RU2015101761A - Способ производства микроносителей - Google Patents
Способ производства микроносителей Download PDFInfo
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- RU2015101761A RU2015101761A RU2015101761A RU2015101761A RU2015101761A RU 2015101761 A RU2015101761 A RU 2015101761A RU 2015101761 A RU2015101761 A RU 2015101761A RU 2015101761 A RU2015101761 A RU 2015101761A RU 2015101761 A RU2015101761 A RU 2015101761A
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- 238000000034 method Methods 0.000 title claims abstract 21
- 238000004519 manufacturing process Methods 0.000 title claims abstract 3
- 239000010410 layer Substances 0.000 claims abstract 48
- 238000005530 etching Methods 0.000 claims abstract 10
- 229920000642 polymer Polymers 0.000 claims abstract 10
- 239000000203 mixture Substances 0.000 claims abstract 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract 8
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract 5
- 238000001312 dry etching Methods 0.000 claims abstract 4
- 239000000377 silicon dioxide Substances 0.000 claims abstract 3
- 239000012790 adhesive layer Substances 0.000 claims abstract 2
- 239000011521 glass Substances 0.000 claims abstract 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract 2
- 239000010453 quartz Substances 0.000 claims abstract 2
- 229910052710 silicon Inorganic materials 0.000 claims abstract 2
- 239000010703 silicon Substances 0.000 claims abstract 2
- 239000000758 substrate Substances 0.000 claims abstract 2
- 239000002184 metal Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- -1 polytetrafluoroethylene Polymers 0.000 claims 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims 1
- 239000004810 polytetrafluoroethylene Substances 0.000 claims 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
- H01G13/06—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
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- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/508—Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L3/54—Labware with identification means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54313—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals the carrier being characterised by its particulate form
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00497—Features relating to the solid phase supports
- B01J2219/005—Beads
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- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
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- B01J2219/00277—Apparatus
- B01J2219/00497—Features relating to the solid phase supports
- B01J2219/00527—Sheets
- B01J2219/00536—Sheets in the shape of disks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
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- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/0054—Means for coding or tagging the apparatus or the reagents
- B01J2219/00554—Physical means
- B01J2219/00556—Perforations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00583—Features relative to the processes being carried out
- B01J2219/00603—Making arrays on substantially continuous surfaces
- B01J2219/00605—Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports
- B01J2219/00632—Introduction of reactive groups to the surface
- B01J2219/00637—Introduction of reactive groups to the surface by coating it with another layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L2200/12—Specific details about manufacturing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
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- B01L2300/0809—Geometry, shape and general structure rectangular shaped
- B01L2300/0819—Microarrays; Biochips
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01L2300/0893—Geometry, shape and general structure having a very large number of wells, microfabricated wells
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/058—Microfluidics not provided for in B81B2201/051 - B81B2201/054
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
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Abstract
