NL8103629A - Inrichting met dunne lagen. - Google Patents

Inrichting met dunne lagen. Download PDF

Info

Publication number
NL8103629A
NL8103629A NL8103629A NL8103629A NL8103629A NL 8103629 A NL8103629 A NL 8103629A NL 8103629 A NL8103629 A NL 8103629A NL 8103629 A NL8103629 A NL 8103629A NL 8103629 A NL8103629 A NL 8103629A
Authority
NL
Netherlands
Prior art keywords
temperature
layer
thin
temperature coefficient
resistor
Prior art date
Application number
NL8103629A
Other languages
English (en)
Dutch (nl)
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of NL8103629A publication Critical patent/NL8103629A/nl

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/232—Adjusting the temperature coefficient; Adjusting value of resistance by adjusting temperature coefficient of resistance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/06—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material including means to minimise changes in resistance with changes in temperature

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
NL8103629A 1980-08-02 1981-07-31 Inrichting met dunne lagen. NL8103629A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3029446 1980-08-02
DE3029446A DE3029446A1 (de) 1980-08-02 1980-08-02 Duennschichtanordnung

Publications (1)

Publication Number Publication Date
NL8103629A true NL8103629A (nl) 1982-03-01

Family

ID=6108804

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8103629A NL8103629A (nl) 1980-08-02 1981-07-31 Inrichting met dunne lagen.

Country Status (4)

Country Link
US (1) US4464646A (de)
JP (1) JPS5753970A (de)
DE (1) DE3029446A1 (de)
NL (1) NL8103629A (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0132374B1 (de) * 1983-07-20 1988-01-20 Tokyo Tatsuno Company Limited Vorrichtung zur Volumendurchflussmessung mit Temperaturkompensation
EP0193015A3 (de) * 1985-02-26 1990-05-09 Novasina AG Sensor zur Messung der elektrischen Leitfähigkeit
GB2179748B (en) * 1985-08-20 1989-09-06 Sharp Kk Thermal flow sensor
JPS6244971A (ja) * 1985-08-23 1987-02-26 日本特殊陶業株式会社 セラミツク基板ヒ−タ−
US4792782A (en) * 1985-09-23 1988-12-20 Hammond Robert W Apparatus and method for providing improved resistive ratio stability of a resistive divider network
DE3733192C1 (de) * 1987-10-01 1988-10-06 Bosch Gmbh Robert PTC-Temperaturfuehler sowie Verfahren zur Herstellung von PTC-Temperaturfuehlerelementen fuer den PTC-Temperaturfuehler
US4803457A (en) * 1987-02-27 1989-02-07 Chapel Jr Roy W Compound resistor and manufacturing method therefore
US4907341A (en) * 1987-02-27 1990-03-13 John Fluke Mfg. Co., Inc. Compound resistor manufacturing method
US4920329A (en) * 1989-09-13 1990-04-24 Motorola, Inc. Impedance-compensated thick-film resistor
US5041809A (en) * 1990-01-08 1991-08-20 General Electric Company Glass-ceramic temperature sensor for heating ovens
DE4025715C1 (de) * 1990-08-14 1992-04-02 Robert Bosch Gmbh, 7000 Stuttgart, De
US5444219A (en) * 1990-09-24 1995-08-22 U.S. Philips Corporation Temperature sensing device and a temperature sensing circuit using such a device
DE4104674A1 (de) * 1991-02-15 1992-08-20 Ludwig Schneider Messtechnik G Sensor, insbesondere temperatursensor
US5161541A (en) * 1991-03-05 1992-11-10 Edentec Flow sensor system
JP2968111B2 (ja) * 1991-11-22 1999-10-25 日本特殊陶業株式会社 マイグレーション防止パターンを備えた抵抗体物理量センサ
JPH0653417A (ja) * 1992-05-19 1994-02-25 Texas Instr Inc <Ti> 抵抗器回路およびそれを形成する方法
CH684614A5 (de) * 1993-02-16 1994-10-31 Landis & Gyr Business Support Abgeglichener Drahtwiderstand zur Erfassung der Temperatur und Verfahren zur Herstellung von abgeglichenen Drahtwiderständen.
JP3196395B2 (ja) * 1993-02-18 2001-08-06 株式会社村田製作所 抵抗温度センサ
DE4312394A1 (de) * 1993-04-16 1994-10-20 Gsf Forschungszentrum Umwelt Widerstandsthermometer
JP3175890B2 (ja) * 1993-12-27 2001-06-11 日本碍子株式会社 温度センサ
JPH08219900A (ja) * 1995-02-15 1996-08-30 Murata Mfg Co Ltd 白金温度センサ
JPH09318594A (ja) * 1996-03-25 1997-12-12 Ngk Insulators Ltd ガスセンサおよび被測定ガス中の特定成分量の測定方法
JP2896996B2 (ja) * 1996-08-27 1999-05-31 釜屋電機株式会社 低抵抗チップ抵抗器及びその製造方法
CZ297066B6 (cs) * 1999-08-10 2006-08-16 Zpusob vztazného merení teplot a rozdílu teplot, asymetrický teplotní senzor a asymetrický vztazný clen pro provádení zpusobu
DE19957991C2 (de) * 1999-12-02 2002-01-31 Daimler Chrysler Ag Anordnung einer Heizschicht für einen Hochtemperaturgassensor
SE516411C2 (sv) * 2000-05-26 2002-01-15 Ericsson Telefon Ab L M Anordning för att kompensera variationer hos ett motstånds ytresistans på ett chips
DE10119928A1 (de) * 2001-04-23 2002-10-31 Behr France Sarl Heizregister mit PTC-Elementen
JP4009520B2 (ja) * 2002-11-05 2007-11-14 日東電工株式会社 温度測定用フレキシブル配線回路基板
US7012499B2 (en) * 2003-06-02 2006-03-14 International Business Machines Corporation Method of fabrication of thin film resistor with 0 TCR
DE102004034185B3 (de) * 2004-07-15 2006-01-05 Zitzmann, Heinrich, Dr. Temperaturfühler und Verfahren zu dessen Herstellung
FR2912674B1 (fr) * 2007-02-20 2009-08-28 Snecma Services Sa Procede de rechargement d'une piece en alliage d'aluminium
US8305186B1 (en) * 2010-08-24 2012-11-06 Minco Products, Inc. Resistive temperature detector assembly
WO2013112861A2 (en) * 2012-01-26 2013-08-01 Vishay Dale Electronics, Inc. Integrated circuit element and electronic circuit for light emitting diode applications
DE102014225897B3 (de) * 2014-12-15 2016-03-17 Ust Umweltsensortechnik Gmbh Hysteresefreier Hochtemperatursensor
US9595518B1 (en) 2015-12-15 2017-03-14 Globalfoundries Inc. Fin-type metal-semiconductor resistors and fabrication methods thereof
US11226244B2 (en) * 2019-01-30 2022-01-18 Sensata Technologies, Inc. Automotive exhaust gas sensor with two calibration portions

