RU2012101843A - Интерферометрическая оптическая дисплейная система с широкодиапазонными характеристиками - Google Patents

Интерферометрическая оптическая дисплейная система с широкодиапазонными характеристиками Download PDF

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RU2012101843A
RU2012101843A RU2012101843/28A RU2012101843A RU2012101843A RU 2012101843 A RU2012101843 A RU 2012101843A RU 2012101843/28 A RU2012101843/28 A RU 2012101843/28A RU 2012101843 A RU2012101843 A RU 2012101843A RU 2012101843 A RU2012101843 A RU 2012101843A
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Prior art keywords
substrate
absorbing substance
layer
interferometric modulator
light
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RU2012101843/28A
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English (en)
Inventor
Евгений ГУСЕВ
Ганг КСЮ
Марек МЬЕНКО
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Квалкомм Мемс Текнолоджис Инк.
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Publication of RU2012101843A publication Critical patent/RU2012101843A/ru

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.

Abstract

1. Устройство, содержащееподложку иинтерферометрический модулятор, поддерживаемый подложкой и выполненный с возможностью отражения по меньшей мере части падающего света, проходящего через подложку, причем интерферометрический модулятор включаетподвижный слой над подложкой ипоглощающее вещество, коэффициент (k) поглощения которого ниже порогового значения для длин световых волн в рабочем оптическом диапазоне интерферометрического модулятор, при этом по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора коэффициент k уменьшается или остается практическим неизменным.2. Устройство по п.1, в котором указанное пороговое значение составляет примерно 2,5.3. Устройство по п.1, в котором интерферометрический модулятор выполнен с возможностью отражения широкодиапазонного белого света с уровнем отражательной способности примерно от 30% до 70% в рабочем оптическом диапазоне.4. Устройство по п.1, в котором подложка включает поглощающее вещество.5. Устройство по п.1, в котором поглощающее вещество осаждено на подложку.6. Устройство по п.1, в котором отношение показателя (n) преломления поглощающего вещества к коэффициенту k составляет примерно от 2,5 до 6.7. Устройство по п.1, в котором поглощающее вещество включает по меньшей мере одно из следующих веществ: германий, сплав германия, легированный германий или сплавы, содержащие легированный германий.8. Устройство по п.1, в котором подвижный слой включает по меньшей мере одно из следующих веществ: алюминий и сплав алюминия.9. Устройство по п.1, в котором поглощающее вещество включает металлический слой.10. Устройство по п.9, в котором �

Claims (29)

