FR2410356A1 - Disposition de lentilles en optique electronique pour focalisation variable d'un faisceau d'electrons - Google Patents

Disposition de lentilles en optique electronique pour focalisation variable d'un faisceau d'electrons

Info

Publication number
FR2410356A1
FR2410356A1 FR7828136A FR7828136A FR2410356A1 FR 2410356 A1 FR2410356 A1 FR 2410356A1 FR 7828136 A FR7828136 A FR 7828136A FR 7828136 A FR7828136 A FR 7828136A FR 2410356 A1 FR2410356 A1 FR 2410356A1
Authority
FR
France
Prior art keywords
electron beam
optical lenses
arrangement
lens system
electronic optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7828136A
Other languages
English (en)
Other versions
FR2410356B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HELL RUDOLF GmbH
Original Assignee
HELL RUDOLF GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HELL RUDOLF GmbH filed Critical HELL RUDOLF GmbH
Publication of FR2410356A1 publication Critical patent/FR2410356A1/fr
Application granted granted Critical
Publication of FR2410356B1 publication Critical patent/FR2410356B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/14—Arrangements for focusing or reflecting ray or beam
    • H01J3/20—Magnetic lenses
    • H01J3/22—Magnetic lenses using electromagnetic means only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Abstract

A.DISPOSITION DE LENTILLES EN OPTIQUE ELECTRONIQUE AVEC UN SYSTEME DE LENTILLES DE FOCALISATION STATIQUE ET UN SYSTEME DE LENTILLES DE FOCALISATION DYNAMIQUE, B.CARACTERISEE EN CE QUE LE SYSTEME DE LENTILLES DYNAMIQUE EST DISPOSE A L'INTERIEUR DU DISPOSITIF DE LENTILLES STATIQUE, C.DISPOSITION APPLICABLE A DES TRAVAUX SUR MATERIAUX, TELS QUE GRAVURE, PAR FAISCEAU D'ELECTRONS.
FR7828136A 1977-11-25 1978-10-02 Disposition de lentilles en optique electronique pour focalisation variable d'un faisceau d'electrons Granted FR2410356A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2752598A DE2752598C3 (de) 1977-11-25 1977-11-25 Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür

Publications (2)

Publication Number Publication Date
FR2410356A1 true FR2410356A1 (fr) 1979-06-22
FR2410356B1 FR2410356B1 (fr) 1984-03-30

Family

ID=6024590

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7828136A Granted FR2410356A1 (fr) 1977-11-25 1978-10-02 Disposition de lentilles en optique electronique pour focalisation variable d'un faisceau d'electrons

Country Status (9)

Country Link
US (1) US4245159A (fr)
JP (1) JPS5476058A (fr)
BE (1) BE871109A (fr)
CA (1) CA1100564A (fr)
CH (1) CH635464A5 (fr)
DE (1) DE2752598C3 (fr)
FR (1) FR2410356A1 (fr)
GB (1) GB2012476B (fr)
NL (1) NL182996C (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0029604A2 (fr) * 1979-11-24 1981-06-03 DR.-ING. RUDOLF HELL GmbH Procédé de gravure utilisant un faisceau d'électrons
WO1982001787A1 (fr) * 1980-11-22 1982-05-27 Grieger Dieter Procede de gravure au moyen d'un faisceau d'electrons
EP0389342A1 (fr) * 1989-03-21 1990-09-26 Cameca Lentille électromagnétique composite à focale variable
FR2683386A1 (fr) * 1991-11-05 1993-05-07 Thomson Tubes & Displays Dispositif de focalisation magnetique pour tube a rayons cathodiques.

