NL7607473A - SPRAYING DEVICE AND METHOD FOR SPRAYING WITH SUCH A DEVICE - Google Patents

SPRAYING DEVICE AND METHOD FOR SPRAYING WITH SUCH A DEVICE

Info

Publication number
NL7607473A
NL7607473A NL7607473A NL7607473A NL7607473A NL 7607473 A NL7607473 A NL 7607473A NL 7607473 A NL7607473 A NL 7607473A NL 7607473 A NL7607473 A NL 7607473A NL 7607473 A NL7607473 A NL 7607473A
Authority
NL
Netherlands
Prior art keywords
spraying
spraying device
Prior art date
Application number
NL7607473A
Other languages
Dutch (nl)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7607473A priority Critical patent/NL7607473A/en
Priority to ZA00773538A priority patent/ZA773538B/en
Priority to CA281,665A priority patent/CA1081656A/en
Priority to DE19772729286 priority patent/DE2729286A1/en
Priority to AU26688/77A priority patent/AU506847B2/en
Priority to BR7704375A priority patent/BR7704375A/en
Priority to SE7707729A priority patent/SE7707729L/en
Priority to GB27861/77A priority patent/GB1587566A/en
Priority to IT25372/77A priority patent/IT1076083B/en
Priority to CH820677A priority patent/CH618289A5/en
Priority to JP8035277A priority patent/JPS536282A/en
Priority to ES460405A priority patent/ES460405A1/en
Priority to FR7720561A priority patent/FR2358020A1/en
Priority to AT482777A priority patent/AT352493B/en
Publication of NL7607473A publication Critical patent/NL7607473A/en
Priority to JP1983128511U priority patent/JPS6028689Y2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
NL7607473A 1976-07-07 1976-07-07 SPRAYING DEVICE AND METHOD FOR SPRAYING WITH SUCH A DEVICE NL7607473A (en)

Priority Applications (15)

Application Number Priority Date Filing Date Title
NL7607473A NL7607473A (en) 1976-07-07 1976-07-07 SPRAYING DEVICE AND METHOD FOR SPRAYING WITH SUCH A DEVICE
ZA00773538A ZA773538B (en) 1976-07-07 1977-06-13 Sputtering device and method of sputtering by means of such a device
CA281,665A CA1081656A (en) 1976-07-07 1977-06-29 Sputtering device and method of sputtering by means of such a device
DE19772729286 DE2729286A1 (en) 1976-07-07 1977-06-29 SPRAYING DEVICE AND SPRAYING METHOD BY MEANS OF SUCH A DEVICE
AU26688/77A AU506847B2 (en) 1976-07-07 1977-07-01 Sputtering device and method
GB27861/77A GB1587566A (en) 1976-07-07 1977-07-04 Sputtering device and method
SE7707729A SE7707729L (en) 1976-07-07 1977-07-04 KATOD SPAINING KIT AND DEVICE
BR7704375A BR7704375A (en) 1976-07-07 1977-07-04 CATHODIC SPRAYING DEVICE AND PROCESS
IT25372/77A IT1076083B (en) 1976-07-07 1977-07-04 EPR DEVICE MOLECULAR PROJECTION AND MOLECULAR PROJECTION METHOD CONDUCTED WITH THE USE OF SUCH DEVICE
CH820677A CH618289A5 (en) 1976-07-07 1977-07-04 Cathode arrangement for an atomising device
JP8035277A JPS536282A (en) 1976-07-07 1977-07-05 Spattering process and apparatus
ES460405A ES460405A1 (en) 1976-07-07 1977-07-05 Sputtering device and method
FR7720561A FR2358020A1 (en) 1976-07-07 1977-07-05 DEVICE FOR CATHODIC SPRAYING AND METHOD FOR SPRAYING USING SUCH A DEVICE
AT482777A AT352493B (en) 1976-07-07 1977-07-06 SPRAYING DEVICE FOR SPRAYING MATERIAL
JP1983128511U JPS6028689Y2 (en) 1976-07-07 1983-08-22 sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7607473A NL7607473A (en) 1976-07-07 1976-07-07 SPRAYING DEVICE AND METHOD FOR SPRAYING WITH SUCH A DEVICE

Publications (1)

Publication Number Publication Date
NL7607473A true NL7607473A (en) 1978-01-10

Family

ID=19826537

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7607473A NL7607473A (en) 1976-07-07 1976-07-07 SPRAYING DEVICE AND METHOD FOR SPRAYING WITH SUCH A DEVICE

Country Status (14)