1. Способ изготовления микроносителей (19, 20), включающий в себя следующие шаги:(a) получение пластины (6), имеющей структуру сэндвича, состоящего из нижнего слоя (7), верхнего слоя (8) и изолирующего слоя (9), расположенного между упомянутым нижним и верхним слоями (7, 8),(b) стравливание верхнего слоя (8) с целью разграничения боковых стенок (12) тел (11) микроносителей (19, 20),(c) нанесение первого активного слоя (13) как минимум на верхнюю поверхность (14) тел (11),(d) нанесение сплошного полимерного слоя (16, 22) поверх первого активного слоя (13),(e) стравливание нижнего слоя (7) и изолирующего слоя (9),(f) удаление полимерного слоя (16, 22) для освобождения микроносителей (19, 20).2. Способ по п. 1, в котором шаг (е) осуществляется путем первого травления для селективного травления нижнего слоя (7), например, путем использования травильной ванны и путем второго травления для селективного травления изолирующего слоя (9), например, путем сухого травления.3. Способ по п. 1, в котором полимерный слой (16) удаляется путем сухого травления.4. Способ по п. 1, в котором отличительная метка, например код (2, 3), гравируется на микроносителях (19, 20), например, между шагами (b) и (с).5. Способ по п. 1, в котором в состав нижнего слоя (7) и/или верхнего слоя (8) входит монокристаллический кремний.6. Способ по п. 1, в котором в состав изолирующего слоя (9) входит диоксид кремния.7. Способ по п. 1, в котором в состав полимерного слоя (16) входит дипараксилен.8. Способ по п. 1, в котором полимерный слой представляет собой слой клея (22), который связывает подложку (21), например пластину, изготавливаемую из кремния, кварца или стекла, с пластиной (6).9. Способ по п. 1, в котором второй активный слой (17) наносится как минимум на нижнюю поверхность (18) тел (11) микроносителей (19), например, между шагами (e) и (f).10. Способ по п. 1, в котором в состав первого
Claims (12)
1. Способ изготовления микроносителей (19, 20), включающий в себя следующие шаги:
(a) получение пластины (6), имеющей структуру сэндвича, состоящего из нижнего слоя (7), верхнего слоя (8) и изолирующего слоя (9), расположенного между упомянутым нижним и верхним слоями (7, 8),
(b) стравливание верхнего слоя (8) с целью разграничения боковых стенок (12) тел (11) микроносителей (19, 20),
(c) нанесение первого активного слоя (13) как минимум на верхнюю поверхность (14) тел (11),
(d) нанесение сплошного полимерного слоя (16, 22) поверх первого активного слоя (13),
(e) стравливание нижнего слоя (7) и изолирующего слоя (9),
(f) удаление полимерного слоя (16, 22) для освобождения микроносителей (19, 20).
2. Способ по п. 1, в котором шаг (е) осуществляется путем первого травления для селективного травления нижнего слоя (7), например, путем использования травильной ванны и путем второго травления для селективного травления изолирующего слоя (9), например, путем сухого травления.
3. Способ по п. 1, в котором полимерный слой (16) удаляется путем сухого травления.
4. Способ по п. 1, в котором отличительная метка, например код (2, 3), гравируется на микроносителях (19, 20), например, между шагами (b) и (с).
5. Способ по п. 1, в котором в состав нижнего слоя (7) и/или верхнего слоя (8) входит монокристаллический кремний.
6. Способ по п. 1, в котором в состав изолирующего слоя (9) входит диоксид кремния.
7. Способ по п. 1, в котором в состав полимерного слоя (16) входит дипараксилен.
8. Способ по п. 1, в котором полимерный слой представляет собой слой клея (22), который связывает подложку (21), например пластину, изготавливаемую из кремния, кварца или стекла, с пластиной (6).
9. Способ по п. 1, в котором второй активный слой (17) наносится как минимум на нижнюю поверхность (18) тел (11) микроносителей (19), например, между шагами (e) и (f).
10. Способ по п. 1, в котором в состав первого активного слоя (13) и/или второго активного слоя (17) входит материал, обладающий оптическими или магнитными свойствами, поликристаллический кремний и/или политетрафторэтилен или слой металла с высоким коэффициентом отражения.
11. Способ по п. 1, в котором в состав первого активного слоя (13) и/или второго активного слоя (17) входит оксид или нитрид, например диоксид кремния, или слой металла.
12. Микроноситель (19), изготавливаемый способом по п. 9, включающий в себя тело (11), имеющее верхнюю поверхность (14), покрытую первым активным слоем (13), и нижнюю поверхность (18), покрытую вторым активным слоем (17).
