NO964127L - Mikromekanisk sensorenhet til deteksjon av akselerasjoner - Google Patents
Mikromekanisk sensorenhet til deteksjon av akselerasjonerInfo
- Publication number
- NO964127L NO964127L NO964127A NO964127A NO964127L NO 964127 L NO964127 L NO 964127L NO 964127 A NO964127 A NO 964127A NO 964127 A NO964127 A NO 964127A NO 964127 L NO964127 L NO 964127L
- Authority
- NO
- Norway
- Prior art keywords
- accelerations
- detection
- sensor unit
- pendulum
- micromechanical sensor
- Prior art date
Links
- 230000001133 acceleration Effects 0.000 title abstract 3
- 238000001514 detection method Methods 0.000 title abstract 2
- 238000005452 bending Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Air Bags (AREA)
- Pressure Sensors (AREA)
- Automotive Seat Belt Assembly (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
En mikromekanisk sensorenhet til deteksjon av akselerasjoner har minst en pendel med en bøyefjær (B) og en seismisk masse (P), en holder (E) for hver pendel og minst to posisjonsfølere (S). Hver posi- sjonsføler (S) og en tilhørende pendel danner en bryter med en definert utløsningsterskel, og minst to brytere reagerer på den samme akselerasjons- retning. Minst en bryter er en safingsensor (SS) med et separat uttak av et sensorsignal.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4411130A DE4411130A1 (de) | 1994-03-30 | 1994-03-30 | Sensoreinheit mit mindestens einem Beschleunigungssensor, z. B. zur Kfz-Airbagauslösung, und Verfahren zu seiner Herstellung |
PCT/DE1995/000429 WO1995027216A1 (de) | 1994-03-30 | 1995-03-30 | Mikromechanische sensoreinheit zum erkennen von beschleunigungen |
Publications (2)
Publication Number | Publication Date |
---|---|
NO964127L true NO964127L (no) | 1996-09-27 |
NO964127D0 NO964127D0 (no) | 1996-09-27 |
Family
ID=6514288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO964127A NO964127D0 (no) | 1994-03-30 | 1996-09-27 | Mikromekanisk sensorenhet til deteksjon av akselerasjoner |
Country Status (8)
Country | Link |
---|---|
US (1) | US5821419A (no) |
EP (1) | EP0753157B1 (no) |
JP (1) | JP2930729B2 (no) |
KR (1) | KR970702495A (no) |
AT (1) | ATE185625T1 (no) |
DE (4) | DE4411130A1 (no) |
NO (1) | NO964127D0 (no) |
WO (3) | WO1995027216A1 (no) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19612825C2 (de) * | 1996-03-30 | 2000-05-11 | Fag Automobiltechnik Ag | Wälzlager, insbesondere Radlager für Kraftfahrzeuge |
DE19625618C1 (de) | 1996-06-26 | 1997-09-04 | Siemens Ag | Aufprallerkennungseinrichtung, insbesondere für ein Kraftfahrzeug |
DE19703832A1 (de) * | 1997-02-01 | 1998-08-06 | Fag Automobiltechnik Ag | Wälzlager, insbesondere Radlager für Kraftfahrzeuge |
WO1998042542A2 (de) * | 1997-03-20 | 1998-10-01 | Siemens Aktiengesellschaft | Anordnung zum steuern einer sicherheitseinrichtung zum aufprallschutz in einem fahrzeug |
JPH11237402A (ja) * | 1998-02-19 | 1999-08-31 | Akebono Brake Ind Co Ltd | 半導体加速度センサ及びその自己診断法 |
DE19807750A1 (de) * | 1998-02-24 | 1999-03-18 | Daimler Benz Ag | Vorrichtung zur Auslösung von Rückhaltemitteln in einem Fahrzeug |