Country Link
JP (2) JPS536282A (en)
AT (1) AT352493B (en)
AU (1) AU506847B2 (en)
BR (1) BR7704375A (en)
CA (1) CA1081656A (en)
CH (1) CH618289A5 (en)
DE (1) DE2729286A1 (en)
ES (1) ES460405A1 (en)
FR (1) FR2358020A1 (en)
GB (1) GB1587566A (en)
IT (1) IT1076083B (en)
NL (1) NL7607473A (en)
SE (1) SE7707729L (en)
ZA (1) ZA773538B (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1113873B (en) * 1978-04-12 1986-01-27 Battelle Memorial Institute PROCEDURE FOR THE MANUFACTURE OF FUEL BATTERY ELECTRODES, DEVICE FOR THE IMPLEMENTATION OF THE ELECTRODES PROCESS OBTAINED THROUGH THAT PROCEDURE
CA1141704A (en) * 1978-08-21 1983-02-22 Charles F. Morrison, Jr. Magnetically enhanced sputtering device
GB2051877B (en) * 1979-04-09 1983-03-02 Vac Tec Syst Magnetically enhanced sputtering device and method
JPS584923Y2 (en) * 1979-04-20 1983-01-27 株式会社 徳田製作所 Horizontal sputtering equipment
US4356073A (en) * 1981-02-12 1982-10-26 Shatterproof Glass Corporation Magnetron cathode sputtering apparatus
JPS59116375A (en) * 1982-11-26 1984-07-05 Kawasaki Heavy Ind Ltd Sputtering device
DE3316548C2 (en) * 1983-03-25 1985-01-17 Flachglas AG, 8510 Fürth Process for coating a transparent substrate
JPS59179782A (en) * 1983-03-31 1984-10-12 Kawasaki Heavy Ind Ltd Structure in electrode part of sputtering device
DE3406953C2 (en) * 1983-04-19 1986-03-13 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Method for heating material to be heated in a vacuum recipient
JPS59169352U (en) * 1983-04-25 1984-11-13 川崎重工業株式会社 Electrode structure of sputtering equipment
CH659346A5 (en) * 1983-05-10 1987-01-15 Balzers Hochvakuum DEVICE FOR TREATING THE INTERNAL WALL OF A TUBE.
CH668565A5 (en) * 1986-06-23 1989-01-13 Balzers Hochvakuum METHOD AND ARRANGEMENT FOR SPRAYING A MATERIAL AT HIGH FREQUENCY.
AT392291B (en) * 1987-09-01 1991-02-25 Miba Gleitlager Ag Rod-shaped magnetron or sputtering cathode arrangement, sputtering process and apparatus for carrying out the process
DE4018914C1 (en) * 1990-06-13 1991-06-06 Leybold Ag, 6450 Hanau, De
DE4042417C2 (en) * 1990-07-17 1993-11-25 Balzers Hochvakuum Etching or coating system and method for igniting or intermittent operation
DE4022708A1 (en) * 1990-07-17 1992-04-02 Balzers Hochvakuum ETCHING OR COATING PLANTS
DE4107505A1 (en) * 1991-03-08 1992-09-10 Leybold Ag METHOD FOR OPERATING A SPUTTER, AND DEVICE FOR CARRYING OUT THE METHOD
WO1995032517A1 (en) * 1994-05-24 1995-11-30 Rossiisko-Shveitsarskoe Aktsionernoe Obschestvo Zakrytogo Tipa 'nova' Method of producing an electrical discharge and a device for carrying out said method
DE19623359A1 (en) * 1995-08-17 1997-02-20 Leybold Ag Device for coating a substrate by vaporisation of a rotary tubular target
DE19652634C2 (en) * 1996-09-13 2002-12-19 Euromat Ges Fuer Werkstofftech Process for the internal coating of a metallic component, in particular a component with a cylindrical cavity, a device for carrying it out and the use of the method
DE19727647A1 (en) * 1997-06-12 1998-12-17 Leybold Ag Cathodic sputtering apparatus with adjustable target
JP5781408B2 (en) * 2011-09-07 2015-09-24 株式会社アルバック Magnetron sputter cathode
US9111734B2 (en) 2013-10-31 2015-08-18 General Electric Company Systems and method of coating an interior surface of an object
US20150114828A1 (en) * 2013-10-31 2015-04-30 General Electric Company Systems and method of coating an interior surface of an object
JP2022178656A (en) * 2021-05-20 2022-12-02 大学共同利用機関法人 高エネルギー加速器研究機構 Non-evaporation type getter coating device, manufacturing methods for non-evaporation type getter coating vessel and pipeline, and non-evaporation type getter coating vessel and pipeline

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3884793A (en) * 1971-09-07 1975-05-20 Telic Corp Electrode type glow discharge apparatus
JPS516017B2 (en) * 1972-09-08 1976-02-24
US4166018A (en) * 1974-01-31 1979-08-28 Airco, Inc. Sputtering process and apparatus
US3956093A (en) * 1974-12-16 1976-05-11 Airco, Inc. Planar magnetron sputtering method and apparatus

Also Published As

Publication number Publication date
JPS536282A (en) 1978-01-20
IT1076083B (en) 1985-04-22
FR2358020B1 (en) 1982-11-12
GB1587566A (en) 1981-04-08
FR2358020A1 (en) 1978-02-03
CA1081656A (en) 1980-07-15
DE2729286C2 (en) 1988-05-11
ATA482777A (en) 1979-02-15
ZA773538B (en) 1979-01-31
SE7707729L (en) 1978-01-08
AU506847B2 (en) 1980-01-24
JPS5947654U (en) 1984-03-29
AU2668877A (en) 1979-01-04
ES460405A1 (en) 1978-05-01
CH618289A5 (en) 1980-07-15
BR7704375A (en) 1978-05-16
DE2729286A1 (en) 1978-01-12
JPS6028689Y2 (en) 1985-08-30
AT352493B (en) 1979-09-25

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Legal Events

Date Code Title Description
BV The patent application has lapsed