JPS54134082A - Belt silicon crystallizer - Google Patents
Belt silicon crystallizerInfo
- Publication number
- JPS54134082A JPS54134082A JP4174378A JP4174378A JPS54134082A JP S54134082 A JPS54134082 A JP S54134082A JP 4174378 A JP4174378 A JP 4174378A JP 4174378 A JP4174378 A JP 4174378A JP S54134082 A JPS54134082 A JP S54134082A
- Authority
- JP
- Japan
- Prior art keywords
- dies
- silicon
- crystal
- crystallizer
- molten silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: In a silicon crystallizer having slitted dies immersed in molten silicon, gas blow openings are placed near the upper portion of the dies to control the temperature distribution thereabout, thereby to produce a specified width and thickness belt type crystal in a high yield.
CONSTITUTION: Slitted dies 23a, 23b are immersed into molten silicon which lifts through the slit by capillary action. The lifted molten silicon is contacted with seed crystal and lifted to be grown into a belt type silicon crystal. The gas admission pipes 27a, 27b are provided near the top of the dies in parallel with growing crystal. The flow direction and quantity of the gas is adjusted so that the temperature distribution at the top of the dies are maintained at a specified condiditon.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4174378A JPS54134082A (en) | 1978-04-11 | 1978-04-11 | Belt silicon crystallizer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4174378A JPS54134082A (en) | 1978-04-11 | 1978-04-11 | Belt silicon crystallizer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54134082A true JPS54134082A (en) | 1979-10-18 |
JPS5638556B2 JPS5638556B2 (en) | 1981-09-07 |
Family
ID=12616897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4174378A Granted JPS54134082A (en) | 1978-04-11 | 1978-04-11 | Belt silicon crystallizer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54134082A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4443411A (en) * | 1980-12-15 | 1984-04-17 | Mobil Solar Energy Corporation | Apparatus for controlling the atmosphere surrounding a crystal growth zone |
-
1978
- 1978-04-11 JP JP4174378A patent/JPS54134082A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4443411A (en) * | 1980-12-15 | 1984-04-17 | Mobil Solar Energy Corporation | Apparatus for controlling the atmosphere surrounding a crystal growth zone |
Also Published As
Publication number | Publication date |
---|---|
JPS5638556B2 (en) | 1981-09-07 |
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