DE69942999D1 - Loch-gekoppeltes laser-abtastsystem - Google Patents
Loch-gekoppeltes laser-abtastsystemInfo
- Publication number
- DE69942999D1 DE69942999D1 DE69942999T DE69942999T DE69942999D1 DE 69942999 D1 DE69942999 D1 DE 69942999D1 DE 69942999 T DE69942999 T DE 69942999T DE 69942999 T DE69942999 T DE 69942999T DE 69942999 D1 DE69942999 D1 DE 69942999D1
- Authority
- DE
- Germany
- Prior art keywords
- hole
- ableading
- coupled laser
- mirror
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/125—Details of the optical system between the polygonal mirror and the image plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/035—Aligning the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Lenses (AREA)
- Facsimile Heads (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Gyroscopes (AREA)
- Optical Communication System (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/104,273 US6078420A (en) | 1998-06-24 | 1998-06-24 | Hole-coupled laser scanning system |
PCT/US1999/013962 WO1999067672A1 (en) | 1998-06-24 | 1999-06-21 | Hole-coupled laser scanning system |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69942999D1 true DE69942999D1 (de) | 2011-01-13 |
Family
ID=22299563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69942999T Expired - Lifetime DE69942999D1 (de) | 1998-06-24 | 1999-06-21 | Loch-gekoppeltes laser-abtastsystem |
Country Status (9)
Country | Link |
---|---|
US (1) | US6078420A (de) |
EP (1) | EP1090321B1 (de) |
JP (1) | JP4344094B2 (de) |
AT (1) | ATE490485T1 (de) |
AU (1) | AU4580499A (de) |
DE (1) | DE69942999D1 (de) |
ES (1) | ES2357022T3 (de) |
PT (1) | PT1090321E (de) |
WO (1) | WO1999067672A1 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4474000B2 (ja) * | 2000-01-20 | 2010-06-02 | キヤノン株式会社 | 投影装置 |
DE10127542C2 (de) * | 2001-05-31 | 2003-06-18 | Infineon Technologies Ag | Kopplungsanordnung zur optischen Kopplung eines Lichtleiters an einen Lichtempfänger |
US7016087B2 (en) * | 2001-08-08 | 2006-03-21 | Becton Dickinson And Company | Photon efficient scanner |
DE10227119A1 (de) | 2002-06-15 | 2004-01-15 | Carl Zeiss Jena Gmbh | Optische Anordnung zur Gewinnung von Informationen von einer Probe oder einem Beobachtungsobjekt |
DE10230960B4 (de) * | 2002-07-10 | 2011-10-06 | Trumpf Laser- Und Systemtechnik Gmbh | Laserbearbeitungsmaschine |
USD490564S1 (en) * | 2002-10-04 | 2004-05-25 | The Procter & Gamble Company | Applicator |
WO2004047772A2 (en) * | 2002-11-26 | 2004-06-10 | Florida Atlantic University | Catalytic antioxidants and methods of use |
US6894818B1 (en) * | 2003-11-25 | 2005-05-17 | Northrop Grumman Corporation | Conformal all-reflective beam-steering (CARBS) device |
WO2012015819A2 (en) * | 2010-07-30 | 2012-02-02 | Kla-Tencor Corporation | Oblique illuminator for inspecting manufactured substrates |
RU2587367C2 (ru) * | 2011-01-05 | 2016-06-20 | Юки Инжиниринг Систем Ко. Лтд. | Устройство для лучевой обработки |
CN102554465B (zh) * | 2012-02-08 | 2016-07-20 | 中国科学院福建物质结构研究所 | 一种应用于激光加工的旋转光学装置 |
DE102012003536A1 (de) * | 2012-02-26 | 2013-08-29 | Keming Du | Optische Anordnungen mit einem rotierenden Spiegel |
US9360680B1 (en) | 2012-08-10 | 2016-06-07 | Ilias Syrgabaev | Electromagnetic beam or image stabilization system |
BE1021343B1 (nl) * | 2012-10-05 | 2015-11-05 | Atlas Copco Airpower, Naamloze Vennootschap | Werkwijze voor het onttrekken van een gas uit een gasmengsel en inrichting daarbij toegepast. |
EP3561489B1 (de) * | 2018-04-27 | 2020-10-28 | Jeanología, S.L. | System und verfahren zur charakterisierung von auf einem gewebe markierten mustern |
CN113534448B (zh) * | 2021-07-16 | 2022-10-11 | 苏州溢博伦光电仪器有限公司 | 用于多个感兴趣区域高速成像的复合扫描器 |
