NL8203116A - Werkwijze en apparaat voor het doen groeien van langgerekte kristallijne lichamen uit een smelt voor de vervaardiging van fotogalvanische zonnecellen. - Google Patents

Werkwijze en apparaat voor het doen groeien van langgerekte kristallijne lichamen uit een smelt voor de vervaardiging van fotogalvanische zonnecellen. Download PDF

Info

Publication number
NL8203116A
NL8203116A NL8203116A NL8203116A NL8203116A NL 8203116 A NL8203116 A NL 8203116A NL 8203116 A NL8203116 A NL 8203116A NL 8203116 A NL8203116 A NL 8203116A NL 8203116 A NL8203116 A NL 8203116A
Authority
NL
Netherlands
Prior art keywords
gas
silicon
melt
meniscus
capillary
Prior art date
Application number
NL8203116A
Other languages
English (en)
Dutch (nl)
Original Assignee
Mobil Tyco Solar Energy Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mobil Tyco Solar Energy Corp filed Critical Mobil Tyco Solar Energy Corp
Publication of NL8203116A publication Critical patent/NL8203116A/nl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/20—Aluminium oxides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
    • Y10T117/1044—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Silicon Compounds (AREA)
NL8203116A 1981-08-20 1982-08-05 Werkwijze en apparaat voor het doen groeien van langgerekte kristallijne lichamen uit een smelt voor de vervaardiging van fotogalvanische zonnecellen. NL8203116A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29473781 1981-08-20
US06/294,737 US4443411A (en) 1980-12-15 1981-08-20 Apparatus for controlling the atmosphere surrounding a crystal growth zone

Publications (1)

Publication Number Publication Date
NL8203116A true NL8203116A (nl) 1983-03-16

Family

ID=23134725

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8203116A NL8203116A (nl) 1981-08-20 1982-08-05 Werkwijze en apparaat voor het doen groeien van langgerekte kristallijne lichamen uit een smelt voor de vervaardiging van fotogalvanische zonnecellen.

Country Status (10)

