PT1090321E - Sistema de varrimento a laser ligado a um orifício - Google Patents

Sistema de varrimento a laser ligado a um orifício Download PDF

Info

Publication number
PT1090321E
PT1090321E PT99928820T PT99928820T PT1090321E PT 1090321 E PT1090321 E PT 1090321E PT 99928820 T PT99928820 T PT 99928820T PT 99928820 T PT99928820 T PT 99928820T PT 1090321 E PT1090321 E PT 1090321E
Authority
PT
Portugal
Prior art keywords
mirror
laser beam
focus
scanning system
point
Prior art date
Application number
PT99928820T
Other languages
English (en)
Portuguese (pt)
Inventor
John A Macken
Original Assignee
Utica Entpr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Utica Entpr Inc filed Critical Utica Entpr Inc
Publication of PT1090321E publication Critical patent/PT1090321E/pt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/125—Details of the optical system between the polygonal mirror and the image plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/035—Aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Lenses (AREA)
  • Facsimile Heads (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Gyroscopes (AREA)
  • Optical Communication System (AREA)
PT99928820T 1998-06-24 1999-06-21 Sistema de varrimento a laser ligado a um orifício PT1090321E (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/104,273 US6078420A (en) 1998-06-24 1998-06-24 Hole-coupled laser scanning system

Publications (1)

Publication Number Publication Date
PT1090321E true PT1090321E (pt) 2011-03-01

Family

ID=22299563

Family Applications (1)

Application Number Title Priority Date Filing Date
PT99928820T PT1090321E (pt) 1998-06-24 1999-06-21 Sistema de varrimento a laser ligado a um orifício

Country Status (9)

Country Link
US (1) US6078420A (enExample)
EP (1) EP1090321B1 (enExample)
JP (1) JP4344094B2 (enExample)
AT (1) ATE490485T1 (enExample)
AU (1) AU4580499A (enExample)
DE (1) DE69942999D1 (enExample)
ES (1) ES2357022T3 (enExample)
PT (1) PT1090321E (enExample)
WO (1) WO1999067672A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4474000B2 (ja) * 2000-01-20 2010-06-02 キヤノン株式会社 投影装置
DE10127542C2 (de) * 2001-05-31 2003-06-18 Infineon Technologies Ag Kopplungsanordnung zur optischen Kopplung eines Lichtleiters an einen Lichtempfänger
US7016087B2 (en) * 2001-08-08 2006-03-21 Becton Dickinson And Company Photon efficient scanner
DE10227119A1 (de) * 2002-06-15 2004-01-15 Carl Zeiss Jena Gmbh Optische Anordnung zur Gewinnung von Informationen von einer Probe oder einem Beobachtungsobjekt
DE10230960B4 (de) * 2002-07-10 2011-10-06 Trumpf Laser- Und Systemtechnik Gmbh Laserbearbeitungsmaschine
USD490564S1 (en) * 2002-10-04 2004-05-25 The Procter & Gamble Company Applicator
US7129374B2 (en) * 2002-11-26 2006-10-31 Florida Atlantic University Catalytic antioxidants and methods of use
US6894818B1 (en) * 2003-11-25 2005-05-17 Northrop Grumman Corporation Conformal all-reflective beam-steering (CARBS) device
WO2012015819A2 (en) * 2010-07-30 2012-02-02 Kla-Tencor Corporation Oblique illuminator for inspecting manufactured substrates
AU2011353979B2 (en) * 2011-01-05 2016-03-03 Yuki Engineering System Co., Ltd Beam processing device
CN102554465B (zh) * 2012-02-08 2016-07-20 中国科学院福建物质结构研究所 一种应用于激光加工的旋转光学装置
DE102012003536A1 (de) * 2012-02-26 2013-08-29 Keming Du Optische Anordnungen mit einem rotierenden Spiegel
US9360680B1 (en) 2012-08-10 2016-06-07 Ilias Syrgabaev Electromagnetic beam or image stabilization system
BE1021343B1 (nl) * 2012-10-05 2015-11-05 Atlas Copco Airpower, Naamloze Vennootschap Werkwijze voor het onttrekken van een gas uit een gasmengsel en inrichting daarbij toegepast.
EP3561489B1 (en) * 2018-04-27 2020-10-28 Jeanología, S.L. System and method for characterization of patterns marked on a fabric
US12124029B2 (en) * 2020-08-17 2024-10-22 Meta Platforms Technologies, Llc Beam scanner with PIC input and display based thereon
CN113534448B (zh) * 2021-07-16 2022-10-11 苏州溢博伦光电仪器有限公司 用于多个感兴趣区域高速成像的复合扫描器
CN113534450B (zh) * 2021-07-16 2022-10-14 苏州溢博伦光电仪器有限公司 一种机械式共振扫描边缘消隐器

