
JP4929657B2 (ja) * 2005-09-21 2012-05-09 株式会社Ihi 浸炭処理装置及び方法
JP4458079B2 (ja) * 2006-09-27 2010-04-28 株式会社Ihi 真空浸炭処理装置
DE102006048434A1 (de) 2006-10-12 2008-06-12 Linde Ag Verfahren zur Erzeugung einer Schutzgas- oder Behandlungsatmosphäre in einem Wärmebehandlungsofen
DE102007038991A1 (de) 2007-08-17 2009-02-19 Daimler Ag Drehherdofen zur Wärmebehandlung von Werkstücken
JP2009084607A (ja) * 2007-09-28 2009-04-23 Aisin Aw Co Ltd 減圧熱処理用治具及び減圧熱処理方法
DE102007047074A1 (de) 2007-10-01 2009-04-02 Robert Bosch Gmbh Verfahren zur Aufkohlung von Werkstücken sowie Verwendung
DE202008010215U1 (de) 2008-07-31 2008-10-09 Ipsen International Gmbh Industrieofen wie Mehrkammer-Vakuumofen, insbesondere Zweikammer-Vakuumofen zur Wärmebehandlung von Chargen metallischer Werkstücke

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1076724A1 (ru) * 1981-08-19 1984-02-29 Всесоюзный Научно-Исследовательский Проектно-Конструкторский И Технологический Институт Электротермического Оборудования Внииэто Методическа электропечь дл химико-термической обработки
EP1247875A2 (de) * 2001-04-04 2002-10-09 Aichelin Industrieofenbau Ges.m.b.H. Verfahren und Vorrichtung zur Niederdruck-Carbonitrierung von Stahlteilen
RU44980U1 (ru) * 2004-12-27 2005-04-10 Общество с ограниченной ответственностью "НПП "Нитрид" Устройство для управления газонапуском для азотирования

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2614292C1 (ru) * 2015-12-24 2017-03-24 Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский автомобильно-дорожный государственный технический университет (МАДИ)" Способ циклического газового азотирования деталей из конструкционных легированных сталей

Also Published As

Publication number Publication date
EP2475797B1 (de) 2017-06-07
EP2475797A1 (de) 2012-07-18
DE102009041041A1 (de) 2011-05-05
BR112012005330A2 (pt) 2016-03-22
KR20120112381A (ko) 2012-10-11
LT2475797T (lt) 2017-09-11
RU2012113813A (ru) 2013-10-20
BR112012005330B1 (pt) 2019-10-08
JP2013504686A (ja) 2013-02-07
MX2012002954A (es) 2012-07-10
PT2475797T (pt) 2017-09-13
WO2011029565A1 (de) 2011-03-17
CA2773860A1 (en) 2011-03-17
DE102009041041B4 (de) 2011-07-14
EP2475797B8 (de) 2017-08-23
PL2475797T3 (pl) 2017-11-30
CN102625859B (zh) 2015-11-25
CA2773860C (en) 2020-12-01
DK2475797T3 (en) 2017-08-28
CN102625859A (zh) 2012-08-01
US20120168033A1 (en) 2012-07-05
ES2639613T3 (es) 2017-10-27
JP5976540B2 (ja) 2016-08-23
US9518318B2 (en) 2016-12-13
KR101774741B1 (ko) 2017-09-05
SI2475797T1 (sl) 2017-10-30
MX348240B (es) 2017-05-29

Similar Documents

Publication Publication Date Title
RU2548551C2 (ru) Способ и устройство для упрочнения стальных деталей, а также упрочненные в соответствии с этим способом стальные детали
JP6723751B2 (ja) ギア、シャフト、リングおよび類似のワークピースの真空浸炭および焼入れのための多チャンバ炉
FR2917752B1 (fr) Procede de traitement thermique de pieces de fonderie mettant en oeuvre une trempe a l'air et systeme pour la mise en oeuvre du procede
EP0236639B1 (fr) Installation flexible automatisée de traitement thermochimique rapide
JP6078000B2 (ja) 冷却装置
CN110172681A (zh) 衬底处理装置、半导体器件的制造方法、记录介质
TW201216400A (en) Storage magazine of a CVD plant
JP6211938B2 (ja) 基板熱処理装置、基板熱処理装置の設置方法
FR2537260A1 (fr) Four multicellulaire pour le traitement thermique, thermochimique ou electrothermique de metaux sous atmosphere rarefiee
JP2013019029A (ja) 熱処理治具および熱処理装置
JP2011222653A (ja) 基板保持具、縦型熱処理装置および熱処理方法
JP5988985B2 (ja) 内燃機関用カムシャフトの製造方法
US10196730B2 (en) Method and device for hardening workpieces, and workpieces hardened according to the method
JP2007224424A (ja) 真空熱処理装置
EP1786944B1 (fr) Machine de traitement thermochimique basse pression
PL236481B1 (pl) Piec karuzelowy do potokowego nawęglania próżniowego LPC pojedynczych detali
FR2845695A1 (fr) Procede et installation de traitement thermique de pieces metalliques
FR3113490A1 (fr) Installation et procede de fabrication de disques de frein
JP2006173482A (ja) 半導体装置の製造方法及び基板処理装置