PL4196309T3 - Układ i sposób mechanicznego i elektrycznego stykania drutu żarnikowego cieplnego źródła promieniowania z metalu trudno topliwego dla technologii półprzewodnikowej i mikrosystemów - Google Patents

Układ i sposób mechanicznego i elektrycznego stykania drutu żarnikowego cieplnego źródła promieniowania z metalu trudno topliwego dla technologii półprzewodnikowej i mikrosystemów

Info

Publication number
PL4196309T3
PL4196309T3 PL21754776.9T PL21754776T PL4196309T3 PL 4196309 T3 PL4196309 T3 PL 4196309T3 PL 21754776 T PL21754776 T PL 21754776T PL 4196309 T3 PL4196309 T3 PL 4196309T3
Authority
PL
Poland
Prior art keywords
filament
semiconductor
mechanical
arrangement
electrical connection
Prior art date
Application number
PL21754776.9T
Other languages
English (en)
Inventor
Marco Schossig
Original Assignee
Infrasolid Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infrasolid Gmbh filed Critical Infrasolid Gmbh
Publication of PL4196309T3 publication Critical patent/PL4196309T3/pl

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004Wire welding
    • B23K20/005Capillary welding
    • B23K20/007Ball bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/3013Au as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302Cu as the principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01KELECTRIC INCANDESCENT LAMPS
    • H01K1/00Details
    • H01K1/02Incandescent bodies
    • H01K1/16Electric connection thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01KELECTRIC INCANDESCENT LAMPS
    • H01K3/00Apparatus or processes adapted to the manufacture, installing, removal, or maintenance of incandescent lamps or parts thereof
    • H01K3/06Attaching of incandescent bodies to mount
    • H01K3/065Machines therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R4/00Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
    • H01R4/06Riveted connections
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/18Dissimilar materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01KELECTRIC INCANDESCENT LAMPS
    • H01K1/00Details
    • H01K1/02Incandescent bodies
    • H01K1/04Incandescent bodies characterised by the material thereof
    • H01K1/08Metallic bodies
    • H10W72/07521
    • H10W72/536
    • H10W72/5363

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
  • Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
PL21754776.9T 2020-08-11 2021-07-30 Układ i sposób mechanicznego i elektrycznego stykania drutu żarnikowego cieplnego źródła promieniowania z metalu trudno topliwego dla technologii półprzewodnikowej i mikrosystemów PL4196309T3 (pl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020121157.0A DE102020121157B4 (de) 2020-08-11 2020-08-11 Anordnung und Verfahren zur mechanischen und elektrischen Kontaktierung eines Glühdrahtes einer thermischen Strahlungsquelle aus Refraktärmetall in der Halbleiter- und Mikrosystemtechnik
PCT/EP2021/071364 WO2022033892A1 (de) 2020-08-11 2021-07-30 Anordnung und verfahren zur mechanischen und elektrischen kontaktierung eines glühdrahtes einer thermischen strahlungsquelle aus refraktärmetall für die halbleiter- und mikrosystemtechnik

Publications (1)

Publication Number Publication Date
PL4196309T3 true PL4196309T3 (pl) 2024-07-08

Family

ID=77317019

Family Applications (1)

Application Number Title Priority Date Filing Date
PL21754776.9T PL4196309T3 (pl) 2020-08-11 2021-07-30 Układ i sposób mechanicznego i elektrycznego stykania drutu żarnikowego cieplnego źródła promieniowania z metalu trudno topliwego dla technologii półprzewodnikowej i mikrosystemów

Country Status (9)

Country Link
US (1) US12090568B2 (pl)
EP (1) EP4196309B1 (pl)
JP (1) JP7554912B2 (pl)
KR (1) KR102837140B1 (pl)
CN (1) CN115776924B (pl)
DE (1) DE102020121157B4 (pl)
ES (1) ES2983273T3 (pl)
PL (1) PL4196309T3 (pl)
WO (1) WO2022033892A1 (pl)

