RU2185688C2 - Солнечный элемент с небольшим затенением и способ его изготовления - Google Patents
Солнечный элемент с небольшим затенением и способ его изготовления Download PDFInfo
- Publication number
- RU2185688C2 RU2185688C2 RU99114608/28A RU99114608A RU2185688C2 RU 2185688 C2 RU2185688 C2 RU 2185688C2 RU 99114608/28 A RU99114608/28 A RU 99114608/28A RU 99114608 A RU99114608 A RU 99114608A RU 2185688 C2 RU2185688 C2 RU 2185688C2
- Authority
- RU
- Russia
- Prior art keywords
- grooves
- solar cell
- silicon substrate
- contact
- planes
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims abstract description 58
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 31
- 239000010703 silicon Substances 0.000 claims abstract description 31
- 238000005530 etching Methods 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims description 24
- 230000002441 reversible effect Effects 0.000 claims description 23
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 12
- 238000009792 diffusion process Methods 0.000 claims description 6
- 230000000873 masking effect Effects 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 238000005275 alloying Methods 0.000 claims description 3
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 2
- 238000010304 firing Methods 0.000 claims 1
- 238000009331 sowing Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 16
- 239000012535 impurity Substances 0.000 description 7
- 239000002800 charge carrier Substances 0.000 description 6
- 238000002161 passivation Methods 0.000 description 6
- 230000006798 recombination Effects 0.000 description 5
- 238000005215 recombination Methods 0.000 description 5
- 230000006378 damage Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/121—The active layers comprising only Group IV materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
- H10F10/146—Back-junction photovoltaic cells, e.g. having interdigitated base-emitter regions on the back side
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
- H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
- H10F77/219—Arrangements for electrodes of back-contact photovoltaic cells
- H10F77/227—Arrangements for electrodes of back-contact photovoltaic cells for emitter wrap-through [EWT] photovoltaic cells, e.g. interdigitated emitter-base back-contacts
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19650111.3 | 1996-12-03 | ||
| DE19650111A DE19650111B4 (de) | 1996-12-03 | 1996-12-03 | Solarzelle mit geringer Abschattung und Verfahren zur Herstellung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU99114608A RU99114608A (ru) | 2001-05-20 |
| RU2185688C2 true RU2185688C2 (ru) | 2002-07-20 |
Family
ID=7813503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU99114608/28A RU2185688C2 (ru) | 1996-12-03 | 1997-11-19 | Солнечный элемент с небольшим затенением и способ его изготовления |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6143976A (enExample) |
| EP (1) | EP0948820B1 (enExample) |
| JP (1) | JP3924327B2 (enExample) |
| AU (1) | AU718786B2 (enExample) |
| DE (2) | DE19650111B4 (enExample) |
| ES (1) | ES2186011T3 (enExample) |
| RU (1) | RU2185688C2 (enExample) |
| WO (1) | WO1998025312A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2303831C2 (ru) * | 2004-06-21 | 2007-07-27 | Открытое Акционерное Общество "Завод электронных материалов и приборов "Аналог" | Паста алюминиевая для кремниевых солнечных элементов |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10045249A1 (de) * | 2000-09-13 | 2002-04-04 | Siemens Ag | Photovoltaisches Bauelement und Verfahren zum Herstellen des Bauelements |
| AUPR174800A0 (en) | 2000-11-29 | 2000-12-21 | Australian National University, The | Semiconductor processing |
| JP4726354B2 (ja) * | 2001-08-22 | 2011-07-20 | 東洋アルミニウム株式会社 | ペースト組成物およびそれを用いた太陽電池 |
| KR20040068928A (ko) | 2001-11-29 | 2004-08-02 | 오리진 에너지 솔라 피티와이 리미티드 | 반도체 가공 방법 |
| US7169669B2 (en) | 2001-12-04 | 2007-01-30 | Origin Energy Solar Pty. Ltd. | Method of making thin silicon sheets for solar cells |