US5990427A (en) * | 1998-10-23 | 1999-11-23 | Trw Inc. | Movable acceleration switch responsive to acceleration parallel to plane of substrate upon which the switch is fabricated and methods |
US6072247A (en) * | 1998-10-23 | 2000-06-06 | Trw Inc. | Cantilevered acceleration switch responsive to acceleration parallel to plane of substrate upon which the switch is fabricated and methods |
DE19930779B4 (de) * | 1999-07-03 | 2010-05-06 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
DE10010036A1 (de) * | 2000-03-02 | 2001-09-06 | Volkswagen Ag | Beschleunigungssensoren |
DE10108850C2 (de) * | 2000-03-18 | 2002-05-08 | Conti Temic Microelectronic | Verfahren zur Steuerung von Insassenschutzeinrichtungen in einem Fahrzeug |
WO2003031992A1 (de) * | 2001-10-05 | 2003-04-17 | Continental Teves Ag & Co. Ohg | Beschleunigungsaufnehmer für kraftfahrzeuge |
US6909985B2 (en) * | 2002-11-27 | 2005-06-21 | Lockheed Martin Corporation | Method and apparatus for recording changes associated with acceleration of a structure |
FR2861464B1 (fr) * | 2003-10-28 | 2006-02-17 | Commissariat Energie Atomique | Detecteur de mouvement a six degres de liberte avec trois capteurs de position et procede de fabrication d'un capteur |
DE102006013381B4 (de) * | 2006-03-23 | 2015-06-18 | Conti Temic Microelectronic Gmbh | Steuervorrichtung für ein Kfz-Sicherheitssystem |
US8186926B2 (en) * | 2006-04-11 | 2012-05-29 | Longyear Tm, Inc. | Drill rod handler |
EP2004949A4 (en) * | 2006-04-11 | 2015-09-16 | Longyear Tm Inc | MEANS FOR HANDLING DRILLING RODS |
DE102013104374A1 (de) * | 2013-04-30 | 2014-10-30 | Hella Kgaa Hueck & Co. | Kontrollvorrichtung für die Kontrolle einer Stellvorrichtung |
FR3050032B1 (fr) | 2016-04-12 | 2018-04-20 | Pierre Delorme Nicolas | Accelerometre basse consommation |
CN114895067B (zh) * | 2022-05-23 | 2024-09-27 | 北京市科学技术研究院城市安全与环境科学研究所 | 双轴仿毛发传感器 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE266841C (no) * | ||||
DE2014210A1 (de) * | 1970-03-24 | 1971-10-14 | Fiala E | Beschleunigungsgeber |
US3889232A (en) * | 1971-08-27 | 1975-06-10 | Technar Inc | Sensor assembly for use in a vehicle equipped with a gas bag restraint system |
JPS5331161Y2 (no) * | 1973-08-17 | 1978-08-03 | ||
DE3704209A1 (de) * | 1986-04-11 | 1987-10-15 | Bosch Gmbh Robert | Beschleunigungssensor |
FR2599833B1 (fr) * | 1986-06-10 | 1992-02-14 | Metravib Sa | Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication |
DE3726145C1 (de) * | 1987-08-06 | 1988-11-24 | Bosch Gmbh Robert | Beschleunigungsaufnehmer,insbesondere zum Ausloesen von Insassenschutzvorrichtungen in Kraftfahrzeugen bei einem Unfall |
DE3727142C2 (de) * | 1987-08-14 | 1994-02-24 | Kernforschungsz Karlsruhe | Verfahren zur Herstellung von Mikrosensoren mit integrierter Signalverarbeitung |
JPH077012B2 (ja) * | 1987-08-18 | 1995-01-30 | 富士通株式会社 | 加速度センサ |
DE3805161A1 (de) * | 1988-01-20 | 1989-08-03 | Schmidt Feinmech | Verfahren zum messen einer beschleunigung, beschleunigungssensor und verfahren zu dessen herstellung |
WO1989011658A1 (en) * | 1988-05-27 | 1989-11-30 | Siemens Aktiengesellschaft | Sensor for measuring a motional parameter, in particular crash sensor for a motor vehicle |
