NL7800851A - Werkwijze voor het met hoge stroomsterkte implanteren met ionen. - Google Patents

Werkwijze voor het met hoge stroomsterkte implanteren met ionen.

Info

Publication number
NL7800851A
NL7800851A NL7800851A NL7800851A NL7800851A NL 7800851 A NL7800851 A NL 7800851A NL 7800851 A NL7800851 A NL 7800851A NL 7800851 A NL7800851 A NL 7800851A NL 7800851 A NL7800851 A NL 7800851A
Authority
NL
Netherlands
Prior art keywords
ions
procedure
high current
current implants
implants
Prior art date
Application number
NL7800851A
Other languages
English (en)
Dutch (nl)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of NL7800851A publication Critical patent/NL7800851A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/3115—Doping the insulating layers
    • H01L21/31155—Doping the insulating layers by ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Bipolar Transistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Electron Beam Exposure (AREA)
  • Dicing (AREA)
  • Element Separation (AREA)
NL7800851A 1977-01-31 1978-01-24 Werkwijze voor het met hoge stroomsterkte implanteren met ionen. NL7800851A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/763,789 US4076558A (en) 1977-01-31 1977-01-31 Method of high current ion implantation and charge reduction by simultaneous kerf implant

Publications (1)

Publication Number Publication Date
NL7800851A true NL7800851A (nl) 1978-08-02

Family

ID=25068815

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7800851A NL7800851A (nl) 1977-01-31 1978-01-24 Werkwijze voor het met hoge stroomsterkte implanteren met ionen.

Country Status (12)

Country Link
US (1) US4076558A (de)
JP (1) JPS5910576B2 (de)
BE (1) BE862557A (de)
CA (1) CA1043474A (de)
CH (1) CH632105A5 (de)
DE (1) DE2801271C2 (de)
ES (1) ES466448A1 (de)
FR (1) FR2379163A1 (de)
GB (1) GB1549971A (de)
IT (1) IT1114183B (de)
NL (1) NL7800851A (de)
SE (1) SE425826B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839376B2 (ja) * 1978-10-30 1983-08-30 富士通株式会社 イオン注入法
US4249962A (en) * 1979-09-11 1981-02-10 Western Electric Company, Inc. Method of removing contaminating impurities from device areas in a semiconductor wafer
US4463255A (en) * 1980-09-24 1984-07-31 Varian Associates, Inc. Apparatus for enhanced neutralization of positively charged ion beam
US4453086A (en) * 1981-12-31 1984-06-05 International Business Machines Corporation Electron beam system with reduced charge buildup
JPS60198721A (ja) * 1984-03-22 1985-10-08 Fujitsu Ltd 半導体装置の製造方法
US5136171A (en) * 1990-03-02 1992-08-04 Varian Associates, Inc. Charge neutralization apparatus for ion implantation system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3507709A (en) * 1967-09-15 1970-04-21 Hughes Aircraft Co Method of irradiating dielectriccoated semiconductor bodies with low energy electrons
NL154061B (nl) * 1967-11-04 1977-07-15 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting en halfgeleiderinrichting vervaardigd met behulp van de werkwijze.
US3701696A (en) * 1969-08-20 1972-10-31 Gen Electric Process for simultaneously gettering,passivating and locating a junction within a silicon crystal
JPS4819113B1 (de) * 1969-08-27 1973-06-11
US3728161A (en) * 1971-12-28 1973-04-17 Bell Telephone Labor Inc Integrated circuits with ion implanted chan stops
US3790412A (en) * 1972-04-07 1974-02-05 Bell Telephone Labor Inc Method of reducing the effects of particle impingement on shadow masks
JPS49118367A (de) * 1973-03-12 1974-11-12

Also Published As

Publication number Publication date
FR2379163B1 (de) 1980-12-19
IT1114183B (it) 1986-01-27
BE862557A (fr) 1978-04-14
JPS5396665A (en) 1978-08-24
US4076558A (en) 1978-02-28
SE7800954L (sv) 1978-08-01
JPS5910576B2 (ja) 1984-03-09
CA1043474A (en) 1978-11-28
GB1549971A (en) 1979-08-08
ES466448A1 (es) 1978-10-16
FR2379163A1 (fr) 1978-08-25
DE2801271A1 (de) 1978-08-03
DE2801271C2 (de) 1988-01-21
CH632105A5 (de) 1982-09-15
SE425826B (sv) 1982-11-08

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
A85 Still pending on 85-01-01
BV The patent application has lapsed