Country Link
US (1) US4443411A (fr)
JP (1) JPS6033800B2 (fr)
AU (1) AU553047B2 (fr)
CA (1) CA1215297A (fr)
DE (1) DE3231090A1 (fr)
FR (1) FR2511708A1 (fr)
GB (1) GB2104410B (fr)
IL (1) IL66491A (fr)
IN (1) IN158517B (fr)
NL (1) NL8203116A (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4591409A (en) * 1984-05-03 1986-05-27 Texas Instruments Incorporated Control of nitrogen and/or oxygen in silicon via nitride oxide pressure during crystal growth
EP0191111B1 (fr) * 1984-12-28 1991-09-18 International Business Machines Corporation Procédés de tirage et appareillage pour la croissance de cristaux de silicium avec une teneur en carbone élevée et contrôlée
US4937053A (en) * 1987-03-27 1990-06-26 Mobil Solar Energy Corporation Crystal growing apparatus
DE3890206T1 (de) * 1987-03-27 1989-04-13 Mobil Solar Energy Corp Kristallziehapparatur
KR890700543A (ko) * 1987-03-27 1989-04-25 버나드 엠. 길스피 결정성장 장치
AU602113B2 (en) * 1987-09-08 1990-09-27 Ebara Solar, Inc. Purification process for dendritic web silicon crystal growth system and dendritic web silicon crystals made thereby
DE69301371T2 (de) * 1992-03-31 1996-09-05 Shinetsu Handotai Kk Vorrichtung zum Ziehen eines Silizium-Einkristalls
US6059875A (en) * 1999-01-11 2000-05-09 Seh America, Inc. Method of effecting nitrogen doping in Czochralski grown silicon crystal
US6562132B2 (en) * 2001-04-04 2003-05-13 Ase Americas, Inc. EFG crystal growth apparatus and method
US6814802B2 (en) * 2002-10-30 2004-11-09 Evergreen Solar, Inc. Method and apparatus for growing multiple crystalline ribbons from a single crucible
DE10361075A1 (de) * 2003-12-22 2005-07-28 Pac Tech - Packaging Technologies Gmbh Verfahren und Vorichtung zur Trocknung von Schaltungssubstraten
JP2005289776A (ja) * 2004-04-05 2005-10-20 Canon Inc 結晶製造方法および結晶製造装置
US7348076B2 (en) * 2004-04-08 2008-03-25 Saint-Gobain Ceramics & Plastics, Inc. Single crystals and methods for fabricating same
US7959732B1 (en) * 2005-06-17 2011-06-14 Saint-Gobain Ceramics & Plastics, Inc. Apparatus and method for monitoring and controlling crystal growth
TWI472652B (zh) * 2006-09-22 2015-02-11 Saint Gobain Ceramics 製造發光二極體或雷射二極體之方法
DE102006062117A1 (de) * 2006-12-22 2008-06-26 Schott Solar Gmbh Verfahren zum Herstellen kristallisierten Siliciums sowie kristallisiertes Silicium
EP2152942A1 (fr) * 2007-06-14 2010-02-17 Evergreen Solar, Inc. Contrôle thermique amovible destiné à des fours de tirage de rubans de cristal
US9487884B2 (en) * 2010-05-31 2016-11-08 International Business Machines Corporation Producing a mono-crystalline sheet of semiconductor material
US20130089944A1 (en) * 2010-06-11 2013-04-11 Amtech Systems, Inc. Solar cell silicon wafer process
US20120126171A1 (en) 2010-11-24 2012-05-24 Siemens Medical Solutions Usa, Inc. Crystal Growth Atmosphere For Oxyorthosilicate Materials Production
US10774440B2 (en) 2010-11-24 2020-09-15 Siemens Medical Solutions Usa, Inc. Crystal growth atmosphere for oxyorthosilicate materials production
US9328288B2 (en) 2013-11-15 2016-05-03 Siemens Medical Solutions Usa, Inc. Rare-earth oxyorthosilicates with improved growth stability and scintillation characteristics
JP6246034B2 (ja) * 2014-03-17 2017-12-13 シチズン時計株式会社 ガレート酸化物結晶の製造方法及び製造装置
CN104862775A (zh) * 2015-06-09 2015-08-26 江苏中电振华晶体技术有限公司 一种蓝宝石晶体半球罩的生长装置及其生长方法
US11047650B2 (en) 2017-09-29 2021-06-29 Saint-Gobain Ceramics & Plastics, Inc. Transparent composite having a laminated structure
JP7477997B2 (ja) * 2019-03-25 2024-05-02 京セラ株式会社 サファイアリボンおよび単結晶リボン製造装置
CN110904500B (zh) * 2019-11-04 2021-09-28 南京同溧晶体材料研究院有限公司 一种多次籽晶可替换的导膜法蓝宝石晶体生长炉
CN110923815B (zh) * 2019-11-04 2021-06-15 南京同溧晶体材料研究院有限公司 一种基于籽晶替换方案的导膜法蓝宝石晶体生长炉
CN112191121B (zh) * 2020-09-22 2022-09-30 南京晶升装备股份有限公司 一种长晶炉工艺气混气气道
CN115233291B (zh) * 2022-06-29 2023-08-04 中环领先(徐州)半导体材料有限公司 导流组件和具有其的长晶炉、长晶方法
CN115491757B (zh) * 2022-11-18 2023-03-10 浙江晶盛机电股份有限公司 晶体生长炉及籽晶更换方法
CN115558985B (zh) * 2022-11-18 2023-03-10 浙江晶盛机电股份有限公司 籽晶更换装置、晶体生长炉及籽晶更换方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2889240A (en) * 1956-03-01 1959-06-02 Rca Corp Method and apparatus for growing semi-conductive single crystals from a melt
US3124489A (en) * 1960-05-02 1964-03-10 Method of continuously growing thin strip crystals
FR1320741A (fr) * 1961-10-06 1963-03-15 Gen Electric Méthode de grossissement des cristaux
DE1286510B (de) * 1962-11-23 1969-01-09 Siemens Ag Verfahren zur Herstellung von bandfoermigen, aus Halbleitermaterial bestehenden Einkristallen durch Ziehen aus einer Schmelze
US3265469A (en) * 1964-09-21 1966-08-09 Gen Electric Crystal growing apparatus
DE2700994C2 (de) * 1976-04-16 1986-02-06 International Business Machines Corp., Armonk, N.Y. Verfahren und Vorrichtung zum Ziehen von kristallinen Siliciumkörpern
US4030965A (en) * 1976-06-09 1977-06-21 The Harshaw Chemical Company Crystal growth procedure
CA1080589A (fr) * 1976-06-24 1980-07-01 Union Carbide Corporation Production de cristaux uniques de gallium-gadolinium
US4118197A (en) * 1977-01-24 1978-10-03 Mobil Tyco Solar Energy Corp. Cartridge and furnace for crystal growth
US4158038A (en) * 1977-01-24 1979-06-12 Mobil Tyco Solar Energy Corporation Method and apparatus for reducing residual stresses in crystals
US4221754A (en) * 1977-12-29 1980-09-09 Nowak Welville B Method for producing solid ribbons
JPS54134082A (en) * 1978-04-11 1979-10-18 Agency Of Ind Science & Technol Belt silicon crystallizer
US4239734A (en) * 1978-07-13 1980-12-16 International Business Machines Corporation Method and apparatus for forming silicon crystalline bodies
US4415401A (en) * 1980-03-10 1983-11-15 Mobil Solar Energy Corporation Control of atmosphere surrounding crystal growth zone

