RU2015101761A - Способ производства микроносителей - Google Patents

Способ производства микроносителей Download PDF

Info

Publication number
RU2015101761A
RU2015101761A RU2015101761A RU2015101761A RU2015101761A RU 2015101761 A RU2015101761 A RU 2015101761A RU 2015101761 A RU2015101761 A RU 2015101761A RU 2015101761 A RU2015101761 A RU 2015101761A RU 2015101761 A RU2015101761 A RU 2015101761A
Authority
RU
Russia
Prior art keywords
layer
etching
composition
microcarriers
active layer
Prior art date
Application number
RU2015101761A
Other languages
English (en)
Other versions
RU2631526C2 (ru
Inventor
Рафаел ТОРНЭЙ
Николас ДЕМАЙЕРРИ
Стефан ГАМПЕР
Филипп РЕНАУД
Original Assignee
МАЙКАРТИС ЭнВи
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by МАЙКАРТИС ЭнВи filed Critical МАЙКАРТИС ЭнВи
Publication of RU2015101761A publication Critical patent/RU2015101761A/ru
Application granted granted Critical
Publication of RU2631526C2 publication Critical patent/RU2631526C2/ru

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502761Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/508Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/54Labware with identification means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/54Labware with identification means
    • B01L3/545Labware with identification means for laboratory containers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00Subject matter not provided for in other groups of this subclass
    • B81C99/0075Manufacture of substrate-free structures
    • B81C99/008Manufacture of substrate-free structures separating the processed structure from a mother substrate
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54313Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals the carrier being characterised by its particulate form
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • B01J2219/005Beads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • B01J2219/00502Particles of irregular geometry
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/00497Features relating to the solid phase supports
    • B01J2219/00527Sheets
    • B01J2219/00536Sheets in the shape of disks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277Apparatus
    • B01J2219/0054Means for coding or tagging the apparatus or the reagents
    • B01J2219/00554Physical means
    • B01J2219/00556Perforations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583Features relative to the processes being carried out
    • B01J2219/00603Making arrays on substantially continuous surfaces
    • B01J2219/00605Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports
    • B01J2219/00632Introduction of reactive groups to the surface
    • B01J2219/00637Introduction of reactive groups to the surface by coating it with another layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06Fluid handling related problems
    • B01L2200/0647Handling flowable solids, e.g. microscopic beads, cells, particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/10Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12Specific details about manufacturing devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0803Disc shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0809Geometry, shape and general structure rectangular shaped
    • B01L2300/0819Microarrays; Biochips
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0848Specific forms of parts of containers
    • B01L2300/0851Bottom walls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0893Geometry, shape and general structure having a very large number of wells, microfabricated wells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/05Microfluidics
    • B81B2201/058Microfluidics not provided for in B81B2201/051 - B81B2201/054
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/06Bio-MEMS

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Clinical Laboratory Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Physics & Mathematics (AREA)
  • Urology & Nephrology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Biotechnology (AREA)
  • Cell Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Microbiology (AREA)
  • Fluid Mechanics (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

1. Способ изготовления микроносителей (19, 20), включающий в себя следующие шаги:(a) получение пластины (6), имеющей структуру сэндвича, состоящего из нижнего слоя (7), верхнего слоя (8) и изолирующего слоя (9), расположенного между упомянутым нижним и верхним слоями (7, 8),(b) стравливание верхнего слоя (8) с целью разграничения боковых стенок (12) тел (11) микроносителей (19, 20),(c) нанесение первого активного слоя (13) как минимум на верхнюю поверхность (14) тел (11),(d) нанесение сплошного полимерного слоя (16, 22) поверх первого активного слоя (13),(e) стравливание нижнего слоя (7) и изолирующего слоя (9),(f) удаление полимерного слоя (16, 22) для освобождения микроносителей (19, 20).2. Способ по п. 1, в котором шаг (е) осуществляется путем первого травления для селективного травления нижнего слоя (7), например, путем использования травильной ванны и путем второго травления для селективного травления изолирующего слоя (9), например, путем сухого травления.3. Способ по п. 1, в котором полимерный слой (16) удаляется путем сухого травления.4. Способ по п. 1, в котором отличительная метка, например код (2, 3), гравируется на микроносителях (19, 20), например, между шагами (b) и (с).5. Способ по п. 1, в котором в состав нижнего слоя (7) и/или верхнего слоя (8) входит монокристаллический кремний.6. Способ по п. 1, в котором в состав изолирующего слоя (9) входит диоксид кремния.7. Способ по п. 1, в котором в состав полимерного слоя (16) входит дипараксилен.8. Способ по п. 1, в котором полимерный слой представляет собой слой клея (22), который связывает подложку (21), например пластину, изготавливаемую из кремния, кварца или стекла, с пластиной (6).9. Способ по п. 1, в котором второй активный слой (17) наносится как минимум на нижнюю поверхность (18) тел (11) микроносителей (19), например, между шагами (e) и (f).10. Способ по п. 1, в котором в состав первого