1. Устройство, содержащее
подложку и
интерферометрический модулятор, поддерживаемый подложкой и выполненный с возможностью отражения по меньшей мере части падающего света, проходящего через подложку, причем интерферометрический модулятор включает
подвижный слой над подложкой и
поглощающее вещество, коэффициент (k) поглощения которого ниже порогового значения для длин световых волн в рабочем оптическом диапазоне интерферометрического модулятор, при этом по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора коэффициент k уменьшается или остается практическим неизменным.
2. Устройство по п.1, в котором указанное пороговое значение составляет примерно 2,5.
3. Устройство по п.1, в котором интерферометрический модулятор выполнен с возможностью отражения широкодиапазонного белого света с уровнем отражательной способности примерно от 30% до 70% в рабочем оптическом диапазоне.
4. Устройство по п.1, в котором подложка включает поглощающее вещество.
5. Устройство по п.1, в котором поглощающее вещество осаждено на подложку.
6. Устройство по п.1, в котором отношение показателя (n) преломления поглощающего вещества к коэффициенту k составляет примерно от 2,5 до 6.
7. Устройство по п.1, в котором поглощающее вещество включает по меньшей мере одно из следующих веществ: германий, сплав германия, легированный германий или сплавы, содержащие легированный германий.
8. Устройство по п.1, в котором подвижный слой включает по меньшей мере одно из следующих веществ: алюминий и сплав алюминия.
9. Устройство по п.1, в котором поглощающее вещество включает металлический слой.
10. Устройство по п.9, в котором металлический слой включает одно из следующих веществ: хром, молибден, преломляющий металл и преломляющий сплав.
11. Устройство по п.1, в котором поглощающее вещество имеет показатель (n) преломления, который возрастает по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрического модулятора.
12. Устройство по п.1, в котором рабочий оптический диапазон составляет примерно от 300 нм до 800 нм.
13. Устройство по п.1, дополнительно содержащее
дисплей,
процессор, выполненный с возможностью взаимодействия с дисплеем и обработки видеоданных, и
запоминающее устройство, выполненное с возможностью взаимодействия с процессором.
14. Устройство по п.13, дополнительно содержащее
схему формирования, выполненную с возможностью передачи дисплею по меньшей мере одного сигнала.
15. Устройство по п.14, дополнительно содержащее
контроллер, выполненный с возможностью передачи схеме формирования по меньшей мере части видеоданных.
16. Устройство по п.13, дополнительно содержащее
модуль видеоисточника, выполненный с возможностью передачи видеоданных на процессор.
17. Устройство по п.16, в котором модуль видеоисточника включает по меньшей мере один из следующих компонентов: приемник, приемопередатчик и передатчик.
18. Устройство по п.13, дополнительно содержащее
устройство ввода, выполненное с возможностью приема входных данных и передачи их на процессор.
19. Устройство, включающее
подложку и
интерферометрический модулятор, поддерживаемый подложкой и выполненный с возможностью отражения по меньшей мере части падающего света, проходящего через подложку, причем интерферометрический модулятор включает
подвижный слой над подложкой и
поглощающее вещество, расположенное между подвижным слоем и подложкой и имеющее коэффициент (k) поглощения, который ниже порогового значения для длин световых волн видимой части спектра, при этом по мере увеличения длины световой волны для длин световых волн видимой части спектра коэффициент k уменьшается или остается практическим неизменным.
20. Устройство по п.19, в котором указанное пороговое значение составляет примерно 2,5.
21. Устройство по п.19, в котором интерферометрический модулятор выполнен с возможностью отражения света с уровнем отражательной способности выше порогового значения отражательной способности в диапазоне длин световых волн видимой части спектра, тем самым с возможностью отражения широкодиапазонного белого света.
22. Устройство по п.19, в котором отношение показателя (n) преломления поглощающего вещества к коэффициенту k составляет примерно 3.
23. Устройство по п.19, в котором поглощающее вещество имеет показатель (n) преломления, который возрастает по мере увеличения длины световой волны для длин световых волн видимой части спектра.
24. Способ изготовления дисплея, содержащий
формирование матрицы интерферометрических модуляторов, которое в свою очередь включает
формирование слоя поглощающего вещества над прозрачной подложкой и
формирование подвижного слоя над слоем поглощающего вещества, причем коэффициент (k) поглощения поглощающего вещества ниже порогового значения для длин световых волн в рабочем оптическом диапазоне интерферометрических модуляторов, при этом по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрических модуляторов коэффициент k уменьшается или остается практическим неизменным.
25. Способ по п.24, при котором указанное пороговое значение составляет примерно 2,5.
26. Способ по п.24, при котором слой поглощающего вещества имеет показатель (n) преломления, который возрастает по мере увеличения длины световой волны в рабочем оптическом диапазоне интерферометрических модуляторов.
27. Способ по п.24, при котором отношение показателя (n) преломления слоя поглощающего вещества к коэффициенту k составляет примерно 3.
28. Способ по п.24, в котором формирование матрицы интерферометрических модуляторов включает
формирование оптической стопы на прозрачной подложке,
осаждение временного слоя на оптическую стопу,
формирование электропроводящего слоя на временном слое и
удаление по меньшей мере части временного слоя для формирования зазора между подложкой и электропроводящим слоем.
29. Способ по п.24, в котором при формировании слоя поглощающего вещества
берут подложку, включающую слой поглощающего вещества.
RU2012101843/28A 2006-04-10 2012-01-19 Интерферометрическая оптическая дисплейная система с широкодиапазонными характеристиками RU2012101843A (ru)

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US11/401,023 US7643203B2 (en) 2006-04-10 2006-04-10 Interferometric optical display system with broadband characteristics
US11/401,023 2006-04-10

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EP2005237A1 (en) 2008-12-24
KR101344484B1 (ko) 2013-12-23
US20120075313A1 (en) 2012-03-29
CN101443691B (zh) 2012-09-05
US8077379B2 (en) 2011-12-13
US20100128339A1 (en) 2010-05-27
BRPI0710270A2 (pt) 2011-08-09
JP5215431B2 (ja) 2013-06-19
US20070236774A1 (en) 2007-10-11
RU2452987C2 (ru) 2012-06-10
WO2007120464A8 (en) 2007-12-27
US7643203B2 (en) 2010-01-05
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CA2647634A1 (en) 2007-10-25
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JP2011180604A (ja) 2011-09-15
KR20090033171A (ko) 2009-04-01
CN102759794A (zh) 2012-10-31
RU2008140134A (ru) 2010-05-20
JP2009533712A (ja) 2009-09-17
TW200827768A (en) 2008-07-01

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