Also Published As

Publication number Publication date
IN158517B (fr) 1986-11-29
GB2104410B (en) 1984-12-12
IL66491A0 (en) 1982-12-31
JPS58104093A (ja) 1983-06-21
GB2104410A (en) 1983-03-09
CA1215297A (fr) 1986-12-16
FR2511708A1 (fr) 1983-02-25
IL66491A (en) 1986-03-31
AU553047B2 (en) 1986-07-03
US4443411A (en) 1984-04-17
AU8694782A (en) 1983-02-24
DE3231090A1 (de) 1983-03-10
JPS6033800B2 (ja) 1985-08-05

Similar Documents

Publication Publication Date Title
NL8203116A (nl) Werkwijze en apparaat voor het doen groeien van langgerekte kristallijne lichamen uit een smelt voor de vervaardiging van fotogalvanische zonnecellen.
US7682452B2 (en) Apparatus and methods of growing void-free crystalline ceramic products
US8262795B2 (en) Method and apparatus for the production of crystalline silicon substrates
US4415401A (en) Control of atmosphere surrounding crystal growth zone
EP0368586B1 (fr) Appareillage pour la fabrication de monocristaux de silicium
US5394825A (en) Method and apparatus for growing shaped crystals
EP2324146B1 (fr) Méthode et dispositif pour la croissance d'un ruban cristallin avec la régulation du transport de contaminants en suspension dans un gaz à travers une surface du ruban
WO1991002832A1 (fr) Procede de solidification dirigee des monocristaux
US4430305A (en) Displaced capillary dies
US20140366582A1 (en) Method and apparatus of manufacturing silicon seed rods
JP2587932B2 (ja) シリコンリボンの製造方法
JPS5950636B2 (ja) 帯状シリコン結晶製造装置
US4353757A (en) Displaced capillary dies
JPH0329756B2 (fr)
JPS5950637B2 (ja) 帯状シリコン結晶の製造装置
JPH05254981A (ja) 化合物半導体単結晶の製造方法及び製造装置
JPS6090891A (ja) 帯状シリコン結晶製造装置
JPS5950091A (ja) 帯状シリコン結晶の製造装置

Legal Events

Date Code Title Description
DNT Communications of changes of names of applicants whose applications have been laid open to public inspection

Free format text: MOBIL SOLAR ENERGY CORPORATION

A85 Still pending on 85-01-01
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
BV The patent application has lapsed