CN113534450B (zh) * | 2021-07-16 | 2022-10-14 | 苏州溢博伦光电仪器有限公司 | 一种机械式共振扫描边缘消隐器 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3827778A (en) * | 1971-12-13 | 1974-08-06 | Hughes Aircraft Co | Dual imaging concentric optics |
US4160939A (en) * | 1977-09-13 | 1979-07-10 | Xerox Corporation | Motor speed control system |
US4232960A (en) * | 1979-02-21 | 1980-11-11 | Xerox Corporation | Scanning system |
US4388651A (en) * | 1981-05-28 | 1983-06-14 | Lincoln Laser Co. | Method and apparatus for generating a scanned optical output signal |
US4461947A (en) * | 1982-08-24 | 1984-07-24 | Allied Corporation | Rotating laser beam with coincident gas jet |
US4469931A (en) * | 1982-09-13 | 1984-09-04 | Macken John A | Laser assisted saw device |
US4518232A (en) * | 1983-08-24 | 1985-05-21 | Avco Everett Research Laboratory, Inc. | Method and apparatus for optical beam shaping |
US4755999A (en) * | 1985-03-25 | 1988-07-05 | Macken John A | Laser apparatus utilizing a magnetically enhanced electrical discharge |
US4941731A (en) * | 1987-07-01 | 1990-07-17 | John Macken | Corner cube utilizing generally spherical surfaces |
US4921338A (en) * | 1989-05-09 | 1990-05-01 | Macken John A | Corrective optics for rectangular laser beams |
US5206763A (en) * | 1989-05-09 | 1993-04-27 | Macken John A | Corrective optics for rectangular laser beams |
US5089683A (en) * | 1990-09-18 | 1992-02-18 | Union Carbide Coatings Service Technology Corporation | Device for producing a constant length laser beam and method for producing it |
JP2736182B2 (ja) * | 1991-02-28 | 1998-04-02 | ファナック株式会社 | レーザ装置及びレーザ溶接方法 |
US5142119A (en) * | 1991-03-14 | 1992-08-25 | Saturn Corporation | Laser welding of galvanized steel |
JPH05134192A (ja) * | 1991-05-02 | 1993-05-28 | Hughes Aircraft Co | 多数の同時機能を有する光学系 |
US5155323A (en) * | 1991-05-16 | 1992-10-13 | John Macken | Dual focus laser welding |
US5173796A (en) * | 1991-05-20 | 1992-12-22 | Palm Steven G | Three dimensional scanning system |
US5237149A (en) * | 1992-03-26 | 1993-08-17 | John Macken | Laser machining utilizing a spacial filter |
US5274492A (en) * | 1992-07-02 | 1993-12-28 | Mahmoud Razzaghi | Light spot size and shape control for laser projector |
JPH0679484A (ja) * | 1992-07-14 | 1994-03-22 | Mitsubishi Electric Corp | レーザ溶接方法 |
US5528613A (en) * | 1993-04-12 | 1996-06-18 | Macken; John A. | Laser apparatus utilizing a magnetically enhanced electrical discharge with transverse AC stabilization |
DE9407288U1 (de) * | 1994-05-02 | 1994-08-04 | Trumpf Gmbh & Co, 71254 Ditzingen | Laserschneidmaschine mit Fokuslageneinstellung |
US5561544A (en) * | 1995-03-06 | 1996-10-01 | Macken; John A. | Laser scanning system with reflecting optics |
-
1998
- 1998-06-24 US US09/104,273 patent/US6078420A/en not_active Expired - Lifetime
-
1999
- 1999-06-21 PT PT99928820T patent/PT1090321E/pt unknown
- 1999-06-21 ES ES99928820T patent/ES2357022T3/es not_active Expired - Lifetime
- 1999-06-21 AT AT99928820T patent/ATE490485T1/de not_active IP Right Cessation
- 1999-06-21 AU AU45804/99A patent/AU4580499A/en not_active Abandoned
- 1999-06-21 DE DE69942999T patent/DE69942999D1/de not_active Expired - Lifetime
- 1999-06-21 WO PCT/US1999/013962 patent/WO1999067672A1/en active Application Filing
- 1999-06-21 EP EP99928820A patent/EP1090321B1/de not_active Expired - Lifetime
- 1999-06-21 JP JP2000556272A patent/JP4344094B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6078420A (en) | 2000-06-20 |
AU4580499A (en) | 2000-01-10 |
JP2002519715A (ja) | 2002-07-02 |
WO1999067672A1 (en) | 1999-12-29 |
EP1090321B1 (de) | 2010-12-01 |
PT1090321E (pt) | 2011-03-01 |
EP1090321A1 (de) | 2001-04-11 |
ATE490485T1 (de) | 2010-12-15 |
JP4344094B2 (ja) | 2009-10-14 |
EP1090321A4 (de) | 2009-04-08 |
ES2357022T3 (es) | 2011-04-15 |
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