NL8101018A - Werkwijze voor het vervaardigen van een halfgeleiderinrichting en met behulp van deze werkwijze vervaardigde halfgeleiderinrichting. - Google Patents
Werkwijze voor het vervaardigen van een halfgeleiderinrichting en met behulp van deze werkwijze vervaardigde halfgeleiderinrichting. Download PDFInfo
- Publication number
- NL8101018A NL8101018A NL8101018A NL8101018A NL8101018A NL 8101018 A NL8101018 A NL 8101018A NL 8101018 A NL8101018 A NL 8101018A NL 8101018 A NL8101018 A NL 8101018A NL 8101018 A NL8101018 A NL 8101018A
- Authority
- NL
- Netherlands
- Prior art keywords
- layer
- semiconductor
- semi
- insulating material
- treatment
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 63
- 238000000034 method Methods 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000011282 treatment Methods 0.000 claims description 33
- 239000011810 insulating material Substances 0.000 claims description 30
- 230000003647 oxidation Effects 0.000 claims description 22
- 238000007254 oxidation reaction Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 230000015556 catabolic process Effects 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 230000007704 transition Effects 0.000 description 12
- 238000005530 etching Methods 0.000 description 10
- 238000002161 passivation Methods 0.000 description 10
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 239000002800 charge carrier Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 229910017604 nitric acid Inorganic materials 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical group [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005267 amalgamation Methods 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 150000004770 chalcogenides Chemical class 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000002068 genetic effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 235000015110 jellies Nutrition 0.000 description 1
- 239000008274 jelly Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/405—Resistive arrangements, e.g. resistive or semi-insulating field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/298—Semiconductor material, e.g. amorphous silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3171—Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/958—Passivation layer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Insulating Films (AREA)
- Bipolar Transistors (AREA)
- Thyristors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8007853 | 1980-03-07 | ||
GB8007853A GB2071411B (en) | 1980-03-07 | 1980-03-07 | Passivating p-n junction devices |
Publications (1)
Publication Number | Publication Date |
---|---|
NL8101018A true NL8101018A (nl) | 1981-10-01 |
Family
ID=10511944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL8101018A NL8101018A (nl) | 1980-03-07 | 1981-03-03 | Werkwijze voor het vervaardigen van een halfgeleiderinrichting en met behulp van deze werkwijze vervaardigde halfgeleiderinrichting. |
Country Status (8)
Country | Link |
---|---|
US (1) | US4375125A (it) |
JP (1) | JPS56140671A (it) |
CA (1) | CA1165013A (it) |
DE (1) | DE3108335A1 (it) |
FR (1) | FR2477771A1 (it) |
GB (1) | GB2071411B (it) |
IT (1) | IT1137408B (it) |
NL (1) | NL8101018A (it) |
Families Citing this family (43)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4420765A (en) * | 1981-05-29 | 1983-12-13 | Rca Corporation | Multi-layer passivant system |
US4474623A (en) * | 1982-04-26 | 1984-10-02 | Raytheon Company | Method of passivating a semiconductor body |
JPS6124240A (ja) * | 1984-07-13 | 1986-02-01 | Toshiba Corp | 半導体基板 |
US4804490A (en) * | 1987-10-13 | 1989-02-14 | Energy Conversion Devices, Inc. | Method of fabricating stabilized threshold switching material |
US5189508A (en) * | 1988-03-30 | 1993-02-23 | Nippon Steel Corporation | Silicon wafer excelling in gettering ability and method for production thereof |