Claims (12)

1. Способ изготовления микроносителей (19, 20), включающий в себя следующие шаги:
(a) получение пластины (6), имеющей структуру сэндвича, состоящего из нижнего слоя (7), верхнего слоя (8) и изолирующего слоя (9), расположенного между упомянутым нижним и верхним слоями (7, 8),
(b) стравливание верхнего слоя (8) с целью разграничения боковых стенок (12) тел (11) микроносителей (19, 20),
(c) нанесение первого активного слоя (13) как минимум на верхнюю поверхность (14) тел (11),
(d) нанесение сплошного полимерного слоя (16, 22) поверх первого активного слоя (13),
(e) стравливание нижнего слоя (7) и изолирующего слоя (9),
(f) удаление полимерного слоя (16, 22) для освобождения микроносителей (19, 20).
2. Способ по п. 1, в котором шаг (е) осуществляется путем первого травления для селективного травления нижнего слоя (7), например, путем использования травильной ванны и путем второго травления для селективного травления изолирующего слоя (9), например, путем сухого травления.
3. Способ по п. 1, в котором полимерный слой (16) удаляется путем сухого травления.
4. Способ по п. 1, в котором отличительная метка, например код (2, 3), гравируется на микроносителях (19, 20), например, между шагами (b) и (с).
5. Способ по п. 1, в котором в состав нижнего слоя (7) и/или верхнего слоя (8) входит монокристаллический кремний.
6. Способ по п. 1, в котором в состав изолирующего слоя (9) входит диоксид кремния.
7. Способ по п. 1, в котором в состав полимерного слоя (16) входит дипараксилен.
8. Способ по п. 1, в котором полимерный слой представляет собой слой клея (22), который связывает подложку (21), например пластину, изготавливаемую из кремния, кварца или стекла, с пластиной (6).
9. Способ по п. 1, в котором второй активный слой (17) наносится как минимум на нижнюю поверхность (18) тел (11) микроносителей (19), например, между шагами (e) и (f).
10. Способ по п. 1, в котором в состав первого активного слоя (13) и/или второго активного слоя (17) входит материал, обладающий оптическими или магнитными свойствами, поликристаллический кремний и/или политетрафторэтилен или слой металла с высоким коэффициентом отражения.
11. Способ по п. 1, в котором в состав первого активного слоя (13) и/или второго активного слоя (17) входит оксид или нитрид, например диоксид кремния, или слой металла.
12. Микроноситель (19), изготавливаемый способом по п. 9, включающий в себя тело (11), имеющее верхнюю поверхность (14), покрытую первым активным слоем (13), и нижнюю поверхность (18), покрытую вторым активным слоем (17).
RU2015101761A 2012-07-24 2013-07-22 Способ производства микроносителей RU2631526C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12177718.9A EP2690059A1 (en) 2012-07-24 2012-07-24 Method for producing microcarriers
EP12177718.9 2012-07-24
PCT/EP2013/065442 WO2014016262A1 (en) 2012-07-24 2013-07-22 Method for producing microcarriers

Publications (2)

Publication Number Publication Date
RU2015101761A true RU2015101761A (ru) 2016-08-10
RU2631526C2 RU2631526C2 (ru) 2017-09-25

Family

ID=48808369

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2015101761A RU2631526C2 (ru) 2012-07-24 2013-07-22 Способ производства микроносителей

Country Status (13)

