CN102272610B - 动态探针检测系统 - Google Patents

动态探针检测系统 Download PDF

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Publication number
CN102272610B
CN102272610B CN200980154318.2A CN200980154318A CN102272610B CN 102272610 B CN102272610 B CN 102272610B CN 200980154318 A CN200980154318 A CN 200980154318A CN 102272610 B CN102272610 B CN 102272610B
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CN
China
Prior art keywords
probe
sample
signal
detection system
height
Prior art date
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CN200980154318.2A
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English (en)
Chinese (zh)
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CN102272610A (zh
Inventor
安德鲁·汉弗里斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infinitesima Ltd
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Infinitesima Ltd
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Filing date
Publication date
Priority claimed from GB0822603A external-priority patent/GB0822603D0/en
Priority claimed from GB0906987A external-priority patent/GB0906987D0/en
Application filed by Infinitesima Ltd filed Critical Infinitesima Ltd
Publication of CN102272610A publication Critical patent/CN102272610A/zh
Application granted granted Critical
Publication of CN102272610B publication Critical patent/CN102272610B/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G01Q60/34—Tapping mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN200980154318.2A 2008-12-11 2009-12-11 动态探针检测系统 Active CN102272610B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB0822603.7 2008-12-11
GB0822603A GB0822603D0 (en) 2008-12-11 2008-12-11 Dynamic probe detection system
GB0906987.3 2009-04-23
GB0906987A GB0906987D0 (en) 2009-04-23 2009-04-23 Dynamic probe detection system
PCT/GB2009/051701 WO2010067129A1 (en) 2008-12-11 2009-12-11 Dynamic probe detection system

Publications (2)

Publication Number Publication Date
CN102272610A CN102272610A (zh) 2011-12-07
CN102272610B true CN102272610B (zh) 2015-02-25

Family

ID=41611181

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980154318.2A Active CN102272610B (zh) 2008-12-11 2009-12-11 动态探针检测系统

Country Status (10)

Country Link
US (1) US8479310B2 (enExample)
EP (1) EP2374011B1 (enExample)
JP (1) JP5654477B2 (enExample)
KR (1) KR101569960B1 (enExample)
CN (1) CN102272610B (enExample)
CA (1) CA2746147A1 (enExample)
IL (1) IL213461A0 (enExample)
RU (1) RU2518859C2 (enExample)
SG (1) SG171994A1 (enExample)
WO (1) WO2010067129A1 (enExample)

