RU2018133478A - Изделие с покрытием, включающее островковый слой(и) металла, сформированный с использованием регулирования стехиометрии, и/или способ его изготовления - Google Patents

Изделие с покрытием, включающее островковый слой(и) металла, сформированный с использованием регулирования стехиометрии, и/или способ его изготовления Download PDF

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RU2018133478A
RU2018133478A RU2018133478A RU2018133478A RU2018133478A RU 2018133478 A RU2018133478 A RU 2018133478A RU 2018133478 A RU2018133478 A RU 2018133478A RU 2018133478 A RU2018133478 A RU 2018133478A RU 2018133478 A RU2018133478 A RU 2018133478A
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coated
preceding paragraph
metal
layer
substrate
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RU2018133478A
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RU2018133478A3 (ru
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Брент БОЙС
Ивэй ЛУ
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ГАРДИАН ГЛАСС, ЭлЭлСи
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/006—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character
    • C03C17/007—Surface treatment of glass, not in the form of fibres or filaments, by coating with materials of composite character containing a dispersed phase, e.g. particles, fibres or flakes, in a continuous phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
    • C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3684—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used for decoration purposes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/25—Metals
    • C03C2217/251—Al, Cu, Mg or noble metals
    • C03C2217/254—Noble metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/40—Coatings comprising at least one inhomogeneous layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/72—Decorative coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/154—Deposition methods from the vapour phase by sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/31—Pre-treatment

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  • Chemical & Material Sciences (AREA)
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  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
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  • Thin Magnetic Films (AREA)

Claims (25)

1. Способ изготовления изделия с покрытием, включающего островковый слой металла, поддерживаемый подложкой, имеющей подлежащую покрытию поверхность, при этом способ включает этапы, на которых:
селективно модифицируют локальную стехиометрию поверхности в одной или более областях подлежащей покрытию поверхности; и
формируют островковый слой металла непосредственно или опосредованно на поверхности подложки в требуемом рисунке, основанном, по меньшей мере частично, на результате селективной модификации.
2. Способ по п. 1, в котором требуемый рисунок представляет собой по существу равномерный рисунок островкового слоя металла.
3. Способ по любому предшествующему пункту, в котором изделие с покрытием имитирует тонированное стекло.
4. Способ по любому предшествующему пункту, в котором селективная модификация очерчивает, по меньшей мере частично, первую область, где должен быть сформирован островковый слой металла, и вторую область, где островковый слой металла формироваться не должен, при этом первая и вторая области соответствуют требуемому рисунку.
5. Способ по любому предшествующему пункту, в котором изделие с покрытием обладает соответствующим требуемому рисунку зрительно воспринимаемым внешним видом, создаваемым за счет эффекта поверхностных плазмонов островкового слоя металла.
6. Способ по любому предшествующему пункту, дополнительно включающий подогрев подложки до температуры, превышающей комнатную температуру, но менее 300°С.
7. Способ по любому предшествующему пункту, в котором островки островкового слоя металла имеют распределение среднего размера 5-15 нм или 100-300 нм в диаметре или большей протяженности.
8. Способ по любому предшествующему пункту, в котором островковый слой металла включает сплошной, но прерывистый слой островков, образованных из благородного или инертного металла.
9. Способ по любому предшествующему пункту, в котором подложка представляет собой стеклянную подложку.
10. Способ по любому предшествующему пункту, в котором селективную модификацию выполняют путем сканирования лазером по подлежащей покрытию поверхности.
11. Способ по любому предшествующему пункту, в котором распыляемая мишень является источником металла в островковом слое металла.
12. Способ по любому предшествующему пункту, в котором формирование островкового слоя металла и селективная модификация включают совместное напыление из первой и второй мишеней, отличных друг от друга, и использование лазера для усиления напыления материала из строго одной из первой и второй мишеней.
13. Способ по п. 12, в котором использование лазера для усиления напыления усиливает химическое взаимодействие между подлежащей покрытию поверхностью и островковым слоем металла.
14. Способ по любому предшествующему пункту, в котором подлежащая покрытию поверхность является главной поверхностью подложки.
15. Способ по любому предшествующему пункту, дополнительно включающий формирование непосредственно или опосредованно на подложке тонкопленочного покрытия, при этом подлежащая покрытию поверхность является главной поверхностью тонкопленочного покрытия.
16. Способ изготовления изделия с покрытием, включающего подложку, имеющую подлежащую покрытию поверхность, слой, содержащий множество островков, сформированных на подлежащей покрытию поверхности при изготовлении изделия с покрытием, при этом способ включает этапы, на которых:
совместно распыляют первую и вторую мишени, отличные друг от друга; и
селективно регулируют напыление материала с помощью лазера для регулирования химических взаимодействий, происходящих на подлежащей покрытию поверхности при формировании на подложке содержащего островки слоя,
при этом каждый из островков содержит металл, и островки совместно создают эффект поверхностных плазмонов, который заставляет изделие с покрытием иметь требуемый оптический внешний вид.
17. Способ по п. 16, в котором селективное регулирование включает в себя фокусировку лазера на строго одной из первой и второй мишеней.
18. Способ по п. 17, в котором селективное регулирование усиливает распыление материала, на котором сфокусирован лазер.
19. Изделие с покрытием, изготовленное способом по п. 1.
20. Изделие с покрытием, изготовленное способом по п. 16.
RU2018133478A 2016-02-24 2017-02-15 Изделие с покрытием, включающее островковый слой(и) металла, сформированный с использованием регулирования стехиометрии, и/или способ его изготовления RU2018133478A (ru)

