PL2089491T3 - Drukowalny środek do trawienia tlenkowych, przezroczystych i przewodzących warstw - Google Patents

Drukowalny środek do trawienia tlenkowych, przezroczystych i przewodzących warstw

Info

Publication number
PL2089491T3
PL2089491T3 PL07818739T PL07818739T PL2089491T3 PL 2089491 T3 PL2089491 T3 PL 2089491T3 PL 07818739 T PL07818739 T PL 07818739T PL 07818739 T PL07818739 T PL 07818739T PL 2089491 T3 PL2089491 T3 PL 2089491T3
Authority
PL
Poland
Prior art keywords
transparent
oxide
conductive layers
etching agent
printable etching
Prior art date
Application number
PL07818739T
Other languages
English (en)
Inventor
Werner Stockum
Armin Kuebelbeck
Original Assignee
Merck Patent Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merck Patent Gmbh filed Critical Merck Patent Gmbh
Publication of PL2089491T3 publication Critical patent/PL2089491T3/pl

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00Etching, surface-brightening or pickling compositions
    • C09K13/04Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/06Etching, surface-brightening or pickling compositions containing an inorganic acid with organic material
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00Etching, surface-brightening or pickling compositions
    • C09K13/04Etching, surface-brightening or pickling compositions containing an inorganic acid
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604Chemical etching
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/138Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Photovoltaic Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
PL07818739T 2006-10-30 2007-10-05 Drukowalny środek do trawienia tlenkowych, przezroczystych i przewodzących warstw PL2089491T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006051735A DE102006051735A1 (de) 2006-10-30 2006-10-30 Druckfähiges Medium zur Ätzung von oxidischen, transparenten, leitfähigen Schichten
EP07818739.0A EP2089491B1 (de) 2006-10-30 2007-10-05 Druckfähiges medium zum ätzen von oxidischen, transparenten und leitfähigen schichten
PCT/EP2007/008663 WO2008052637A1 (de) 2006-10-30 2007-10-05 Druckfähiges medium zum ätzen von oxidischen, transparenten und leitfähigen schichten

Publications (1)

Publication Number Publication Date
PL2089491T3 true PL2089491T3 (pl) 2013-08-30

Family

ID=38984085

Family Applications (1)

Application Number Title Priority Date Filing Date
PL07818739T PL2089491T3 (pl) 2006-10-30 2007-10-05 Drukowalny środek do trawienia tlenkowych, przezroczystych i przewodzących warstw

Country Status (11)

Country Link
US (1) US8795549B2 (pl)
EP (1) EP2089491B1 (pl)
JP (1) JP5190063B2 (pl)
KR (1) KR101465276B1 (pl)
CN (1) CN101600779B (pl)
DE (1) DE102006051735A1 (pl)
ES (1) ES2416310T3 (pl)
MY (1) MY149959A (pl)
PL (1) PL2089491T3 (pl)
TW (1) TWI425079B (pl)
WO (1) WO2008052637A1 (pl)