GB2238427A (en) * | 1989-11-24 | 1991-05-29 | Philips Electronic Associated | Thin film diode devices and active matrix addressed display devices incorporating such |
US5030295A (en) * | 1990-02-12 | 1991-07-09 | Electric Power Research Institut | Radiation resistant passivation of silicon solar cells |
US5763937A (en) * | 1990-03-05 | 1998-06-09 | Vlsi Technology, Inc. | Device reliability of MOS devices using silicon rich plasma oxide films |
US5374833A (en) * | 1990-03-05 | 1994-12-20 | Vlsi Technology, Inc. | Structure for suppression of field inversion caused by charge build-up in the dielectric |
US5602056A (en) * | 1990-03-05 | 1997-02-11 | Vlsi Technology, Inc. | Method for forming reliable MOS devices using silicon rich plasma oxide film |
DE4304849C2 (de) * | 1992-02-21 | 2000-01-27 | Mitsubishi Electric Corp | Halbleitervorrichtung und Verfahren zur Herstellung einer Halbleitervorrichtung |
US5589422A (en) * | 1993-01-15 | 1996-12-31 | Intel Corporation | Controlled, gas phase process for removal of trace metal contamination and for removal of a semiconductor layer |
DE4308624A1 (de) * | 1993-03-18 | 1994-09-22 | Abb Management Ag | MOS-gesteuertes Leistungshalbleiterbauelement |
WO1995032524A1 (en) * | 1994-05-24 | 1995-11-30 | Abb Research Ltd. | Semiconductor device in silicon carbide with passivated surface |
SE9500013D0 (sv) * | 1995-01-03 | 1995-01-03 | Abb Research Ltd | Semiconductor device having a passivation layer |
US5967795A (en) * | 1995-08-30 | 1999-10-19 | Asea Brown Boveri Ab | SiC semiconductor device comprising a pn junction with a voltage absorbing edge |
US5677562A (en) * | 1996-05-14 | 1997-10-14 | General Instrument Corporation Of Delaware | Planar P-N junction semiconductor structure with multilayer passivation |
US6090726A (en) * | 1996-07-05 | 2000-07-18 | National Science Council | Pretreatment method of a silicon wafer using nitric acid |
US5763905A (en) * | 1996-07-09 | 1998-06-09 | Abb Research Ltd. | Semiconductor device having a passivation layer |
US6033974A (en) * | 1997-05-12 | 2000-03-07 | Silicon Genesis Corporation | Method for controlled cleaving process |
US6146979A (en) * | 1997-05-12 | 2000-11-14 | Silicon Genesis Corporation | Pressurized microbubble thin film separation process using a reusable substrate |
US20070122997A1 (en) * | 1998-02-19 | 2007-05-31 | Silicon Genesis Corporation | Controlled process and resulting device |
US5932894A (en) * | 1997-06-26 | 1999-08-03 | Abb Research Ltd. | SiC semiconductor device comprising a pn junction |
US6548382B1 (en) | 1997-07-18 | 2003-04-15 | Silicon Genesis Corporation | Gettering technique for wafers made using a controlled cleaving process |
US6500732B1 (en) | 1999-08-10 | 2002-12-31 | Silicon Genesis Corporation | Cleaving process to fabricate multilayered substrates using low implantation doses |
US6263941B1 (en) | 1999-08-10 | 2001-07-24 | Silicon Genesis Corporation | Nozzle for cleaving substrates |
EP1212787B1 (en) * | 1999-08-10 | 2014-10-08 | Silicon Genesis Corporation | A cleaving process to fabricate multilayered substrates using low implantation doses |
US6544862B1 (en) | 2000-01-14 | 2003-04-08 | Silicon Genesis Corporation | Particle distribution method and resulting structure for a layer transfer process |
JP2002190582A (ja) * | 2000-12-21 | 2002-07-05 | Mitsubishi Electric Corp | 半導体メモリ及びその製造方法 |
GB0103715D0 (en) | 2001-02-15 | 2001-04-04 | Koninkl Philips Electronics Nv | Semicondutor devices and their peripheral termination |
US6955940B2 (en) * | 2001-08-29 | 2005-10-18 | Micron Technology, Inc. | Method of forming chalcogenide comprising devices |
US7354815B2 (en) * | 2003-11-18 | 2008-04-08 | Silicon Genesis Corporation | Method for fabricating semiconductor devices using strained silicon bearing material |
US7811900B2 (en) * | 2006-09-08 | 2010-10-12 | Silicon Genesis Corporation | Method and structure for fabricating solar cells using a thick layer transfer process |
US9362439B2 (en) | 2008-05-07 | 2016-06-07 | Silicon Genesis Corporation | Layer transfer of films utilizing controlled shear region |