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Application Number Priority Date Filing Date Title
US15/051,927 2016-02-24
US15/051,927 US20170241009A1 (en) 2016-02-24 2016-02-24 Coated article including metal island layer(s) formed using stoichiometry control, and/or method of making the same
PCT/US2017/017851 WO2017146944A1 (en) 2016-02-24 2017-02-15 Coated article including metal island layer(s) formed using stoichiometry control, and/or method of making the same

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RU2018133478A true RU2018133478A (ru) 2020-03-24
RU2018133478A3 RU2018133478A3 (ru) 2020-06-01

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10562812B2 (en) 2018-06-12 2020-02-18 Guardian Glass, LLC Coated article having metamaterial-inclusive layer, coating having metamaterial-inclusive layer, and/or method of making the same
US10830933B2 (en) 2018-06-12 2020-11-10 Guardian Glass, LLC Matrix-embedded metamaterial coating, coated article having matrix-embedded metamaterial coating, and/or method of making the same
CN109085668B (zh) * 2018-08-01 2021-04-20 中国航空工业集团公司雷华电子技术研究所 局域表面等离子体谐振器
CN115159861B (zh) * 2022-07-05 2023-10-31 上海玻光科技合伙企业(有限合伙) 一种中性色光学薄膜

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0823645B2 (ja) * 1989-11-24 1996-03-06 松下電器産業株式会社 非線形光学薄膜及びその製造方法
JPH03294829A (ja) * 1990-04-13 1991-12-26 Matsushita Electric Ind Co Ltd 非線形光学薄膜およびその製造方法
US5817410A (en) * 1991-11-18 1998-10-06 Matsushita Electric Industrial Co., Ltd. Nonlinear optical composites using linear transparent substances and method for producing the same
US5401569A (en) * 1992-05-19 1995-03-28 Tdk Corporation Nonlinear optical thin film
US5852303A (en) * 1996-10-11 1998-12-22 Cuomo; Jerome J. Amorphous matrices having dispersed cesium
US20050244977A1 (en) * 2004-03-24 2005-11-03 Drachev Vladimir P Adaptive metal films for detection of biomolecules
JP4847123B2 (ja) * 2005-12-20 2011-12-28 独立行政法人理化学研究所 近接場光分布伝送素子
US20100092747A1 (en) * 2008-10-14 2010-04-15 Northwestern University Infrared-reflecting films and method for making the same
TWI383055B (zh) * 2009-02-17 2013-01-21 Univ Nat Chunghsing The Method of Making Metal Material Pattern
CN201358298Y (zh) * 2009-02-23 2009-12-09 河北大学 一种磁控和脉冲激光共沉积装置
TW201104237A (en) * 2009-07-16 2011-02-01 Univ Nat Taiwan Localized surface plasmon resonance sensor and fabrication thereof and method for forming a metal neon-structure
US8836941B2 (en) * 2010-02-10 2014-09-16 Imra America, Inc. Method and apparatus to prepare a substrate for molecular detection
FR2965749B1 (fr) * 2010-10-12 2014-02-14 Univ Troyes Technologie Structure multicouche comprenant un métal précieux accroche sur un substrat diélectrique procédé et utilisation associes
JP6085095B2 (ja) * 2011-03-31 2017-02-22 住友化学株式会社 光学素子
JP6018774B2 (ja) * 2011-03-31 2016-11-02 住友化学株式会社 金属系粒子集合体
GB2493698B (en) * 2011-08-08 2018-02-28 Univ Nottingham Trent Surface plasmon resonance in thin films
WO2013039454A1 (en) * 2011-09-12 2013-03-21 Agency For Science, Technology And Research An optical arrangement and a method of forming the same
LT6112B (lt) * 2013-05-24 2015-01-26 Integrated Optics, Uab Paviršiumi aktyvuotos ramano sklaidos (pars) jutiklis ir jo gamybos būdas
US20160202394A1 (en) * 2013-09-02 2016-07-14 Danmarks Tekniske Universitet Nanostructures for structural colouring
US20150205021A1 (en) * 2014-01-20 2015-07-23 Pc Krause And Associates, Inc. Metamaterial for improved energy efficiency

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CN109071327A (zh) 2018-12-21
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RU2018133478A3 (ru) 2020-06-01
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