NL2023804A - Method for internal heating of epoxy bonds - Google Patents

Method for internal heating of epoxy bonds Download PDF

Info

Publication number
NL2023804A
NL2023804A NL2023804A NL2023804A NL2023804A NL 2023804 A NL2023804 A NL 2023804A NL 2023804 A NL2023804 A NL 2023804A NL 2023804 A NL2023804 A NL 2023804A NL 2023804 A NL2023804 A NL 2023804A
Authority
NL
Netherlands
Prior art keywords
substrates
bonding layer
heating element
substrate
heating
Prior art date
Application number
NL2023804A
Other languages
English (en)
Dutch (nl)
Inventor
Robert Burroughs John
Jagatia Bhavi
Hudson Griffing Charles Iii
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of NL2023804A publication Critical patent/NL2023804A/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16BDEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B11/00Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding
    • F16B11/006Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding by gluing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • B32B37/1207Heat-activated adhesive
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691Handling of masks or workpieces
    • G03F7/70716Stages
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/708Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
NL2023804A 2018-10-05 2019-09-11 Method for internal heating of epoxy bonds NL2023804A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201862742009P 2018-10-05 2018-10-05

Publications (1)

Publication Number Publication Date
NL2023804A true NL2023804A (en) 2020-05-06

Family

ID=68084758

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2023804A NL2023804A (en) 2018-10-05 2019-09-11 Method for internal heating of epoxy bonds

Country Status (4)

Country Link
KR (1) KR20210062647A (zh)
CN (1) CN112805478B (zh)
NL (1) NL2023804A (zh)
WO (1) WO2020069829A1 (zh)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE793166A (en) * 1972-12-21 1973-06-21 Centre Rech Metallurgique Adhesively bonding materials - with a thin adhesive coated metal sheet heated electrically
US5100494A (en) * 1989-09-05 1992-03-31 Hughes Aircraft Company Structural bonding and debonding system
DE59206897D1 (de) * 1991-07-03 1996-09-19 Gurit Essex Ag Lösbare Klebeverbindungen, Verfahren zu deren Herstellung und Verwendung von Vorrichtungen zum Lösen solcher Klebeverbindungen
DE602004026564D1 (de) * 2003-04-01 2010-05-27 Bonding Ltd De Verfahren und vorrichtung zum verbinden und trennen von verklebungen
DE102005026815B4 (de) * 2005-06-09 2008-11-27 Ortwin Prof. Dr.-Ing. Hahn Klebeverbindung und Herstellungsverfahren hierzu
DE102008034748A1 (de) * 2008-07-24 2010-01-28 Tesa Se Flexibles beheiztes Flächenelement
DE102009046256A1 (de) * 2009-10-30 2011-05-12 Tesa Se Verfahren zum Verkleben von hitzeaktiviert verklebbaren Flächenelementen
JP2014188998A (ja) * 2013-03-28 2014-10-06 Mitsubishi Aircraft Corp 被修理部の修理方法、修理結果物、および修理装置
CN105736536B (zh) * 2014-12-30 2019-11-08 全耐塑料公司 通过直接加热胶合剂胶合机动车辆零件的方法
US10099458B2 (en) * 2015-03-23 2018-10-16 Board Of Trustees Of Michigan State University Reversible adhesive compositions and related methods
DE102016205039A1 (de) * 2016-03-24 2017-09-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Verbinden zweier Fügeelemente
US10752809B2 (en) * 2016-12-23 2020-08-25 The Board Of Trustees Of The University Of Illinois Reusable attaching apparatus and methods of making and using a reusable attaching apparatus

Also Published As

Publication number Publication date
WO2020069829A1 (en) 2020-04-09
CN112805478B (zh) 2023-08-22
KR20210062647A (ko) 2021-05-31
CN112805478A (zh) 2021-05-14

Similar Documents

Publication Publication Date Title
TWI446482B (zh) 靜電鉗微影裝置及製造靜電鉗之方法
CN103547955B (zh) 反射镜阵列
JP5960154B2 (ja) 静電クランプ、リソグラフィ装置、および静電クランプの製造方法
JP4022181B2 (ja) リソグラフ装置
KR20110103359A (ko) 리소그래피 장치 및 방법
TWI455455B (zh) 位移器具、微影裝置、用於一微影裝置之一載物台系統與一參考結構之組合及用於位移器具之定位方法
CN102914947A (zh) 静电夹持装置、光刻设备和制造静电夹持装置的方法
JP2005236308A (ja) 位置合わせ後のウェハ滑りを減じることによるオーバーレイ修正
TWI474130B (zh) 致動器、微影裝置及致動器建構方法
NL2023804A (en) Method for internal heating of epoxy bonds
TW202138934A (zh) 物件固持器、工具及製造物件固持器之方法
EP3043361A1 (en) Armature coil for electromagnetic actuator, electromagnetic actuator, exposure apparatus, and device manufacturing method
KR102111070B1 (ko) 광학 장치, 그것을 구비한 노광 장치 및 물품 제조 방법
CN103415812B (zh) 静电夹具、光刻设备和器件制造方法
JP2011009217A (ja) 電気接続システム、リソグラフィ投影装置、デバイス製造方法および電気接続システムを製造する方法
EP4390541A1 (en) Object table
JP2011082366A (ja) 加熱モジュール
Divoux et al. Miniaturized deformable magnetic mirror for adaptive optics
JP2018072662A (ja) 光学装置、それを備えた露光装置、および物品の製造方法
JP2011091172A (ja) 移動ステージ、加圧装置およびデバイスの製造方法
TWI261044B (en) Carrier platform device for micro electro-mechanical packaging
JP2011082367A (ja) 加圧加熱モジュール
NL2025107A (en) Lithographic apparatus and method for motor temperature control
JP2005348539A (ja) コイルユニット、電磁アクチュエータ、露光装置及びデバイス製造方法