PL2089491T3 - Drukowalny środek do trawienia tlenkowych, przezroczystych i przewodzących warstw - Google Patents
Drukowalny środek do trawienia tlenkowych, przezroczystych i przewodzących warstwInfo
- Publication number
- PL2089491T3 PL2089491T3 PL07818739T PL07818739T PL2089491T3 PL 2089491 T3 PL2089491 T3 PL 2089491T3 PL 07818739 T PL07818739 T PL 07818739T PL 07818739 T PL07818739 T PL 07818739T PL 2089491 T3 PL2089491 T3 PL 2089491T3
- Authority
- PL
- Poland
- Prior art keywords
- transparent
- oxide
- conductive layers
- etching agent
- printable etching
- Prior art date
Links
- 238000005530 etching Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/06—Etching, surface-brightening or pickling compositions containing an inorganic acid with organic material
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Photovoltaic Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006051735A DE102006051735A1 (de) | 2006-10-30 | 2006-10-30 | Druckfähiges Medium zur Ätzung von oxidischen, transparenten, leitfähigen Schichten |
| EP07818739.0A EP2089491B1 (de) | 2006-10-30 | 2007-10-05 | Druckfähiges medium zum ätzen von oxidischen, transparenten und leitfähigen schichten |
| PCT/EP2007/008663 WO2008052637A1 (de) | 2006-10-30 | 2007-10-05 | Druckfähiges medium zum ätzen von oxidischen, transparenten und leitfähigen schichten |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| PL2089491T3 true PL2089491T3 (pl) | 2013-08-30 |
Family
ID=38984085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PL07818739T PL2089491T3 (pl) | 2006-10-30 | 2007-10-05 | Drukowalny środek do trawienia tlenkowych, przezroczystych i przewodzących warstw |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US8795549B2 (pl) |
| EP (1) | EP2089491B1 (pl) |
| JP (1) | JP5190063B2 (pl) |
| KR (1) | KR101465276B1 (pl) |
| CN (1) | CN101600779B (pl) |
| DE (1) | DE102006051735A1 (pl) |
| ES (1) | ES2416310T3 (pl) |
| MY (1) | MY149959A (pl) |
| PL (1) | PL2089491T3 (pl) |
| TW (1) | TWI425079B (pl) |
| WO (1) | WO2008052637A1 (pl) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200939509A (en) * | 2007-11-19 | 2009-09-16 | Applied Materials Inc | Crystalline solar cell metallization methods |
| CN101889348B (zh) * | 2007-11-19 | 2013-03-27 | 应用材料公司 | 使用图案化蚀刻剂物质以形成太阳能电池接点的工艺 |
| TW201040299A (en) * | 2009-05-05 | 2010-11-16 | Fraunhofer Ges Forschung | Layer system having barrier properties and a structured conductive layer, method for producing the same, and use of such a layer system |
| CN101958361A (zh) * | 2009-07-13 | 2011-01-26 | 无锡尚德太阳能电力有限公司 | 透光薄膜太阳电池组件刻蚀方法 |
| US9012766B2 (en) | 2009-11-12 | 2015-04-21 | Silevo, Inc. | Aluminum grid as backside conductor on epitaxial silicon thin film solar cells |
| CN102097536B (zh) * | 2009-12-11 | 2012-12-12 | 杜邦太阳能有限公司 | 制造一体化光伏模块的方法 |
| US8524524B2 (en) * | 2010-04-22 | 2013-09-03 | General Electric Company | Methods for forming back contact electrodes for cadmium telluride photovoltaic cells |
| US9214576B2 (en) | 2010-06-09 | 2015-12-15 | Solarcity Corporation | Transparent conducting oxide for photovoltaic devices |
| US20130092657A1 (en) * | 2010-06-14 | 2013-04-18 | Nano Terra, Inc. | Cross-linking and multi-phase etch pastes for high resolution feature patterning |
| US9773928B2 (en) | 2010-09-10 | 2017-09-26 | Tesla, Inc. | Solar cell with electroplated metal grid |
| US9800053B2 (en) | 2010-10-08 | 2017-10-24 | Tesla, Inc. | Solar panels with integrated cell-level MPPT devices |
| EP2651841A1 (en) | 2010-12-15 | 2013-10-23 | Sun Chemical Corporation | Printable etchant compositions for etching silver nanowire-based transparent, conductive films |
| US9054256B2 (en) | 2011-06-02 | 2015-06-09 | Solarcity Corporation | Tunneling-junction solar cell with copper grid for concentrated photovoltaic application |