US8993410B2 (en) | 2006-09-08 | 2015-03-31 | Silicon Genesis Corporation | Substrate cleaving under controlled stress conditions |
US8293619B2 (en) | 2008-08-28 | 2012-10-23 | Silicon Genesis Corporation | Layer transfer of films utilizing controlled propagation |
US8330126B2 (en) * | 2008-08-25 | 2012-12-11 | Silicon Genesis Corporation | Race track configuration and method for wafering silicon solar substrates |
JP5195186B2 (ja) * | 2008-09-05 | 2013-05-08 | 三菱電機株式会社 | 半導体装置の製造方法 |
US8329557B2 (en) * | 2009-05-13 | 2012-12-11 | Silicon Genesis Corporation | Techniques for forming thin films by implantation with reduced channeling |
CN101794740A (zh) * | 2010-02-25 | 2010-08-04 | 海湾电子(山东)有限公司 | 抗高温整流芯片 |
CN102315177B (zh) * | 2011-10-12 | 2013-01-30 | 扬州杰利半导体有限公司 | 一种耐高压钝化保护二极管芯片的加工方法 |
NL2018309B1 (en) * | 2017-02-06 | 2018-08-28 | Lisz B V | semiconductor device having a junction |
JP2020047718A (ja) * | 2018-09-18 | 2020-03-26 | 株式会社東芝 | 半導体装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3391287A (en) * | 1965-07-30 | 1968-07-02 | Westinghouse Electric Corp | Guard junctions for p-nu junction semiconductor devices |
US4060827A (en) * | 1967-02-03 | 1977-11-29 | Hitachi, Ltd. | Semiconductor device and a method of making the same |
GB1255347A (en) * | 1968-10-02 | 1971-12-01 | Hitachi Ltd | Improvements in semiconductor devices |
US3532539A (en) * | 1968-11-04 | 1970-10-06 | Hitachi Ltd | Method for treating the surface of semiconductor devices |
US3943621A (en) * | 1974-03-25 | 1976-03-16 | General Electric Company | Semiconductor device and method of manufacture therefor |
JPS6022497B2 (ja) * | 1974-10-26 | 1985-06-03 | ソニー株式会社 | 半導体装置 |
DE2452289A1 (de) * | 1974-11-04 | 1976-05-06 | Siemens Ag | Halbleiterbauelement |
JPS51128264A (en) * | 1975-04-30 | 1976-11-09 | Sony Corp | A semiconductor device |
US4056415A (en) * | 1975-08-04 | 1977-11-01 | International Telephone And Telegraph Corporation | Method for providing electrical isolating material in selected regions of a semiconductive material |
JPS5275181A (en) * | 1975-12-13 | 1977-06-23 | Sony Corp | Formation of oxide film |
FR2335951A1 (fr) * | 1975-12-19 | 1977-07-15 | Radiotechnique Compelec | Dispositif semiconducteur a surface passivee et procede d'obtention de la structure de passivation |
JPS52108775A (en) * | 1976-03-09 | 1977-09-12 | Sony Corp | Semiconductor device |
US4194934A (en) * | 1977-05-23 | 1980-03-25 | Varo Semiconductor, Inc. | Method of passivating a semiconductor device utilizing dual polycrystalline layers |
DE2739762C2 (de) * | 1977-09-03 | 1982-12-02 | SEMIKRON Gesellschaft für Gleichrichterbau u. Elektronik mbH, 8500 Nürnberg | Verfahren zur Passivierung von Halbleiterkörpern |
-
1980
- 1980-03-07 GB GB8007853A patent/GB2071411B/en not_active Expired
-
1981
- 1981-02-26 CA CA000371855A patent/CA1165013A/en not_active Expired
- 1981-03-03 NL NL8101018A patent/NL8101018A/nl not_active Application Discontinuation
- 1981-03-04 IT IT20132/81A patent/IT1137408B/it active
- 1981-03-05 DE DE3108335A patent/DE3108335A1/de not_active Withdrawn
- 1981-03-06 JP JP3237881A patent/JPS56140671A/ja active Pending
- 1981-03-06 US US06/241,306 patent/US4375125A/en not_active Expired - Fee Related
- 1981-03-06 FR FR8104517A patent/FR2477771A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
CA1165013A (en) | 1984-04-03 |
US4375125A (en) | 1983-03-01 |
GB2071411B (en) | 1983-12-21 |
JPS56140671A (en) | 1981-11-04 |
IT8120132A0 (it) | 1981-03-04 |
DE3108335A1 (de) | 1982-04-08 |
FR2477771A1 (fr) | 1981-09-11 |
FR2477771B1 (it) | 1984-11-16 |
GB2071411A (en) | 1981-09-16 |
IT1137408B (it) | 1986-09-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BA | A request for search or an international-type search has been filed | ||
BB | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
A85 | Still pending on 85-01-01 | ||
BI | The patent application has been withdrawn |