US4882933A (en) * | 1988-06-03 | 1989-11-28 | Novasensor | Accelerometer with integral bidirectional shock protection and controllable viscous damping |
DE3925594A1 (de) * | 1988-08-26 | 1990-03-01 | Bosch Gmbh Robert | Elektronische einrichtung und betriebsverfahren |
US4855544A (en) * | 1988-09-01 | 1989-08-08 | Honeywell Inc. | Multiple level miniature electromechanical accelerometer switch |
DE3886764T2 (de) * | 1988-09-09 | 1994-04-14 | Bosch Gmbh Robert | Auslösungsschaltkreis für einen airbag in fahrzeugen. |
US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
US5233141A (en) * | 1989-02-23 | 1993-08-03 | Automotive Technologies International Inc. | Spring mass passenger compartment crash sensors |
US5103667A (en) * | 1989-06-22 | 1992-04-14 | Ic Sensors, Inc. | Self-testable micro-accelerometer and method |
US5192395A (en) * | 1990-10-12 | 1993-03-09 | Texas Instruments Incorporated | Method of making a digital flexure beam accelerometer |
DE4103589A1 (de) * | 1991-02-06 | 1992-08-13 | Siemens Ag | Sensoreinrichtung mit einem mechanisch resonanten schwingungselement |
US5177331A (en) * | 1991-07-05 | 1993-01-05 | Delco Electronics Corporation | Impact detector |
EP0567938B1 (en) * | 1992-04-30 | 1998-03-18 | Texas Instruments Incorporated | Digital accelerometer |
US5337606A (en) * | 1992-08-10 | 1994-08-16 | Motorola, Inc. | Laterally sensitive accelerometer and method for making |
US5591910A (en) * | 1994-06-03 | 1997-01-07 | Texas Instruments Incorporated | Accelerometer |
-
1994
- 1994-03-30 DE DE4411130A patent/DE4411130A1/de not_active Withdrawn
- 1994-03-30 DE DE4447487A patent/DE4447487A1/de not_active Withdrawn
- 1994-03-30 DE DE4447488A patent/DE4447488A1/de not_active Withdrawn
-
1995
- 1995-03-30 WO PCT/DE1995/000429 patent/WO1995027216A1/de active IP Right Grant
- 1995-03-30 EP EP95914278A patent/EP0753157B1/de not_active Expired - Lifetime
- 1995-03-30 KR KR1019960705369A patent/KR970702495A/ko not_active Application Discontinuation
- 1995-03-30 WO PCT/DE1995/000430 patent/WO1995027214A1/de active Application Filing
- 1995-03-30 JP JP7525346A patent/JP2930729B2/ja not_active Expired - Fee Related
- 1995-03-30 AT AT95914278T patent/ATE185625T1/de not_active IP Right Cessation
- 1995-03-30 WO PCT/DE1995/000431 patent/WO1995027217A1/de active Application Filing
- 1995-03-30 DE DE59507051T patent/DE59507051D1/de not_active Expired - Lifetime
-
1996
- 1996-09-26 US US08/721,564 patent/US5821419A/en not_active Expired - Lifetime
- 1996-09-27 NO NO964127A patent/NO964127D0/no unknown
Also Published As
Publication number | Publication date |
---|---|
EP0753157B1 (de) | 1999-10-13 |
DE4411130A1 (de) | 1995-10-05 |
EP0753157A1 (de) | 1997-01-15 |
WO1995027216A1 (de) | 1995-10-12 |
DE59507051D1 (de) | 1999-11-18 |
US5821419A (en) | 1998-10-13 |
KR970702495A (ko) | 1997-05-13 |
JPH09505149A (ja) | 1997-05-20 |
NO964127D0 (no) | 1996-09-27 |
JP2930729B2 (ja) | 1999-08-03 |
WO1995027217A1 (de) | 1995-10-12 |
WO1995027214A1 (de) | 1995-10-12 |
ATE185625T1 (de) | 1999-10-15 |
DE4447488A1 (de) | 1995-10-12 |
DE4447487A1 (de) | 1995-10-19 |
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