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CN102097536B (zh) * 2009-12-11 2012-12-12 杜邦太阳能有限公司 制造一体化光伏模块的方法
US8524524B2 (en) * 2010-04-22 2013-09-03 General Electric Company Methods for forming back contact electrodes for cadmium telluride photovoltaic cells
US9214576B2 (en) 2010-06-09 2015-12-15 Solarcity Corporation Transparent conducting oxide for photovoltaic devices
US20130092657A1 (en) * 2010-06-14 2013-04-18 Nano Terra, Inc. Cross-linking and multi-phase etch pastes for high resolution feature patterning
US9773928B2 (en) 2010-09-10 2017-09-26 Tesla, Inc. Solar cell with electroplated metal grid
US9800053B2 (en) 2010-10-08 2017-10-24 Tesla, Inc. Solar panels with integrated cell-level MPPT devices
EP2651841A1 (en) 2010-12-15 2013-10-23 Sun Chemical Corporation Printable etchant compositions for etching silver nanowire-based transparent, conductive films
US9054256B2 (en) 2011-06-02 2015-06-09 Solarcity Corporation Tunneling-junction solar cell with copper grid for concentrated photovoltaic application
EP2735216A1 (de) * 2011-07-18 2014-05-28 Merck Patent GmbH Strukturierung von antistatischen und antireflektionsbeschichtungen und von entsprechenden stapelschichten
CN102603211B (zh) * 2012-01-12 2013-10-30 福耀玻璃工业集团股份有限公司 一种在玻璃上制作标识的方法
JP6351601B2 (ja) 2012-10-04 2018-07-04 ソーラーシティ コーポレーション 電気めっき金属グリッドを用いた光起電力装置
US9865754B2 (en) 2012-10-10 2018-01-09 Tesla, Inc. Hole collectors for silicon photovoltaic cells
JP6136186B2 (ja) * 2012-10-16 2017-05-31 日立化成株式会社 液状組成物
US9281436B2 (en) 2012-12-28 2016-03-08 Solarcity Corporation Radio-frequency sputtering system with rotary target for fabricating solar cells
US10074755B2 (en) 2013-01-11 2018-09-11 Tesla, Inc. High efficiency solar panel
US9412884B2 (en) 2013-01-11 2016-08-09 Solarcity Corporation Module fabrication of solar cells with low resistivity electrodes
WO2014110520A1 (en) 2013-01-11 2014-07-17 Silevo, Inc. Module fabrication of solar cells with low resistivity electrodes
US9624595B2 (en) 2013-05-24 2017-04-18 Solarcity Corporation Electroplating apparatus with improved throughput
CN103508677A (zh) * 2013-09-24 2014-01-15 苏州诺维克光伏新材料有限公司 一种膏体材料及其应用
CN103980905B (zh) * 2014-05-07 2017-04-05 佛山市中山大学研究院 一种用于氧化物材料体系的蚀刻液及其蚀刻方法和应用
WO2015191520A1 (en) * 2014-06-09 2015-12-17 Natcore Technology, Inc. Emitter diffusion conditions for black silicon
US10309012B2 (en) 2014-07-03 2019-06-04 Tesla, Inc. Wafer carrier for reducing contamination from carbon particles and outgassing
JP6359394B2 (ja) * 2014-09-18 2018-07-18 国立研究開発法人産業技術総合研究所 半導体装置とその製造方法
US9899546B2 (en) 2014-12-05 2018-02-20 Tesla, Inc. Photovoltaic cells with electrodes adapted to house conductive paste
US9947822B2 (en) 2015-02-02 2018-04-17 Tesla, Inc. Bifacial photovoltaic module using heterojunction solar cells
KR101629852B1 (ko) 2015-03-23 2016-06-14 주식회사 해나라 휠 가드 제조 시스템
US9761744B2 (en) 2015-10-22 2017-09-12 Tesla, Inc. System and method for manufacturing photovoltaic structures with a metal seed layer
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US10115838B2 (en) 2016-04-19 2018-10-30 Tesla, Inc. Photovoltaic structures with interlocking busbars
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TWI776196B (zh) * 2020-07-29 2022-09-01 國立虎尾科技大學 低溫製造微型發電機的製程方法

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Also Published As

Publication number Publication date
TWI425079B (zh) 2014-02-01
TW200827431A (en) 2008-07-01
EP2089491B1 (de) 2013-04-10
CN101600779A (zh) 2009-12-09
JP2010508664A (ja) 2010-03-18
KR20090087016A (ko) 2009-08-14
JP5190063B2 (ja) 2013-04-24
EP2089491A1 (de) 2009-08-19
MY149959A (en) 2013-11-15
CN101600779B (zh) 2013-06-26
US8795549B2 (en) 2014-08-05
HK1136004A1 (en) 2010-06-18
DE102006051735A1 (de) 2008-05-08
US20100068890A1 (en) 2010-03-18
KR101465276B1 (ko) 2014-11-26
ES2416310T3 (es) 2013-07-31
WO2008052637A1 (de) 2008-05-08

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