Country Link
US (1) US9349545B2 (ru)
EP (2) EP2690059A1 (ru)
JP (1) JP6277188B2 (ru)
KR (1) KR20150040939A (ru)
CN (1) CN104736470B (ru)
AU (1) AU2013295081B2 (ru)
BR (1) BR112015001463A2 (ru)
CA (1) CA2879150C (ru)
ES (1) ES2787857T3 (ru)
IN (1) IN2015DN00439A (ru)
RU (1) RU2631526C2 (ru)
WO (1) WO2014016262A1 (ru)
ZA (1) ZA201500438B (ru)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2690058A1 (en) * 2012-07-24 2014-01-29 Biocartis SA Method for producing microcarriers and for performing biological assays
US9978644B1 (en) * 2016-09-07 2018-05-22 Amkor Technology, Inc. Semiconductor device and manufacturing method
KR102348180B1 (ko) 2019-02-19 2022-01-07 전남대학교산학협력단 색전술용 마이크로캐리어 및 그 제조방법
CN110484129B (zh) * 2019-07-02 2022-01-25 昆山联滔电子有限公司 带有防护涂层的产品及其制备方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5071792A (en) * 1990-11-05 1991-12-10 Harris Corporation Process for forming extremely thin integrated circuit dice
US5545291A (en) * 1993-12-17 1996-08-13 The Regents Of The University Of California Method for fabricating self-assembling microstructures
WO2000063695A1 (en) 1999-04-16 2000-10-26 Tibotec N.V. Encoding of microcarriers
US6963530B1 (en) * 2000-02-01 2005-11-08 Research Investment Network, Inc. Near-field optical head system with integrated slider and laser
TWI220927B (en) * 2000-05-12 2004-09-11 Rong-Seng Chang Method for producing a micro-carrier
US6823744B2 (en) * 2002-01-11 2004-11-30 Honda Giken Kogyo Kabushiki Kaisha Six-axis force sensor
US7872804B2 (en) * 2002-08-20 2011-01-18 Illumina, Inc. Encoded particle having a grating with variations in the refractive index
JP2004349416A (ja) * 2003-05-21 2004-12-09 Nikon Corp Memsの製造方法
US7951580B2 (en) * 2004-04-21 2011-05-31 The Regents Of The University Of California Automated, programmable, high throughput, multiplexed assay system for cellular and biological assays
US7507638B2 (en) * 2004-06-30 2009-03-24 Freescale Semiconductor, Inc. Ultra-thin die and method of fabricating same
JP2010500764A (ja) * 2006-08-07 2010-01-07 セミ−フォトニクス カンパニー リミテッド 複数の半導体ダイを分離する方法
WO2009014848A2 (en) * 2007-06-25 2009-01-29 Affymetrix, Inc. Patterned microcodes
US8097926B2 (en) * 2008-10-07 2012-01-17 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
CA2745580C (en) 2008-12-23 2017-11-07 Biocartis Sa Assay device and method for performing biological assays
WO2010134019A2 (en) * 2009-05-19 2010-11-25 Ramot At Tel Aviv University Ltd. Vertical junction pv cells
EP2312393A1 (en) 2009-10-14 2011-04-20 Biocartis SA Method for producing microparticles
US8953314B1 (en) * 2010-08-09 2015-02-10 Georgia Tech Research Corporation Passive heat sink for dynamic thermal management of hot spots

Also Published As

Publication number Publication date
WO2014016262A1 (en) 2014-01-30
JP6277188B2 (ja) 2018-02-07
US9349545B2 (en) 2016-05-24
KR20150040939A (ko) 2015-04-15
IN2015DN00439A (ru) 2015-06-19
EP2690059A1 (en) 2014-01-29
BR112015001463A2 (pt) 2017-07-04
AU2013295081A1 (en) 2015-02-05
EP2877423A1 (en) 2015-06-03
RU2631526C2 (ru) 2017-09-25
ES2787857T3 (es) 2020-10-19
CN104736470A (zh) 2015-06-24
US20150162141A1 (en) 2015-06-11
AU2013295081B2 (en) 2016-10-06
JP2015531691A (ja) 2015-11-05
CA2879150C (en) 2020-07-14
CN104736470B (zh) 2016-08-17
CA2879150A1 (en) 2014-01-30
EP2877423B1 (en) 2020-03-11
ZA201500438B (en) 2017-11-29

Similar Documents

Publication Publication Date Title
SG169292A1 (en) Semiconductor device and production method thereof
WO2006095566A8 (en) Nitride semiconductor light-emitting device and method for fabrication thereof
CN101863452B (zh) 一种改善绝缘衬底上纳米阵列结构器件制作的方法
JP2013508254A5 (ru)
ATE510795T1 (de) Verfahren zur herstellung eines elektromechanischen mems-bauteils in einem einkristallinen material
JP2009111375A5 (ru)
RU2015101761A (ru) Способ производства микроносителей
JP2013525253A5 (ru)
ATE529891T1 (de) Stickstoffplasma-oberflächenbehandlung in einem direktbindungsverfahren
TW200705541A (en) Manufacturing method of nano-sticker
WO2009006284A3 (en) Semiconductor die having a redistribution layer
ATE523612T1 (de) Verfahren zur herstellung einer funktionsschicht
EP2015116A3 (en) Silicon structure, in particular including an optical waveguide, and method of manufacturing the same
WO2014064057A3 (en) Method for preparing a substantially clean monolayer of a two-dimensional material
CN107342305B (zh) 一种柔性基板结构及其制备方法
SG166738A1 (en) Method for manufacturing soi substrate and soi substrate
EP2468928A3 (en) Composition and manufacturing method
KR101547257B1 (ko) 접을 수 있는 전자장치의 제조 방법 및 이를 적용한 전자장치
WO2010127320A3 (en) Methods for wafer bonding, and for nucleating bonding nanophases
WO2011160814A3 (en) Method for creating a passivated boron-doped region, especially during production of a solar cell, and solar cell with passivated boron-diffused region
SG160295A1 (en) Method for manufacturing semiconductor device
CN103596304B (zh) 一种嵌入式自测温微热台及其制备方法
CN105060240A (zh) 改善amr mems器件侧壁表面粗糙度的方法
WO2003086958A3 (de) Verfahren zur herstellung eines erzeugnisses mit einer strukturierten oberfläche
MY146154A (en) Radio frequency mems switch

Legal Events

Date Code Title Description
MM4A The patent is invalid due to non-payment of fees

Effective date: 20190723