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US20120047610A1 (en) * 2010-04-09 2012-02-23 Boise State University Cantilever-based optical interface force microscope
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WO2013116553A1 (en) * 2012-01-31 2013-08-08 University Of Utah Research Foundation Method for height control for single electron tunneling force spectroscopy and dynamic tunneling force microscopy
GB201218350D0 (en) 2012-10-12 2012-11-28 Infinitesima Ltd Multiple probe actuation
GB201215546D0 (en) 2012-08-31 2012-10-17 Infinitesima Ltd Multiple probe detection and actuation
US8646110B1 (en) * 2012-11-27 2014-02-04 Xiaoji Xu Method to obtain absorption spectra from near-field infrared scattering using homodyne detection
US10254306B2 (en) 2012-11-29 2019-04-09 Infinitesima Limited Probe calibration or measurement routine
GB201313064D0 (en) * 2013-07-22 2013-09-04 Infinitesima Ltd Probe Microscope
US9885691B1 (en) 2013-10-08 2018-02-06 Nanometronix LLC Nanoindenter ultrasonic probe tip and force control
JP6269153B2 (ja) * 2014-02-24 2018-01-31 株式会社リコー 電位検出装置、及び画像形成装置
EP2913681A1 (en) 2014-02-28 2015-09-02 Infinitesima Limited Probe system with multiple actuation locations
EP2913682A1 (en) 2014-02-28 2015-09-02 Infinitesima Limited Probe actuation system with feedback controller
BR102015010352B1 (pt) * 2015-05-07 2021-05-04 Instituto Nacional De Metrologia, Qualidade E Tecnologia - Inmetro dispositivo metálico para miscroscopia e espectroscopia óptica de campo próximo e método de fabricação do mesmo
JP6769593B2 (ja) 2015-06-12 2020-10-14 インフィニテシマ リミテッド 走査型プローブシステム
WO2017006436A1 (ja) * 2015-07-07 2017-01-12 オリンパス株式会社 原子間力顕微鏡およびその制御方法
CN105241908A (zh) * 2015-08-28 2016-01-13 广州市本原纳米仪器有限公司 一种改进的扫描探针显微镜扫描方法
US9625331B2 (en) 2015-09-10 2017-04-18 International Business Machines Corporation Surface force apparatus based on a spherical lens
CN105841658A (zh) * 2016-05-12 2016-08-10 四川大学 一种探针式轮廓仪形貌测量动态误差的控制方法
JP6936964B2 (ja) * 2016-08-26 2021-09-22 大日本印刷株式会社 走査型プローブ顕微鏡
US10373799B2 (en) * 2016-08-31 2019-08-06 Fei Company Probe landing detection
GB201705613D0 (en) 2017-04-07 2017-05-24 Infinitesima Ltd Scanning probe system
EP3727694B1 (en) * 2017-12-19 2023-07-19 Siemens Healthcare Diagnostics, Inc. Probe apparatus, assemblies, and methods for aspirating and dispensing liquids
CN109975727B (zh) * 2019-03-04 2020-03-27 中国科学技术大学 纳米级磁共振扫描成像设备以及方法
EP3722817B1 (en) * 2019-04-12 2022-05-11 attocube systems AG Active bimodal afm operation for measurements of optical interaction
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
JP7340761B2 (ja) * 2019-10-28 2023-09-08 パナソニックＩｐマネジメント株式会社 測定用プローブ
CN110763873B (zh) * 2019-11-18 2021-04-13 中国科学院沈阳自动化研究所 基于原子力显微镜技术的峰值力轻敲与扭转共振复合方法
CN111044803A (zh) * 2019-12-12 2020-04-21 佛山市卓膜科技有限公司 一种压电材料的压电系数测量方法
CN113125808A (zh) * 2020-01-10 2021-07-16 精浚科技股份有限公司 聚焦式原子力显微镜
US11519935B2 (en) 2020-08-18 2022-12-06 Oxford Instruments Asylum Research, Inc. Atomic force microscope
CN112964198A (zh) * 2021-04-12 2021-06-15 天津大学 基于自动聚焦原理的曲面样品母线轮廓测量系统及方法
CN115616008B (zh) * 2021-07-13 2023-12-15 同方威视技术股份有限公司 臂架、移动式辐射探测设备、验收系统和安检方法
US11835546B1 (en) 2021-08-04 2023-12-05 Nanometronix LLC Characterization of nanoindented and scratch induced accoustic events
US11346857B1 (en) 2021-08-04 2022-05-31 Nanometronix LLC Characterization of nanoindentation induced acoustic events
US20240426869A1 (en) 2021-10-07 2024-12-26 Infinitesima Limited Method and apparatus for scanning a sample with a probe
EP4339624A1 (en) 2022-09-15 2024-03-20 Infinitesima Limited Image data segmentation
GB202304777D0 (en) 2023-03-31 2023-05-17 Infinitesima Ltd Machine-learning based methods of probe microscopy
CN119534951A (zh) * 2023-08-29 2025-02-28 麦峤里(上海)半导体科技有限责任公司 探针压力的调整方法、探针式测量仪及探针压力调整装置
EP4553505A1 (en) 2023-11-09 2025-05-14 Infinitesima Limited Scanning probe microscope

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Also Published As

Publication number Publication date
US20110247106A1 (en) 2011-10-06
KR20110104018A (ko) 2011-09-21
JP2012511715A (ja) 2012-05-24
WO2010067129A1 (en) 2010-06-17
EP2374011B1 (en) 2018-11-21
RU2518859C2 (ru) 2014-06-10
RU2011128378A (ru) 2013-01-20
JP5654477B2 (ja) 2015-01-14
IL213461A0 (en) 2011-07-31
SG171994A1 (en) 2011-07-28
CA2746147A1 (en) 2010-06-17
CN102272610A (zh) 2011-12-07
EP2374011A1 (en) 2011-10-12
KR101569960B1 (ko) 2015-11-27
US8479310B2 (en) 2013-07-02

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