NL8402340A - Microscoop voor niet-gedifferentieerde fase-beeldvorming. - Google Patents

Microscoop voor niet-gedifferentieerde fase-beeldvorming. Download PDF

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Publication number
NL8402340A
NL8402340A NL8402340A NL8402340A NL8402340A NL 8402340 A NL8402340 A NL 8402340A NL 8402340 A NL8402340 A NL 8402340A NL 8402340 A NL8402340 A NL 8402340A NL 8402340 A NL8402340 A NL 8402340A
Authority
NL
Netherlands
Prior art keywords
detector
microscope
microscope according
scanning
electron
Prior art date
Application number
NL8402340A
Other languages
English (en)
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL8402340A priority Critical patent/NL8402340A/nl
Priority to DE8585201140T priority patent/DE3577775D1/de
Priority to EP85201140A priority patent/EP0171109B1/en
Priority to US06/757,998 priority patent/US4691103A/en
Priority to JP60163064A priority patent/JPH0626106B2/ja
Publication of NL8402340A publication Critical patent/NL8402340A/nl

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL8402340A 1984-07-25 1984-07-25 Microscoop voor niet-gedifferentieerde fase-beeldvorming. NL8402340A (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL8402340A NL8402340A (nl) 1984-07-25 1984-07-25 Microscoop voor niet-gedifferentieerde fase-beeldvorming.
DE8585201140T DE3577775D1 (de) 1984-07-25 1985-07-09 Mikroskop zur erzeugung von nichtdifferenzierten phasenbildern.
EP85201140A EP0171109B1 (en) 1984-07-25 1985-07-09 Microscope for non-differentiated phase image formation
US06/757,998 US4691103A (en) 1984-07-25 1985-07-23 Microscope for non-differentiated phase image formation
JP60163064A JPH0626106B2 (ja) 1984-07-25 1985-07-25 走査透過顕微鏡

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8402340A NL8402340A (nl) 1984-07-25 1984-07-25 Microscoop voor niet-gedifferentieerde fase-beeldvorming.
NL8402340 1984-07-25

Publications (1)

Publication Number Publication Date
NL8402340A true NL8402340A (nl) 1986-02-17

Family

ID=19844267

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8402340A NL8402340A (nl) 1984-07-25 1984-07-25 Microscoop voor niet-gedifferentieerde fase-beeldvorming.

Country Status (5)

Country Link
US (1) US4691103A (ja)
EP (1) EP0171109B1 (ja)
JP (1) JPH0626106B2 (ja)
DE (1) DE3577775D1 (ja)
NL (1) NL8402340A (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5185559A (en) * 1986-05-20 1993-02-09 Canon Kabushiki Kaisha Supply circuit for P-N junction cathode
US4739399A (en) * 1987-08-06 1988-04-19 Gatan Inc. TV system for transmission electron microscopes
JPH0760661B2 (ja) * 1988-07-22 1995-06-28 株式会社日立製作所 電子顕微鏡
JP2563134B2 (ja) * 1989-01-25 1996-12-11 日本電子株式会社 走査透過型位相差電子顕微鏡
DE69128104T2 (de) * 1990-05-18 1998-04-09 Hitachi Ltd Elektronenmikroskop, Probenstellglied für ein Elektronenmikroskop und Verfahren zum Beobachten von mikroskopischen Bildern
JPH0464694A (ja) * 1990-07-05 1992-02-28 Nippon Steel Corp 車両走行路用換気採光側壁
DE19714221A1 (de) * 1997-04-07 1998-10-08 Zeiss Carl Fa Konfokales Mikroskop mit einem motorischen Scanningtisch
DE10050529B4 (de) * 2000-10-11 2016-06-09 Leica Microsystems Cms Gmbh Verfahren zur Strahlsteuerung in einem Scanmikroskop, Anordnung zur Strahlsteuerung in einem Scanmikroskop und Scanmikroskop
US7745786B2 (en) * 2008-03-19 2010-06-29 Fama Leo A Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
EP2194565A1 (en) * 2008-12-03 2010-06-09 FEI Company Dark field detector for use in a charged-particle optical apparatus
EP2575159B1 (en) * 2011-09-30 2016-04-20 Carl Zeiss Microscopy GmbH Particle beam system and method for operating the same
US10546715B2 (en) 2015-09-29 2020-01-28 Hitachi High—Technologies Corporation Charged particle beam device
EP3538941A4 (en) 2016-11-10 2020-06-17 The Trustees of Columbia University in the City of New York METHODS FOR FAST IMAGING OF HIGH RESOLUTION LARGE SAMPLES

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7804037A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.
JPS5975765A (ja) * 1982-10-25 1984-04-28 Hitachi Ltd 電子ビ−ム偏向方法及びその装置

Also Published As

Publication number Publication date
US4691103A (en) 1987-09-01
DE3577775D1 (de) 1990-06-21
JPH0626106B2 (ja) 1994-04-06
EP0171109A1 (en) 1986-02-12
EP0171109B1 (en) 1990-05-16
JPS6139442A (ja) 1986-02-25

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BV The patent application has lapsed