JPS548865A - Method of making thin film resistance elements - Google Patents

Method of making thin film resistance elements

Info

Publication number
JPS548865A
JPS548865A JP7320177A JP7320177A JPS548865A JP S548865 A JPS548865 A JP S548865A JP 7320177 A JP7320177 A JP 7320177A JP 7320177 A JP7320177 A JP 7320177A JP S548865 A JPS548865 A JP S548865A
Authority
JP
Japan
Prior art keywords
thin film
resistance elements
film resistance
making thin
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7320177A
Other languages
Japanese (ja)
Inventor
Taiji Shimomoto
Yasuo Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7320177A priority Critical patent/JPS548865A/en
Publication of JPS548865A publication Critical patent/JPS548865A/en
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP7320177A 1977-06-22 1977-06-22 Method of making thin film resistance elements Pending JPS548865A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7320177A JPS548865A (en) 1977-06-22 1977-06-22 Method of making thin film resistance elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7320177A JPS548865A (en) 1977-06-22 1977-06-22 Method of making thin film resistance elements

Publications (1)

Publication Number Publication Date
JPS548865A true JPS548865A (en) 1979-01-23

Family

ID=13511287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7320177A Pending JPS548865A (en) 1977-06-22 1977-06-22 Method of making thin film resistance elements

Country Status (1)

Country Link
JP (1) JPS548865A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4464646A (en) * 1980-08-02 1984-08-07 Robert Bosch Gmbh Controlled temperature coefficient thin-film circuit element

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836626A (en) * 1971-09-10 1973-05-30
JPS4921662A (en) * 1972-06-20 1974-02-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836626A (en) * 1971-09-10 1973-05-30
JPS4921662A (en) * 1972-06-20 1974-02-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4464646A (en) * 1980-08-02 1984-08-07 Robert Bosch Gmbh Controlled temperature coefficient thin-film circuit element

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