| US7152289B2 (en) * | 2002-09-25 | 2006-12-26 | Intel Corporation | Method for forming bulk resonators silicon <110> substrate |
| US7649141B2 (en) * | 2003-06-30 | 2010-01-19 | Advent Solar, Inc. | Emitter wrap-through back contact solar cells on thin silicon wafers |
| JP4121928B2 (ja) * | 2003-10-08 | 2008-07-23 | シャープ株式会社 | 太陽電池の製造方法 |
| US20050172996A1 (en) * | 2004-02-05 | 2005-08-11 | Advent Solar, Inc. | Contact fabrication of emitter wrap-through back contact silicon solar cells |
| US7144751B2 (en) * | 2004-02-05 | 2006-12-05 | Advent Solar, Inc. | Back-contact solar cells and methods for fabrication |
| US20060060238A1 (en) * | 2004-02-05 | 2006-03-23 | Advent Solar, Inc. | Process and fabrication methods for emitter wrap through back contact solar cells |
| US7335555B2 (en) * | 2004-02-05 | 2008-02-26 | Advent Solar, Inc. | Buried-contact solar cells with self-doping contacts |
| US7101789B2 (en) * | 2004-09-13 | 2006-09-05 | General Electric Company | Method of wet etching vias and articles formed thereby |
| DE102004050269A1 (de) * | 2004-10-14 | 2006-04-20 | Institut Für Solarenergieforschung Gmbh | Verfahren zur Kontakttrennung elektrisch leitfähiger Schichten auf rückkontaktierten Solarzellen und Solarzelle |
| US20060130891A1 (en) * | 2004-10-29 | 2006-06-22 | Carlson David E | Back-contact photovoltaic cells |
| JP4887504B2 (ja) * | 2005-07-04 | 2012-02-29 | 国立大学法人東北大学 | 粒界性格制御多結晶の作製方法 |
| KR101212198B1 (ko) * | 2006-04-06 | 2012-12-13 | 삼성에스디아이 주식회사 | 태양 전지 |
| EP1993142A1 (de) * | 2007-05-14 | 2008-11-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Reflektiv beschichtetes Halbleiterbauelement, Verfahren zu dessen Herstellung sowie dessen Verwendung |
| US8309844B2 (en) * | 2007-08-29 | 2012-11-13 | Ferro Corporation | Thick film pastes for fire through applications in solar cells |
| EP2068369A1 (en) | 2007-12-03 | 2009-06-10 | Interuniversitair Microelektronica Centrum (IMEC) | Photovoltaic cells having metal wrap through and improved passivation |
| EP2071632B1 (en) * | 2007-12-14 | 2013-02-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Thin-film solar cell and process for its manufacture |
| KR100953618B1 (ko) | 2008-01-11 | 2010-04-20 | 삼성에스디아이 주식회사 | 태양 전지 |
| KR100927725B1 (ko) * | 2008-01-25 | 2009-11-18 | 삼성에스디아이 주식회사 | 태양 전지 및 이의 제조 방법 |
| WO2009094545A2 (en) * | 2008-01-25 | 2009-07-30 | Applied Materials, Inc. | Automated solar cell electrical connection apparatus |
| US20090239363A1 (en) * | 2008-03-24 | 2009-09-24 | Honeywell International, Inc. | Methods for forming doped regions in semiconductor substrates using non-contact printing processes and dopant-comprising inks for forming such doped regions using non-contact printing processes |
| WO2009148562A1 (en) * | 2008-06-04 | 2009-12-10 | Solexant Corp. | Thin film solar cells with monolithic integration and backside contact |
| KR100997113B1 (ko) * | 2008-08-01 | 2010-11-30 | 엘지전자 주식회사 | 태양전지 및 그의 제조방법 |
| US20100035422A1 (en) * | 2008-08-06 | 2010-02-11 | Honeywell International, Inc. | Methods for forming doped regions in a semiconductor material |
| US8053867B2 (en) * | 2008-08-20 | 2011-11-08 | Honeywell International Inc. | Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants |
| US7951696B2 (en) * | 2008-09-30 | 2011-05-31 | Honeywell International Inc. | Methods for simultaneously forming N-type and P-type doped regions using non-contact printing processes |
| US8518170B2 (en) * | 2008-12-29 | 2013-08-27 | Honeywell International Inc. | Boron-comprising inks for forming boron-doped regions in semiconductor substrates using non-contact printing processes and methods for fabricating such boron-comprising inks |
| EP2412030A2 (en) * | 2009-03-26 | 2012-02-01 | BP Corporation North America Inc. | Apparatus and method for solar cells with laser fired contacts in thermally diffused doped regions |
| WO2010118687A1 (zh) * | 2009-04-15 | 2010-10-21 | Zhu Huilong | 用于半导体器件制造的基板结构及其制造方法 |
| US8324089B2 (en) * | 2009-07-23 | 2012-12-04 | Honeywell International Inc. | Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions |