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3827778A (en) * 1971-12-13 1974-08-06 Hughes Aircraft Co Dual imaging concentric optics
US4160939A (en) * 1977-09-13 1979-07-10 Xerox Corporation Motor speed control system
US4232960A (en) * 1979-02-21 1980-11-11 Xerox Corporation Scanning system
US4388651A (en) * 1981-05-28 1983-06-14 Lincoln Laser Co. Method and apparatus for generating a scanned optical output signal
US4461947A (en) * 1982-08-24 1984-07-24 Allied Corporation Rotating laser beam with coincident gas jet
US4469931A (en) * 1982-09-13 1984-09-04 Macken John A Laser assisted saw device
US4518232A (en) * 1983-08-24 1985-05-21 Avco Everett Research Laboratory, Inc. Method and apparatus for optical beam shaping
US4755999A (en) * 1985-03-25 1988-07-05 Macken John A Laser apparatus utilizing a magnetically enhanced electrical discharge
US4941731A (en) * 1987-07-01 1990-07-17 John Macken Corner cube utilizing generally spherical surfaces
US5206763A (en) * 1989-05-09 1993-04-27 Macken John A Corrective optics for rectangular laser beams
US4921338A (en) * 1989-05-09 1990-05-01 Macken John A Corrective optics for rectangular laser beams
US5089683A (en) * 1990-09-18 1992-02-18 Union Carbide Coatings Service Technology Corporation Device for producing a constant length laser beam and method for producing it
JP2736182B2 (ja) * 1991-02-28 1998-04-02 ファナック株式会社 レーザ装置及びレーザ溶接方法
US5142119A (en) * 1991-03-14 1992-08-25 Saturn Corporation Laser welding of galvanized steel
JPH05134192A (ja) * 1991-05-02 1993-05-28 Hughes Aircraft Co 多数の同時機能を有する光学系
US5155323A (en) * 1991-05-16 1992-10-13 John Macken Dual focus laser welding
US5173796A (en) * 1991-05-20 1992-12-22 Palm Steven G Three dimensional scanning system
US5237149A (en) * 1992-03-26 1993-08-17 John Macken Laser machining utilizing a spacial filter
US5274492A (en) * 1992-07-02 1993-12-28 Mahmoud Razzaghi Light spot size and shape control for laser projector
JPH0679484A (ja) * 1992-07-14 1994-03-22 Mitsubishi Electric Corp レーザ溶接方法
US5528613A (en) * 1993-04-12 1996-06-18 Macken; John A. Laser apparatus utilizing a magnetically enhanced electrical discharge with transverse AC stabilization
DE9407288U1 (de) * 1994-05-02 1994-08-04 Trumpf Gmbh & Co, 71254 Ditzingen Laserschneidmaschine mit Fokuslageneinstellung
US5561544A (en) * 1995-03-06 1996-10-01 Macken; John A. Laser scanning system with reflecting optics

Also Published As

Publication number Publication date
EP1090321A4 (en) 2009-04-08
WO1999067672A1 (en) 1999-12-29
DE69942999D1 (de) 2011-01-13
JP4344094B2 (ja) 2009-10-14
JP2002519715A (ja) 2002-07-02
AU4580499A (en) 2000-01-10
EP1090321A1 (en) 2001-04-11
ATE490485T1 (de) 2010-12-15
US6078420A (en) 2000-06-20
EP1090321B1 (en) 2010-12-01
ES2357022T3 (es) 2011-04-15

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