JPS52153662A - Long focus magnetic lens - Google Patents

Long focus magnetic lens

Info

Publication number
JPS52153662A
JPS52153662A JP7095177A JP7095177A JPS52153662A JP S52153662 A JPS52153662 A JP S52153662A JP 7095177 A JP7095177 A JP 7095177A JP 7095177 A JP7095177 A JP 7095177A JP S52153662 A JPS52153662 A JP S52153662A
Authority
JP
Japan
Prior art keywords
magnetic lens
long focus
focus magnetic
long
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7095177A
Other languages
English (en)
Inventor
Eeruman Andoreasu
Shiyumitsuto Rainhoruto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS52153662A publication Critical patent/JPS52153662A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Coils Or Transformers For Communication (AREA)
JP7095177A 1976-06-15 1977-06-15 Long focus magnetic lens Pending JPS52153662A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762627176 DE2627176B2 (de) 1976-06-15 1976-06-15 Elektronenstrahloptisches Projektionsgerät mit einer langbrennweitigen magnetischen Linse

Publications (1)

Publication Number Publication Date
JPS52153662A true JPS52153662A (en) 1977-12-20

Family

ID=5980761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7095177A Pending JPS52153662A (en) 1976-06-15 1977-06-15 Long focus magnetic lens

Country Status (5)

Country Link
JP (1) JPS52153662A (ja)
DE (1) DE2627176B2 (ja)
FR (1) FR2355374A1 (ja)
GB (1) GB1584005A (ja)
NL (1) NL7706304A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678051A (en) * 1979-11-30 1981-06-26 Jeol Ltd Electron beam device

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2752598C3 (de) * 1977-11-25 1981-10-15 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür
US4345152A (en) * 1980-08-11 1982-08-17 The Perkin-Elmer Corporation Magnetic lens
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
GB2334372A (en) * 1998-02-11 1999-08-18 Nikon Corp System for directing a charged particle beam, e.g. for electron beam projection
DE102004019835B4 (de) * 2004-04-23 2007-08-02 Vistec Electron Beam Gmbh Beleuchtungskondensor für ein Partikeloptik-Projektionssystem
CN103811251A (zh) * 2012-11-08 2014-05-21 北京中科信电子装备有限公司 一种离子注入系统中束流均匀性调节装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678051A (en) * 1979-11-30 1981-06-26 Jeol Ltd Electron beam device

Also Published As

Publication number Publication date
NL7706304A (nl) 1977-12-19
DE2627176B2 (de) 1978-09-14
GB1584005A (en) 1981-02-04
DE2627176C3 (ja) 1979-05-17
FR2355374A1 (fr) 1978-01-13
FR2355374B1 (ja) 1980-09-12
DE2627176A1 (de) 1977-12-22

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