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP12177718.9A EP2690059A1 (en) | 2012-07-24 | 2012-07-24 | Method for producing microcarriers |
EP12177718.9 | 2012-07-24 | ||
PCT/EP2013/065442 WO2014016262A1 (en) | 2012-07-24 | 2013-07-22 | Method for producing microcarriers |
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RU2015101761A true RU2015101761A (ru) | 2016-08-10 |
RU2631526C2 RU2631526C2 (ru) | 2017-09-25 |
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RU2015101761A RU2631526C2 (ru) | 2012-07-24 | 2013-07-22 | Способ производства микроносителей |
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Country | Link |
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US (1) | US9349545B2 (ru) |
EP (2) | EP2690059A1 (ru) |
JP (1) | JP6277188B2 (ru) |
KR (1) | KR20150040939A (ru) |
CN (1) | CN104736470B (ru) |
AU (1) | AU2013295081B2 (ru) |
BR (1) | BR112015001463A2 (ru) |
CA (1) | CA2879150C (ru) |
ES (1) | ES2787857T3 (ru) |
IN (1) | IN2015DN00439A (ru) |
RU (1) | RU2631526C2 (ru) |
WO (1) | WO2014016262A1 (ru) |
ZA (1) | ZA201500438B (ru) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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EP2690058A1 (en) * | 2012-07-24 | 2014-01-29 | Biocartis SA | Method for producing microcarriers and for performing biological assays |
US9978644B1 (en) * | 2016-09-07 | 2018-05-22 | Amkor Technology, Inc. | Semiconductor device and manufacturing method |
KR102348180B1 (ko) | 2019-02-19 | 2022-01-07 | 전남대학교산학협력단 | 색전술용 마이크로캐리어 및 그 제조방법 |
CN110484129B (zh) * | 2019-07-02 | 2022-01-25 | 昆山联滔电子有限公司 | 带有防护涂层的产品及其制备方法 |
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US5071792A (en) * | 1990-11-05 | 1991-12-10 | Harris Corporation | Process for forming extremely thin integrated circuit dice |
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-
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- 2012-07-24 EP EP12177718.9A patent/EP2690059A1/en not_active Withdrawn
-
2013
- 2013-07-22 RU RU2015101761A patent/RU2631526C2/ru not_active IP Right Cessation
- 2013-07-22 AU AU2013295081A patent/AU2013295081B2/en not_active Ceased
- 2013-07-22 ES ES13739449T patent/ES2787857T3/es active Active
- 2013-07-22 JP JP2015523519A patent/JP6277188B2/ja not_active Expired - Fee Related
- 2013-07-22 EP EP13739449.0A patent/EP2877423B1/en active Active
- 2013-07-22 BR BR112015001463A patent/BR112015001463A2/pt not_active Application Discontinuation
- 2013-07-22 WO PCT/EP2013/065442 patent/WO2014016262A1/en active Application Filing
- 2013-07-22 KR KR20157004439A patent/KR20150040939A/ko not_active Application Discontinuation
- 2013-07-22 CN CN201380049104.5A patent/CN104736470B/zh not_active Expired - Fee Related
- 2013-07-22 US US14/414,174 patent/US9349545B2/en active Active
- 2013-07-22 CA CA2879150A patent/CA2879150C/en not_active Expired - Fee Related
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2015
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WO2014016262A1 (en) | 2014-01-30 |
JP6277188B2 (ja) | 2018-02-07 |
US9349545B2 (en) | 2016-05-24 |
KR20150040939A (ko) | 2015-04-15 |
IN2015DN00439A (ru) | 2015-06-19 |
EP2690059A1 (en) | 2014-01-29 |
BR112015001463A2 (pt) | 2017-07-04 |
AU2013295081A1 (en) | 2015-02-05 |
EP2877423A1 (en) | 2015-06-03 |
RU2631526C2 (ru) | 2017-09-25 |
ES2787857T3 (es) | 2020-10-19 |
CN104736470A (zh) | 2015-06-24 |
US20150162141A1 (en) | 2015-06-11 |
AU2013295081B2 (en) | 2016-10-06 |
JP2015531691A (ja) | 2015-11-05 |
CA2879150C (en) | 2020-07-14 |
CN104736470B (zh) | 2016-08-17 |
CA2879150A1 (en) | 2014-01-30 |
EP2877423B1 (en) | 2020-03-11 |
ZA201500438B (en) | 2017-11-29 |
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