RU2518859C2 - Система обнаружения для динамического зонда - Google Patents

Система обнаружения для динамического зонда Download PDF

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Publication number
RU2518859C2
RU2518859C2 RU2011128378/28A RU2011128378A RU2518859C2 RU 2518859 C2 RU2518859 C2 RU 2518859C2 RU 2011128378/28 A RU2011128378/28 A RU 2011128378/28A RU 2011128378 A RU2011128378 A RU 2011128378A RU 2518859 C2 RU2518859 C2 RU 2518859C2
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RU
Russia
Prior art keywords
probe
detection system
sample
height
signal
Prior art date
Application number
RU2011128378/28A
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English (en)
Russian (ru)
Other versions
RU2011128378A (ru
Inventor
Эндрю ХАМФРИС
Original Assignee
Инфинитесима Лтд
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0822603A external-priority patent/GB0822603D0/en
Priority claimed from GB0906987A external-priority patent/GB0906987D0/en
Application filed by Инфинитесима Лтд filed Critical Инфинитесима Лтд
Publication of RU2011128378A publication Critical patent/RU2011128378A/ru
Application granted granted Critical
Publication of RU2518859C2 publication Critical patent/RU2518859C2/ru

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
RU2011128378/28A 2008-12-11 2009-12-11 Система обнаружения для динамического зонда RU2518859C2 (ru)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB0822603.7 2008-12-11
GB0822603A GB0822603D0 (en) 2008-12-11 2008-12-11 Dynamic probe detection system
GB0906987.3 2009-04-23
GB0906987A GB0906987D0 (en) 2009-04-23 2009-04-23 Dynamic probe detection system
PCT/GB2009/051701 WO2010067129A1 (en) 2008-12-11 2009-12-11 Dynamic probe detection system

Publications (2)

Publication Number Publication Date
RU2011128378A RU2011128378A (ru) 2013-01-20
RU2518859C2 true RU2518859C2 (ru) 2014-06-10

Family

ID=41611181

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2011128378/28A RU2518859C2 (ru) 2008-12-11 2009-12-11 Система обнаружения для динамического зонда

Country Status (10)

Country Link
US (1) US8479310B2 (enExample)
EP (1) EP2374011B1 (enExample)
JP (1) JP5654477B2 (enExample)
KR (1) KR101569960B1 (enExample)
CN (1) CN102272610B (enExample)
CA (1) CA2746147A1 (enExample)
IL (1) IL213461A0 (enExample)
RU (1) RU2518859C2 (enExample)
SG (1) SG171994A1 (enExample)
WO (1) WO2010067129A1 (enExample)

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CN109975727B (zh) * 2019-03-04 2020-03-27 中国科学技术大学 纳米级磁共振扫描成像设备以及方法
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CN110763873B (zh) * 2019-11-18 2021-04-13 中国科学院沈阳自动化研究所 基于原子力显微镜技术的峰值力轻敲与扭转共振复合方法
CN111044803A (zh) * 2019-12-12 2020-04-21 佛山市卓膜科技有限公司 一种压电材料的压电系数测量方法
CN113125808A (zh) * 2020-01-10 2021-07-16 精浚科技股份有限公司 聚焦式原子力显微镜
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Also Published As

Publication number Publication date
US20110247106A1 (en) 2011-10-06
KR20110104018A (ko) 2011-09-21
JP2012511715A (ja) 2012-05-24
WO2010067129A1 (en) 2010-06-17
EP2374011B1 (en) 2018-11-21
RU2011128378A (ru) 2013-01-20
JP5654477B2 (ja) 2015-01-14
IL213461A0 (en) 2011-07-31
SG171994A1 (en) 2011-07-28
CA2746147A1 (en) 2010-06-17
CN102272610A (zh) 2011-12-07
EP2374011A1 (en) 2011-10-12
KR101569960B1 (ko) 2015-11-27
CN102272610B (zh) 2015-02-25
US8479310B2 (en) 2013-07-02

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Effective date: 20151212