NL182996C - Snelle elektronenoptische, elektromagnetische lenzeninrichting. - Google Patents

Snelle elektronenoptische, elektromagnetische lenzeninrichting.

Info

Publication number
NL182996C
NL182996C NLAANVRAGE7811418,A NL7811418A NL182996C NL 182996 C NL182996 C NL 182996C NL 7811418 A NL7811418 A NL 7811418A NL 182996 C NL182996 C NL 182996C
Authority
NL
Netherlands
Prior art keywords
optical
lens apparatus
electromagnetic lens
fast electronic
fast
Prior art date
Application number
NLAANVRAGE7811418,A
Other languages
English (en)
Dutch (nl)
Other versions
NL182996B (nl
NL7811418A (nl
Original Assignee
Hell Rudolf Dr Ing Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hell Rudolf Dr Ing Gmbh filed Critical Hell Rudolf Dr Ing Gmbh
Publication of NL7811418A publication Critical patent/NL7811418A/xx
Publication of NL182996B publication Critical patent/NL182996B/xx
Application granted granted Critical
Publication of NL182996C publication Critical patent/NL182996C/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/14—Arrangements for focusing or reflecting ray or beam
    • H01J3/20—Magnetic lenses
    • H01J3/22—Magnetic lenses using electromagnetic means only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
NLAANVRAGE7811418,A 1977-11-25 1978-11-20 Snelle elektronenoptische, elektromagnetische lenzeninrichting. NL182996C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2752598A DE2752598C3 (de) 1977-11-25 1977-11-25 Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür

Publications (3)

Publication Number Publication Date
NL7811418A NL7811418A (nl) 1979-05-29
NL182996B NL182996B (nl) 1988-01-18
NL182996C true NL182996C (nl) 1988-06-16

Family

ID=6024590

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7811418,A NL182996C (nl) 1977-11-25 1978-11-20 Snelle elektronenoptische, elektromagnetische lenzeninrichting.

Country Status (9)

Country Link
US (1) US4245159A (xx)
JP (1) JPS5476058A (xx)
BE (1) BE871109A (xx)
CA (1) CA1100564A (xx)
CH (1) CH635464A5 (xx)
DE (1) DE2752598C3 (xx)
FR (1) FR2410356A1 (xx)
GB (1) GB2012476B (xx)
NL (1) NL182996C (xx)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512576U (xx) * 1978-07-12 1980-01-26
DE2947444C2 (de) * 1979-11-24 1983-12-08 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Elektronenstrahl-Gravierverfahren
DE3037230C2 (de) * 1980-10-02 1988-06-16 Institut für Kerntechnik und Energiewandlung e.V., 7000 Stuttgart Elektronenoptik für eine Elektronenstrahlschweißmaschine
JPS5780646A (en) * 1980-11-06 1982-05-20 Jeol Ltd Electron lens
WO1982001787A1 (en) * 1980-11-22 1982-05-27 Grieger Dieter Method for engraving by means of an electron beam
ATE24985T1 (de) * 1981-10-10 1987-01-15 Hell Rudolf Dr Ing Gmbh Elektronenstrahl-gravierverfahren und einrichtung zu seiner durchfuehrung.
US4395691A (en) * 1982-03-04 1983-07-26 Hughes Aircraft Company Beam deflection system
EP0255542A1 (en) * 1986-02-03 1988-02-10 CREWE, Albert V. Electron beam memory system with ultra-compact, high current density electron gun
US4764818A (en) * 1986-02-03 1988-08-16 Electron Beam Memories Electron beam memory system with improved high rate digital beam pulsing system
NL8601511A (nl) * 1986-06-11 1988-01-04 Philips Nv Kathodestraalbuis met magnetische focusseerlens.
NL8601512A (nl) * 1986-06-11 1988-01-04 Philips Nv Kathodestraalbuis met magnetische focusseerlens.
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
JPS6369463U (xx) * 1986-10-24 1988-05-10
FR2644930B1 (fr) * 1989-03-21 1996-04-26 Cameca Lentille electromagnetique composite a focale variable
FR2683386B1 (fr) * 1991-11-05 1993-12-31 Thomson Tubes Displays Sa Dispositif de focalisation magnetique pour tube a rayons cathodiques.
US5489826A (en) * 1994-08-08 1996-02-06 Thomson Consumer Electronics, Inc. Focus coil current generator for a cathode ray tube
JPH08138602A (ja) * 1994-11-08 1996-05-31 Hitachi Ltd 電子線装置
US6180947B1 (en) * 1998-08-07 2001-01-30 Nikon Corporation Multi-element deflection aberration correction for electron beam lithography
US6201251B1 (en) 1998-08-28 2001-03-13 Nikon Corporation Compensation of space charge in a particle beam system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB515947A (en) * 1938-06-14 1939-12-19 Baird Television Ltd Improvements in or relating to cathode ray tube arrangements
US2664521A (en) * 1951-11-07 1953-12-29 Motorola Inc Deflection circuits
BE563662A (xx) * 1957-01-03
NL268860A (xx) * 1959-04-17
NL285301A (xx) * 1961-11-15
NL145716B (nl) * 1964-06-06 1975-04-15 Philips Nv Elektronenstraalapparaat.
JPS5136196B2 (xx) * 1972-05-22 1976-10-07
DE2458370C2 (de) * 1974-12-10 1984-05-10 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Energiestrahl-Gravierverfahren und Einrichtung zu seiner Durchführung
DE2627176B2 (de) * 1976-06-15 1978-09-14 Siemens Ag, 1000 Berlin Und 8000 Muenchen Elektronenstrahloptisches Projektionsgerät mit einer langbrennweitigen magnetischen Linse

Also Published As

Publication number Publication date
BE871109A (fr) 1979-02-01
CH635464A5 (de) 1983-03-31
GB2012476A (en) 1979-07-25
US4245159A (en) 1981-01-13
GB2012476B (en) 1982-05-19
DE2752598B2 (de) 1981-01-29
FR2410356B1 (xx) 1984-03-30
DE2752598A1 (de) 1979-05-31
NL182996B (nl) 1988-01-18
FR2410356A1 (fr) 1979-06-22
NL7811418A (nl) 1979-05-29
CA1100564A (en) 1981-05-05
JPS6124782B2 (xx) 1986-06-12
JPS5476058A (en) 1979-06-18
DE2752598C3 (de) 1981-10-15

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
V4 Discontinued because of reaching the maximum lifetime of a patent

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