NL1035717A1 - Inrichting voor het gelijktijdig meten van krachten. - Google Patents

Inrichting voor het gelijktijdig meten van krachten.

Info

Publication number
NL1035717A1
NL1035717A1 NL1035717A NL1035717A NL1035717A1 NL 1035717 A1 NL1035717 A1 NL 1035717A1 NL 1035717 A NL1035717 A NL 1035717A NL 1035717 A NL1035717 A NL 1035717A NL 1035717 A1 NL1035717 A1 NL 1035717A1
Authority
NL
Netherlands
Prior art keywords
measuring forces
forces simultaneously
measuring
forces
Prior art date
Application number
NL1035717A
Other languages
English (en)
Other versions
NL1035717C2 (nl
Inventor
Professor Gerd Joger
Original Assignee
Sios Messtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sios Messtechnik Gmbh filed Critical Sios Messtechnik Gmbh
Publication of NL1035717A1 publication Critical patent/NL1035717A1/nl
Application granted granted Critical
Publication of NL1035717C2 publication Critical patent/NL1035717C2/nl

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01GWEIGHING
    • G01G3/00Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/14Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of electrical resistance
    • G01G3/1402Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01G3/1404Special supports with preselected places to mount the resistance strain gauges; Mounting of supports combined with means to connect the strain gauges on electrical bridges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
NL1035717A 2007-07-18 2008-07-17 Inrichting voor het gelijktijdig meten van krachten. NL1035717C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007033441A DE102007033441B4 (de) 2007-07-18 2007-07-18 Vorrichtung zur gleichzeitigen Messung von Kräften
DE102007033441 2007-07-18

Publications (2)

Publication Number Publication Date
NL1035717A1 true NL1035717A1 (nl) 2009-01-20
NL1035717C2 NL1035717C2 (nl) 2011-10-10

Family

ID=40148945

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1035717A NL1035717C2 (nl) 2007-07-18 2008-07-17 Inrichting voor het gelijktijdig meten van krachten.

Country Status (4)

Country Link
US (1) US7930946B2 (nl)
CH (1) CH697712B1 (nl)
DE (1) DE102007033441B4 (nl)
NL (1) NL1035717C2 (nl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010025633B4 (de) * 2009-11-06 2013-11-14 SIOS Meßtechnik GmbH Vorrichtung zur Messung kleiner und großer Kräfte
JP5595721B2 (ja) * 2009-12-24 2014-09-24 アンリツ産機システム株式会社
DE102010012441B4 (de) * 2010-03-23 2015-06-25 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Millinewton-Mikrokraftmesser und Verfahren zum Herstellen eines Millinewton-Mikrokraftmessers
EP3205993B1 (en) * 2014-10-06 2020-10-21 The University of Tokyo Pressure sensor
CA3006938C (en) * 2014-12-10 2023-08-15 Paul D. Okulov Micro electro-mechanical strain displacement sensor and usage monitoring system
CN105092427A (zh) * 2015-08-20 2015-11-25 哈尔滨工业大学(威海) 一种黏附力测量方法和装置
EP3147258A1 (en) * 2015-09-22 2017-03-29 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Connection panel for electronic components
IT201900019532A1 (it) * 2019-10-22 2021-04-22 Torino Politecnico Sensore e dispositivo per il monitoraggio di fluidi

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4479385A (en) * 1982-09-23 1984-10-30 The United States Of America As Represented By The Department Of Energy Double resonator cantilever accelerometer
US4655305A (en) * 1985-06-24 1987-04-07 Revere Corporation Of America Strain gage type platform sensor
US5079958A (en) * 1989-03-17 1992-01-14 Olympus Optical Co., Ltd. Sensor having a cantilever
CH680963A5 (nl) * 1989-09-01 1992-12-15 Asulab Sa
US5113698A (en) * 1990-02-26 1992-05-19 Sundstrand Data Control, Inc. Vibrating beam transducer drive system
JPH05196458A (ja) * 1991-01-04 1993-08-06 Univ Leland Stanford Jr 原子力顕微鏡用ピエゾ抵抗性片持ばり構造体
US5633455A (en) * 1993-10-05 1997-05-27 Board Of Trustees Of The Leland Stanford, Jr. University Method of detecting particles of semiconductor wafers
JPH0862230A (ja) * 1994-08-24 1996-03-08 Olympus Optical Co Ltd 集積型spmセンサー
JP3599880B2 (ja) * 1996-03-12 2004-12-08 オリンパス株式会社 カンチレバーチップ
US5908981A (en) * 1996-09-05 1999-06-01 Board Of Trustees Of The Leland Stanford, Jr. University Interdigital deflection sensor for microcantilevers
US5825020A (en) * 1996-09-06 1998-10-20 The Regents Of The University Of California Atomic force microscope for generating a small incident beam spot
DE19901831A1 (de) * 1998-08-18 2000-07-20 Barmag Barmer Maschf Meßeinrichtung zur Fadenspannungsmessung
JP2000258332A (ja) * 1999-03-10 2000-09-22 Agency Of Ind Science & Technol 原子間力顕微鏡のための垂直力検出用カンチレバー
JP4598307B2 (ja) * 2001-05-31 2010-12-15 エスアイアイ・ナノテクノロジー株式会社 自己検知型spmプローブ
JP2003194698A (ja) * 2001-12-25 2003-07-09 Mitsubishi Electric Corp 走査型プローブ顕微鏡およびその使用方法
DE10307561B4 (de) * 2003-02-19 2006-10-05 Suss Microtec Test Systems Gmbh Meßanordnung zur kombinierten Abtastung und Untersuchung von mikrotechnischen, elektrische Kontakte aufweisenden Bauelementen
JP4832296B2 (ja) * 2003-07-15 2011-12-07 ユニバーシティ・オブ・ブリストル 原子間力顕微鏡用プローブ

Also Published As

Publication number Publication date
US7930946B2 (en) 2011-04-26
DE102007033441A1 (de) 2009-01-22
CH697712A2 (de) 2009-01-30
NL1035717C2 (nl) 2011-10-10
DE102007033441B4 (de) 2013-04-18
CH697712B1 (de) 2011-04-15
US20090019948A1 (en) 2009-01-22

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
MM Lapsed because of non-payment of the annual fee

Effective date: 20150801