NL7706304A - Magnetische lens met een lalge en van de be- krachtignng ontkoppelde braldpuntsafstand. - Google Patents

Magnetische lens met een lalge en van de be- krachtignng ontkoppelde braldpuntsafstand.

Info

Publication number
NL7706304A
NL7706304A NL7706304A NL7706304A NL7706304A NL 7706304 A NL7706304 A NL 7706304A NL 7706304 A NL7706304 A NL 7706304A NL 7706304 A NL7706304 A NL 7706304A NL 7706304 A NL7706304 A NL 7706304A
Authority
NL
Netherlands
Prior art keywords
lalge
brace
point distance
magnetic lens
force released
Prior art date
Application number
NL7706304A
Other languages
English (en)
Dutch (nl)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of NL7706304A publication Critical patent/NL7706304A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Coils Or Transformers For Communication (AREA)
NL7706304A 1976-06-15 1977-06-08 Magnetische lens met een lalge en van de be- krachtignng ontkoppelde braldpuntsafstand. NL7706304A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762627176 DE2627176B2 (de) 1976-06-15 1976-06-15 Elektronenstrahloptisches Projektionsgerät mit einer langbrennweitigen magnetischen Linse

Publications (1)

Publication Number Publication Date
NL7706304A true NL7706304A (nl) 1977-12-19

Family

ID=5980761

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7706304A NL7706304A (nl) 1976-06-15 1977-06-08 Magnetische lens met een lalge en van de be- krachtignng ontkoppelde braldpuntsafstand.

Country Status (5)

Country Link
JP (1) JPS52153662A (xx)
DE (1) DE2627176B2 (xx)
FR (1) FR2355374A1 (xx)
GB (1) GB1584005A (xx)
NL (1) NL7706304A (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2752598C3 (de) * 1977-11-25 1981-10-15 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür
JPS5678051A (en) * 1979-11-30 1981-06-26 Jeol Ltd Electron beam device
US4345152A (en) * 1980-08-11 1982-08-17 The Perkin-Elmer Corporation Magnetic lens
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
GB2334372A (en) * 1998-02-11 1999-08-18 Nikon Corp System for directing a charged particle beam, e.g. for electron beam projection
DE102004019835B4 (de) * 2004-04-23 2007-08-02 Vistec Electron Beam Gmbh Beleuchtungskondensor für ein Partikeloptik-Projektionssystem
CN103811251A (zh) * 2012-11-08 2014-05-21 北京中科信电子装备有限公司 一种离子注入系统中束流均匀性调节装置

Also Published As

Publication number Publication date
JPS52153662A (en) 1977-12-20
DE2627176B2 (de) 1978-09-14
GB1584005A (en) 1981-02-04
DE2627176C3 (xx) 1979-05-17
FR2355374A1 (fr) 1978-01-13
FR2355374B1 (xx) 1980-09-12
DE2627176A1 (de) 1977-12-22

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Legal Events

Date Code Title Description
BV The patent application has lapsed