KR970702495A - 가속도 측정용 초소형 기계식 센서 유니트(micromechanical sensor unit for detecting acceleration) - Google Patents

가속도 측정용 초소형 기계식 센서 유니트(micromechanical sensor unit for detecting acceleration)

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Publication number
KR970702495A
KR970702495A KR1019960705369A KR19960705369A KR970702495A KR 970702495 A KR970702495 A KR 970702495A KR 1019960705369 A KR1019960705369 A KR 1019960705369A KR 19960705369 A KR19960705369 A KR 19960705369A KR 970702495 A KR970702495 A KR 970702495A
Authority
KR
South Korea
Prior art keywords
sensor
sensor unit
pendulum
switch
acceleration
Prior art date
Application number
KR1019960705369A
Other languages
English (en)
Inventor
게르하르트 마더
옌스 뇌트첼
슈테펜 슐체
Original Assignee
로더리히 네테부쉬;롤프 옴케
지멘스 악티엔게젤샤프트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 로더리히 네테부쉬;롤프 옴케, 지멘스 악티엔게젤샤프트 filed Critical 로더리히 네테부쉬;롤프 옴케
Publication of KR970702495A publication Critical patent/KR970702495A/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/135—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by making use of contacts which are actuated by a movable inertial mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

가속도 측정용 초소형 기계식 센서 유니트는 적어도 하나의 진자와 진동 질량부(P)를 가지는 나선형 스프링(B), 각각의 진자를 위한 보조 수단(E) 및 적어도 2개의 위치 센서(S)를 구비한다. 한정된 트리거링 임계값을 가지는 스위치로부터의 각각의 위치 센서(S)와 그것의 진자 및 적어도 2개의 스위치는 가속도와 동일 방향으로 응답한다. 적어도 하나의 스위치는 개별적 센서 신호 태핑을 가지는 안전 스위치(SS)이다.

Description

가속도 측정용 초소형 기계식 센서 유니트(MlCROMECHANlCAL SENSOR UNIT FOR DETECTING ACCELERATION)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 자동차 탑승자 보호 시스템 트리거링용 제어 장치를 도시하는 도면,
제2도는 센서 유니트의 평면도.

Claims (3)

  1. 나선형 스프링(B)과 진동 질량부(P)를 가지는 적어도 하나의 진자와, 각각의 진자를 의한 보조 수단(E)과, 적어도 2개의 위치 센서(S)와, 한정된 트리거링 임계값을 가지는 스위치를 형성하는 각각의 위치 센서(S)와 연합 진자, 가속도의 동일한 방향에 응답하는 적어도 2개의 스위치와, 센서 신호의 개별적 탭과 함께 안전 센서(SS)가 있는 적어도 하나의 스위치를 구비하는 가속도 측정용 초소형 기계식 센서 유니트.
  2. 제1항에 있어서, 평가 회로(μP)에 의해 생성된 다른 스위치 상기 센서 신호는 점화 회로(ZK)에 공급되고, 상기 안전 센서(SS)의 상기 센서 신호는 상기 점화 회로(ZK)에 개별적으로 공급되는 것을 특징으로 하는 초소형 기계식 센서 유니트.
  3. 제1항에 있어서, 상기 센서 유니트(μP)와 상기 점화 회로(ZK)는 하이브리드 방법 또는 집적 방법으로 반도체 칩에 서로 배열되는 것을 특징으로 하는 초소형 기계식 센서 유니트.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960705369A 1994-03-30 1995-03-30 가속도 측정용 초소형 기계식 센서 유니트(micromechanical sensor unit for detecting acceleration) KR970702495A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4411130A DE4411130A1 (de) 1994-03-30 1994-03-30 Sensoreinheit mit mindestens einem Beschleunigungssensor, z. B. zur Kfz-Airbagauslösung, und Verfahren zu seiner Herstellung
DEP4411130.4 1994-03-30
PCT/DE1995/000429 WO1995027216A1 (de) 1994-03-30 1995-03-30 Mikromechanische sensoreinheit zum erkennen von beschleunigungen

Publications (1)

Publication Number Publication Date
KR970702495A true KR970702495A (ko) 1997-05-13

Family

ID=6514288

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960705369A KR970702495A (ko) 1994-03-30 1995-03-30 가속도 측정용 초소형 기계식 센서 유니트(micromechanical sensor unit for detecting acceleration)

Country Status (8)

Country Link
US (1) US5821419A (ko)
EP (1) EP0753157B1 (ko)
JP (1) JP2930729B2 (ko)
KR (1) KR970702495A (ko)
AT (1) ATE185625T1 (ko)
DE (4) DE4447487A1 (ko)
NO (1) NO964127D0 (ko)
WO (3) WO1995027216A1 (ko)

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Also Published As

Publication number Publication date
DE4447488A1 (de) 1995-10-12
NO964127L (no) 1996-09-27
US5821419A (en) 1998-10-13
JP2930729B2 (ja) 1999-08-03
WO1995027214A1 (de) 1995-10-12
DE4447487A1 (de) 1995-10-19
DE4411130A1 (de) 1995-10-05
EP0753157B1 (de) 1999-10-13
NO964127D0 (no) 1996-09-27
DE59507051D1 (de) 1999-11-18
JPH09505149A (ja) 1997-05-20
EP0753157A1 (de) 1997-01-15
ATE185625T1 (de) 1999-10-15
WO1995027217A1 (de) 1995-10-12
WO1995027216A1 (de) 1995-10-12

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