| EP2735216A1 (de) * | 2011-07-18 | 2014-05-28 | Merck Patent GmbH | Strukturierung von antistatischen und antireflektionsbeschichtungen und von entsprechenden stapelschichten |
| CN102603211B (zh) * | 2012-01-12 | 2013-10-30 | 福耀玻璃工业集团股份有限公司 | 一种在玻璃上制作标识的方法 |
| JP6351601B2 (ja) | 2012-10-04 | 2018-07-04 | ソーラーシティ コーポレーション | 電気めっき金属グリッドを用いた光起電力装置 |
| US9865754B2 (en) | 2012-10-10 | 2018-01-09 | Tesla, Inc. | Hole collectors for silicon photovoltaic cells |
| JP6136186B2 (ja) * | 2012-10-16 | 2017-05-31 | 日立化成株式会社 | 液状組成物 |
| US9281436B2 (en) | 2012-12-28 | 2016-03-08 | Solarcity Corporation | Radio-frequency sputtering system with rotary target for fabricating solar cells |
| US10074755B2 (en) | 2013-01-11 | 2018-09-11 | Tesla, Inc. | High efficiency solar panel |
| US9412884B2 (en) | 2013-01-11 | 2016-08-09 | Solarcity Corporation | Module fabrication of solar cells with low resistivity electrodes |
| WO2014110520A1 (en) | 2013-01-11 | 2014-07-17 | Silevo, Inc. | Module fabrication of solar cells with low resistivity electrodes |
| US9624595B2 (en) | 2013-05-24 | 2017-04-18 | Solarcity Corporation | Electroplating apparatus with improved throughput |
| CN103508677A (zh) * | 2013-09-24 | 2014-01-15 | 苏州诺维克光伏新材料有限公司 | 一种膏体材料及其应用 |
| CN103980905B (zh) * | 2014-05-07 | 2017-04-05 | 佛山市中山大学研究院 | 一种用于氧化物材料体系的蚀刻液及其蚀刻方法和应用 |
| WO2015191520A1 (en) * | 2014-06-09 | 2015-12-17 | Natcore Technology, Inc. | Emitter diffusion conditions for black silicon |
| US10309012B2 (en) | 2014-07-03 | 2019-06-04 | Tesla, Inc. | Wafer carrier for reducing contamination from carbon particles and outgassing |
| JP6359394B2 (ja) * | 2014-09-18 | 2018-07-18 | 国立研究開発法人産業技術総合研究所 | 半導体装置とその製造方法 |
| US9899546B2 (en) | 2014-12-05 | 2018-02-20 | Tesla, Inc. | Photovoltaic cells with electrodes adapted to house conductive paste |
| US9947822B2 (en) | 2015-02-02 | 2018-04-17 | Tesla, Inc. | Bifacial photovoltaic module using heterojunction solar cells |
| KR101629852B1 (ko) | 2015-03-23 | 2016-06-14 | 주식회사 해나라 | 휠 가드 제조 시스템 |
| US9761744B2 (en) | 2015-10-22 | 2017-09-12 | Tesla, Inc. | System and method for manufacturing photovoltaic structures with a metal seed layer |
| US9842956B2 (en) | 2015-12-21 | 2017-12-12 | Tesla, Inc. | System and method for mass-production of high-efficiency photovoltaic structures |
| US9496429B1 (en) | 2015-12-30 | 2016-11-15 | Solarcity Corporation | System and method for tin plating metal electrodes |
| US10115838B2 (en) | 2016-04-19 | 2018-10-30 | Tesla, Inc. | Photovoltaic structures with interlocking busbars |
| CN106280680A (zh) * | 2016-08-09 | 2017-01-04 | 上海交通大学 | 一种水溶性含磷油墨及其制备方法 |
| US10672919B2 (en) | 2017-09-19 | 2020-06-02 | Tesla, Inc. | Moisture-resistant solar cells for solar roof tiles |
| US11190128B2 (en) | 2018-02-27 | 2021-11-30 | Tesla, Inc. | Parallel-connected solar roof tile modules |
| TWI776196B (zh) * | 2020-07-29 | 2022-09-01 | 國立虎尾科技大學 | 低溫製造微型發電機的製程方法 |
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| US3904443A (en) * | 1973-03-02 | 1975-09-09 | Boeing Co | High temperature lubricant |
| DE2929589A1 (de) * | 1979-07-04 | 1981-01-22 | Bbc Brown Boveri & Cie | Verfahren zur herstellung eines optisch transparenten und elektrisch leitfaehigen filmmusters |
| FR2583916B1 (fr) * | 1985-06-25 | 1990-01-12 | Europ Composants Electron | Cellule pour condensateur a double couche electrique et procede de fabrication d'une telle cellule |
| JPH01147078A (ja) * | 1987-12-02 | 1989-06-08 | Ricoh Co Ltd | 透明電極パターン形成用エッチングインキ組成物及びその使用方法 |
| US5688366A (en) | 1994-04-28 | 1997-11-18 | Canon Kabushiki Kaisha | Etching method, method of producing a semiconductor device, and etchant therefor |
| JP3173318B2 (ja) * | 1994-04-28 | 2001-06-04 | キヤノン株式会社 | エッチング方法及び半導体素子の製造方法 |
| US5457057A (en) * | 1994-06-28 | 1995-10-10 | United Solar Systems Corporation | Photovoltaic module fabrication process |
