RU2365960C2 - Гибкий нано-впечатывающий штамп - Google Patents

Гибкий нано-впечатывающий штамп Download PDF

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Publication number
RU2365960C2
RU2365960C2 RU2007112511/28A RU2007112511A RU2365960C2 RU 2365960 C2 RU2365960 C2 RU 2365960C2 RU 2007112511/28 A RU2007112511/28 A RU 2007112511/28A RU 2007112511 A RU2007112511 A RU 2007112511A RU 2365960 C2 RU2365960 C2 RU 2365960C2
Authority
RU
Russia
Prior art keywords
imprinting
stamp
nano
parts
imprinting stamp
Prior art date
Application number
RU2007112511/28A
Other languages
English (en)
Russian (ru)
Other versions
RU2007112511A (ru
Inventor
Теодор НИЛЬСЕН (DK)
Теодор НИЛЬСЕН
Андерс КРИСТЕНСЕН (DK)
Андерс КРИСТЕНСЕН
Оле ХАНСЕН (DK)
Оле ХАНСЕН
Original Assignee
Нил Текнолоджи Апс
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Нил Текнолоджи Апс filed Critical Нил Текнолоджи Апс
Publication of RU2007112511A publication Critical patent/RU2007112511A/ru
Application granted granted Critical
Publication of RU2365960C2 publication Critical patent/RU2365960C2/ru

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/0046—Surface micromachining, i.e. structuring layers on the substrate using stamping, e.g. imprinting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/887—Nanoimprint lithography, i.e. nanostamp

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Printing Methods (AREA)
RU2007112511/28A 2004-09-08 2005-09-07 Гибкий нано-впечатывающий штамп RU2365960C2 (ru)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DKPA200401354 2004-09-08
DKPA200401354 2004-09-08
US61252004P 2004-09-24 2004-09-24
US60/612,520 2004-09-24

Publications (2)

Publication Number Publication Date
RU2007112511A RU2007112511A (ru) 2008-10-20
RU2365960C2 true RU2365960C2 (ru) 2009-08-27

Family

ID=39062428

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2007112511/28A RU2365960C2 (ru) 2004-09-08 2005-09-07 Гибкий нано-впечатывающий штамп

Country Status (6)

Country Link
KR (1) KR20070106683A (pt)
AT (1) ATE472749T1 (pt)
BR (1) BRPI0515058A (pt)
DE (1) DE602005022084D1 (pt)
IL (1) IL181718A (pt)
RU (1) RU2365960C2 (pt)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2476917C1 (ru) * 2011-08-12 2013-02-27 Открытое акционерное общество "НИИ молекулярной электроники и завод "Микрон" Способ изготовления штампа для наноимпринт литографии
RU2671324C2 (ru) * 2013-07-22 2018-10-30 Конинклейке Филипс Н.В. Способ изготовления снабженного рисунком штампа, способ импринтинга снабженным рисунком штампом и полученное импринтингом изделие
RU2701780C2 (ru) * 2014-09-22 2019-10-01 Конинклейке Филипс Н.В. Способ переноса, а также устройство и компьютерный программный продукт для его осуществления
RU2745059C2 (ru) * 2016-04-06 2021-03-18 Конинклейке Филипс Н.В. Штамп для импринт-литографии и способ его изготовления и использования

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101581437B1 (ko) * 2013-12-23 2015-12-30 (재)한국나노기술원 비대칭형 금속 또는 금속산화물 나노구조체의 형성방법
KR101663629B1 (ko) * 2015-11-20 2016-10-10 (재)한국나노기술원 가변형 임프린트용 스탬프를 이용한 비대칭형 금속 또는 금속산화물 나노구조체

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2476917C1 (ru) * 2011-08-12 2013-02-27 Открытое акционерное общество "НИИ молекулярной электроники и завод "Микрон" Способ изготовления штампа для наноимпринт литографии
RU2671324C2 (ru) * 2013-07-22 2018-10-30 Конинклейке Филипс Н.В. Способ изготовления снабженного рисунком штампа, способ импринтинга снабженным рисунком штампом и полученное импринтингом изделие
RU2701780C2 (ru) * 2014-09-22 2019-10-01 Конинклейке Филипс Н.В. Способ переноса, а также устройство и компьютерный программный продукт для его осуществления
RU2745059C2 (ru) * 2016-04-06 2021-03-18 Конинклейке Филипс Н.В. Штамп для импринт-литографии и способ его изготовления и использования

Also Published As

Publication number Publication date
DE602005022084D1 (de) 2010-08-12
IL181718A0 (en) 2007-07-04
RU2007112511A (ru) 2008-10-20
BRPI0515058A (pt) 2008-07-01
IL181718A (en) 2011-09-27
KR20070106683A (ko) 2007-11-05
ATE472749T1 (de) 2010-07-15

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MM4A The patent is invalid due to non-payment of fees

Effective date: 20140908