NL8500465A - Capacitieve drukdetector. - Google Patents

Capacitieve drukdetector. Download PDF

Info

Publication number
NL8500465A
NL8500465A NL8500465A NL8500465A NL8500465A NL 8500465 A NL8500465 A NL 8500465A NL 8500465 A NL8500465 A NL 8500465A NL 8500465 A NL8500465 A NL 8500465A NL 8500465 A NL8500465 A NL 8500465A
Authority
NL
Netherlands
Prior art keywords
plate
silicon
tube
membrane
shaped
Prior art date
Application number
NL8500465A
Other languages
English (en)
Dutch (nl)
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of NL8500465A publication Critical patent/NL8500465A/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
NL8500465A 1984-02-21 1985-02-19 Capacitieve drukdetector. NL8500465A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI840700A FI69211C (fi) 1984-02-21 1984-02-21 Kapacitiv styckgivare
FI840700 1984-02-21

Publications (1)

Publication Number Publication Date
NL8500465A true NL8500465A (nl) 1985-09-16

Family

ID=8518584

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8500465A NL8500465A (nl) 1984-02-21 1985-02-19 Capacitieve drukdetector.

Country Status (9)

Country Link
US (1) US4594639A (it)
JP (1) JPS60195830A (it)
BR (1) BR8500738A (it)
DE (1) DE3505924C2 (it)
FI (1) FI69211C (it)
FR (1) FR2559899B1 (it)
GB (1) GB2154747B (it)
IT (1) IT1186831B (it)
NL (1) NL8500465A (it)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572204A (en) * 1984-03-21 1986-02-25 Hewlett-Packard Company Pressure dome with compliant chamber
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4812199A (en) * 1987-12-21 1989-03-14 Ford Motor Company Rectilinearly deflectable element fabricated from a single wafer
FI78784C (fi) * 1988-01-18 1989-09-11 Vaisala Oy Tryckgivarkonstruktion och foerfarande foer framstaellning daerav.
US4960177A (en) * 1988-06-03 1990-10-02 University Of Hawaii Silicon membrane micro-scale
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
US4954925A (en) * 1988-12-30 1990-09-04 United Technologies Corporation Capacitive sensor with minimized dielectric drift
DE3932618A1 (de) * 1989-09-29 1991-04-18 Fraunhofer Ges Forschung Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
DE3937522A1 (de) * 1989-11-10 1991-05-16 Texas Instruments Deutschland Mit einem traegerelement verbundener halbleiter-drucksensor
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
FI93579C (fi) * 1993-08-20 1995-04-25 Vaisala Oy Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi
US6662663B2 (en) 2002-04-10 2003-12-16 Hewlett-Packard Development Company, L.P. Pressure sensor with two membranes forming a capacitor
DE102013204197A1 (de) * 2013-03-12 2014-10-02 Robert Bosch Gmbh Mikroelektrochemischer Sensor und Verfahren zum Betreiben eines mikroelektrochemischen Sensors
US9902611B2 (en) * 2014-01-13 2018-02-27 Nextinput, Inc. Miniaturized and ruggedized wafer level MEMs force sensors
US10466119B2 (en) 2015-06-10 2019-11-05 Nextinput, Inc. Ruggedized wafer level MEMS force sensor with a tolerance trench
US11243125B2 (en) 2017-02-09 2022-02-08 Nextinput, Inc. Integrated piezoresistive and piezoelectric fusion force sensor
CN110494724B (zh) 2017-02-09 2023-08-01 触控解决方案股份有限公司 集成数字力传感器和相关制造方法
EP3655740A4 (en) 2017-07-19 2021-07-14 Nextinput, Inc. STRESS TRANSFER STACKING IN MEMS FORCE SENSOR
US11423686B2 (en) 2017-07-25 2022-08-23 Qorvo Us, Inc. Integrated fingerprint and force sensor
WO2019023552A1 (en) 2017-07-27 2019-01-31 Nextinput, Inc. PIEZORESISTIVE AND PIEZOELECTRIC FORCE SENSOR ON WAFER AND METHODS OF MANUFACTURING THE SAME
WO2019079420A1 (en) 2017-10-17 2019-04-25 Nextinput, Inc. SHIFT TEMPERATURE COEFFICIENT COMPENSATION FOR FORCE SENSOR AND STRAIN GAUGE
US11385108B2 (en) 2017-11-02 2022-07-12 Nextinput, Inc. Sealed force sensor with etch stop layer
US11874185B2 (en) 2017-11-16 2024-01-16 Nextinput, Inc. Force attenuator for force sensor
US10962427B2 (en) 2019-01-10 2021-03-30 Nextinput, Inc. Slotted MEMS force sensor

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1138401A (en) * 1965-05-06 1969-01-01 Mallory & Co Inc P R Bonding
US3808480A (en) * 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US3965746A (en) * 1974-11-04 1976-06-29 Teledyne Industries, Inc. Pressure transducer
US4040118A (en) * 1975-06-18 1977-08-02 Bunker Ramo Corporation Pressure sensitive transducer
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4386453A (en) * 1979-09-04 1983-06-07 Ford Motor Company Method for manufacturing variable capacitance pressure transducers
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer
US4445383A (en) * 1982-06-18 1984-05-01 General Signal Corporation Multiple range capacitive pressure transducer
US4467394A (en) * 1983-08-29 1984-08-21 United Technologies Corporation Three plate silicon-glass-silicon capacitive pressure transducer

Also Published As

Publication number Publication date
GB8504078D0 (en) 1985-03-20
IT1186831B (it) 1987-12-16
BR8500738A (pt) 1985-10-08
JPS60195830A (ja) 1985-10-04
FI840700A0 (fi) 1984-02-21
FR2559899B1 (fr) 1987-02-13
DE3505924C2 (de) 1994-03-24
GB2154747B (en) 1987-05-07
IT8512436A0 (it) 1985-02-20
FI69211B (fi) 1985-08-30
DE3505924A1 (de) 1985-08-22
US4594639A (en) 1986-06-10
FR2559899A1 (fr) 1985-08-23
FI69211C (fi) 1985-12-10
GB2154747A (en) 1985-09-11

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