FR2355374A1 - Lentille magnetique comportant une grande distance focale decouplee vis-a-vis de l'excitation - Google Patents

Lentille magnetique comportant une grande distance focale decouplee vis-a-vis de l'excitation

Info

Publication number
FR2355374A1
FR2355374A1 FR7712711A FR7712711A FR2355374A1 FR 2355374 A1 FR2355374 A1 FR 2355374A1 FR 7712711 A FR7712711 A FR 7712711A FR 7712711 A FR7712711 A FR 7712711A FR 2355374 A1 FR2355374 A1 FR 2355374A1
Authority
FR
France
Prior art keywords
magnetic lens
decoupleted
excitation
focal distance
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7712711A
Other languages
English (en)
Other versions
FR2355374B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2355374A1 publication Critical patent/FR2355374A1/fr
Application granted granted Critical
Publication of FR2355374B1 publication Critical patent/FR2355374B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

L'invention concerne une lentille magnétique de grande distance focale. Cette lentille 15 est constituée par une bobine formée d'enroulements excitables séparément 16, 21 disposés à l'intérieur d'une enveloppe enfer 13 et qui s'étendent au moins partiellement sur des sections axiales différentes de la bobine. Application notamment aux appareils réducteurs électro-optiques formant l'image d'un masque sur une pastille de semi-conducteur.
FR7712711A 1976-06-15 1977-04-27 Lentille magnetique comportant une grande distance focale decouplee vis-a-vis de l'excitation Granted FR2355374A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762627176 DE2627176B2 (de) 1976-06-15 1976-06-15 Elektronenstrahloptisches Projektionsgerät mit einer langbrennweitigen magnetischen Linse

Publications (2)

Publication Number Publication Date
FR2355374A1 true FR2355374A1 (fr) 1978-01-13
FR2355374B1 FR2355374B1 (fr) 1980-09-12

Family

ID=5980761

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7712711A Granted FR2355374A1 (fr) 1976-06-15 1977-04-27 Lentille magnetique comportant une grande distance focale decouplee vis-a-vis de l'excitation

Country Status (5)

Country Link
JP (1) JPS52153662A (fr)
DE (1) DE2627176B2 (fr)
FR (1) FR2355374A1 (fr)
GB (1) GB1584005A (fr)
NL (1) NL7706304A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2410356A1 (fr) * 1977-11-25 1979-06-22 Hell Rudolf Gmbh Disposition de lentilles en optique electronique pour focalisation variable d'un faisceau d'electrons

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678051A (en) * 1979-11-30 1981-06-26 Jeol Ltd Electron beam device
US4345152A (en) * 1980-08-11 1982-08-17 The Perkin-Elmer Corporation Magnetic lens
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
GB2334372A (en) * 1998-02-11 1999-08-18 Nikon Corp System for directing a charged particle beam, e.g. for electron beam projection
DE102004019835B4 (de) * 2004-04-23 2007-08-02 Vistec Electron Beam Gmbh Beleuchtungskondensor für ein Partikeloptik-Projektionssystem
CN103811251A (zh) * 2012-11-08 2014-05-21 北京中科信电子装备有限公司 一种离子注入系统中束流均匀性调节装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2410356A1 (fr) * 1977-11-25 1979-06-22 Hell Rudolf Gmbh Disposition de lentilles en optique electronique pour focalisation variable d'un faisceau d'electrons

Also Published As

Publication number Publication date
JPS52153662A (en) 1977-12-20
NL7706304A (nl) 1977-12-19
DE2627176B2 (de) 1978-09-14
GB1584005A (en) 1981-02-04
DE2627176C3 (fr) 1979-05-17
FR2355374B1 (fr) 1980-09-12
DE2627176A1 (de) 1977-12-22

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Legal Events

Date Code Title Description
ST Notification of lapse