NL7705207A - Inrichting met deeltjesoptiek. - Google Patents

Inrichting met deeltjesoptiek.

Info

Publication number
NL7705207A
NL7705207A NL7705207A NL7705207A NL7705207A NL 7705207 A NL7705207 A NL 7705207A NL 7705207 A NL7705207 A NL 7705207A NL 7705207 A NL7705207 A NL 7705207A NL 7705207 A NL7705207 A NL 7705207A
Authority
NL
Netherlands
Prior art keywords
particle optic
optic
particle
Prior art date
Application number
NL7705207A
Other languages
English (en)
Other versions
NL177578C (nl
NL177578B (nl
Original Assignee
Thomson Csf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR7614719A external-priority patent/FR2351497A1/fr
Priority claimed from FR7702600A external-priority patent/FR2379159A2/fr
Application filed by Thomson Csf filed Critical Thomson Csf
Publication of NL7705207A publication Critical patent/NL7705207A/nl
Publication of NL177578B publication Critical patent/NL177578B/nl
Application granted granted Critical
Publication of NL177578C publication Critical patent/NL177578C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
NLAANVRAGE7705207,A 1976-05-14 1977-05-11 Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel. NL177578C (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7614719A FR2351497A1 (fr) 1976-05-14 1976-05-14 Dispositif permettant le trace programme de figures de formes differentes
FR7702600A FR2379159A2 (fr) 1977-01-31 1977-01-31 Dispositif permettant le trace programme de figures de formes differentes

Publications (3)

Publication Number Publication Date
NL7705207A true NL7705207A (nl) 1977-11-16
NL177578B NL177578B (nl) 1985-05-17
NL177578C NL177578C (nl) 1985-10-16

Family

ID=26219446

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7705207,A NL177578C (nl) 1976-05-14 1977-05-11 Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel.

Country Status (7)

Country Link
US (1) US4110622A (nl)
JP (1) JPS538064A (nl)
CA (1) CA1085073A (nl)
DE (1) DE2721704A1 (nl)
GB (1) GB1570347A (nl)
NL (1) NL177578C (nl)
SE (1) SE415309B (nl)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1166766A (en) * 1977-02-23 1984-05-01 Hans C. Pfeiffer Method and apparatus for forming a variable size electron beam
US4167676A (en) * 1978-02-21 1979-09-11 Bell Telephone Laboratories, Incorporated Variable-spot scanning in an electron beam exposure system
US4475044A (en) * 1979-04-23 1984-10-02 Hitachi, Ltd. Apparatus for focus-deflecting a charged particle beam
FR2472831A1 (fr) * 1979-08-08 1981-07-03 Zeiss Jena Veb Carl Procede et dispositif pour l'inclinaison de sondes de rayonnement superficiel
JPS57206173A (en) * 1981-06-15 1982-12-17 Nippon Telegr & Teleph Corp <Ntt> Focusing deflecting device for charged corpuscule beam
GB2115976A (en) * 1982-02-26 1983-09-14 Philips Electronic Associated Charged particle beam apparatus
DE3786588D1 (de) * 1986-04-24 1993-08-26 Integrated Circuit Testing Elektrostatisch-magnetische-linse fuer korpuskularstrahlgeraete.
DE3766092D1 (de) * 1986-12-12 1990-12-13 Integrated Circuit Testing Detektoranordnung mit einem detektorobjektiv fuer korpuskularstrahlgeraete.
JP2002217088A (ja) * 2001-01-17 2002-08-02 Nikon Corp 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2356535A (en) * 1940-08-31 1944-08-22 Ruska Ernst Electronic lens
NL154050B (nl) * 1966-08-13 1977-07-15 Philips Nv Elektronenmicroscoop.
NL6807439A (nl) * 1968-05-27 1969-12-01
US3857034A (en) * 1970-08-31 1974-12-24 Max Planck Gesellschaft Scanning charged beam particle beam microscope
US3996468A (en) * 1972-01-28 1976-12-07 Nasa Electron microscope aperture system
US4000440A (en) * 1974-07-26 1976-12-28 International Business Machines Corporation Method and apparatus for controlling brightness and alignment of a beam of charged particles
GB1557924A (en) * 1976-02-05 1979-12-19 Western Electric Co Irradiation apparatus and methods
JPS52147977A (en) * 1976-04-02 1977-12-08 Jeol Ltd Electronic lens unit
JPS5320391A (en) * 1976-08-09 1978-02-24 Becton Dickinson Co Blood inspection apparatus

Also Published As

Publication number Publication date
SE415309B (sv) 1980-09-22
DE2721704A1 (de) 1977-11-24
SE7705531L (sv) 1977-11-15
NL177578C (nl) 1985-10-16
CA1085073A (en) 1980-09-02
DE2721704C2 (nl) 1987-05-07
JPS538064A (en) 1978-01-25
US4110622A (en) 1978-08-29
GB1570347A (en) 1980-07-02
NL177578B (nl) 1985-05-17

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
BA A request for search or an international-type search has been filed
BV The patent application has lapsed
A85 Still pending on 85-01-01
V1 Lapsed because of non-payment of the annual fee

Effective date: 19961201