| WO2001083391A1 (de) | 2000-04-28 | 2001-11-08 | Merck Patent Gmbh | Ätzpasten für anorganische oberflächen |
| DE10150040A1 (de) | 2001-10-10 | 2003-04-17 | Merck Patent Gmbh | Kombinierte Ätz- und Dotiermedien |
| DE10239656A1 (de) * | 2002-08-26 | 2004-03-11 | Merck Patent Gmbh | Ätzpasten für Titanoxid-Oberflächen |
| DE10241300A1 (de) * | 2002-09-04 | 2004-03-18 | Merck Patent Gmbh | Ätzpasten für Siliziumoberflächen und -schichten |
| US20040112868A1 (en) * | 2002-12-13 | 2004-06-17 | Phipps Peter Beverley Powell | Etchant solution for removing a thin metallic layer |
| WO2005013394A1 (en) * | 2003-08-01 | 2005-02-10 | Avestor Limited Partnership | Cathode material for polymer batteries and method of preparing same |
| DE102004016766A1 (de) * | 2004-04-01 | 2005-10-20 | Degussa | Nanoskalige Siliziumpartikel in negativen Elektrodenmaterialien für Lithium-Ionen-Batterien |
| JP2006086069A (ja) * | 2004-09-17 | 2006-03-30 | Three M Innovative Properties Co | 有機エレクトロルミネッセンス素子及びその製造方法 |
| DE102005007743A1 (de) * | 2005-01-11 | 2006-07-20 | Merck Patent Gmbh | Druckfähiges Medium zur Ätzung von Siliziumdioxid- und Siliziumnitridschichten |
| JP4887664B2 (ja) * | 2005-05-17 | 2012-02-29 | ソニー株式会社 | 多孔質構造体の製造方法及び光電変換素子の製造方法 |
| DE102005031469A1 (de) * | 2005-07-04 | 2007-01-11 | Merck Patent Gmbh | Medium zur Ätzung von oxidischen, transparenten, leitfähigen Schichten |
| DE102005033724A1 (de) * | 2005-07-15 | 2007-01-18 | Merck Patent Gmbh | Druckfähige Ätzmedien für Siliziumdioxid-und Siliziumnitridschichten |
| DE102005035255A1 (de) * | 2005-07-25 | 2007-02-01 | Merck Patent Gmbh | Ätzmedien für oxidische, transparente, leitfähige Schichten |
| US7494744B2 (en) * | 2006-03-08 | 2009-02-24 | Changs-Ascending Enterprise Co. | Cathode material for Li-ion battery applications |
| US20070241482A1 (en) * | 2006-04-06 | 2007-10-18 | Z Corporation | Production of three-dimensional objects by use of electromagnetic radiation |
| US8158071B2 (en) * | 2006-04-29 | 2012-04-17 | Chun-Chieh Chang | Method and devices for producing air sensitive electrode materials for lithium ion battery applications |
| DE102006051952A1 (de) * | 2006-11-01 | 2008-05-08 | Merck Patent Gmbh | Partikelhaltige Ätzpasten für Siliziumoberflächen und -schichten |
| US20090035661A1 (en) * | 2007-08-01 | 2009-02-05 | Jeffrey Swoyer | Synthesis of cathode active materials |
-
2006
- 2006-10-30 DE DE102006051735A patent/DE102006051735A1/de not_active Withdrawn
-
2007
- 2007-10-05 MY MYPI20091714A patent/MY149959A/en unknown
- 2007-10-05 US US12/447,763 patent/US8795549B2/en not_active Expired - Fee Related
- 2007-10-05 KR KR1020097010962A patent/KR101465276B1/ko not_active Expired - Fee Related
- 2007-10-05 WO PCT/EP2007/008663 patent/WO2008052637A1/de not_active Ceased
- 2007-10-05 CN CN2007800404944A patent/CN101600779B/zh not_active Expired - Fee Related
- 2007-10-05 PL PL07818739T patent/PL2089491T3/pl unknown
- 2007-10-05 ES ES07818739T patent/ES2416310T3/es active Active
- 2007-10-05 JP JP2009534999A patent/JP5190063B2/ja not_active Expired - Fee Related
- 2007-10-05 EP EP07818739.0A patent/EP2089491B1/de not_active Not-in-force
- 2007-10-26 TW TW096140455A patent/TWI425079B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI425079B (zh) | 2014-02-01 |
| TW200827431A (en) | 2008-07-01 |
| EP2089491B1 (de) | 2013-04-10 |
| CN101600779A (zh) | 2009-12-09 |
| JP2010508664A (ja) | 2010-03-18 |
| KR20090087016A (ko) | 2009-08-14 |
| JP5190063B2 (ja) | 2013-04-24 |
| EP2089491A1 (de) | 2009-08-19 |
| MY149959A (en) | 2013-11-15 |
| CN101600779B (zh) | 2013-06-26 |
| US8795549B2 (en) | 2014-08-05 |
| HK1136004A1 (en) | 2010-06-18 |
| DE102006051735A1 (de) | 2008-05-08 |
| US20100068890A1 (en) | 2010-03-18 |
| KR101465276B1 (ko) | 2014-11-26 |
| ES2416310T3 (es) | 2013-07-31 |
| WO2008052637A1 (de) | 2008-05-08 |
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