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1477618A (en) 1920-06-22 1923-12-18 Hygrade Engineering Co Inc Welded join
US2145186A (en) 1938-07-01 1939-01-24 Gen Electric Connection for filament and lead wires
US2227324A (en) 1940-05-24 1940-12-31 Gen Electric Filament joint for electric lamps
US3561084A (en) 1968-10-04 1971-02-09 Chicago Miniature Lamp Works Method of terminating a lamp filament
NL7100606A (pl) 1971-01-16 1972-07-18
JPS5736750A (en) * 1980-08-12 1982-02-27 Sony Corp Electron gun
US4370589A (en) 1980-09-02 1983-01-25 Westinghouse Electric Corp. Filament connector means for electric incandescent lamp
JPS5891649A (ja) * 1981-11-26 1983-05-31 Toshiba Corp 半導体装置の製造方法
JPS59188966U (ja) * 1983-05-31 1984-12-14 株式会社日立ホームテック 吸気加熱装置
JPH0344050A (ja) * 1989-07-11 1991-02-25 Texas Instr Japan Ltd 半導体装置及びその製造方法
JPH0426149A (ja) * 1990-05-22 1992-01-29 Toppan Printing Co Ltd リードフレームおよびリードフレームと半導体素子の接続方法
JPH04196236A (ja) * 1990-11-27 1992-07-16 Mitsubishi Electric Corp 接続方法
DE19545296C2 (de) 1995-12-05 1998-08-27 Heraeus Noblelight Gmbh Infrarotstrahler
DE19809081A1 (de) * 1998-03-04 1999-09-16 Bosch Gmbh Robert Verfahren und Kontaktstelle zur Herstellung einer elektrischen Verbindung
JP2001332578A (ja) * 2000-05-22 2001-11-30 Rohm Co Ltd ワイヤボンディング方法及びワイヤボンディングされた電子部品
DE10321954A1 (de) * 2003-05-15 2004-12-02 Vishay Semiconductor Gmbh Einzelhalbleiterelement in Flip-Chip-Bauweise
DE102004027806A1 (de) * 2004-06-08 2006-01-05 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Verfahren zum Verschweißen einer Metallfolie mit einem zylindrischen Metallstift
JP4709535B2 (ja) * 2004-11-19 2011-06-22 株式会社東芝 半導体装置の製造装置
DE102004061736A1 (de) * 2004-12-22 2006-07-06 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Befestigungsverfahren und danach hergestellte Lampe
WO2006090196A1 (en) * 2005-02-23 2006-08-31 Infineon Technologies Ag Rectangular bond pad and method of wire bonding the same with an elongated ball bond
JPWO2007004609A1 (ja) * 2005-07-05 2009-01-29 フェトン株式会社 球状物の形成方法、細線の接合方法及びレーザ処理装置
DE102010040779A1 (de) 2010-09-15 2012-03-15 Osram Ag Verfahren zum Verschweißen von Molybdänfolie und Molybdän- oder Wolframstift
JP5832248B2 (ja) * 2011-11-09 2015-12-16 クボタシーアイ株式会社 融着インナーおよびそれを用いた分岐サドル継手
KR101501668B1 (ko) * 2013-11-06 2015-03-12 에이피시스템 주식회사 램프 장치 및 램프 제조 방법
EP3071730A1 (en) * 2013-11-21 2016-09-28 Heraeus Deutschland GmbH & Co. KG Coated wire for bonding applications
DE102017221071B4 (de) * 2017-11-24 2024-05-23 Siemens Aktiengesellschaft Elektrische Kontaktierungsschnittstelle mit einem geringen und stabilen elektrischen Übergangswiderstand
CN210379031U (zh) * 2019-08-14 2020-04-21 甬矽电子(宁波)股份有限公司 一种新型SIP-hybrid芯片封装结构

Also Published As

Publication number Publication date
JP2023538874A (ja) 2023-09-12
CN115776924B (zh) 2025-11-28
JP7554912B2 (ja) 2024-09-20
WO2022033892A1 (de) 2022-02-17
EP4196309A1 (de) 2023-06-21
DE102020121157B4 (de) 2022-03-31
ES2983273T3 (es) 2024-10-22
EP4196309C0 (de) 2024-03-06
EP4196309B1 (de) 2024-03-06
US12090568B2 (en) 2024-09-17
CN115776924A (zh) 2023-03-10
US20230278132A1 (en) 2023-09-07
DE102020121157A1 (de) 2022-02-17
KR20230048330A (ko) 2023-04-11
KR102837140B1 (ko) 2025-07-21

Similar Documents

Publication Publication Date Title
US7873265B2 (en) Filament lamp and light irradiation type heat treatment apparatus
KR20170113277A (ko) 웨이퍼 배치 장치
BR112018011113A2 (pt) estrutura de substrato tendo peças eletrônicas nele montadas e alojamento para acomodação do substrato
JP2018506175A (ja) 加工物の温度均一性を向上させる装置
PL4196309T3 (pl) Układ i sposób mechanicznego i elektrycznego stykania drutu żarnikowego cieplnego źródła promieniowania z metalu trudno topliwego dla technologii półprzewodnikowej i mikrosystemów
JP2008243820A (ja) カーボンヒータ
WO2016104633A1 (ja) ヒーターユニット及び浸炭炉
TWI745006B (zh) 半導體製造裝置用構件
US7358666B2 (en) System and method for sealing high intensity discharge lamps
CN112233961A (zh) 基板处理装置
EP2105948B1 (en) Filament lamp
JP6468808B2 (ja) ランプ装置及びランプの製造方法
JP5365884B2 (ja) ハロゲンヒータランプユニットおよび熱処理装置
EP2993434A1 (en) Dual zone furnace
JP5942380B2 (ja) 半導体製造装置用ウエハ保持体
JP2018056532A (ja) プラズマ処理装置およびプラズマ処理方法
CN104576487A (zh) 支撑装置、衬底处理设备以及衬底处理方法
CN102456599A (zh) 支撑单元及具有支撑单元的衬底处理设备
JP5525174B2 (ja) 熱処理装置
JP2014162936A (ja) 熱処理方法、加熱炉
KR100858439B1 (ko) 실링 플랜지를 구비한 텅스텐 할로겐 램프
JP4525550B2 (ja) ハロゲンランプ
US10332763B2 (en) Lamp driver for low pressure environment
KR101103180B1 (ko) 필라멘트 램프
KR100816858B1 (ko) 스템 거치면에 방열홈을 가지는 무전극 형광램프 실링머신용 스템 거치 지그