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512576U (fr) * 1978-07-12 1980-01-26
DE3037230C2 (de) * 1980-10-02 1988-06-16 Institut für Kerntechnik und Energiewandlung e.V., 7000 Stuttgart Elektronenoptik für eine Elektronenstrahlschweißmaschine
JPS5780646A (en) * 1980-11-06 1982-05-20 Jeol Ltd Electron lens
DE3175839D1 (en) * 1981-10-10 1987-02-19 Hell Rudolf Dr Ing Gmbh Electron beam engraving method and apparatus for carrying it out
US4395691A (en) * 1982-03-04 1983-07-26 Hughes Aircraft Company Beam deflection system
US4764818A (en) * 1986-02-03 1988-08-16 Electron Beam Memories Electron beam memory system with improved high rate digital beam pulsing system
WO1987004846A1 (fr) * 1986-02-03 1987-08-13 Crewe Albert V Systeme de memoire a faisceau d'electrons avec canon a electrons ultracompacte et a densite de courant elevee
NL8601512A (nl) * 1986-06-11 1988-01-04 Philips Nv Kathodestraalbuis met magnetische focusseerlens.
NL8601511A (nl) * 1986-06-11 1988-01-04 Philips Nv Kathodestraalbuis met magnetische focusseerlens.
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
JPS6369463U (fr) * 1986-10-24 1988-05-10
US5489826A (en) * 1994-08-08 1996-02-06 Thomson Consumer Electronics, Inc. Focus coil current generator for a cathode ray tube
JPH08138602A (ja) * 1994-11-08 1996-05-31 Hitachi Ltd 電子線装置
US6180947B1 (en) * 1998-08-07 2001-01-30 Nikon Corporation Multi-element deflection aberration correction for electron beam lithography
US6201251B1 (en) 1998-08-28 2001-03-13 Nikon Corporation Compensation of space charge in a particle beam system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2220303A (en) * 1938-06-14 1940-11-05 Baird Television Ltd Cathode ray tube arrangement
FR2355374A1 (fr) * 1976-06-15 1978-01-13 Siemens Ag Lentille magnetique comportant une grande distance focale decouplee vis-a-vis de l'excitation

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2664521A (en) * 1951-11-07 1953-12-29 Motorola Inc Deflection circuits
NL96667C (fr) * 1957-01-03
NL268860A (fr) * 1959-04-17
NL285301A (fr) * 1961-11-15
NL145716B (nl) * 1964-06-06 1975-04-15 Philips Nv Elektronenstraalapparaat.
JPS5136196B2 (fr) * 1972-05-22 1976-10-07
DE2458370C2 (de) * 1974-12-10 1984-05-10 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Energiestrahl-Gravierverfahren und Einrichtung zu seiner Durchführung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2220303A (en) * 1938-06-14 1940-11-05 Baird Television Ltd Cathode ray tube arrangement
FR2355374A1 (fr) * 1976-06-15 1978-01-13 Siemens Ag Lentille magnetique comportant une grande distance focale decouplee vis-a-vis de l'excitation

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EXBK/68 *
EXBK/76 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0029604A2 (fr) * 1979-11-24 1981-06-03 DR.-ING. RUDOLF HELL GmbH Procédé de gravure utilisant un faisceau d'électrons
EP0029604A3 (en) * 1979-11-24 1981-11-04 Dr.-Ing. Rudolf Hell Gmbh Electron beam engraving process
WO1982001787A1 (fr) * 1980-11-22 1982-05-27 Grieger Dieter Procede de gravure au moyen d'un faisceau d'electrons
EP0389342A1 (fr) * 1989-03-21 1990-09-26 Cameca Lentille électromagnétique composite à focale variable
FR2683386A1 (fr) * 1991-11-05 1993-05-07 Thomson Tubes & Displays Dispositif de focalisation magnetique pour tube a rayons cathodiques.

Also Published As

Publication number Publication date
FR2410356B1 (fr) 1984-03-30
JPS5476058A (en) 1979-06-18
CH635464A5 (de) 1983-03-31
DE2752598A1 (de) 1979-05-31
GB2012476A (en) 1979-07-25
NL7811418A (nl) 1979-05-29
NL182996B (nl) 1988-01-18
US4245159A (en) 1981-01-13
JPS6124782B2 (fr) 1986-06-12
BE871109A (fr) 1979-02-01
GB2012476B (en) 1982-05-19
NL182996C (nl) 1988-06-16
DE2752598B2 (de) 1981-01-29
DE2752598C3 (de) 1981-10-15
CA1100564A (fr) 1981-05-05

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Legal Events

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