| US20110048505A1 (en) * | 2009-08-27 | 2011-03-03 | Gabriela Bunea | Module Level Solution to Solar Cell Polarization Using an Encapsulant with Opened UV Transmission Curve |
| US8377738B2 (en) | 2010-07-01 | 2013-02-19 | Sunpower Corporation | Fabrication of solar cells with counter doping prevention |
| NL2006932C2 (en) | 2011-06-14 | 2012-12-17 | Stichting Energie | Photovoltaic cell. |
| US8629294B2 (en) | 2011-08-25 | 2014-01-14 | Honeywell International Inc. | Borate esters, boron-comprising dopants, and methods of fabricating boron-comprising dopants |
| US8975170B2 (en) | 2011-10-24 | 2015-03-10 | Honeywell International Inc. | Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions |
| US9812590B2 (en) | 2012-10-25 | 2017-11-07 | Sunpower Corporation | Bifacial solar cell module with backside reflector |
| US9035172B2 (en) | 2012-11-26 | 2015-05-19 | Sunpower Corporation | Crack resistant solar cell modules |
| US8796061B2 (en) | 2012-12-21 | 2014-08-05 | Sunpower Corporation | Module assembly for thin solar cells |
| US9685571B2 (en) | 2013-08-14 | 2017-06-20 | Sunpower Corporation | Solar cell module with high electric susceptibility layer |
| JP6338990B2 (ja) | 2014-09-19 | 2018-06-06 | 株式会社東芝 | 多接合型太陽電池 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5067985A (en) * | 1990-06-08 | 1991-11-26 | The United States Of America As Represented By The Secretary Of The Air Force | Back-contact vertical-junction solar cell and method |
| RU2065227C1 (ru) * | 1994-06-01 | 1996-08-10 | Борис Александрович Александров | Омический контакт к кремниеву солнечному элементу |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4838952A (en) * | 1988-04-29 | 1989-06-13 | Spectrolab, Inc. | Controlled reflectance solar cell |
| US5468652A (en) * | 1993-07-14 | 1995-11-21 | Sandia Corporation | Method of making a back contacted solar cell |
| DE4343296C2 (de) * | 1993-12-17 | 1996-09-12 | Siemens Ag | Verfahren zur Herstellung einer Siliziumhalbleiterscheibe mit drei gegeneinander verkippten kreissektorförmigen monokristallinen Bereichen und seine Verwendung |
-
1996
- 1996-12-03 DE DE19650111A patent/DE19650111B4/de not_active Expired - Fee Related
-
1997
- 1997-11-19 WO PCT/EP1997/006465 patent/WO1998025312A1/de not_active Ceased
- 1997-11-19 US US09/319,397 patent/US6143976A/en not_active Expired - Fee Related
- 1997-11-19 DE DE59708512T patent/DE59708512D1/de not_active Expired - Fee Related
- 1997-11-19 AU AU53231/98A patent/AU718786B2/en not_active Ceased
- 1997-11-19 JP JP52512698A patent/JP3924327B2/ja not_active Expired - Fee Related
- 1997-11-19 EP EP97950204A patent/EP0948820B1/de not_active Expired - Lifetime
- 1997-11-19 RU RU99114608/28A patent/RU2185688C2/ru not_active IP Right Cessation
- 1997-11-19 ES ES97950204T patent/ES2186011T3/es not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5067985A (en) * | 1990-06-08 | 1991-11-26 | The United States Of America As Represented By The Secretary Of The Air Force | Back-contact vertical-junction solar cell and method |
| RU2065227C1 (ru) * | 1994-06-01 | 1996-08-10 | Борис Александрович Александров | Омический контакт к кремниеву солнечному элементу |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2303831C2 (ru) * | 2004-06-21 | 2007-07-27 | Открытое Акционерное Общество "Завод электронных материалов и приборов "Аналог" | Паста алюминиевая для кремниевых солнечных элементов |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1998025312A1 (de) | 1998-06-11 |
| EP0948820B1 (de) | 2002-10-16 |
| EP0948820A1 (de) | 1999-10-13 |
| DE19650111B4 (de) | 2004-07-01 |
| JP3924327B2 (ja) | 2007-06-06 |
| ES2186011T3 (es) | 2003-05-01 |
| AU5323198A (en) | 1998-06-29 |
| JP2001504996A (ja) | 2001-04-10 |
| DE19650111A1 (de) | 1998-06-04 |
| DE59708512D1 (de) | 2002-11-21 |
| US6143976A (en) | 2000-11-07 |
| AU718786B2 (en) | 2000-04-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PD4A | Correction of name of patent owner | ||
| MM4A | The patent is invalid due to non-payment of fees |
Effective date: 20061120 |