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1317558A (de) * 1961-03-13 1963-05-08
US3513411A (en) * 1968-01-30 1970-05-19 El Rad Mfg Co Frequency stabilized tuned circuit oscillator
US3845443A (en) * 1972-06-14 1974-10-29 Bailey Meter Co Thin film resistance thermometer
DD106493A1 (de) * 1973-08-24 1974-06-12
DE2362567A1 (de) * 1973-12-17 1975-06-19 Crl Electronic Bauelemente Temperaturstabilisierte elektronische schaltung
JPS5111161A (ja) * 1974-07-18 1976-01-29 Iwatsu Electric Co Ltd Hakumakuteikososhino teikoondokeisuchoseiho
US4019168A (en) * 1975-08-21 1977-04-19 Airco, Inc. Bilayer thin film resistor and method for manufacture
US4079349A (en) * 1976-09-29 1978-03-14 Corning Glass Works Low TCR resistor
JPS53103194A (en) * 1977-02-18 1978-09-08 Hitachi Ltd Thin film resistor unit with resistor for compensating resistance temperature coefficient
US4104607A (en) * 1977-03-14 1978-08-01 The United States Of America As Represented By The Secretary Of The Navy Zero temperature coefficient of resistance bi-film resistor
JPS53133800A (en) * 1977-04-26 1978-11-21 Nec Corp Method of manufacturing thin film resistor element
DE2719988C2 (de) * 1977-05-04 1983-01-05 Siemens AG, 1000 Berlin und 8000 München Amorphe, Tantal enthaltende mindestens bis 300 Grad C temperaturstabile Metallschicht und Verfahren zu ihrer Herstellung
JPS548865A (en) * 1977-06-22 1979-01-23 Hitachi Ltd Method of making thin film resistance elements
JPS5434901A (en) * 1977-08-23 1979-03-14 Teijin Ltd Method of producing printing plate
FR2440618A1 (fr) * 1978-11-03 1980-05-30 Lignes Telegraph Telephon Circuit integre resistance - capacite a couches minces
EP0016263B1 (de) * 1979-03-21 1983-07-06 BBC Brown Boveri AG Dünnschichtwiderstand mit grossem Temperaturkoeffizienten und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
JPS5753970A (de) 1982-03-31
DE3029446C2 (de) 1990-12-20
US4464646A (en) 1984-08-07
DE3029446A1 (de) 1982-03-11

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Legal Events

Date Code Title Description
A85 Still pending on 85-01-01
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
BV The patent application has lapsed